• Title/Summary/Keyword: Zn doping

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Characterization of Zn Doping in AIGaInP Epitaxy Layer Grown by MOCVD (유기금속 화학증착법을 사용한 AIGAInP층의 Zn 도우핑 농도의 특성)

  • Yun, Gi-Hyeon;Kim, Nam-Heon
    • Korean Journal of Materials Research
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    • v.6 no.9
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    • pp.950-958
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    • 1996
  • 저압 유기금속 화학증착법을 사용하여 AIGaInP층의 diethylzinc의 III족 원소(AO, Ga, In)에 대한 비와 성장온도 변화에 따른 Zn(acceptor)의 첨가 농도특성을 연구하였다. Diethylzinc의 III족 원소(AI, Ga, In)비를 0.4에서 2.0까지 변화시켜 본 결과 0.85일 때 가장 높은 acceptor 농도를 가졌으며, 성장온도를 69$0^{\circ}C$에서 80$0^{\circ}C$까지 변화시킨 결과 성장온도에 대한 변화는 69$0^{\circ}C$-73$0^{\circ}C$일 때 온도가 증가함에 따라 acceptor농도는 커졌으며, 그 이상에서는 감소하였다. 또한, 성장속도가 빠를수록 높은 acceptor 농도를 가지게 되어 3.3$\mu\textrm{m}$/hr의 성장속도일 때 8x1017/㎤의 가장 높은 acceptor 농도를 얻을수 있다.

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The Influence of Re2O3(RDy, Er) on the Electromagnetic Properties of Mn-Zn Ferrite (Re2O3(RDy, Er)가 Mn-Zn ferrite의 전자기적 특성에 미치는 영향)

  • 백승철;최우성
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.15 no.2
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    • pp.178-183
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    • 2002
  • The effects of Dy$_2$O$_3$and Er$_2$O$_3$addition on the electromagnetic properties of Mn-Zn ferrite were investigated in the doping concentration range from 0.05 wt% to 0.25 wt%. All samples were prepared by standard fabrication of ferrite ceramics. The XRD patterns of sample were observed spinel and secondary phase. The densities of sample were showed nearly constant values. As the increased additive, electrical resistivity, initial permeability and real component of the series complex permeability increased with setting limits each other. Excess doped with Dy$_2$O$_3$ and Er$_2$O$_3$, those values decreased. The maximum electrical resistivity was observed with 0.15 we% and initial permeability was observed with 0.05 wt%. Magnetic loss decreased with additive and then increased in proportion to increased.

Effects of Doping Concentration and Microstructures on Photoluminescence Dispersion of InGaAsP Semiconductors (InGaAsP 에피막의 도핑농도 및 미세조직구조가 photoluminescence 분산특성에 미치 는 영향)

  • 이종원
    • Journal of the Microelectronics and Packaging Society
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    • v.4 no.2
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    • pp.71-78
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    • 1997
  • 본 논문에서는 InGaAsP 에피막에서 도핑 농도와 에피막의 미세조직구조가 photoluminescence (PL) 스펙트럼의 위치 및 형상에 어떤 영향을 미치는가를 연구하였고, 그 결과를 설명하기 위해 가능한 모델을 제시하였다. InGaAsP 에피막(발진파장 ~1.3$\mu$m) 을 액상증착법(liquid phase epitaxy, LPE)으로 성장하여 9K에서 PL측정을 했을 때 InGaAsP 활성층 내 Zn 억셉터의 유무에 따라 PL 피크의 위치가 최대 30nm (24meV)까지 shift하고 피크의 선폭도 넓어지는 현사을 발견하였다. 이와같은 피크 분산현상은 inGaAsP 에피막이 유기금속 기상증착법으로 성장되거나 Zn로 고농도로 도핑되거나 고온에서 어닐링 될 경우 대폭 감소하였다. 이를 설명하기 위해 여러 가지 모델을 설정하여 실험을 하였으며 이 중 InGaAsP 에피막의 미세조직구조 특히 Spinodal 분해에 의한 조성이 모듈레이션과 Zn의 상호작용의 관계가 이 현상을 설명하는 데 가장 적절하다는 것을 밝혔다.

