• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집
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• pp.213-216
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• 2001

Etching behaviors of ferroelectric YMn $O_3$ thin films were studied by an inductively coupled plasma (ICP). Etch characteristic on ferroelectric YMn $O_3$ thin film have been investigated in terms of etch rate, selectivity and etch profile. The maximum etch rate of YMn $O_3$ thin film is 300 $\AA$/min at Ar/C $l_2$ of 2/8, RF power of 800W, dc bias voltage of 200V, chamber pressure of 15mTorr and substrate temperature of 3$0^{\circ}C$. Addition of C $F_4$ gas decrease the etch rate of YMn $O_3$ thin film. From the results of XPS analysis, Y $F_{X}$ compunds were found on the surface of YMn $O_3$ thin film which is etched in Ar/C1/C $F_4$ plasma. The etch profile of YMn $O_3$ film is improved by addition of C $F_4$ gas into the Ar/C $l_2$ plasma. These results suggest that fluoride yttrium acts as a sidewall passivants which reduce the sticking coefficient of chlorine on YMn $O_3$.>.

• 한국재료학회지
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• 제11권3호
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• pp.203-206
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• 2001

SrTiO$_3$첨가량 및 소결온도에 따른 YIG 소결체의 미세구조 및 자기적 특성변화에 대하여 조사하였다. 소량의 SrTiO$_3$소결재를 첨가한 결과 소결체의 격자상수는 약간 증가하였으며, 이는 소결시 $Y^{+3}$, Fe$^{+3}$이온이 이온반경이 상대적으로 큰 Sr$^{+2}$, Ti$^{+4}$이온으로 치환되었기 때문인 것으로 추정된다. SrTiO$_3$소결재를 0.2mo1% 첨가하고, 142$0^{\circ}C$에서 소결한 소결체의 밀도는 이론밀도의 98%이상의 치밀화를 얻을 수 있었다. 상온에서의 포화자화값(M$_s$)은 SrTiO$_3$소결재의 첨가량이 증가함에 따라 약간 감소하였으나 큰 변화는 없었다. 더욱이 온도에 따른 보자력 (H$_c$)의 변화는 없었다.

• 한국세라믹학회지
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• 제38권11호
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• pp.1008-1014
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• 2001

Nanosize의 YIG 분말을 자기광학효과에 뛰어난 첨가제인 Cerium을 첨가하여 에틸렌 글리콜 용매로서 졸-겔법을 이용하여 합성하였다. 점도와 pH가 일정한 값을 유지하고, aging시간에 따라 점도변화가 없는 120분에서 150분사이의 반응시간에서 가장 안정한 상태의 용액을 얻을 수 있었다. 건조시킨 YIG 분말로서 DTA 및 XRD 측정결과 80$0^{\circ}C$에서 단일상의 YIG를 합성할 수 있었고, Cerium 첨가량 증가에 따라 12면체 Y 이온 자리로의 치환에 의해 격자상수가 12.3921에서 12.4130$\AA$까지 증가하는 경향을 보였다. 80$0^{\circ}C$에서 105$0^{\circ}C$까지 열처리 온도 증가에 따라 평균입자크기는 40nm~330nm정도를 보였고, 포화자화값(M$_{s}$)은 YIG 결정성 증대 및 미량의 orthoferrite의 감소에 의해 18.37~21.25emu/g으로 증가하였으며, 보자력(H$_{c}$)은 80$0^{\circ}C$부터 90$0^{\circ}C$ 사이에서는 증가하다가, 그 이상 온도에서는 감소하는 경향을 보였다. Ce 첨가량이 증가함에 따른 보자력값은 큰 변화가 없었으며, 포화자화값은 0.1 mol%일 때 가장 큰 값을 지녔고, 이후 미량의 orhtoferrite 증가로 인해 감소하는 경향을 보였으나, 큐리 온도(T$_{c}$)에는 영향을 미치지 않았다.않았다.

