• Title/Summary/Keyword: Zinc-Aluminum

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The property of surface morphology of AZO films deposited at low temperature with post-annealing (저온증착 AZO 박막의 분위기 후열처리에 따른 표면 형상 특성)

  • Jeong, Yun-Hwan;Chen, Ho;Song, Min-Jong;Park, Choon-Bae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.417-418
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    • 2008
  • Transparent conductive oxide (TCO) are necessary as front electrode or anti-reflecting coating for increasing efficiency of LED and Photodiode. In this paper, aluminum-doped Zinc oxide films(AZO) were prepared by DC magnetron sputtering on glass(corning 1737) and Si substrate at temperature of $100^{\circ}C$ and then annealed at temperature of $400^{\circ}C$ for 1hr in Ar and vaccum. The AZO films were etched in diluted HCL (0.5 %) to examine the surface morphology properties. After annealing, Structural and electrical property were investigated. The c-axis orientation along (002) plane was enhanced and the electrical resistivity of the AZO film decreased from $1.1\times10^{-1}$ to $1.6\times10^{-2}{\Omega}cm$. We observed textured structure of AZO thin film etched for 2s.

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Effect of heat treatment on the electrical and optical properties of ZnO : Al thin films prepared by reactive magnetron sputtering method (반응성 sputtering법으로 제막된 ZnO : Al 박막의 전기.광학적 특성에 미치는 열처리의 영향)

  • 유세웅;유병석;이정훈
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.6 no.4
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    • pp.493-500
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    • 1996
  • AZO transparent conducting thin films were fabricated by reactive DC magnetron sputtering method using Zn metla target containing 2 wt% of Al, and electrical and optical properties were investigated after heattreatment. Electrical resistivity was reduced 50% and had reached $1{\times}10^{-3}~3.5{\times}10^{-4}\;{\Omega}cm$ by heat treatment. In the case of oxide AZO films, the resistivity of $10^{3}\;{\Omega}cm$ was also decreased to $2{\times}10^{-3}\;{\Omega}cm$ after heat treatment. The optical transmittance of AZO films deposited in the transition range was increased from 59.4 % to 77.4 % by $400^{\circ}C$, 30 min heat treatment.

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Protective Metal Oxide Coatings on Zinc-sulfide-based Phosphors and their Cathodoluminescence Properties

  • Oh, Sung-Il;Lee, Hyo-Sung;Kim, Kwang-Bok;Kang, Jun-Gill
    • Bulletin of the Korean Chemical Society
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    • v.31 no.12
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    • pp.3723-3729
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    • 2010
  • We investigated the high-excitation voltage cathodoluminescence (CL) performance of blue light-emitting (ZnS:Ag,Al,Cl) and green light-emitting (ZnS:Cu,Al) phosphors coated with metal oxides ($SiO_2$, $Al_2O_3$, and MgO). Hydrolysis of the metal oxide precursors tetraethoxysilane, aluminum isopropoxide, and magnesium nitrate, with subsequent heat annealing at $400^{\circ}C$, produced $SiO_2$ nanoparticles, an $Al_2O_3$ thin film, and MgO scale-type film, respectively, on the surface of the phosphors. Effects of the phosphor surface coatings on CL intensities and aging behavior of the phosphors were assessed using an accelerating voltage of 12 kV. The MgO thick film coverage exhibited less reduction in initial CL intensity and was most effective in improving aging degradation. Phosphors treated with a low concentration of magnesium nitrate maintained their initial CL intensities without aging degradation for 2000 s. In contrast, the $SiO_2$ and the $Al_2O_3$ coverages were ineffective in improving aging degradation.

Electrical, Structural, Optical Properties of the AZO Transparent Conducting Oxide Layer for Application to Flat Panel Display (평판디스플레이 응용을 위한 AZO 투명전도막의 전기적, 구조적 및 광학적 특성)

