• Proceedings of the Optical Society of Korea Conference
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• 2007.07a
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• pp.187-188
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• 2007

Four kinds of mirror substrates with same surface roughness were fabricated. On those substrates, a dielectric multi-layer coating with high reflectivity was deposited by ion beam sputtering technique. Most of the fused silica mirrors showed lower scattering than the ZERODUR mirrors one, which deposited on substrates similar in surface roughness. The ZERODUR mirrors scattering strongly depend on the micro-structure of $Ta_2O_5/SiO_2$ thin films wear deposited on ZERODUR substrates.

• Korean Journal of Optics and Photonics
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• v.18 no.6
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• pp.452-460
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• 2007

Ultra-low loss ZERODUR and fused silica mirrors were manufactured and their light scattering characteristics were investigated. For this purpose, ZERODUR and fused silica substrates were super-polished by the bowl feed method. The surface roughness were 0.292 ${\AA}$ and 0.326 ${\AA}$ in rms for ZERODUR and fused silica, respectively. To obtain the high reflectivity, 22 thin film layers of $SiO_2$ and $Ta_2O_5$ were deposited by Ion Beam Sputtering. The measured light scattering of ZERODUR and fused silica mirror were 30.9 ppm and 4.6 ppm, respectively. This shows that the substrate surface roughness is not the only parameter which determines the light scattering of the mirror. In order to investigate the mechanism for additional light scattering of the ZERODUR mirror, the surface roughness of the mirror was measured by AFM and was found to be 2.3 times higher than that of the fused silica mirror. It is believed that there is some mismatch at the interface between the substrate and the first thin film layer which leads to the increased mirror surface roughness. To clarify this, the contact angle measurements were performed by SEO 300A, based on the Giriflaco-Good-Fowkes-Young method. The fused silica substrates with 0.46 ${\AA}$ in its physical surface roughness shows lower contact angle than that of the ZERODUR substrate with 0.31 ${\AA}$. This indicates that the thin film surface roughness is determined by not only its surface roughness but also the surface energy of the substrate, which depends on the chemical composition or crystalline orientation of the materials. The surface energy of each substrate was calculated from a contact angle measurement, and it shows that the higher the surface energy of the substrate, the better the surface roughness of the thin film.

• Journal of the Optical Society of Korea
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• v.16 no.1
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• pp.80-84
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• 2012

A high reflectance mirror, which has very low absorption and scattering loss, was coated onto a crystalline substrate by ion beam sputtering and then annealed at $450^{\circ}C$. We carefully selected the mirror coating material, and designed the high reflectance mirror, in order to avoid UV degradation which comes from the He-Ne plasma. We measured the surface roughness of the Zerodur substrate using phase shift interferometry and atomic force microscopy, and compared it with the TIS scattering of the mirror. The cavity ring-down method was used to measure the absorption of the mirror, and the thin film structure was correlated to its results. We also compared the optical properties of coated mirrors before and after annealing.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.04a
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• pp.405-409
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• 2003

We explored a new rough grinding technique on optics materials such as Zerodur. The facility used is a NANOFORM-600 diamond turning machine with a custom grinding module and range of diamond resin bond wheel. The grinding parameters such as workpiece rotation speed depth of cut and feed rate were altered while grinding the workpiece surfaces of 20m in diameter. Surface roughness is measured by Form Talysurf series2. Our target is to define grinding conditions producing the surface roughness better than 0.02${\mu}{\textrm}{m}$ Ra and the form accuracy of around 0.2${\mu}{\textrm}{m}$ PV.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.4 no.1
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• pp.13-17
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• 2005

We explored a new rough grinding technique on optics materials such as Zerodur. The facility used is a NANOFORM-600 diamond turning machine with a custom grinding module and a range of diamond resin bond wheel. The grinding parameters such as workpiece rotation speed, depth of cut and feed rate were altered while grinding the workpiece surfaces of 20mm in diameter. Surface roughness was measured by Form Talysurf series2. Our target is to define grinding conditions producing the surface roughness smaller than $0.2{\mu}m$ Ra.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.34 no.10
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• pp.40-47
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• 2006

Optical performance of the mirror for satellite camera is highly dependent on the adhesive properties of its support. Therefore, in this paper, the adhesive properties of three kinds of space adhesives are investigated. For this purpose, the lap shear test is performed with Zerodur-to-metal lap shear specimen as well as metal-to-metal one. And it is also investigated whether reliable adhesive strength can be secured after the specific thermal cycle. Finally, the properties of three adhesives are compared with each other.

