• Title/Summary/Keyword: XPS(X-ray Photoelectron Spectroscopy)

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Surface Analysis of Copper-Tin Thin Films Synthesized by rf Magnetron Co-sputtering

  • Gang, Yu-Jin;Park, Ju-Yeon;Gang, Yong-Cheol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.272.2-272.2
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    • 2016
  • Copper-Tin (CuSn) thin films were synthsized by rf magnetron co-sputtering method with pure Cu and Sn metal targets with various rf powers and sputtering times. The obtained CuSn thin films were characterized by a surface profiler (alpha step), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), X-ray induced Auger electron spectroscopy (XAES), and contact angle measurement. The deposition rates were calculated by the thickness of CuSn thin films and sputtering times. We observed hexagonal Cu20Sn6 and cubic Cu39Sn11 phases from the films by XRD measurement. From the survey XPS spectra, the Cu and Sn main peaks were observed. Therefore, we could conclude CuSn thin films were successfully fabricated on the substrate in this study. The changes of oxidation states and chemical environment of the films were investigated with high resolution XPS spectra in the regions of Cu 2p, Cu LMM, and Sn 3d. Surface free energy (SFE) and wettability of the CuSn thin films were studied with distilled water (DW) and ethylene glycol (EG) using the contact angle measurement. The total SFE of CuSn thin films decreased as rf power on Cu target increased. The contribution to the total SFE of dispersive SFE was relatively superior to polar SFE.

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Deposition of Polytetrafluoroethylene Thin Films by IR-pulsed Laser Ablation (Nd:YAG 레이저에 의한 폴리테트라플루오르에틸렌 박막 증착)

  • Park Hoon;Seo Yu-Suk;Hong Jin-Soo;Chae Hee-Baik
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.6 no.1
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    • pp.58-63
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    • 2005
  • PTFE (polytetrafluoroethylene) thin films were prepared from the pellets of the graphite doped PTFE via pulsed laser ablation with 1064 nm Nd:YAG laser. The graphite powder converts the absorbed photon energy into thermal energy which is transmitted to nearby PTFE. The PTFE is decomposed by thermal process. The deposited films were transparent and crystalline. SEM (scanning electron microscopy) and AFM (atomic force microscopy) analyses indicated that the film surface morphology changed to fibrous structure with increasing thickness. The fluorine to carbon ratios of the film were 1.7 and molecular axis was parallel with (100) Si-wafer substrate. These results obtained by XPS (X-ray photoelectron spectroscopy), FTIR (fourier transform infrared spectroscopy) and XRD (X-ray diffraction).

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Preparation of Aminosiloxane-grafted Poly(imidesiloxane) Copolymer and its Morphology and Adhesive Properties in Film (아미노실록산이 그래프팅된 폴리(이미드실록산) 공중합체 제조와 필름 모폴로지 및 점착 특성 연구)

  • Lee, Ji Mok;Kwon, Eunjin;Lee, Sunyoung;Jung, Hyun Min
    • Polymer(Korea)
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    • v.37 no.4
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    • pp.547-552
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    • 2013
  • Polyimide (PI) containing carboxyl functional group was prepared and reacted with diaminosiloxane during high temperature film casting. The morphology of resulting film was observed by using transmission electron microscopy (TEM) and energy dispersive X-ray spectroscopy (EDX), which revealed that globular 100 nm-sized PI domains and continuous polysiloxane phase were formed. X-ray photoelectron spectroscopy (XPS) study indicated that air-film interface mainly consisted of polysiloxane blocks. Poly(imidesiloxane) thin layer was thermostable until $400^{\circ}C$ and its pressure- sensitive adhesive property was retained up to $300^{\circ}C$. The comparative experiments revealed that grafting between carboxyl groups of polyimide and aminosiloxane was crucial for formation of microdomain structure and pressure-sensitive adhesive property.