  • No, Im-Jun;Kim, Sung-Hyun;Park, Dong-Wha;Shin, Paik-Kyun
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.58 no.10
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    • pp.1976-1981
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    • 2009
  • Transparent conducting aluminum-doped zinc oxide (AZO) thin films were deposited on Coming glass substrate using an Gun-type rf magnetron sputtering deposition technology. The AZO thin films were fabricated with an AZO ceramic target (Zn: 98wt.%, $Al_2O_3$: 2wt.%). The AZO thin films were deposited with various growth conditions such as the substrate temperature, oxygen pressure. X -ray diffraction (XRD), UV/visible spectroscope, atomic force microscope (AFM), and Hall effect measurement system were done in order to investigate the properties of the AZO thin films Among the AZO thin films prepared in this study, the one formed at conditions of the substrate temperature $100^{\circ}C$, Ar 50 sccm, $O_2$ 5 sccm and working pressure 5 motor showed the best properties of an electrical resistivity of $1.763{\times}10^{-4}\;[{\Omega}{\cdot}cm]$, a carrier concentration of $1.801{\times}10^{21}\;[cm^{-3}]$, and a carrier mobility of $19.66\;[cm^2/V{\cdot}S]$, which indicates that it could be used as a transparent electrode for thin film transistor and flat panel display applications.

Adhesion Change of AZO/PET Film by ZrCu Insertion Layer

  • Ko, Sang-Won;Jung, Jong-Gook;Park, Kyeong-Soon;Lim, Sil-Mook
    • Journal of the Korean institute of surface engineering
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    • v.49 no.3
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    • pp.252-259
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    • 2016
  • In order to form an aluminum-doped zinc oxide (AZO) transparent electrode film on a polyethylene terephthalate (PET) substrate used for a flexible display substrate, the AZO transparent electrode was produced at low temperature without substrate heating. Even though the produced electrode showed characteristic optical transmittance of 90 % (at 550 nm) and sheet resistance within $100{\Omega}/sq$, cracks occurred 10 minutes after loading applied 2 mm radius of curvature, and the sheet resistance increased linearly. An insertion layer of ZrCu was formed between the AZO film and the PET substrate to suppress the generation of cracks on the AZO film. It was verified that the crack was not generated 30 minutes after the loading of 2 mm radius of curvature, and no increase in sheet resistance was recorded. There was also not cracks in the dynamic bending test of 4 mm radius, but surface resistance was slightly increased. As a result, the ZrCu insertion film improved the interfacial adhesion between the substrate and AZO film layer without increasing sheet resistance and decreasing transmittance.

Realization and Electrical-Optical Properties of AZO/p-Si UV Photodetector (AZO/p-Si 자외선 수광소자의 전기적.광학적 특성)

  • Oh, Sang-Hyun;Jeong, Yun-Hwan;Chen, Hao;Park, Choon-Bae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.323-324
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    • 2007
  • Investigation of improving the properties of UV photodetector which uses the wide bandgap of ZnO are under active progress. In this paper, transparent conducting aluminum-doped Zinc oxide films(AZO) were prepared by rf magnetron sputtering on glass(corning 1737) and p-Si substrate, were then annealed at temperature $400^{\circ}C$ for 2hr. The AZO thin films were deposited by RF sputtering system. HF power and work pressure is 120 W and 15 mTorr, respectively, and the purity of AZO target is 5N. The AZO thin films were deposited at 300, 400, $500^{\circ}C$, and $600^{\circ}C$. For sample deposited at $400^{\circ}C$, we observed best $V_r-I_{ph}$ of 0.94 mA and good transmittance.

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Analysis on the Electrical.optical Properties and fabrication of OLED with AZO Anode Electrode (AZO Anode 전극을 적용한 OLED 소자의 제작과 전기적.광학적 특성 분석)

  • Jin, Eun-Mi;Shin, Eun-Chul;Kim, Tae-Wan;Park, Choon-Bae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.20 no.4
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    • pp.357-362
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    • 2007
  • AZO(Aluminum-doped Zinc Oxide) films are attractive materials as transparent conductive electrode because they are inexpensive, nontoxic and abundant element compared with ITO(Indium Tin Oxide). AZO films have been deposited on glass (corning 1737) substrates by RF magnetron sputtering. The AZO film was post-annealed at $600^{\circ}C$ for 2 hr with $N_2$ atmosphere. The AZO films were used as an anode contact to fabricate OLEDs(Organic Light Emitting Diodes). OLEDs with $AZO/TPD/Alq_3/Al$ configuration were fabricated by thermal evaporation. We investigated that the electric, structural and optical properties of AZO thin films, which measured using the methods of XRD, SEM, Hall measurement and Spectrophotometer. The current density-voltage and luminescence-voltage properties of devices were studied and compared with ITO devices fabricated under the same conditions.

