• Title/Summary/Keyword: ZnO(Zinc Oxide)

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Manufacture and characteristic evaluation of Amorphous Indium-Gallium-Zinc-Oxide (IGZO) Thin Film Transistors

  • Seong, Sang-Yun;Han, Eon-Bin;Kim, Se-Yun;Jo, Gwang-Min;Kim, Jeong-Ju;Lee, Jun-Hyeong;Heo, Yeong-U
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.166-166
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    • 2010
  • Recently, TFTs based on amorphous oxide semiconductors (AOSs) such as ZnO, InZnO, ZnSnO, GaZnO, TiOx, InGaZnO(IGZO), SnGaZnO, etc. have been attracting a grate deal of attention as potential alternatives to existing TFT technology to meet emerging technological demands where Si-based or organic electronics cannot provide a solution. Since, in 2003, Masuda et al. and Nomura et al. have reported on transparent TFTs using ZnO and IGZO as active layers, respectively, much efforts have been devoted to develop oxide TFTs using aforementioned amorphous oxide semiconductors as their active layers. In this thesis, I report on the performance of thin-film transistors using amorphous indium gallium zinc oxides for an active channel layer at room temperature. $SiO_2$ was employed as the gate dielectric oxide. The amorphous indium gallium zinc oxides were deposited by RF magnetron sputtering. The carrier concentration of amorphous indium gallium zinc oxide was controlled by oxygen pressure in the sputtering ambient. Devices are realized that display a threshold voltage of 1.5V and an on/off ration of > $10^9$ operated as an n-type enhancement mode with saturation mobility with $9.06\;cm^2/V{\cdot}s$. The devices show optical transmittance above 80% in the visible range. In conclusion, the fabrication and characterization of thin-film transistors using amorphous indium gallium zinc oxides for an active channel layer were reported. The operation of the devices was an n-type enhancement mode with good saturation characteristics.

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Preparation of Zinc Oxide Thin Film by CFR Method and its Electrical Property for Detection of Sulfur Compounds (CFR 법에 의한 산화아연 박막의 제조 및 황 화합물 검출을 위한 전기적 특성)

  • Lee, Sun Yi;Park, No-Kuk;Yoon, Suk Hoon;Lee, Tae Jin
    • Korean Chemical Engineering Research
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    • v.48 no.2
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    • pp.218-223
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    • 2010
  • The zinc oxide thin film, which can be applied as the gas sensor of a semiconductor type, was grown on the silicon substrate by CFR(continuous flow reaction) method in this study. The growth property and the electrical property of the zinc oxide thin films synthesized by CFR method were also investigated. Zinc acetate solutions of 0.005~0.02 M were used as the precursor for the preparation of zinc oxide thin films. The size of ZnO particles consisted on the zinc oxide thin film increased not only with increasing concentration of precursor, but also the thickness of thin film increased. The growth rate of zinc oxide thin film by CFR method was proportionably depend on the concentration of precursor and the uniform ZnO thin film was prepared when zinc acetate of 0.01 M is used as the precursor. The charged currents on the zinc oxide thin films were obtained as its electrical property by I-V meter, and increased agree with increasing the thickness of zinc oxide thin film. Thus, it was concluded that the charged current on the zinc oxide thin film can be controlled with changing concentration of precursor solution in CFR method. The charged currents on the zinc oxide thin films also decreased when ZnO thin film is exposed under hydrogen sulfide of 500 ppmv at $300^{\circ}C$ for 5 min. From these results, it could be confirmed that the zinc oxide thin film prepared by CFR method can be used for the detection of sulfur compounds.

ZnO Nanostructure Characteristics by VLS Synthesis (VLS 합성법을 이용한 ZnO 나노구조의 특성)

  • Choi, Yuri;Jung, Il Hyun
    • Applied Chemistry for Engineering
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    • v.20 no.6
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    • pp.617-621
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    • 2009
  • Zinc oxide (ZnO) nanorods were grown on the pre-oxidized silicon substrate with the assistance of Au and the fluorine-doped tin oxide (FTO) based on the catalysts by vapor-liquid-solid (VLS) synthesis. Two types of ZnO powder particle size, 20nm, $20{\mu}m$, were used as a source material, respectively The properties of the nanorods such as morphological characteristics, chemical composition and crystalline properties were examined by X-ray diffraction (XRD), energy-dispersive X-ray spectroscopy (EDX) and field-emission scanning electron microscope (FE-SEM). The particle size of ZnO source strongly affected the growth of ZnO nanostructures as well as the crystallographic structure. All the ZnO nanostructures are hexagonal and single crystal in nature. It is found that $1030^{\circ}C$ is a suitable optimum growth temperature and 20 nm is a optimum ZnO powder particle size. Nanorods were fabricated on the FTO deposition with large electronegativity and we found that the electric potential of nanorods rises as the ratio of current rises, there is direct relationship with the catalysts, Therefore, it was considered that Sn can be the alternative material of Au in the formation of ZnO nanostructures.

