• 제목/요약/키워드: YBCO 박막

검색결과 192건 처리시간 0.024초

분사 열분해 CVD법에서 분사방식에 따른 YBCO 박막의 결정구조와 미세조직 연구 (Deposition of Epitaxial YBCO Films on $LaAlO_3$(100) Substrate by Spray Pyrolysis Method)

  • 김호진;주진호;홍석관;이선왕;임선원;이희균;홍계원
    • Progress in Superconductivity
    • /
    • 제7권1호
    • /
    • pp.52-57
    • /
    • 2005
  • [ $YBa_{2}Cu_{3}O_y$ ] superconducting films were prepared on $LaAlO_3$(100) single crystal substrate by spray pyrolysis method. The precursor solution was prepared by dissolving nitrate powders in de-ionized water. Both of ultrasonic and concentric nebulizers were used in order to generate fine droplets of precursor solution. C-axis oriented films were obtained at deposition temperature of $750\~850^{\circ}C$ and working pressure of 100 Torr and 500 Torr. In case of ultrasonic nebulizer, films showed rough and porous surface morphology due to formation of enormous droplets, while smooth and dense films were obtained for concentric nebulizer. A transport $J_c$ value of $0.43\;MA/cm^2$ at 77 K and self field was achieved on $LaAlO_3$(100) single crystal substrate.

  • PDF

YBCO 초전도 박막 선재용 Ni-W 및 Ni-W-Cu 합금의 격자상수 변화 (Variation of Lattice Constant in Ni-W and Ni-W-Cu Alloys for YBCO Coated Conductor)

  • 김민우;정규동;전병혁;김형섭;김찬중
    • Progress in Superconductivity
    • /
    • 제7권1호
    • /
    • pp.64-68
    • /
    • 2005
  • We fabricated Ni-based alloy substrates for YBCO coated conductor using powder metallurgy. Tungsten and copper were selected as alloy elements due to their mutual solubility to the base element of nickel. The alloying elements were mixed with nickel using ball milling and dried in air. The powder mixtures were packed in a rubber mold, cold isostatic pressed 200 MPa and made into rods. The compacted rods were sintered at $1150^{\circ}C$ for 6 hours for densification. It was confirmed by neutron diffraction experiment that W and Cu atoms made complete solid solution with Ni. Lattice constant of nickel alloy increased by $0.004{\AA}$ for 1at. $\%$ W in Ni-W alloy, $0.0006{\AA}$ for 1 at. $\%$ Cu in Ni-W-Cu alloy.

  • PDF

TFA-MOD공정에서 $BaCeO_3$ 첨가에 의한 $YBa_2Cu_3O_{7-\delta}$ 박막의 임계전류밀도 증가 (Enhancement of critical current density in $BaCeO_3$ doped $YBa_2Cu_3O_{7-\delta}$ thin Films deposited by TFA-MOD process)

  • 이종범;김병주;이희균;홍계원
    • 한국초전도ㆍ저온공학회논문지
    • /
    • 제10권1호
    • /
    • pp.1-5
    • /
    • 2008
  • The effect of $BaCeO_3$ doping on the critical current density of YBCO film by TFA-MOD method was studied. $BaCeO_3$ doping was made by two method; one is direct addition of $BaCeO_3$ nano-sized powder prepared by citrate process followed by grinding with planetary ball mill for 10 hours. Another is addition of Ba-Ce precursor solution prepared with Ba-acetate and Ce acetate dissolved in TFA to the YBCO-TFA precursor solution. The film was made by standard dip coating and heat treatment process with conversion temperature of $790^{\circ}C$ in 1000 ppm oxygen containing moisturized Ar gas atmosphere. The direct addition of $BaCeO_3$ powder resulted in YBCO film with good epitaxial growth and no evidence of second phase formation. The addition through precursor solution resulted in the increase of critical current density upto 30 at% doping and uniform dispersion of $BaCeO_3$ fine inclusion was confirmed by SEM-EDX.

마이크로파 소자 응용을 위한 고온초전도 $YBa_2Cu_3O_{7-\delta}$ 에피택셜 박막의 제조 및 특성분석 (Preparation and Characterization of Epitaxial $YBa_2Cu_3O_{7-\delta}$ Thin Films for Fabrication of High-$T_{c}$ Superconducting Microwave Devices)

  • 강광용;한석길;김제하;이상렬
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 1995년도 춘계학술대회 논문집
    • /
    • pp.26-30
    • /
    • 1995
  • We describe the preparation and characterization of epitaxial thin films made with high temperature superconductor, $YBa_2Cu_3O_{7-\delta}$. The influence of processing parameters for YBCO thin films on MgO substrates in-situ grown by the pulsed laser deposition, including parameters of a laser beam energy, oxygen pressure, substrate temperature, target-substrate dis-tance is discussed. The characteristics of YBCO thin films were analyzed by using XRD, R-T measurement, AFM, crosssectional TEM, and RBS. For examples of microwave device applications, The fabrication and characterization of the microstrip lowpass filter and bandpass filter are also presented.

