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Effects of metal catalysts on the characteristics of NO sensor using ZnO thin film as sensing material (금속 촉매가 ZnO 박막을 감지물질로 이용한 NO 센서의 특성에 미치는 영향)

  • Chung, Gwiy-Sang;Jeong, Jae-Min
    • Journal of Sensor Science and Technology
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    • v.19 no.1
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    • pp.58-61
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    • 2010
  • This paper describes the fabrication and characteristics of NO sensor using ZnO thin film by RF magnetron sputter system. The sensitivity, working temperature, and response time of sputtered pure ZnO thin film and added catalysts such as Pt, Pd, Al, Ti on those films were measured and analyzed. The sensitivity of pure ZnO thin film at working temperature of $300^{\circ}C$ is 0.875 in NO gas concentration of 0.046 ppm. At same volume of the gas in chamber, measuring sensitivity of 1.87 at $250^{\circ}C$ was the case of Pt/ZnO thin film. The ZnO thin films added with catalyst materials were showed higher sensitivity, lower working temperature and faster adsorption characteristics to NO gas than pure ZnO thin film.

Shapes of ZnO Nanostructures Grown in the Aqueous Solutions (수용액에서 합성한 ZnO 나노구조체의 형상)

  • Jang Yeon-Ik;Park Hoon;Lee Seung-Yong;Ahn Jae-Pyoung;Park Jong-Ku
    • Journal of Powder Materials
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    • v.12 no.4 s.51
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    • pp.284-290
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    • 2005
  • ZnO nanostructures with various shapes were synthesized under ambient pressure condition by a wet chemical reaction method. Nanorods of ZnO with hexagonal cross-section and their aggregates with radiate shape were synthesized. Precursor concentration affected considerably the shape evolution of ZnO nanorods. Low precursor concentration was proved to be more preferable to the growth of ZnO nanorods, which is attributed to the intrinsic characteristics of chemical reaction in the synthesis of ZnO from zinc compounds.

Size Control and Optical Properties of ZnO nanoparticles by Zinc-Lithium-Acetate System (Zinc-Lithium-Acetate System을 통한 ZnO 분말 크기제어 및 광학 특성 연구)

  • Yu, Ri;Kim, YooJin
    • Journal of Powder Materials
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    • v.20 no.5
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    • pp.371-375
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    • 2013
  • ZnO nanoparticles in the size range from 5 to 15 nm were prepared by zinc-lithium-acetate system. The morphologies and structures of ZnO were characterized by TEM, XRD and FT-IR spectra. UV-visible results shows that the absorption of ZnO nanoparticles is blue shifted with decrease in particles size. Furthermore, photoluminescence spectra of the ZnO nanoparticles were also investigated. The ZnO nanoparticles have strong visible-emission intensity and their intensities depend upon size of ZnO nanoparticles.

The Effect of ZnO on the Hydration Reaction and Physical Properties of Cement (Cement의 수화반응 물리특성에 미치는 ZnO의 영향)

  • 김홍기;추용식;이경희;송명신
    • Journal of the Korean Ceramic Society
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    • v.34 no.4
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    • pp.399-405
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    • 1997
  • With the increase of ZnO content, heat of hydration decreased. For specimens containing ZnO more than 0.6 wt.%, the compressive stength of cement cured for 28 days could not be measured because setting was not occurred. With the increase of ZnO content, Blaine specific surface area of cement was decreased and the residue of 45 ${\mu}{\textrm}{m}$ and 90 ${\mu}{\textrm}{m}$ was increased when cement was ground. That is, grindability became worse as ZnO increased in clinker. The difference of color as a function of ZnO content could not be observed, but in the excess of amount of ZnO added, color became more white and reddish yellow.

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Optical Properties of a ZnO-MgZnO Quantum-Well

  • Ahn, Do-Yeol;Park, Seoung-Hwan
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.6 no.3
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    • pp.125-130
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    • 2006
  • The optical gain and the luminescence of a ZnO quantum well with MgZnO barriers is studied theoretically. We calculated the non-Markovian optical gain and the luminescence for the strained-layer wurtzite quantum well taking into account of the excitonic effects. It is predicted that both optical gain and luminescence are enhanced for the ZnO quantum well when compared with those of InGaN-AlGaN quantum well structure due to the significant reduction of the piezoelectric effects in the ZnO-MgZnO systems.

Electrical and Optical Properties of Ti-ZnO Films Grown on Glass Substrate by Atomic Layer Deposition (원자층 증착법을 통하여 유리 기판에 증착한 Ti-ZnO 박막의 전기적 광학적 특성)

  • Lee, U-Jae;Kim, Tae-Hyeon;Gwon, Se-Hun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.57-57
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    • 2018
  • Zinc-oxide (ZnO), II-VI semiconductor with a wide and direct band gap (Eg: 3.2~3.4 eV), is one of the most potential candidates to substitute for ITO due to its excellent chemical, thermal stability, specific electrical and optoelectronic property. However, the electrical resistivity of un-doped ZnO is not low enough for the practical applications. Therefore, a number of doped ZnO films have been extensively studied for improving the electrical conductivities. In this study, Ti-doped ZnO films were successfully prepared by atomic layer deposition (ALD) techniques. ALD technique was adopted to careful control of Ti doping concentration in ZnO films and to show its feasible application for 3D nanostructured TCO layers. Here, the structural, optical and electrical properties of the Ti-doped ZnO depending on the Ti doping concentration were systematically presented. Also, we presented 3D nanostructured Ti-doped ZnO layer by combining ALD and nanotemplate processes.