Study of ITO/ZnO/Ag/ZnO/ITO Multilayer Films for the Application of a very Low Resistance Transparent Electrode on Polymer Substrate

  • Han, Jin-Woo;Han, Jeong-Min;Kim, Byoung-Yong;Kim, Young-Hwan;Kim, Jong-Yeon;Ok, Chul-Ho;Seo, Dae-Shik
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.20 no.9
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    • pp.798-801
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    • 2007
  • Multilayer transparent electrodes, having a much lower electrical resistance than the widely used transparent conducting oxide electrodes, were prepared by using radio frequency magnetron sputtering. The multilayer structure consisted of five layers, indium tin oxided (ITO)/zinc oxide (ZnO)/Ag/zinc oxide (ZnO)/ITO. With about 50 nm thick ITO films, the multilayer showed a high optical transmittance in the visible range of the spectrum and had color neutrality. The electrical and optical properties of ITO/ZnO/Ag/ZnO/ITO multilayer were changed mainly by Ag film properties, which were affected by the deposition process of the upper layer. Especially ZnO layer was improved to adhesion of Ag and ITO. A high quality transparent electrode, having a resistance as low as and a high optical transmittance of 91% at 550 nm, was obtained. It could satisfy the requirement for the flexible OLED and LCD.

Selective Laser Direct Patterning of Indium Tin Oxide on Transparent Oxide Semiconductor Thin Films

  • Lee, Haechang;Zhao, Zhenqian;Kwon, Sang Jik;Cho, Eou Sik
    • Journal of the Semiconductor & Display Technology
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    • v.18 no.4
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    • pp.6-11
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    • 2019
  • For a wider application of laser direct patterning, selective laser ablation of indium tin oxide (ITO) film on transparent oxide semiconductor (TOS) thin film was carried out using a diode-pumped Q-switched Nd:YVO4 laser at a wavelength of 1064 nm. In case of the laser ablation of ITO on indium gallium zinc oxide (IGZO) film, both of ITO and IGZO films were fully etched for all the conditions of the laser beams even though IGZO monolayer was not ablated at the same laser beam condition. On the contrary, in case of the laser ablation of ITO on zinc oxide (ZnO) film, it was possible to etch ITO selectively with a slight damage on ZnO layer. The selective laser ablation is expected to be due to the different coefficient of thermal expansion (CTE) between ITO and ZnO.

The effect of nano-Zinc oxide on the self-cleaning properties of cotton fabrics for textile application

  • Panutumrong, Praripatsaya;Metanawin, Tanapak;Metanawin, Siripan;O-Charoen, Narongchai
    • International Journal of Advanced Culture Technology
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    • v.3 no.1
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    • pp.13-20
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    • 2015
  • The self-cleaning properties of nano-zinc oxide on cotton fabrics have been investigated. The cotton fabric has been prepared by pad-dry method. The nano-zinc oxide was encapsulated in the polystyrene particle by mini-emulsion process prior used. The loading amount of zinc oxide particles into the mini-emulsion were various from 1% wt to 40%wt. The particles sizes of ZnO-encapsulated polystyrene mini-emulsion were determined using dynamic light scattering. It was showed that the particle size of the mini-emulsion was in the range of 124-205 nm. The topography and morphology of ZnO-encapsulated polystyrene which coated on cotton fabrics was observed using scanning electron microscopy. The crystal structure of ZnO-coated on cotton fabrics was explored by X-ray diffraction spectroscopy. The photocatalytic activities of zinc oxide were present through the self-cleaning properties. The presents of the zinc oxide on cotton fabrics significantly showed the improving of the self-cleaning properties under UV radiation.