Top-Emitting Organic Light-Emitting Diodes Based on the Interfacial Electronic Structures of Bis(8-Quinolinolato)Aluminum (III)/Barium

  • Im, Jong-Tae;Yeom, Geun-Yeong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2007.04a
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    • pp.5-6
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    • 2007
  • 반투명 전도성 음극 (semi-transparent conducting cathode)인 Ba (x nm)/Au (20 nm)/ITO (100 nm)을 이용하여 전면발광 유기전계 발광 소자 (top-emitting organic light-emitting didodes, TEOLEDs)를 제작했다. Ba과 bis(8-quinolinolato)aluminum (III) ($Alq_3$) 계면의 전자구조는 엑스선 광전자 분광법 (X-ray photoelectron spectroscopy, XPS), 자외선 광전자 분광법 (ultraviolet photoelectron spectroscopy, UPS) 및 가까운 끝머리 엑스선 흡수 미세구조 (near-edge x-ray absorption fine structure, NEXAFS) 스펙트럼의 광 방출 특성을 통하여 조사되었다. $Alq_3$/Ba 계면 특성에 있어서 XPS와 NEXAFS 특성에 의하면, $Alq_3$ (10.0 nm) 위에 Ba이 연속적으로 증착됨에 따라 Ba으로부터 $Alq_3$로의 전자전달 (electron charge transfer) 특성은 꾸준희 증가된다. 그러나 Ba의 두께가 1.0 nm 이상 초과되면 Ba의 전자전달에 기인한 반응성때문에 $Alq_3$의 분자구조가 해리된다. 한편, 제작된 TEOLEDE의 전류-전압-휘도 곡선의 경우에서도 바륨의 증착 두께가 1.0 nm일 때 가장 우수한 구동특성을 나타냈다.

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Optical Absorption and X-ray Photoelectron Spectra of Zinc Phosphate Glasses with Cu Nano-sized Metallic Particles (Cu 금속미립자를 함유하는 Zinc Phosphate 유리의 광흡수와 XPS 스펙트럼)

  • 강은태;박용배
    • Journal of the Korean Ceramic Society
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    • v.37 no.9
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    • pp.900-908
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    • 2000
  • 일반적인 유리용융과 열처리법을 이용하여 많은 양의 금속구리 미립자가 분산된 Zinc Phosphate 유리를 제조하였다. 금속산화물로는 Cu$_2$O를, 환원제로는 SnO를 사용하였다. XRD와 전자회절로부터 열처리에 의해 금속구리의 결정상이 석출됨을 알 수 있었고, TEM에 의해 석출상의 크기는 수~20nm 정도임을 알 수 있었다. 또한 570nm에서의 광흡수 피크로부터도 금속구리의 석출을 확인할 수 있었다. 석출입자의 크기와 흡광은 석출을 위한 열처리 온도와 시간이 증가함에 따라 증가하였다. XPS 스펙트럼으로는 구리의 산화상태 중 Cu$^{2+}$ 이온의 상태만을 분명히 할 수 있었다. 매질유리의 BO/NBO의 비는 열처리 전후 크게 변화가 없었으며, 열처리 후 Cu$^{2+}$ 이온이 다소 감소되는 경향을 보였다.

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Study on Etch Characteristics of BTO Thin Film by using $Cl_2$/Ar Inductively Coupled Plasma ($Cl_2$/Ar ICP 플라즈마를 이용한 BTO박막의 식각 특성 연구)

  • Kim, Man-Su;Min, Nam-Ki;Lee, Hyun-Woo;Choi, Bok-Gil;Kwon, Kwang-Ho
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.177-178
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    • 2007
  • 본 연구에서는 MIM (Metal-Insulator-Metal) capacitor의 유전 물질로 사용되는 $Ba_xTi_yO_z$(BTO) 박막의 식각 특성을 고찰하였다. $Cl_2$/Ar 혼합가스를 이용하여 Inductively Coupled Plasma(ICP)에서 BTO 박막을 식각하였고, 식각된 BTO박막의 표면을 X-ray photoelectron spectroscopy(XPS) 분석하였다. BTO박막의 식각 속도는 Ar이 80%인 식각 조건에서 31.7nm/min의 식각 속도를 추출하였고, 동시에 Pt박막에 대한 높은 선택비를 얻었다. X-ray photoelectron spectroscopy (XPS) 분석 결과로부터 표면 반응을 조사하여, 식각 기구를 고찰하였다.

