• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.186-189
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• 2001

In a precise control system, the Lu-Gre friction model has often been used to describe the nonlinear friction. For the XY table system with this friction model, we identified the friction parameters and designed nonlinear observer. The nonlinear friction effects could be removed within appropriate position tracking errors and control inputs through experiments. Also, we designed the nonmodel-based SMC system to compensate the nonlinear friction. Through experiments, it is shown that this method has the similar performance compared with the nonlinear observer system and is useful when friction parameters are hard to identify except the problem of input chattering.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.6
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• pp.51-61
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• 2002

A tracking control scheme on the XY ball-screw drive system in the presence of nonlinear dynamic friction is proposed. A nonlinear dynamic friction is regarded as the Lund-Grenoble friction model to compensate effects of friction. The conventional VSC method that often has been used as a non-model-based friction controller has poor tracking performance in high-precision position tracking application since it cannot compensate the friction effect below a certain precision level completely. Thus to improve the precise position tracking performance, we propose the integral type VSC method combined with the friction-model-based observer. Then this control scheme has the high precise tracking performance compared with the non-model-baked VSC method and the PID control method with a similar observer. This fact is shown through the experiment on the XY ball-screw drive system with the nonlinear dynamic friction.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.5
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• pp.589-597
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• 2011

In this paper, optimal tuning of a cross-coupled controller linked with the feedforward controller and the disturbance observer is studied to improve contouring and tracking accuracy as well as robustness against disturbance. Previously developed integrated design and optimal tuning methods are applied for developing the robust tuning method. Strict mathematical modeling of the multivariable system is formulated as a state-space equation. Identification processes of the servomechanism are conducted for mechanical servo models. An optimal tuning problem to minimize both the contour error and settling time is formulated as a nonlinear constrained optimization problem including the relevant controller parameters of the servo control system. Constraints such as relative stability, robust stability and overshoot, etc. are considered for the optimization. To verify the effectiveness of the proposed optimal tuning procedure, linear and circular motion experiments are performed on the xy-table. Experimental results confirm the control performance and robustness despite the variation of parameters of the mechanical subsystems.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.21 no.11
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• pp.554-560
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• 2020

In the manufacturing process of flat panel displays, a high-precision planar motion stage is used to position a specimen. Stages of this type typically use frictionless linear motors and air bearings, and laser interferometers. Real-time dynamic correction of the yaw motion error is very important because the inevitable yaw motion error of the stage means a change in the specimen orientation. Gantry control is generally used to compensate for yaw motion errors. Flexure units that allow rotational motion are applied to the stage to apply this method to a stage using an air-bearing guide. This paper proposes a method to improve the constant speed motion performance of a H-type XY stage equipped with air bearing and flexure units. When applying the gantry control to the stage, including the flexure units, the cause of the mutual ripple generated from the linear motors is analyzed, and adaptive learning control is proposed to compensate for the mutual ripple. A simulation was performed to verify the proposed method. The speed ripple was reduced to approximately the 22 % level. The ripple reduction was verified by simulating the stage state where yaw motion error occurs.