Atomic layer deposition of Al-doped ZnO thin films using dimethylaluminum isopropoxide as Al dopant

  • Lee, Hui-Ju;Kim, Geon-Hui;U, Jeong-Jun;Jeon, Du-Jin;Kim, Yun-Su
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.178-178
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    • 2010
  • We have deposited aluminum-doped ZnO thin films on borosilicate glass by atomic layer deposition. Diethylzinc (DEZ) and dimethylaluminum isopropoxide (DMAIP) were used as the metal precursor and the Al-dopant, respectively. Water was used as an oxygen source. DMAIP was successfully used as an aluminum precursor for chemical vapor deposition and ALD. All deposited films showed n-type conduction. The resistivity decreased to a minimum and then increased with increasing the aluminum content. The carrier concentration increased and the carrier mobility decreased with increasing the DMAIP to DEZ pulse ratio. The average optical transmittance was nearly 80 % in the visible part of the spectrum. The absorption edge moved to the shorter wavelength region with increasing the DMAIP to DEZ pulse ratio. Our results indicate that DMAIP is suitable for Al doping of ZnO films.

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Influence of sputtering parameter on the properties of silver-doped zinc oxide sputtered films

  • S. H. Jeong;Lee, S. B.;J.H. Boo
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2003.10a
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    • pp.58-58
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    • 2003
  • Silver doped ZnO (SZO) films were prepared by rf magnetron sputtering on glass substrates with extraordinary designed ZnO target. With the doping source for target, use AgNO$_3$ powder on a various rate (0, 2, and 4 wt.%). We investigated dependence of coating parameter such as dopant content in target and substrate temperature in the SZO films. The SZO films have a preferred orientation in the (002) direction. As amounts of the Ag dopant in the target were increased, the crystallinity and the transmittance and optical band gap were decreased. And the substrate temperature were increased, the crystallinity and the transmittance were increased. But the crystallinity and the transmittance of SZO films were retrograde at 200$^{\circ}C$. Upside facts were related with composition. In addition, the Oxygen K-edge features of the SZO films were investigated by using near edge X-ray absorption fine structure (NEXAFS) spectroscopy. Changes of optical band gap of the SZO films were explained compared with XRD, XPS and NEXAFS spectra.

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Characteristics and Preparation of Gas Sensor Using Nano Indium Coated ZnO:In (나노 Indium을 부착한 ZnO:In 가스센서의 제작 및 특성)

  • Jung, Jong-Hun;Yu, Yun-Sik;Yu, Il
    • Korean Journal of Materials Research
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    • v.21 no.9
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    • pp.486-490
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    • 2011
  • Nano-indium-coated ZnO:In thick films were prepared by a hydrothermal method. ZnO:In gas sensors were fabricated by a screen printing method on alumina substrates. The gas sensing properties of the gas sensors were investigated for hydrocarbon gas. The effects of the indium concentration of the ZnO:In gas sensors on the structural and morphological properties were investigated by X-ray diffraction and scanning electron microscopy. XRD patterns revealed that the ZnO:In with wurtzite structure was grown with (1 0 0), (0 0 2), and (1 0 1) peaks. The quantity of In coating on the ZnO surface increased with increasing In concentration. The sensitivity of the ZnO:In sensors was measured for 5 ppm $CH_4$ gas and $CH_3CH_2CH_3$ gas at room temperature by comparing the resistance in air with that in target gases. The highest sensitivity to $CH_4$ gas and $CH_3CH_2CH_3$ gas of the ZnO:In sensors was observed at the In 6 wt%. The response and recovery times of the 6 wt% indiumcoated ZnO:In gas sensors were 19 s and 12 s, respectively.

Fabrication of Zn-treated ACF/TiO2 Composites and Their Photocataytic Activity for Degradation of Methylene Blue

