• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.36 no.5
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• pp.487-495
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• 2012

The yaw control, a major part of the wind turbine, is closely related to the efficiency of electric power production and the mechanical load. The yaw error, which results from the nacelle not being appropriately aligned in the wind direction, not only decreases the power output but also reduces the lifetime of the wind turbine as a result of large fatigue loads. However, the yawing rate cannot be increased indefinitely because of constraints on mechanical loads. This paper investigates the characteristics of an active yaw control system, the basic principle of the system, and mechanical loads around the yaw axis during yawing.

• The Journal of the Acoustical Society of Korea
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• v.40 no.4
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• pp.382-390
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• 2021

Synthetic aperture sonars as well as side scan sonars or multibeam echo sounders have been commercialized and are widely used for seafloor imaging. In Korea related research such as the development of a towed synthetic aperture sonar system is underway. In order to obtain high-resolution synthetic aperture sonar images, it is necessary to accurately estimate the platform motion on which it is installed, and a precise underwater navigation system is required. In this paper we are going to provide reference data for determining the required navigation accuracy and precision of navigation sensors by quantitatively analyzing how much distortion of the sonar images occurs according to motion characteristics of the platform equipped with the synthetic aperture sonar. Five types of motions are considered and normalized root mean square error is defined for quantitative analysis. Simulation for error analysis with parameter variation of motion characteristics results in that yaw and sway motion causes the largest image distortion whereas the effect of pitch and heave motion is not significant.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.769-772
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• 2005

Five DOF motion errors of a hydrostatic bearing table driven by the coreless type linear motor were compensated utilizing the active controlled capillaries in this study. Horizontal linear motion and yaw error were simultaneously compensated using two active controlled capillaries and vertical linear motion, pitch and yaw error were also simultaneously compensated using three active controlled capillaries. By the compensation, horizontal linear motion accuracy and yaw were improved from 0.16 ${\mu}m$ and 1.96 arcsec to 0.02 ${\mu}m$ and 0.03 arcsec. Vertical linear motion accuracy, pitch and roll were also largely improved from 0.18 ${\mu}m$, 2.26 arcsec and 0.14 arcsec upto 0.03 ${\mu}m$, 0.07 arcsec and 0.02 arcsec. The compensated motion errors were within the range of measuring repeatability which was ${\pm}0.02\;{\mu}m$ in the linear motion and ${\pm}0.05$ arcsec in the angular motion. From these results, it is found that the motion error compensation method utilizing the active controlled capillaries are very effective to improve the five motion accuracies of the hydrostatic bearing tables.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.21 no.11
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• pp.554-560
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• 2020

In the manufacturing process of flat panel displays, a high-precision planar motion stage is used to position a specimen. Stages of this type typically use frictionless linear motors and air bearings, and laser interferometers. Real-time dynamic correction of the yaw motion error is very important because the inevitable yaw motion error of the stage means a change in the specimen orientation. Gantry control is generally used to compensate for yaw motion errors. Flexure units that allow rotational motion are applied to the stage to apply this method to a stage using an air-bearing guide. This paper proposes a method to improve the constant speed motion performance of a H-type XY stage equipped with air bearing and flexure units. When applying the gantry control to the stage, including the flexure units, the cause of the mutual ripple generated from the linear motors is analyzed, and adaptive learning control is proposed to compensate for the mutual ripple. A simulation was performed to verify the proposed method. The speed ripple was reduced to approximately the 22 % level. The ripple reduction was verified by simulating the stage state where yaw motion error occurs.

• Current Research on Agriculture and Life Sciences
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• v.32 no.3
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• pp.159-163
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• 2014

Agricultural unmanned helicopters have become a new paradigm for aerial application. Yet, such agricultural helicopters require easy and affordable attitude control systems. Therefore, this study presents an affordable attitude measurement system using a DCM (direction cosine matrix) algorithm that would be applied to agricultural unmanned helicopters. An IMU using a low-cost MEMS and an algorithm to estimate the attitude of the helicopter were applied in a gimbals structure to evaluate the accuracy of the attitude measurements. The estimation errors in the attitude were determined in comparison with the true angles determined by absolute position encoders. The DCM algorithm and sensors showed an accuracy of about 1.1% for the roll and pitch angle estimation. However, the accuracy of the yaw angle estimation at 3.7% was relatively larger. Such errors may be due to the magnetic field of the stepping motor and encoder system. Notwithstanding, since the intrinsic behavior of the agricultural helicopter remains steady, the determination of attitude would be reliable and practical.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1992.10a
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• pp.43-46
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• 1992

