• 제목/요약/키워드: ZnO/Si

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다공성 ZnO 막의 황화과정을 통해 형성된 ZnS 막의 미세구조 연구

  • An, Heung-Bae;Lee, Jeong-Yong;Kim, Yeong-Heon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.326-326
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    • 2012
  • ZnS를 합성하는 방법 중 thioacetamide (TAA)를 녹인 물에 ZnO template를 넣어서 황화시키는 방법이 있다. 이 방법은 실험과정이 간편할 뿐만 아니라 그 반응양의 조절도 용이해 ZnS-ZnO core-shell 구조나 ZnS hollow 구조 등을 만드는데 널리 사용되고 있다. 그러나 다양한 형태의 ZnS 구조체 합성에 관한 연구는 활발한 반면, ZnS의 상형성 과정이나 구조 변화와 같은 ZnO의 황화 과정 기구에 관한 연구는 매우 미비한 실정이다. ZnS는 기본적으로 저온에서는 cubic sphalerite 구조를, 고온에서는 hexagonal wurtzite 구조를 안정상으로 가진다. 또한, 8H나 15R 등과 같은 다양한 polytype 구조도 존재한다. 그러나 다양한 구조에서 비슷한 면간거리가 존재하기 때문에 결정구조의 분석이 어려운 실정이다. 이러한 비슷한 면간거리를 가지는 ZnS 등의 결정구조 분석에 있어 원자배열을 직접적으로 관찰할 수 있는 투과전자현미경 (TEM, transmission electron microscopye)을 이용한 연구는 큰 강점을 가진다. 본 연구에서는 다공성 ZnO 막을 황화시켜 형성된 ZnS 막의 미세구조 특성을 분석하였다. 다공성 ZnO 막은 패턴된 Si (111) 기판 위에 스핀코팅법을 이용하여 4,000 rpm의 속도로 증착되었으며 ZnO 결정화를 위해 150 도와 500도에서 각각 drying과 후열처리를 수행하였다. 이렇게 만들어진 ZnO 막을 TAA를 녹인 물에 넣어 48 시간 동안 반응시켰고 최종적으로 ZnS 막을 생성하였다. 다공성 ZnS 막의 미세구조를 분석하기 위해 주사전자현미경 (SEM, scanning electron microscope), X-선 회절분석기 (XRD, x-ray diffractometer), 그리고 투과전자현미경을 이용하였으며, 정확한 결정구조 분석을 위하여 결정구조 시뮬레이션을 병행하였다.

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Structural, Optical and Electrical Properties of N-doped ZnO Nanofilms by Plasma Enhanced Atomic Layer Deposition (플라즈마 원자층 증착 방법을 이용한 N-doped ZnO 나노박막의 구조적.광학적.전기적 특성)

  • Kim, Jin-Hwan;Yang, Wan-Youn;Hahn, Yoon-Bong
    • Korean Chemical Engineering Research
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    • v.49 no.3
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    • pp.357-360
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    • 2011
  • N-doped ZnO nanofilms were prepared by plasma enhanced atomic layer deposition method. $Zn(C_{2}H_{5})_{2}$, $O_{2}$ and $N_{2}$ were used as Zn, O and N sources, respectively, for N-doped ZnO films under variation of radio frequency (rf) power from 50-300W. Structural, optical and electrical properties of as-grown ZnO films were investigated with Xray diffraction(XRD), photoluminescence(PL) and Hall-effect measurements, respectively. Nitrogen content and p-type conductivity in ZnO nanofilms increased with the rf power.

Low Temperature Optical Properties of NiO coated ZnO Nanorods (NiO 코팅 두께에 따른 ZnO 나노막대의 저온분광특성)

  • Shin, Y.H.;Park, Y.H.;Kim, Yong-Min
    • Journal of the Korean Vacuum Society
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    • v.16 no.4
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    • pp.286-290
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    • 2007
  • We fabricated NiO coated ZnO nanorods using ZnO nanorods grown on a Si substrate. After thermal hydrogenation process of these NiO-ZnO core-shell nanorods, we confirm that Ni nanodots were built up on the surface of ZnO nanorods. Photoluminescence (PL) measurements at T=5 K were made to understand the optical properties of these various nanorods. As samples sequencially transformed into $ZnO{\rightarrow}NiO-ZnO{\rightarrow}Ni$ nanodot-ZnO, PL transition energies and intensities are varied as well. In comparison to pure ZnO nanorod, the acceptor bound exciton ($A^0X$) became the minor peak for NiO-ZnO nanorods. On the other hand, for Ni nanodot-ZnO sample, ($A^0X$) transition peak intensity became the most dominant peak. This is due to the fact that during thermal hydrogenation process, appreciable amounts of Ni and hydrogen ions defused into ZnO nanorod which played as accepters.

