• 제목/요약/키워드: Zn doping

검색결과 366건 처리시간 0.025초

원자층 증착법을 통하여 유리 기판에 증착한 Ti-ZnO 박막의 전기적 광학적 특성 (Electrical and Optical Properties of Ti-ZnO Films Grown on Glass Substrate by Atomic Layer Deposition)

  • 이우재;김태현;권세훈
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2018년도 춘계학술대회 논문집
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    • pp.57-57
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    • 2018
  • Zinc-oxide (ZnO), II-VI semiconductor with a wide and direct band gap (Eg: 3.2~3.4 eV), is one of the most potential candidates to substitute for ITO due to its excellent chemical, thermal stability, specific electrical and optoelectronic property. However, the electrical resistivity of un-doped ZnO is not low enough for the practical applications. Therefore, a number of doped ZnO films have been extensively studied for improving the electrical conductivities. In this study, Ti-doped ZnO films were successfully prepared by atomic layer deposition (ALD) techniques. ALD technique was adopted to careful control of Ti doping concentration in ZnO films and to show its feasible application for 3D nanostructured TCO layers. Here, the structural, optical and electrical properties of the Ti-doped ZnO depending on the Ti doping concentration were systematically presented. Also, we presented 3D nanostructured Ti-doped ZnO layer by combining ALD and nanotemplate processes.

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용액법을 이용한 나트륨 도핑에 따른 Cu2ZnSnSe4 (CZTSSe) 박막의 합성 및 특성 평가 (The Effects of Sodium Doping on the Electrical Properties of the Cu2ZnSn(S,Se)4 (CZTSSe) Solar Cells)

  • 심홍재;김지훈;강명길;김진혁
    • 한국재료학회지
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    • 제28권10호
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    • pp.564-569
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    • 2018
  • $Cu_2ZnSn(S,Se)_4$ (CZTSSe) films were prepared on Mo coated soda lime glass substrates by sulfo-selenization of sputtered stacked Zn-Sn-Cu(CZT) precursor films. The precursor was dried in a capped state with aqueous NaOH solution. The CZT precursor films were sulfo-selenized in the S + Se vapor atmosphere. Sodium was doped during the sulfo-selenization treatment. The effect of sodium doping on the structural and electrical properties of the CZTSSe thin films were studied using FE-SEM(field-emission scanning electron microscopy), XRD(X-ray diffraction), XRF(X-ray fluorescence spectroscopy), dark current, SIMS(secondary ion mass spectrometry), conversion efficiency. The XRD, XRF, FE-SEM, Dark current, SIMS and cell efficiency results indicated that the properties of sulfo-selenized CZTSSe thin films were strongly related to the sodium doping. Further detailed analysis and discussion for effect of sodium doping on the properties CZTSSe thin films will be discussed.

RF 마그네트론 스퍼터링 방법으로 상온에서 유리기판 위에 성장시킨 ZnO의 성질에 미치는 Ga 도핑 효과 (Effect of Ga-doping on the properties of ZnO films grown on glass substrate at room temperature by radio frequency magnetron sputtering)

  • 김금채;이지수;이수경;김도현;이성희;문주호;전민현
    • 한국진공학회지
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    • 제17권1호
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    • pp.40-45
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    • 2008
  • 유리기판 위에 약 500 nm 의 두께로 성장된 ZnO층의 구조적, 광학적, 전기적 성질에 미치는 갈륨도핑의 영향에 대하여 연구 하였다. 다결정 ZnO 와 GZO 층은 상온에서 radio frequency magnetron sputtering 법을 사용하여 성장되었다. 투과전자현미경 (TEM)과 x-ray 회절분석 (XRD)에 의하면, 갈륨이 도핑된 ZnO 박막의 결정성은 ZnO에 비하여 향상되었고 (002)방향을 따라 우선성장 되었음이 발견되었다. GZO 박막의 투과도는 가시광 영역에서 ZnO 박막에 비해 약 10% 정도 향상된 것으로 나타났다. PL 분석에 따르면, NBE emission 세기와 DL emission 세기의 비는 GZO 와 ZnO의 경우 각각 2.65:1 과 1.27:1로 나타났다. GZO와 ZnO의 비저항은 각각 1.27과 1.61 $\Omega{\cdot}cm$로서 GZO의 전기전도도가 높았다. GZO 와 ZnO의 캐리어농도는 각각 $10^{18}$ and $10^{20}cm^2$/Vs으로 측정되었다. 본 실험결과 따르면, Ga 도핑으로 인해 ZnO 박막의 전기적, 광학적, 구조적 특성이 향상되었음을 알 수 있었다.

Influence of Dy Doping on Electrical Properties and dc Aging Behaviors of Zn-Pr-Co-Cr System

  • Nahm, Choon-Woo
    • Transactions on Electrical and Electronic Materials
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    • 제8권6호
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    • pp.234-240
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    • 2007
  • The electrical properties and dc aging behavior for specified stress state of system, which is composed of quaternary Zn-Pr-Co-Cr, were investigated for different $Dy_2O_3$ addition doping level. As $Dy_2O_3$ doping level increased, the density decreased in the range of 5.51-4.90 $g/cm^3$, reaching maximum at 0.5 mol% and the average ZnO grain size decreased in the range of 17.7-6.0 ${\mu}m$. The incorporation of $Dy_2O_3$ significantly improved the non-ohmic properties, above 30 in non-ohmic coefficient, compared with that of undoped samples. The samples with the best performance of non-ohmic properties were obtained for $Dy_2O_3$ doping level of 1.0 mol%, with 49 in non-ohmic coefficient and 2.6 ${\mu}A/cm^2$ in leakage current. The samples with the highest stability were obtained for $Dy_2O_3$ doping level of 0.5 mol%.