• 한국주조공학회지
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• 제35권5호
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• pp.114-119
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• 2015

This paper reports the effect of a refractory crucible type on the microstructure of duplex stainless steel (DSS) cast with the addition of gadolinium using air-induction melting. Grade 4A DSSs with 1 wt% of gadolinium (Gd) were fabricated in various crucibles including alumina ($Al_2O_3$), magnesia (MgO), calcia (CaO) coated with yttria ($Y_2O_3$) and graphite. The standard free energies of the formation of calcium and yttrium oxide were lower than those of gadolinium oxide and other crucible elements based oxide. The yield of Gd in DSS using $Al_2O_3$, MgO, CaO-coated $Y_2O_3$ and graphite was 5, 19, 83 and 96%, respectively. As Gd yield increased, the amount of Gd-based inclusions increased, the size of the inclusions were reduced, and the inclusions became evenly distributed.

• 한국세라믹학회지
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• 제38권8호
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• pp.710-715
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• 2001

반응소결공정(RSP : Reaction Sintering Process)을 이용하여 YF댸₃와 Fe₂O₃의 성분에 소결첨가재 Bi₂O₃를 첨가하여 YIG를 합성하였다. Bi₂O₃첨가량과 소결온도에 따른 YIG 소결체의 미세구조 및 자기적 특성변화에 대해 주사전자현미경, X-선 회절분석기 및 시료 진동형 자력계를 이용하여 조사하였다. 소량의 소결첨가재 Bi₂O₃첨가시 YIG 소결체의 격자상수는 12.387에서 12.420 Å으로 증가하였다. 이는 상대적으로 이온반경이 큰 Bi 이온이 12면체 Y 이온 자리로 치환되었기 때문인 것으로 여겨진다. Bi₂O₃를 1.0 wt% 첨가하였을 때 비교적 균질한 미세구조를 보였으며, 1350℃에서 소결한 YIG의 밀도가 이론밀도의 98% 이상의 치밀화를 보였다. Bi₂O₃가 0.0 wt%에서 1.5 wt%로 첨가량이 증가함에 따라 상온에서의 포화자화값(M/sub s/)은 조금씩 증가하는 경향을 보였으나 큰 변화는 없었다. 반응소결공정을 이용 YIG 소결시 소결첨가제 Bi₂O₃가 1.0 wt%이고, 소결온도 1350℃에서 비교적 우수한 소결특성과 자기특성을 가지는 YIG 소결체를 얻을 수 있었다.

• IEIE Transactions on Smart Processing and Computing
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• 제4권5호
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• pp.305-310
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• 2015

We propose a new concept for a depth of interaction (DOI) positron emission tomography (PET) detector based on dual-ended-scintillator (DES) readout for small animal imaging. The detector consists of lutetium yttrium orthosilicate (LYSO) arrays coupled with orthogonal wavelength-shifting (WLS) fibre placed on the top and bottom of the arrays. On every other line, crystals that are 2 mm shorter are arranged to create grooves. WLS fibre is inserted into these grooves. This paper describes the design and performance evaluation of this PET detector using Monte Carlo simulations. To investigate sensitivity by crystal size, five types of PET detectors were simulated. Because the proposed detector is composed of crystals with three different lengths, degradation in sensitivity across the field of view was also explored by simulation. In addition, the effect of DOI resolution on image quality was demonstrated. The simulation results proved that the devised PET detector with excellent DOI resolution is helpful for reducing the channels of sensors/electronics and minimizing gamma ray attenuation and scattering while maintaining good detector performance.