다양한 기판에 FTS(Facing Target Sputtering)방법으로 제작된 AZO박막의 광전 특성에 관한 연구

  • ;Seo, Seong-Bo;Kim, Hwa-Min
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.176.1-176.1
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    • 2013
  • TCO (Transparent Conductive Oxide)는 투명 전도성 산화물 높은 투과율과 낮은 비저항 가지고 있어서 최근 사용된 평판디스플레이 LCD(liquid crystal display), PDP (Plasma Display Panel), OLED (Organic Light Emitting Display) 에 많이 사용되고 있다. 현재 양산화 되고 있는 ITO (Indium tin Oxide)는 좋은 전도율과 높은 투과율로서 가장 많이 쓰인다. 하지만 ITO중에 Indium Oxide는 치명적인 독성을 가지고 있으며 In의 저장량이 적어 시간이 갈수록 가격이 비싸지는 등 여러 가지 단점을 가지고 있다. 그것에 비해 AZO (aluminum-doped zinc oxide)는 독성이 없고 가격도 저렴하여 ITO의 단점을 보완 할 수 있는 물질이다. AZO 증착은 현재 sol-gel, CVD(chemical vapor deposition), Sputter, 등으로 사용되고 있으며 현재 많은 연구가 진행되고 있다. 본 실험에서는 PEN 기판을 사용하였으며, 플라즈마의 열적 데미지로 인한 기판의 변형 등 여러 가지 문제를 해결하기 위하여 박막의 열적 변형이 적고, 고밀도 플라즈마로 양질의 박막 증착이 가능한 FTS (Facing Target Sputtering)방법을 사용하여 AZO박막을 증착시키고 구조적, 전기적, 광학적인 특성을 평가 하였다. 측정 분석 결과 AZO는 가시광 영역에 높은 투과율이 요구되는 Flexible display 표시장치와 OLED, PDP, 유기태양전지 등 많은 영역에 사용이 가능 할 것이라 사료된다.

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Atmospheric Corrosion Behavior of Carbon Steel by the Outdoor Exposure Test for 10 Years in Korea

  • Yoo, Y.R.;Choi, S.H.;Kim, Y.S.
    • Corrosion Science and Technology
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    • v.21 no.3
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    • pp.184-199
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    • 2022
  • Steel was exposed in an atmospheric environment, and atmospheric environmental factors that include chloride, humidity, SO2, NO2 etc. induced the corrosion of steel. Corrosivity categories classified by SO2 and chloride deposition rate were low, but those classified by TOW were high in the Korean Peninsula, and on these environmental categories, the corrosivity of atmospheres classified by corrosion rate in carbon steel was low medium, C2-C3, and medium, C3 for zinc, copper, and aluminum. This work performed the outdoor exposure test for 10 years at 14 areas in Korea and calculated the atmospheric corrosion rate of carbon steel. The atmospheric corrosion behavior of carbon steel is discussed based on the various corrosion factors. When the corrosion product forms on carbon steel by atmospheric corrosion, cracks may also be formed, and through these cracks, the environmental factors can penetrate into the interior of the product, detach some of the corrosion products and finally corrode locally. Thus, the maximum corrosion rate was about 7.3 times greater than the average corrosion rate. The color difference and glossiness of carbon steel by the 10 year-outdoor exposure tests are discussed based on the corrosion rate and the environmental factors.

A Study on Thin-Film Silicon Solar Cells with Multi-Architecture Etching Technique to Improve Light Trapping (광 포획 향상을 위한 다중 아키텍처 식각 기술을 적용한 박막 실리콘 태양전지에 관한 연구)

  • Hyeong Gi Park;Junsin Yi
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.37 no.3
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    • pp.337-344
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    • 2024
  • This work focuses on improving the light-harvesting efficiency of thin-film silicon solar cells through innovative multi-architecture surface modifications. To create a regular optical structure, a lithographic process was performed to form it on a glass substrate through various etching processes, from Etch-1 to Etch-3. AZO was deposited on top of the structures and re-etched to create a multi-architectural surface. These surface-modified structures improved the light absorption and overall performance of the solar cell through changes in optical and physical properties, which we will analyze. In addition, we investigated the effect of post-cleaning on the etched glass structures through EDX analysis to understand the mechanism of the etching action. The results of this study are expected to provide important guidelines for the design and fabrication of solar cells and other photovoltaic devices.