A study on the zinc oxide crystalline powder synthesized by zinc chloride solution and sodium-based alkali precipitants (염화아연 수용액과 나트륨계 알칼리 침전제 종류에 따라 합성한 산화아연 결정 분말에 대한 연구)

  • Dae-Weon Kim;Dae-Hwan Jang;Bo-Ram Kim
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.33 no.1
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    • pp.15-21
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    • 2023
  • To prepare zinc oxide powder, three types of sodium-based alkali precipitants such as NaOH, Na2CO3, NaOH/NaHCO3 were compared to the differences in the manufacturing process of zinc oxide powder from zinc precipitate products like intermediates with the consideration of thermodynamic reaction. The prepared zinc precipitate products by the reaction with the sodium-based alkali precipitant were confirmed to respectively hydroxy zinc chloride (Zn5(OH)8Cl2·H2O) and zinc carbonate hydroxide (Zn5(OH)6(CO3)2·H2O) from XRD analysis. Zinc oxide particles were compared in heat treatment at 800℃ according to sodium-based alkali precipitants. The mixed NaOH and NaHCO3 of alkali precipitant reaction was contributed to synthesize the more uniform zinc oxide particles.

Mechanochemical Synthesis of Zinc Ferrite, $ZnFe_2O_4$

  • Sawada, Yutaka;Iizumi, Kiyokata;Kuramochi, Tomokazu;Wang, Mei-Han;Sun, Li-Xian;Okada, Shigeru;Kudou, Kunio;Shishido, Toetsu;Matsushita, Jun-Ichi
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09b
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    • pp.971-972
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    • 2006
  • Mechanochemical synthesis of zinc ferrite, $ZnFe_2O_4$, was attempted from a powder mixture of iron (III) oxide, alpha-$Fe_2O_3$ and zinc (II) oxide, ZnO. Nanocrystalline zinc ferrite, $ZnFe_2O_4$ powders were successfully synthesized only bymilling for 30 hours. Evidence of the $ZnFe_2O_4$ formation was absent for the powders milled for 10 and 20 hours; the milling lowered the crystallinity of the starting materials. Heating after milling enhanced the formation of $ZnFe_2O_4$, crystal growth of $ZnFe_2O_4$ and the unreacted starting materials. The unreacted starting materials decreased their amounts by heating at higher temperatures.

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Microstructure and Electrical Properties of $SiO_2$-Doped Zinc Oxide Varistors ($SiO_2$가 첨가된 산화아연 바리스터의 미세구조 및 전기적 특성)

  • 남춘우;정순철
    • Electrical & Electronic Materials
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    • v.10 no.7
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    • pp.659-667
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    • 1997
  • The influence of SiO$_2$on the microstructure and electrical properties of zinc oxide varistor was investigated. Zn$_2$SiO$_4$third phase in the sintered body was found at grain boundaries, multiple grain junctions, and occasionally within ZnO grains. This phase acted as a grain growth inhibitor, which retard the grain growth of the ZnO matrix by impeding migration on the grain boundaries. As SiO$_2$ addition increases, average grain size decreased from 40.6${\mu}{\textrm}{m}$ to 26.9${\mu}{\textrm}{m}$ due to the pinning effect by Zn$_2$SiO$_4$ and drag effect by Si segregation at grain boundaries, the breakdown voltage consequently increased. When SiO$_2$ addition is increased, interface state density decreased, however, the barrier height increased by decrease of donor concentration, as a result, the nonlinear exponent increased and leakage current decreased. While, as SiO$_2$ addition increase, it was found that the apparent dielectric loss factor shows a tendency of decrease. Wholly, electrical properties of zinc oxide varistor can be said to be improved by SiO$_2$addition.

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The Application for Electrophotographic Photoreceptors of Zinc Oxide Adsorbed Copper Phthalocyanine and Sunfast Yellow (색소 흡착 산화아연 감광체의 전자사진 특성에 관한 연구)

  • Heo, Sun Ok;Kim, Young Soon
    • Journal of the Korean Chemical Society
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    • v.38 no.9
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    • pp.632-639
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    • 1994
  • For dye sensitization of zinc oxide in the visible region, copper phthalocyanine(CuPc) and sunfast yellow(SY) were adsorbed in two layers on zinc oxide powder. The adsorption structures of $\alpha-and\beta-CuPc$ on zinc oxide were investigated by photoacoustic, IR and Raman spectra. The ${\alpha}-and\;{\beta}$-polymorphs exhibited dimeric structure or molecular aggregates. The surface photovoltaic effect of ZnO/CuPc/SY showed higher than that of ZnO/SY/CuPc and $ZnO/\beta-CuPc/SY$ indicated better photosensitive than $ZnO/\alpha-CuPc/SY.$ Electrophotographic sensitivity of $ZnO/\beta-CuPc/SY$ was $$S_{1/2}=2.99{\times}10^{-2}(erg/cm^2)^{-1}$ at 630 nm.

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