Preparation of ZnO Thin Films Using Zn/O-containing Single Precursorthrough MOCVD Method

  • Park, Jong-Pil;Kim, Sin-Kyu;Park, Jae-Young;Ok, Kang-Min;Shim, Il-Wun
    • Bulletin of the Korean Chemical Society
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    • v.30 no.1
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    • pp.114-118
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    • 2009
  • A new Zn/O single source precursor, TMEDA-Zn$(eacac)_2$, has been synthesized by using N, N, N’, N’-tetramethylethylendiamine (TMEDA), sodium ethyl-acetoacetate, and $ZnCl_2$. From this organometallic precursor, ZnO thin films have been successfully grown on Si (100) substrates through the metal organic chemical vapor deposition (MOCVD) method at relatively mild conditions in the temperature range of 390~430 ${^{\circ}C}$. The synthesized ZnO films have been found to possess average grain sizes of about 70 nm with an orientation along the c-axis. The precursor and ZnO films are characterized through infrared spectroscopy, nuclear magnetic resonance spectroscopy, EI-FAB-spectroscopy, elemental analyses, thermal analysis, X-ray diffraction, and field emission scanning electron microscopic analyses.

The Preferred Orientation of CdSe and CdS Thin Films on the AlOx and SiO2 Templates (AlOx와 SiO2 형판위 CdSe와 CdS 박막의 우선방위(Preferred Orientation) 특성)

  • Lee, Young-Gun;Chang, Ki-Seog
    • Journal of the Korea Institute of Military Science and Technology
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    • v.15 no.4
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    • pp.502-506
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    • 2012
  • In order to find the structural characteristics of the thin films of group II-VI semiconductor compounds compared with those of powder materials, films were made of 4 powders of ZnS, CdS, CdSe, and CdTe(Aldrich), each with 99.99 % purity. For the ZnS/CdS multi-layers, the ZnS layer was coated over the CdS layer on an $AlO_x$ membrane, which served as a protective layer within a vacuum at the average speed of 1 ${\AA}$/sec. After studying the structures of the group II-VI semiconductor thin films by using X-ray spectroscopy, we found that the ZnS, ZnS/CdS, CdS, and CdSe films were hexagonal and exhibited some degree of preferred orientation. Also, the particles of the thin films of II-VI semiconductor compounds proved to be more homogeneous in size compared to those of the powder materials. These results were further verified through scanning electron microscopy(SEM), EDX analysis, and powder and thin film X-ray diffraction.

Graphoepitaxy of ZnO thin films by Zn evaporation (Graphoepitaxy법을 이용하여 SiO$_2$ 기판 위에 제작한 ZnO 박막의 특성에 관한 연구)

  • Kim, Gwang-Hui;Choi, Seok-Cheol;Lee, Tae-Hun;Jung, Jin-U;Park, Seung-Hwan;Jung, Mi-Na;Jung, Myeong-Hun;Yang, Min;Yao, Takafumi;Chang, Ji-Ho
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • v.9 no.1
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    • pp.1026-1029
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    • 2005
  • The feasibility of graphoepitaxial growth of compound semiconductors has been studied. Two kinds of substrates were prepared; one is smooth substrate, the other one is a periodic structured substrate. ZnO film was formed on both substrates by thermal evaporation of elemental Zn and natural oxidation of the deposited Zn. Thermal treatment was performed to improve the crystal quality and to investigate the effect of the periodic structure. Atomic force microscopy (AFM) and photoluminescence (PL) were used to characterize the samples. As a result, the improvement of crystallinity as annealing temperature increase, has been observed from both samples. The samples, annealed at 800 $^{\circ}$C, show the best crystal quality in terms of PL linewidth. Also the sample grown on grating structure shows better crystal quality than the sample grown on flat substrate. It implies that the periodic structure affects the crystallinity of the films, and the graphoepitaxy of compound semiconductors is possible by using appropriate surface structure.