  • PDF

균질한 대면적 YBCO 박막증착을 위한 실린더형 할로우 캐소드 스퍼터링 증착법 (Cylindrical Hollow Cathode Sputtering Deposition for Uniform Large Area YBCO Thin Film)

  • 서정대;한석길;성건용;강광용
    • 한국초전도학회:학술대회논문집
    • /
    • 한국초전도학회 1999년도 High Temperature Superconductivity Vol.IX
    • /
    • pp.67-70
    • /
    • 1999
  • We have fabricated YBa$_2Cu_3O_{7-x}$ thin films by cylindrical hollow cathode sputtering. For 2 inch diameter of MgO (100) substrate, we obtained the zero resistance temperature in the range from 83 K to 86 K and thickness uniformity better than 5 % over the whole area. Also, the average deposition rate was 100nm/h which is higher than 10 times compare to conventional off-axis sputtering method. These results indicate that cylindrical hollow cathode sputtering seems to have unique capabilities for high rate and homogeneous deposition of large area thin film.

  • PDF

고온초전도 박막을 이용한 튜너블 이상기의 마이크로파 특성 (Microwave Properties of Tunable Phase Shifter Using High Temperature Superconducting Thin Film)

  • 곽민환;김영태;문승언;류한철;이수재;강광용
    • 한국초전도ㆍ저온공학회논문지
    • /
    • 제7권1호
    • /
    • pp.13-16
    • /
    • 2005
  • High temperature superconductor, $\YBa_2Cu_3O_{7-x}$ (YBCO) and ferroelectric, $\Ba_{0.1}Sr_{0.9}TiO_{3}$ (BST) multilayer thin films were deposited using on MgO(100) substrates pulsed laser deposition. The thin films exhibited only (001) peaks of YBCO and 1357 The HTS thin films demonstrated excellent zero resistance temperature of 92.5 K. We designed and fabricated HTS ferroelectric phase shifter using high frequency system simulator and standard photolithography method, respectively The HTS phase shifter shows a low insertion loss (2.97 dB) and large phase change ($\162^{circ}$) with 40 V do bias at 10 GHz. The HTS phase shifter shows 54 of figure of merit. These results can be applicable to phased anay antenna system for satellite communication services.

펄스 레이저 증착법에 의한 YBCO 박막증착과 이중모드 공진기의 제작 (Fabrication of Novel Dual Mode Resonator Using Superconducting Thin Film Grown by Pulsed Laser Deposition)

  • 박주형;이상렬;안달
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 1998년도 하계학술대회 논문집 D
    • /
    • pp.1546-1548
    • /
    • 1998
  • Dual mode ring resonators(DMRR) have been fabricated using laser ablated $YBa_2Cu_3O_{7-x}$ superconducting thin films. The transition temperature of YBCO thin films were 85 - 88 K and the film thicknesses were about 5,000 $\AA$. Dual mode ring resonators were patterned by standard photolithography process and wet-etching. Then two-layer metal thin films (Ti/Ag) have been deposited for the ground plane on the back side of substrate by e-beam and thermal evaporation. The input/output feedline angles of each resonator were $60^{\circ}$, $100^{\circ}$, $180^{\circ}$. A network analyzer was used for testing the performance of the resonators in the frequency range of 6-13 GHz at 77 K.

  • PDF

PLD법에 의한 YBCO Coated Conductor를 위한 다층 산화물 박막의 증착 조건 연구 (Study on deposition condition of multi-layer oxide buffer by PLD for YBCO Coated Conductor)

  • 신기철;고락길;박유미;정준기;최수정;;송규정;하홍수;김호섭
    • 한국초전도저온공학회:학술대회논문집
    • /
    • 한국초전도저온공학회 2003년도 추계학술대회 논문집
    • /
    • pp.153-156
    • /
    • 2003
  • The multi-layer oxide buffer layer for the coated conductor was deposited on biaxially textured Ni substrates using pulsed laser deposition. Oxygen partial pressure, 4%$H_2$/Ar partial pressure, and deposition temperature were deposition variables investigated to find the optimum deposition conditions. $Y_2$O$_3$seed layer was deposited epitaxially on metal substrate. The full buffer architecture of $Y_2$O$_3$/YSZ/CeO$_2$was successfully prepared on metal substrate.

  • PDF

고온초전도 박막을 이용한 두 고리형 공진소자의 고주파 특성 (Microwave performance of High Tc Superconducting Double Ring Resonator)

  • 송승용;이조용;최선웅;송기영
    • 한국재료학회지
    • /
    • 제7권5호
    • /
    • pp.431-433
    • /
    • 1997
  • We investigated a double ring resonator(DRR)device to improve the resonating Q value of a superconductor resonator. To make a DRR device, we made a large area YBCO film on a MgO substrate by pulsed laser deposition(PLD). Thetransition temperature was 88 K and the film was uniformly deposited. We also deposited 500$\AA$SrTiO$_{3}$on the YBCO thin film to protect the superconducting properties from degradation. The loaded Q value was measured as 50000 from simulation and as 2000 from experiment near 10GHz at 77K.

  • PDF

션트리액터에 의한 박막형 초전도 한류기의 퀜치 특성 (Quench Properties of a Superconducting Fault Current Limiter Using YBCO Films by Shunt Reactors)

  • 남긍현;조용선;이나영;박형민;최효상;한병성
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 2005년도 제36회 하계학술대회 논문집 B
    • /
    • pp.1219-1221
    • /
    • 2005
  • We improved quench properties of a superconducting fault current limiter(SFCL) components based on YBCO thin films. This consists of three components with nearly identical properties and one with slightly difference properties. The units were connected in series and first of parallel to increase the current and voltage ratings. It have caused significantly imbalanced power distribution. The imbalance remarkably improved by connecting a shunt reactor to the SFCL component in parallel.

  • PDF