• Title/Summary/Keyword: XeCl laser

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Measurements of Saturation Energy Denity and Small Signal Gain Coefficient Dependent on the Active Gas Pressure in XeCl Laser Amplifier (XeCl 레이저 증폭기의 활성기체 압력에 따른 포화 에너지 밀도와 소신호 이득계수 측정)

  • 김규옥;김용평
    • Korean Journal of Optics and Photonics
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    • v.5 no.4
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    • pp.457-460
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    • 1994
  • Dependence of saturation energy density and small signal gain coefficient on the active gas pressure in XeCl laser amplifier has been investigated. The saturation energy density was increased almost linearly as 1.3, 1.45, 2.0, and $2.3mJ/\textrm{cm}^2$ when the pressure of Xe and He were 30 and 2000 mb, and the pressure of HC] was varied as 34, 52, 73, and 92 mb. Whereas the small signal gain coefficient was measured to be 6.5, 7.5, 7.0, 7.0 %/cm, which shows that the small signal gain did not varies not so much.o much.

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Output Ccharacteristics of XeCl Excimer Laser Excited by Transeverse-Electron-Beam (횡방향 전자빔여기 XeCl 엑시머 레이저의 출력특성)

  • 류한용;이주희;김용평
    • Korean Journal of Optics and Photonics
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    • v.5 no.3
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    • pp.386-393
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    • 1994
  • We have investigated output characteristics of XeCI excimer laser excited by transeverse electronbeam. We used e-beam output of 880 kV, 21 kA (70 ns, FWHM) and controlled current density of e-beam by pulsed magnetic coil (4.7 kG) which was fabricated around an e-beam diode (A-K gap is 21 mm) and laser chamber. We have obtained 35 J (4 atm) of e-beam deposition energy injected into laser media. The deposition energy was converted from an exposure area of Radcolor film and rising pressure of gas media which is measured by pressure jump method. The excited volume of $320cm^{3}$ was calculated. The maximum efficiency of 1.7% was obtained with the mixing ratio of HCllXe/Ar==0.2/ 6.3/93.5% and total pressure of 3 atm. Also laser output energy and specific energy were obtained 0.52 J and 1.7 J/I, respectively. For the analysis of experimental results we have developed computer simulation code. From the good agreements with the results of experiment and simulation we could theoretically explain the XeCI* formation channel. relaxation channel, and absorption channel of 308 nm.308 nm.

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Characterization of PECVD and LPCVD a-Si films crystallized by excimer laser (엑시머 레이저를 이용하여 결정화한 PECVD 및 LPCVD 비정질 실리콘 박막의 특성 분석)

  • 최홍석;이성규;장근호;전명철;한민구
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.33A no.6
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    • pp.172-177
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    • 1996
  • We have characterized XeCl excimer-laser-induced crystallization of thin amorphous silicon films deposited by PECVD (${\alpha}$-Si:H) and LPCVD (${\alpha}$-Si). The electrical properties, surface roughness and crystallinity of crystallized thin films have been measured. The dc conductivities, crystallinity andsurface roughness of the films increased as the laser energy density and shot density were increased. The properties of laser annealed films deposited by LPCVD were better than those of thin films deposite by PECVD. We have also found that the multiple shots with relative low energy density were more benifical to the improsvement of surface roughness than the single shot with high energy density preserving the crystallinity.

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UV ultra-short laser pulse generation and amplification (UV 극초단 레이저 펄스의 발생과 증폭)

  • 이영우
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2004.05b
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    • pp.324-326
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    • 2004
  • We have obtained ultra-short pulses with a wavelength of 616 nm from a Distributed Feedback Dye Laser pumped by excimer laser. Using the second harmonic generation, we obtained ultra-short pulse at 308nm in ultraviolet region and also performed amplification in 3 stages of XeCl amplifiers.

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Fabrication and Output Characteristics of Compact Capacitor Transfer XeCl Laser (용량이행영 소형 XeCl레이저 제작 및 출력특성)

  • 김동환
    • Korean Journal of Optics and Photonics
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    • v.4 no.1
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    • pp.57-65
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    • 1993
  • Small XeCl laser of charge transfer discharge excitation was fabricated and output charateristics were investigated according to gas mixture ratio. Beam cross section of 2.7cm${\times}$1.5cm was obtained by constructing excimer laser which preionization is operated automatically and which has chang profile electrode. According to the component gas mixture ratio, the condition of maximum output energy, efficiency were investigated. The maximum energy, efficiency and specific energy were obtained 230 mJ, 1.6% and 1.1 J/l, respectively. The long pulse effect is observed by constructing low peaking to main capacitance ratio of 1:3.