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P2O5-ZnO-SiO2-R2O Glass Frit Materials for Hermetic Sealing of Dye-Sensitized Solar Cells

  • Lee, Hansol;Lee, Choon Yeob;Hwang, Jae Kwun;Chung, Woon Jin
    • Journal of the Korean Ceramic Society
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    • v.54 no.5
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    • pp.400-405
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    • 2017
  • $P_2O_5-ZnO-SiO_2-R_2O$ glasses were synthesized as a sealing material for large scale dye-sensitized solar cells (DSSC). Compositional effects of $P_2O_5$ and ZnO were examined by varying their contents. Their viscosity and glass stability at sintering temperatures of less than $550^{\circ}C$ were examined by flow button test. Glass transition temperature and structural change upon compositional change were investigated. Chemical stability against electrolyte was also examined by immersing the glasses in the electrolyte for 72 h at $85^{\circ}C$.

Graphite상의 ZnO Nanorod성장과 그를 이용한 Schottky Diode 제작

  • Nam, Gwang-Hui;Baek, Seong-Ho;Park, Il-Gyu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.421.2-421.2
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    • 2014
  • We report on the growth of ZnO nanorods (NRs) grown on graphite and silicon substrates via an all-solution process and characteristics of their heterojunctions. Structural investigations indicated that morphological and crystalline properties were not significantly different for the ZnO NRs on both substrates. However, optical properties from photoluminescence spectra showed that the ZnO NRs on graphite substrate contained more point defects than that on Si substrate. The ZnO NRs on both substrates showed typical rectification properties exhibiting successful diode formation. The heterojunction between the ZnO NRs and the graphite substrate showed a Schottky diode characteristic and photoresponse under ultraviolet illumination at a small reverse bias of -0.1 V. The results showed that the graphite substrate could be a good candidate for a Schottky contact electrode as well as a conducting substrate for electronic and optoelectronic applications of ZnO NRs.

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ECR Plasma Pretreatment on Sapphire and Silicon Substrates for ZnO ALE (ZnO ALE를 위한 Si, sapphire기판의 ECR 플라즈마 전처리)

  • Lim Jongmin;Shin Kyoungchul;Lee Chongmu
    • Korean Journal of Materials Research
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    • v.14 no.5
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    • pp.363-367
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    • 2004
  • Recently ZnO epitaxial layers have been widely studied as a semiconductor material for optoelectronic devices. Sapphire and silicon are commonly selected as substrate materials for ZnO epitaxial growth. In this communication, we report the effect of the ECR plasma pretreatment of sapphire and silicon substrates on the nucleation in the ZnO ALE (atomic layer epitaxy). It was found that ECR plasma pretreatment reduces the incubation period of the ZnO nucleation. Oxygen ECR plasma enhances ZnO nucleation most effectively since it increases the hydroxyl group density at the substrate surface. The nucleation enhancing effect of the oxygen ECR plasma treatment is stronger on the sapphire substrate than on the silicon substrate since the saturation density of the hydroxyl group is lower at the sapphire surface than that at the silicon surface.

The Residual Stress Effect on Microstructure and Optical Property of ZnO Films Produced by RF Sputtering (R.F Sputtering으로 제조한 ZnO박막의 미세구조와 광학적 특성에 미치는 잔류응력의 영향)

  • Ryu, Sang;Kim, Young-Man
    • Journal of the Korean institute of surface engineering
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    • v.38 no.4
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    • pp.144-149
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    • 2005
  • ZnO films were produced on the Si(100) and sapphire(0001) wafers by RF magnetron sputtering in terms of processing variables such as substrate temperature and RF power. The stress in films was obtained from the Stoney's formula using a laser scanning device. The stress levels in the films showed the range from $\~40$ MPa to $\~-1100$MPa depending on processing variables. The specimens were thermally cycled from R.T. to $250^{\circ}C$ to investigate the stress variation as a function of temperature. SEM was employed to characterize the microstructure of te films. As the substrate temperature increased, the film surface became rougher and the films showed coarser grains. The optical property o the films was studied by PL measurements. At the highest substrate temperature $800^{\circ}C$ the film exhibited sharper UV peaks unlike other conditions.