Measurement of straightness errors (vertical, horizontal),and angular error (roll, pitch, yaw) have been classified as difficult tasks in the machine tool metrology field. In this paper, computer aided measurement techniques are proposed using quadrant type photo pin diode. In the developed system, three photo diodes are mounted on the positioning table to detect the five degrees of movement error simultaneously. Outputs from the photo diode are analyzed in the computer and are displayed graphically.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.22 no.1
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• pp.16-23
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• 2011

This paper suggests a motion compensation technique using GPS/IMU data in order to compensate for phase error caused by undesired motion of radar platform. An actual flight trajectory would be deviate from an ideal straight-constant trajectory with a constant velocity for SAR imaging, due to pitch, roll and yaw motion of aircraft caused by turbulence. This leads to blurred SAR images due to inter-pulse phase errors as well as along-track velocity errors. If the motion compensation is carried out to reduce those errors, SAR image quality can be significantly improved. Simulation results show that the motion compensation technique introduced in this paper is an effective tool to improve SAR image quality against severe motion of radar platform.

• Journal of the Korean Society of Marine Environment & Safety
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• v.19 no.6
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• pp.666-673
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• 2013

This paper proposes the performance evaluation test of attitude heading reference system (AHRS) suitable for small high speed autonomous underwater vehicle(AUV). Although IMU can provides the detail attitude information, it is sometime not suitable for small AUV with short operation time in view of price and the electrical power consumption. One of alternative for tactical grade IMU is the AHRS based micro-machined electro mechanical system(MEMS) which can overcome many problems that have inhibited the adoption of inertial system for small AUV such as cost and power consumption. A cost effective and small size AHRS which incorporates measurements from 3-axis MEMS gyroscopes, accelerometers, and 3-axis magnetometers has been developed to provide a complete attitude solution for AUV and the attitude calculation algorithm is derived based the coordinate transform equation and Kalman filter. The developed AHRS was validated through various performance tests as like the magnetometer calibration, operating experiments using land mobile vehicle and flight motion simulator (FMS). The test of magnetometer calibration shows the developed MEMS AHRS is robust to the external magent field change and the test with land vehicle proves the leveling error of developed MEMS AHRS is below $0.5^{\circ}/hr$. The results of FMS test shows the fact that AHRS provides the measurement with $0.5^{\circ}/hr$ error during 5 minutes operation time. These results of performance evaluation tests showed that the developed AHRS provides attitude information which error of roll and pitch are below $1^{\circ}$ and the error of yaw is below $5^{\circ}$ and satisfies the required specification. It is expected that developed AHRS can provide the precise attitude measurement under sea trial with real AUV.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.11 s.176
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• pp.135-141
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• 2005

Measurement of five DOF motion errors in a ultra precision feed table was attempted in this study. Yaw and pitch error were measured by using a laser interferometer and roll error was measured by using the reversal method. Linear motion errors in the vertical and horizontal directions were measured by using the sequential two point method. In this case, influence of angular motion errors was compensated by using the previously measured ones by the laser interferometer and the reversal method. The capacitive type sensors and an optical straight edge were used in the reversal method and the sequential two point method. Influence of thermal deformation on sensor jig was investgated and minimized by the periodic measurement according to the variation of room temperature. Deviation of gain between sensors was also compensated using the step response data. 5 DOF motion errors of a hydrostatic table driven by the linear motor werer tested using the measurement method. In the horizontal direction, measuring accuracies for the linear and angular motion were within ${\pm}0.02\;{\mu}m$ and ${\pm}0.04$ arcsec, respectively. In the vertical direction, they were within ${\pm}0.02{\mu}m$ and ${\pm}0.05$ arcsec. From these results, it was found that the introduced measurement method was very effective to measure 5 DOF motion errors of the ultra precision feed tables.