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Output Characteristics of 2-wavelength Resonator Dye Laser Pumped by XeCl Excimer Laser (XeCl 엑시머레이저 펌핑 쌍공진기형 색소레이저의 출력 특성)

  • 이용우
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2003.10a
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    • pp.434-438
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    • 2003
  • XeCl 엑시머 레이저로 펌핑되는 쌍공진기형 색소레이저와 2단 증폭시스템을 개발하여 원격계측 시스템에 적합한 두 개의 파장을 동시 또는 순차적으로 출력하였다. 개발된 쌍공진기는 1200 g/mm의 회절격자를 갖는 grazing-incidence 방법에서 제 1차 및 제 2차 회절차수를 이용하여 구성되었다. 출력특성은 스펙트럼 선폭이 10 pm이하이고, 펌프 에너지에 대하 전체효율은 6% 이상이다. 또한, 파장가변 영역은 제 1차 및 제 2차의 회절차수에 대해 각각 434-470 nm, 436-468 nm 이며, 2단의 증폭기의 증폭이득은 37dB, 추출효율은 9%이다. 개발된 레이저 증폭시스템에서 Coumarine-450의 색소로 발진하고, 이의 출력 6 mJ을 원격계측시스템에 적용하여 수원상공의 NO$_2$의 가스농도분포를 측정하였다. 이 결과 개발된 색소레이저 시스템은 원격계측 시스템의 광원으로 매우 적합함을 확인하였다.

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Pulse Stretching Effect in XeCl Excimer Laser (XeCl 엑시머 레이저에서의 Pulse Stretching 효과)

  • Chu, Hong;Kim, Dong-Hwan;Lee, Soo-Man;John, Young-Min;Choi, Sang-Sam;Park, Dae-Yoon
    • Korean Journal of Optics and Photonics
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    • v.4 no.4
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    • pp.447-451
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    • 1993
  • Long pulse XeCl excimer laser with 150 ns (FWHM) pulse duration is developed using a simple capacitor-charge transfer circuit. We measured the laser pulse width varying the gas mixture ratio and capacitance ratio, which dominantly affect the pulse width. In this way we can easily stretch the pulse width from short pulse to long pulse. The pulse width was stretched by 120 ns as the partial pressure of HC1 and Xe gas was reduced under constant gas mixture ratio ([Xe]/[HCl]= 15), and by varying the capacitance ratio (Cm/Cp) under fixed pressure, the pulse width was stretched by 60 ns.

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Wavelength tunability of XeCl laser pumped double-resonator dye laser for DIAL (DIAL용 XeCl 레이저펌핑 쌍공진기색소레이저의 파장가변특성)

  • 이용우;이주희
    • Korean Journal of Optics and Photonics
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    • v.7 no.3
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    • pp.238-243
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    • 1996
  • We have developed XeCl laser pumped double-resonator Dye laser and two-stage amplifier system, and generated simultaneously of alternatively two wavelengths suitable in DIAL system. The developed double-resonator is composed of 1st and 2nd diffraction orders on light incidence angle in grazing-incidence grating method with 1200 g/mm. We have obtained spectral linewidth below 10 pm and the total efficiency dependent on pump energy over 6%. The tuning ranges dependent on 1st and 2nd diffraction orders are 434~470 nm and 436~468 nm, respectively. The amplification gain and rine-450 dye laser by using the double-resonator laser system and measured the distribution of $NO_2$ concentration over Suwon as the result of transmission of laser output of 6 mJ in this DIAL system. Consequently, we have confirmed that the developed dye laser system is very useful as the tunable source for DIAL.

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Development and Operation Characteristics of XeCl Excimer Laser (방전여기 XeCl 엑시머레이저의 제작 및 동작특성)

  • Jin, Yun-Sik;Lee, Hong-Sik;Kim, Hee-Je;Rho, Young-Soo;Kim, Youn-Taeg
    • Proceedings of the KIEE Conference
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    • 1993.11a
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    • pp.268-271
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    • 1993
  • Discharge pumped high power excimer laser is a very useful light source of ultraviolet region. In this paper. the design and operation characteristics of UV pre-ionized discharge pumped XeCl laser are discussed. Maximum output power of 890mJ at the efficiency of 1.4% was achieved with 35kV charging voltage, 3.4atm of total pressure and 10pps of pulse repetition rate. Optimum HCl pressure is considered to be between 2.5 and 3.5torr.

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