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Characteristics of Organic Solar Cell having an Electron Transport Layer co-Deposited with ZnO Metal Oxide and Graphene using the Cyclic Voltammetry Method (순환전류법을 이용해 ZnO 금속산화물과 Graphene을 동시에 제막한 전자수송층을 갖는 유기태양전지의 특성)

  • Ahn, Joonsub;Han, Eunmi
    • Journal of the Microelectronics and Packaging Society
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    • v.29 no.1
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    • pp.71-75
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    • 2022
  • Graphene oxide was stirred with a ZnCl2:NaCl electrolyte and electrochemically coated by cyclic voltammetry to simplify the electron transpfer layer film forming process for organic solar cells and to fabricate an organic solar cell having it. The device structure is FTO/ZnO:graphene/P3HT:PCBM/PEDOT:PSS/Ag. Morphology and chemical properties of ETL were confirmed by scanning electron microscopy(SEM), X-ray photoelectron spectroscopy (XPS), and Raman spectroscopy. As a result of XPS measurement, ZnO metal oxide and carbon bonding were simultaneously confirmed, and ZnO and graphene peaks were confirmed by Raman spectroscopy. The electrical characteristics of the manufactured solar cell were specified with a solar simulator, and the ETL device coated twice at a rate of 0.05 V/s showed the highest photoelectric conversion efficiency of 1.94%.

Investigation of Liquid Crystal Alignment on ion beam exposed polystyrene surface (이온빔을 조사한 폴리스타일렌 기판에서의 액정의 배향특성)

  • Hwang, Hyun Suk;Lee, Jong-Deok;Rho, Jungkyu;Han, Jeong-Min
    • Journal of Satellite, Information and Communications
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    • v.9 no.1
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    • pp.33-37
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    • 2014
  • This paper introduces homogeneous liquid crystal (LC) orientations on chemically modulated polystyrene (PS) surfaces using various ion beam (IB) exposure time. Transparent PS was replaced with conventional polyimide material. As a non-contact process, IB bombardment process induced LC orientation in the direction parallel to the IB process. Through x-ray photoelectron spectroscopy, it was shown that the chemical compositional changes of the IB-irradiated PS surfaces were determined as a function of IB exposure time.Using this analysis, the optimal IB bombardment condition was determined at IB exposure time of up to 15 s. Moreover, thermal stability on IB-irradiated PS surfaces were carried out which showed that a relatively high IB exposure time induced a thermally stable LC alignment property.

X-Ray Photoelectron Spectroscopy Studies of Pd Supported MgO/Mg (X-선 광전자분광법을 이용한 MgO/Mg 표면에 증착된 Pd의 분석)

  • Tai, Wei-Sheng;Seo, Hyun-Ook;Kim, Kwang-Dae;Kim, Young-Dok
    • Journal of the Korean Vacuum Society
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    • v.18 no.4
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    • pp.281-287
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    • 2009
  • Pd was deposited on magnesium-oxide-covered magnesium ribon substrate by metal thermal evaporation method in high vacuum. The electronic and chemical properties of Pd samples with different coverages were studied using in-situ X-ray Photoelctron Spectroscopy (XPS) and Field Emission Scanning Electron Microscopy (SEM). For relatively lower amounts of Pd deposited(< 1nm), separate Pd particles could be observed, whereas at higher Pd coverages, Pd thin films caused by agglomeration of Pd nanoparticles was found. The metal support interaction with Pd-support was observed. The Pd atoms on the metal oxide/metal interface were partially negative charged by charge transfer.

Antibacterial property and characterization of CuSn thin films deposited by RF magnetron co-sputtering method

  • Gang, Yu-Jin;Park, Ju-Yeon;Kim, Dong-U;Kim, Hak-Jun;Gang, Yong-Cheol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.360.2-360.2
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    • 2016
  • CuSn thin films were fabricated by rf magnetron co-sputtering method on the Si(100) substrate for evaluation of the antibacterial effect. The co-sputtering process was performed with different rf powers and sputtering times to regulate the thickness of the films and relative atomic ratio of Cu to Sn. The physicochemical properties of the CuSn thin films were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), X-ray induced Auger electron spectroscopy (XAES), Optical microscope (OM), 4-point probe, and antibacterial test. An antibacterial test was conducted with Escherichia coli (E. coli) and Staphylococcus aureus (S. aureus) as changing contact times between CuSn fillms and bacteria suspension. We compared to the crystalline structures of films before sterilization and after sterilization by XRD measurement. The changes of oxidation states of Cu and Sn and the chemical environment of films before and after antibacterial test were investigated with high resolution XPS spectra in the regions of Cu 2p, Cu LMM, and Sn 3d. After antibacterial test, the morphology of the films was checked with an OM images. The electrical properties of the CuSn films such as surface resistance and conductivity were measured by using 4-point probe.

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