• Nuclear Engineering and Technology
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• 제52권4호
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• pp.811-818
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• 2020

Y-containing CLAM steels were melted via vacuum induction melting and electroslag remelting. In this study, the evolution, microstructure, and mechanical properties of the alloy inclusions (ESR-1 (0 wt.% Y), ESR-2 (0.016 wt.% Y) and ESR-3 (0.042 wt.% Y)) were investigated. Further, the number of inclusions in ESRed steel was observed to obviously decrease, and the distributions were more uniform. The fine Y-Al-O inclusions (1-2 ㎛) were the main inclusions in ESR-2. The addition of Y affected the prior austenite grain size (PAGZ), increasing the tensile strength at test temperature. Low ductile-brittle transition temperature (DBTT) was obtained because of the fine PAGZ and dispersive inclusions. For the ESRed CLAM steel with 0.016 wt.% Y, the yield strengths were 621 MPa at 20 ℃ and 354 MPa at 600 ℃ in air. Further, the uniform elongation and elongation of the ESR-2 alloy were 5.5% and 20.1% at 20 ℃, respectively. Meanwhile, the DBTT tested using full-size Charpy impact specimen (55 cm × 10 cm × 10 cm) was reduced to -83 ℃.

• Carbon letters
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• 제6권2호
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• pp.71-78
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• 2005

Anti-oxidation coatings are the key technique for carbon/carbon (C/C) composites used as the thermal structural materials. The microstructure and oxidation behavior of several kinds of high-performance ceramic coatings for C/C composites prepared in Northwestern Polytechnical University were introduced in this paper. It showed that the ceramic coatings such as SiC, Si-$MoSi_2$, SiC-$MoSi_2$, $Al_2O_3$-mullite-SiC and SiC/yttrium silicate/glass coatings possessed excellent oxidation resistance at high temperatures, and some of these coatings were characterized with excellent thermal shock resistance. The SiC-$MoSi_2$ coating system has the best oxidation protective property, which can effectively protect C/C composites from oxidation up to 1973 K. In addition, the protection and failure reasons of some coatings at high temperature were also provided.

• 한국재료학회지
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• 제30권11호
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• pp.573-580
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• 2020

YAG (Yttrium Aluminum Garnet, Y₃Al₅O₁₂) has excellent plasma resistance and recently has been used as an alternative to Y₂O₃ as a chamber coating material in the semiconductor process. However, due to the presence of an impurity phase and difficulties in synthesis and densification, many studies on YAG are being conducted. In this study, YAG powder is synthesized by an organic-inorganic complex solution synthesis method using PVA polymer. The PVA solution is added to the sol in which the metal nitrate salts are dissolved, and the precursor is calcined into a porous and soft YAG powder. By controlling the molecular weight and the amount of PVA polymer, the effect on the particle size and particle shape of the synthesized YAG powder is evaluated. The sintering behavior of the YAG powder compact according to PVA type and grinding time is studied through an examination of its microstructure. Single phase YAG is synthesized at relatively low temperature of 1,000 ℃ and can be pulverized to sub-micron size by ball milling. In addition, sintered YAG with a relative density of about 98 % is obtained by sintering at 1,650 ℃.

• Korean Chemical Engineering Research
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• 제40권6호
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• pp.741-745
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• 2002

Sol-Gel법에 의해 출발물질로 zirconium-n-butoxide(ZNB)와 yttrium nitrate를 사용하여 yttria-stabilized zirconia(YSZ) 나노분말을 제조하였다. 또한 ZNB의 가수분해 동안 첨가된 물량의 변화가 얻어진 YSZ 나노분말의 결정상과 기공특성에 미치는 영향을 조사하였다. 하소온도 변화에 따른 결정상 변화는 첨가된 물량에 관계없이 동일한 양상을 보였다. 즉, $100^{\circ}C$에서 건조된 분말은 모두 비정질상이었으며, $400^{\circ}C$에서 입방정상의 결정구조로 전환되었고, $1,000^{\circ}C$에서 정방정상과 단사정상이 나타나 $1,400^{\circ}C$까지 정방정상과 단사정상이 공존하는 결정구조를 보였다. ZNB의 가수분해 중 물의 양이 비교적 적게 첨가된 경우로($H_2O/ZNB=20$이하) 제조된 분말은 mesopore의 기공분포를 보인 반면, 물의 양이 비교적 많이 첨가된 경우에서는 ($H_2O/ZNB=50$이상) micropore의 기공분포를 보였다.