• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.104-104
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• 2009

Critical dimensions has rapidly shrunk to increase the degree of integration and to reduce the power consumption. However, it is accompanied with several problems like direct tunneling through the gate insulator layer and the low conductivity characteristic of poly-silicon. To cover these faults, the study of new materials is urgently needed. Recently, high dielectric materials like $Al_2O_3$, $ZrO_2$ and $HfO_2$ are being studied for equivalent oxide thickness (EOT). However, poly-silicon gate is not compatible with high-k materials for gate-insulator. To integrate high-k gate dielectric materials in nano-scale devices, metal gate electrodes are expected to be used in the future. Currently, metal gate electrode materials like TiN, TaN, and WN are being widely studied for next-generation nano-scale devices. The TaN gate electrode for metal/high-k gate stack is compatible with high-k materials. According to this trend, the study about dry etching technology of the TaN film is needed. In this study, we investigated the etch mechanism of the TaN thin film in an inductively coupled plasma (ICP) system with $O_2/BCl_3/Ar$ gas chemistry. The etch rates and selectivities of TaN thin films were investigated in terms of the gas mixing ratio, the RF power, the DC-bias voltage, and the process pressure. The characteristics of the plasma were estimated using optical emission spectroscopy (OES). The surface reactions after etching were investigated using X-ray photoelectron spectroscopy (XPS) and auger electron spectroscopy (AES).

• 한국결정성장학회지
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• 제21권5호
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• pp.214-217
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• 2011

Fresnoite 결정화 유리는 최근 비선형 광학특성으로 인하여 널리 연구되어 지고 있다. 그러나, 이전 연구 결과를 통하여 투명결정화 유리의 화학 조성으로는 정량적으로 Fresnoite 구조에 유사한 조성을 조절하는 것에 한계가 있음을 확인 할 수 있다. 본 연구에서는 $K_2O-TiO_2-SiO_2$ glass의 제조한 후, 제조된 유리를 $Sr(NO_3)_2$ 용융염에 담지하여 모유리의 표면에 Fresnoite 결정을 형성시키는 방법으로 투명결정화 유리를 제조하고, 이 때 Sr 이온이 비선형광학효과에 미치는 영향을 살펴보았다. XRD를 통하여 담지 시간에 따른 결정상 변화와 열처리를 통한 결정상 변화를 관찰하였으며, FE-SEM을 사용하여 생성된 결정의 미세구조와 Nd : YAG laser를 사용하여 2차비선형특성의 유무를 관찰하였다.

• 센서학회지
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• 제16권2호
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• pp.159-164
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• 2007

Thin films of platinum were deposited on a $Al_{2}O_{3}/ONO(SiO_{2}-Si_{3}N_{4}-SiO_{2})/Si$-substrate with an 2-inch Pt(99.99 %) target at room temperature for 20, 30 and 60 min by DC magnetron sputtering, respectively X-ray diffract meter (XRD) was used to analyze the crystallanity of the thin films and field emission scanning electron microscopy (FE-SEM) was employed for the investigation on crystal growth. The densification and the grain growth of the sputtered films have a considerable effect on sputtering time and annealing temperatures. The resistance of the Pt thin films was decreased with increasing deposition time and sintering temperature. Pt micro heater thin film deposited for 60 min by DC magnetron sputtering on an $Al_{2}O_{3}$/ONO-Si substrate and annealed at $600^{\circ}C$ for 1 h in air is found to be a most suitable micro heater with a generation capacity of $350^{\circ}C$ temperature and 645 mW power at 5.0 V input voltage. Adherence of Pt thin film and $Al_{2}O_{3}$ substrate was also found excellent. This characteristic is in good agreement with the uniform densification and good crystallanity of the Pt film. Efforts are on progress to find the parameters further reduce the power consumption and the results will be presented as soon as possible.

• 한국레이저가공학회지
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• 제16권4호
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• pp.1-6
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• 2013

Femtosecond laser patterning of ITO on a touch screen panel with a shaped fs laser beam was investigated. A quasi flat-top beam was formed using a variable mask and a planoconvex lens. The spatial profile of the original Gaussian beam and the shaped beam were monitored by a CCD beam profiler. The laser patterned ITO film was examined using an optical microscope, Scanning Electron Microscope (SEM) with Energy Dispersive X-ray Spectroscopy (EDS), and Atomic Force Microscope (AFM). It turned out that the quality of the ITO pattern fabricated by a shaped beam is superior to that of the pattern without beam shaping in terms of debris generation, height of the craters, and homogeneity of the bottom. Optimum processing window was determined at the laser irradiance exhibiting 100% removal of Sn. The removal rate of In was measured to be 83%.