  • Go, Yu-Gyoung;Zhang, Feng-Jun;Chen, Ming-Liang;Oh, Won-Chun
    • Korean Journal of Materials Research
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    • v.19 no.3
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    • pp.142-150
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    • 2009
  • In this paper, non-treated ACF (Activated Carbon Fiber) /$TiO_2$ and Zn-treated ACF/$TiO_2$ were prepared. The prepared composites were characterized in terms of their structural crystallinity, elemental identification and photocatalytic activity. XRD patterns of the composites showed that the non-treated ACF/$TiO_2$ composite contained only typical single and clear anatase forms while the Zn-treated ACF/$TiO_2$ contained a mixed anatase and rutile phase with a unique ZnO peak. SEM results show that the titanium complex particles are uniformly distributed on and around the fiber and that the titanium complex particles are more regularly distributed on and around the ACF surfaces upon an increase of the $ZnCl_2$ concentration. These EDX spectra show the presence of peaks from the C, O and Ti elements. Moreover, peaks of the Zn element were observed in the Zn-treated ACF/$TiO_2$ composites. The prominent photocatalytic activity of the Zn-treated ACF/$TiO_2$ can be attributed to the three different effects of photo-degradation: doping, absorptivity by an electron transfer, and adsorptivity of porous ACFs between the Zn-$TiO_2$ and Zn-ACF.

Study on Ohmic resistance of Zn-doping InP using RTA method (RTA 방법에 의해 Zn 도핑된 InP의 오믹저항 특성연구)

  • Kim, H.J.;Kim, I.S.;Kim, T.U.;Kim, S.T.;Kim, S.H;Ki, H.C.;Lee, K.M.;Yang, M.H.;Ko, H.J.;Kim, H.J.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.237-238
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    • 2008
  • Electrical properties of Pd/Zn/Pd/Au contacts to p-InP were investigated as function of the V/III ratio of p-InP. P-type InP was made by the Zn diffusion into InP and activation process with rapid thermal annealing (RTA) measurement. After activation, the hole concentration was two orders of magnitude higher than that of the sample having only diffusion process. According to transmission line method (TLM) results, the specific contact resistance of p-InP was lower as used InP having the lower V/III ratio. The experimental results represent that the diffusion of Zn in undoped InP deeply related to the equilibrium between interstitials and substitutional Zn is established via indium interstitials.

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Properties of Transparent Conducting Zinc Oxide Films Prepared by RF Sputtering (RF Sputter 방법으로 제조한 투명전도막 ZnO 특성)

  • Choe, Byung-Ho
    • Korean Journal of Materials Research
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    • v.2 no.5
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    • pp.360-365
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    • 1992
  • Ga-doped polycrystalline ZnO films on glass substrates were prepared by sputtering the targets, which had been prepared by sintering discs consisting of ZnO powder and various amounts of G$a_2O_3$, to investigate the effects of gallium doping and sputtering conditions on electrical properties. Optimizing the RF power density, argon gas pressure and gallium content, transparent Ga-doped ZnO films with resistivity less than 1$0^{-3}$ohm-cm are obtained. Electron concentration of undoped and Ga-doped ZnO films are order of $10^{18}$, $10^{21}$/c$m^2$respectively. After heat treatment in air and $N_2atmosphere, $ the resistivity of Ga-doped ZnO films increases by about two orders of magnitude. The optical transmission is above 80% in the visible range and the optical band widens as the Ga content increases.

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A Study on Fabrication of $ZnSe_{1-x}:Te_x$ Thin Films and Their OPtical Properties ($ZnSe_{1-x}:Te_x$ 박막의 제작과 광학적 특성에 관한 연구)

  • Lee Hong-Chan
    • Journal of Advanced Marine Engineering and Technology
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    • v.30 no.1
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    • pp.176-181
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    • 2006
  • In this study, systematical investigations were carried out on crystal qualifies and optical properties of $ZnSe_{1-x}:Te_x$ (x=0.002-0.04) thin films frown by molecular beam epitaxy (MBE). The crystal qualifies and optical properties have been investigated by X-ray diffraction (XRD) and Photoluminescence (PL) measurements, respectively. From the XRD measurements, the crystallographic characteristics showed mediocre crystal quality with increasing the Te composition. From the PL measurements, emission in the visible spectrum region from blue to green was obtained by varying the Te content of the ZnSe:Te epilayers. The efficient blue and green emission were attributed to the recombination of excitons trapped at isoelectronic isolated a single Te atom and $Te_n(n{\geq}2)$ clusters. respectively. The blue emission become dominant in Te tightly doped $ZnSe_{1-x}:Te_x$ $(Te=0.2\%)$ epilayers with increasing temperature. For the Te heavily doping condition $(Te=4.0\%)$, the dominant green emission could be observed at around 160K.