Hot Wall 법의 반복 증착에 의해 제작한 ZnS:Mn 박막 엘렉트로루미네센스의 특성 (Characteristics of Zns:Mn Thin Film Electroluminescences Prepared by a Repeated Deposition of Hot Wall Method)

  • 이상태
    • 한국항해학회지
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    • 제25권4호
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    • pp.435-442
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    • 2001
  • A new technique to grow a manganese-doped zinc-sulfide(ZnS:Mn) has been proposed using the repeated deposition of the Hot Wall method. The optical characteristics and crystallinity for the ZnS and ZnS:Mn thin films deposited on a quartz glass substrate by the method were investigated. Also, The ZnS:Mn thin film elcetroluminescent devices were fabricated by the method to study luminescence characteristics. All films showed (111)-oriented cubic structure. By the repeated deposition, the deposition rates were decreased, and the optical characteristics and crystalline properties were improved, which clarifies that the method is effective to deposit the thin films with good crystallinity Futhermore, the crystallinity was more improved by the doping of Mn. Only one peak emission at around 585nm originating from Mn luminescent center is observed In the photoluminescent and electroluminescent spectra of ZnS:Mn films and the luminance of the ZnS:Mn-based thin film electroluminescent devices was obtained below 60cd/$m^2$ . The optical and crystalline properties, luminescence characteristics are discussed in terms of the effects of the repeated deposition and Mn-doping.

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초음파분무법으로 제조한 ZnO:Er막의 UV 발광 특성 (UV emission of ZnO:Er films prepared by ultrasonic spray pyrolysis)

  • 최무희;마대영
    • 센서학회지
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    • 제16권4호
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    • pp.307-312
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    • 2007
  • The films of Er-doped ZnO (ZnO:Er) were prepared onto MgO wafers by ultrasonic spray pyrolysis at $550^{\circ}C$. The concentration of Er in the deposition source varied from 0.5 wt% to 3.0 wt%. The crystallographic properties and surface morphologies of the films were investigated by X-ray diffraction (XRD) and scanning electron microscope (SEM), respectively. The properties of photoluminescence (PL) for the films were investigated by dependence of PL spectra on the Er concentration in the films. The films were grown as polycrystalline with a dominant direction of [002]. The grain size of the films were reduced by Er-doping. Er-doping enhanced the ultraviolet emission of ZnO:Er films. The ZnO:Er films prepared with the deposition source of 2.0 wt% Er showed the strongest ultraviolet light emission peak among the films in this study.

전이금속 도핑이 ZnO 나노분말의 특성 및 메틸렌블루 광촉매 분해 특성에 미치는 영향 (Effects of transition metal-doping on the properties of ZnO nanoparticles and the photocatalytic degradation of methylene blue)

  • 장한권;오경준;장희동;조국;김동진;최진훈
    • 한국입자에어로졸학회지
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    • 제6권1호
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    • pp.29-35
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    • 2010
  • Transition metals such as V, Fe, and Ni were used to synthesize doped zinc oxide nanoparticles from mixed liquid precursors by using the flame spray pyrolysis (FSP). The effects of dopants on the powder properties such as morphology, specific surface area, crystal structure, and light adsorption were analyzed by TEM, BET, XRD, and UV-Vis diffuse reflection spectrum (DRS), respectively. The results showed that hexagonal wurtzite structured ZnO:M (M = V, Fe, Ni) nanoparticles were successfully synthesized by the FSP. The transition metal-doping resulted in the decrease in its particle size and crystallite size. The UV-vis absorption spectra of ZnO:M nanoparticles were also red-shifted. ZnO:V showed the highest MB degradation of 99.4% under the UV irradiation after 3 hrs.

Influence of the Fluorine-doping Concentration on Nanocrystalline ZnO Thin Films Deposited by Sol-gel Process

  • Yoon, Hyunsik;Kim, Ikhyun;Kang, Daeho;Kim, Soaram;Kim, Jin Soo;Son, Jeong-Sik;Leem, Jae-Young
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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    • pp.204.2-204.2
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    • 2013
  • Wide band gap II-VI semiconductors have attracted the interest of many research groups during the past few years due to the possibility of their applications in light-emitting diodes and laser diodes. Among the II-VI semiconductors, ZnO is an important optoelectronic device material for use in the violet and blue regions because of its wide direct band gap (Eg ~3.37 eV) and large exciton binding energy (60 meV). F-doped ZnO (FZO) and undoped ZnO thin films were grown onto quartz substrate by the sol-gel spin-coating method. The doping level in the solution, designated by F/Zn atomic ratio of was varied from 0 to 5 in 1 steps. To investigate the effects of the structure and optical properties of FZO thin films were investigated using X-ray diffraction (XRD), UV-visible spectroscopy, and photoluminescence (PL). In the XRD, the residual stress, FWHM, bond length, and average grain size were changed with increasing the doping concentration. For the PL spectra, the high INBE/IDLE ratio of the FZO thin films doping concentration at 1 at.% than the other samples.

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Sensing Properties of Ga-doped ZnO Nanowire Gas Sensor

  • Lee, Sang Yeol
    • Transactions on Electrical and Electronic Materials
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    • 제16권2호
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    • pp.78-81
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    • 2015
  • Pure ZnO and ZnO nanowires doped with 3 wt.% Ga (‘3GZO’) were grown by pulsed laser deposition in a furnace system. The doping of Ga in ZnO nanowires was analyzed by observing the optical and chemical properties of the doped nanowires. The diameter and length of nanowires were under 200 nm and several ${\mu}m$, respectively. Changes of significant resistance were observed and the sensitivities of ZnO and 3GZO nanowires were compared. The sensitivities of ZnO and 3GZO nanowire sensors measured at 300℃ for 1 ppm of ethanol gas were 97% and 48%, respectively.