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Nitrogen Doping Characterization of ZnO Prepared by Atomic Layer Deposition (원자층 증착법으로 성장된 ZnO 박막의 질소 도핑에 대한 연구)

  • Kim, Doyoung
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.27 no.10
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    • pp.642-647
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    • 2014
  • For feasible study of opto-electrical application regarding to oxide semiconductor, we implemented the N doped ZnO growth using a atomic layer deposition technique. The p-type ZnO deposition, necessary for ZnO-based optoelectronics, has considered to be very difficulty due to sufficiently deep acceptor location and self-compensating process on doping. Various sources of N such as $N_2$, $NH_3$, NO, and $NO_2$ and deposition techniques have been used to fabricate p-type ZnO. Hall measurement showed that p-type ZnO was prepared in condition with low deposition temperature and dopant concentration. From the evaluation of photoluminescence spectroscopy, we could observe defect formation formed by N dopant. In this paper, we exhibited the electrical and optical properties of N-doped ZnO thin films grown by atomic layer deposition with $NH_3OH$ doping source.

The Instability Behaviors of Spray-pyrolysis Processed nc-ZnO/ZnO Field-effect Transistors Under Illumination (스프레이 공정을 이용한 nc-ZnO/ZnO 전계효과트랜지스터의 광학적 노출에 대한 열화 현상 분석)

  • Junhee Cho
    • Journal of the Semiconductor & Display Technology
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    • v.22 no.1
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    • pp.78-82
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    • 2023
  • Metal oxide semiconductor (MOS) adapting spray-pyrolysis deposition technique has drawn large attention based on their high quality of intrinsic and electrical properties in addition to simple and low-cost processibility. To fully utilize the merits of MOS field-effect transistors (FETs) , transparency, it is important to understand the instability behaviors of FETs under illumination. Here, we studied the photo-induced properties of nc-ZnO/ZnO field-effect transistors (FETs) based on spray-pyrolysis under illumination which incorporating ZnO nanocrystalline nanoparticles into typical ZnO precursor. Our experiments reveal that nc-ZnO in active layer suppressed the light instabilities of FETs.

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Growth of Non-Polar a-plane ZnO Layer On R-plane (1-102) Sapphire Substrate by Hydrothermal Synthesis (저온 수열 합성법에 의해 (1-102) 사파이어 기판상에 성장된 무분극 ZnO Layer 에 관한 연구)

  • Jang, Jooil;Oh, Tae-Seong;Ha, Jun-Seok
    • Journal of the Microelectronics and Packaging Society
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    • v.21 no.4
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    • pp.45-49
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    • 2014
  • In this study, we grew non-polar ZnO nanostructure on (1-102) R-plane sapphire substrates. As for growth method of ZnO, we used hydrothermal synthesis which is known to have the advantages of low cost and easy process. For growth of non-polar, the deposited AZO seed buffer layer with of 80 nm on R-plane sapphire by radio frequency magnetron sputter was annealed by RTA(rapid thermal annealing) in the argon atmosphere. After that, we grew ZnO nanostructure on AZO seed layer by the added hexamethylenetramine (HMT) solution and sodium citrate at $90^{\circ}C$. With two types of additives into solution, we investigated the structures and shapes of ZnO nanorods. Also, we investigate the possibility of formation of 2D non-polar ZnO layer by changing the ratio of two additives. As a result, we could get the non-polar A-plane ZnO layer with well optimized additives' concentrations.

Synthesis of 3D nanostructured flower-like ZnO architecture on ZnO thin-film by hydrothermal process (ZnO buffer 박막층 위에 성장된 3차원 ZnO 나노구조체의 합성)

  • Yoo, Beom-Keun;Park, Yong-Wook;Kang, Chong-Yoon;Kim, Jin-Sang;Cho, Doo-Jin;Yoon, Seok-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.248-248
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    • 2009
  • Recently, the control of size, morphology and dimensionality in inorganic materials has been rapidly developed into a promising field in materials chemistry. 3D nanostructured flower-like ZnO architecture with different size and shapes have been simply synthesized via a hydrothermal process, using zinc acetate and ammonium hydroxide as reactants.[1] In this study, the Zno thin-films were deposited by RF magnetron sputtering in other to get high adhesion and uniformity of 3D nanostructured flower-like ZnO architecture on a $SiO_2$ substrate. The XRD patterns identified that the obtained the nanocrystallized ZnO architecture exhibited a wurtzite structure. SEM images illustrated that the flower-like ZnO bundles consisted of flower-like or chestnut bur, which were characterized by polycrystalline and [0001] preferential orientation.

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