• Bulletin of the Korean Space Science Society
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• 2005.10a
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• pp.149-152
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• 2005

High-resolution telescope from space comprises electro-optical imagery with a ground resolution tying within the range of 1 to 5 meters. According to information documented in the literature up to now, most primary mirrors verified and flown in optical space missions have been lightweighted made from Zerodur, ULE, beryllium, SiC or aluminium. A trade off study was performed to determine as a &lightweighted& by factors like backside cell pattern, rib thickness, face thickness, mirror fixation device location and material and so on based on structural performance for primary mirror in submeter class spaceborne telescope.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.4 no.2
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• pp.10-15
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• 2005

For the development of compensation machining program, ultra precision grinding used in ultra precision machine and corrective machining was studied. We explored a new rough grinding technique on optical material such as zerodur. The facility used is a polishing machine with a custom grinding module and a range of diamond resin bond wheel. Surface roughness and form accuracy are measured by surface measurement equipment(Form Talysurf series2). Our compensation machining program has complied with a target of producing surface roughness better than $0.05{\mu}m$ Ra and form accuracy of around $0.05{\mu}m$ Rt and has been unveiled as a work-hour model.

• The Bulletin of The Korean Astronomical Society
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• v.37 no.2
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• pp.227.2-227.2
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• 2012

대구경 고해상도 광학탑재체의 광구조부는 주반사경과 부반사경 등을 포함한 주요 광학부품들과 검출기를 포함한 초점면 조립부 등을 고정 지지해주는 부분으로, 발사시 전달되는 진동 및 우주 열환경하에서의 길이 안정성을 광학성능 범위내로 유지하여야 한다. 광학탑재체의 성능에 가장 큰 영향을 미치는 것은 주반사경과 부반사경의 광축방향의 길이 안정성으로, 광학탑재체의 작동 온도범위 내에서 수 마이크로미터 내외로 안정성이 요구된다. 이를 실현하기 위하여 주반사경과 부반사경의 간격은 열 및 흡습에 둔감한 탄소섬유 강화수지 복합재로 되어 있는 경통 구조물로 설계, 제작된다. 제작된 경통구조물의 길이 안정성을 검증하기 위해서는 별도의 정밀 측정장치가 필요하게 된다. 본 논문에서는 이러한 길이 안정성 측정장치에 대해 기술한다. 온도에 대해 변화가 거의 없는 (CTE<0.1ppm/K) Zerodur 소재의 막대 구조물을 기준 스케일로 삼았고, 이를 지지하기 위해 Invar 소재의 구조물을 사용 하였다. 주반사경의 베젤부위와 부반사경의 접속부위의 변위 변화를 세점에서 측정하여 길이 안정성을 측정할 수 있게 하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.800-803
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• 2004

The refractive index of the laser interferometer is compensated using the simultaneously measured variations of room temperature and humidity in the method. In order to investigate the limit of compensation, the stationary test against two fixed reflectors mounted on the zerodur plate is performed firstly. From the experiment, it is confirmed that the measuring error of the laser interferometer can be improved from 0.12$\mu$m to 0.17$\mu$m by the application of the method. Secondly, for the verification of the compensating effect, it is applied to estimate the positioning accuracy of an ultra precision aerostatic stage. Two times of the refractive index compensation are performed to acquire the positioning error of the stage from the initially measured data, that is, to the initially measured positioning error and to the measured positioning error profile after the NC compensation. Although the positioning error of anaerostatic stage cannot be clarified perfectly, it is known that by the compensation method, the measuring error by the laser interferometer can be improved to within 0.15$\mu$m. English here.