• Ocean and Polar Research
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• 제26권2호
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• pp.231-243
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• 2004

Sequential extraction was carried out on twenty two subsamples of three ferromanganese crusts from three seamounts (Lemkein, Lomilik, and Litakpooki) near the Marshall Islands in the western Pacific. The extraction was designed to fractionate Fe-Mn crust forming elements into low defined groups: (1) exchangeable and carbornate, (2) Mn-oxide, (3) Fe-oxyhyd.oxide, and (4) residual fraction. X-ray diffraction result shows that target material were well removed by each extraction step except for CFA in phosphatized crusts generation. According to chemical analysis of each leachate, most of elements in the Fe-Mn crusts are bound with two major phases. Mn, Ba, Co, Ni, Zn, (Fe, Sr, Cu, and V) are strongly bounded with Mn-oxide $({\delta}-MnO_2)$ phase, whereas Fe, Ti, Zr, Mo, Pb, Al, Cu,(V, P, and Zn) show chemical affinity with Fe-oxyhydroxide phase. This result indicates that significant amount of Al, Ti, and Zr can not be explained by detrital origin. Ca, Mg, K, and Sr mainly occur as exchangeable elements and/or carbonate phase. Outermost layer 1 and inner layer 2 which are both young crusts generations are similar in chemical speciations of elements. However, some of Fe-oxyhydroxide bounded elements (Pb, Y, Mo, Ba, Al, and V) in phosphatized innermost layer 3 are released during phosphatization and incorporated into phosphate (Pb, Y, Mo, and Ba) or Mn-oxide phase (Al and V). Our sequential extraction results reveal that chemical speciations of elements in the hydrogenetic crusts are more or less different from interelemental relationship calculated by statistical method based on bulk chemistry.

• Korean Chemical Engineering Research
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• 제56권3호
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• pp.349-355
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• 2018

$BaMnAl_{11}O_{19}$는 요소를 이용한 균일용액침전법으로 제조되었으며, X선 회절분석과 장방출 주사현미경으로 분석되었다. 침전제의 농도가 증가하면서 Al 종은 $Al(OH)_3$에서 AlOOH로 변화되었으며, 소성과정에서 $BaMnAl_{11}O_{19}$ 상으로 쉽게 변화하였다. 합성시간이 증가하면서 $BaMnAl_{11}O_{19}$ 상의 비율은 크게 증가하지 않는 반면 $BaAl_2O_4$ 상의 비율은 급격하게 증가하였다. 금속염 전구체의 반응속도는 Al, Ba, Mn 순으로 빨라, 침전제의 농도와 합성시간에 따라 $BaMnAl_{11}O_{19}$ 상의 비율이 달라진다. $BaAl_2O_4$와 $BaMnAl_{11}O_{19}$는 촉매 연소 성능을 향상시키고, $BaMnAl_{11}O_{19}$ 만이 CO 배출을 억제시키는 것을 확인하였다.

• 비파괴검사학회지
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• 제29권1호
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• pp.36-42
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• 2009

역공학의 한 방법으로 엑스선 전산 단층촬영 장치에서 획득한 삼차원 데이터를 CAD(computeraided design) 데이터로 변환하여 쾌속조형 모델을 제작할 수 있고, 또한 삼차원 가시화를 통해 피검사체의 오차를 확인하고 분석할 수 있는 알고리즘들에 대한 연구를 수행하였다. 연구 결과를 바탕으로 GUI(graphical user interface) 기반의 소프트웨어를 개발하였다. 개발한 소프트웨어의 검증을 위하여 산업 및 의료용 샘플들에 대한 전산 단층촬영 스캐닝을 수행하고 CAD 데이터 변환 및 컴퓨터 원용 결함진단 시뮬레이션을 수행하였다. 이를 통해 컴퓨터 원용 결함진단의 산업 및 의료분야 적용 가능성을 확인하였다.

• 한국멀티미디어학회논문지
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• 제12권3호
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• pp.383-396
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• 2009

뼈 나이 측정은 소아의 내분비계 관련 질병 진단을 위해 소아과에서 널리 사용되는 방법이다. 그러나 전문 인력이 부족하여 자동화된 측정 방법에 대한 꾸준한 요구가 있었다. 따라서 본 논문에서는 패턴 인식기법을 이용한 자동화된 뼈 나이 측정 알고리즘을 제안한다. 제안하는 알고리즘은 X-ray 영상에서 손가락뼈의 각 부분을 자동으로 분류하는 과정과 분류된 뼈 영상으로부터 정규화된 형상 모델을 추출하는 과정, 그리고 정규화된 형상 모델로부터 뼈 나이를 측정하는 과정으로 구성된다. 제안하는 알고리즘은 능동 형상 모델(Active Shape Model: ASM)을 이용하여 나이 측정에 사용되는 특정값 추출의 정확도를 향상시켰으며, 뼈 나이 분류를 위해 사용된 Support Vector Machine(SVM)의 입력으로 정규화된 형상 모델로부터 얻어진 각 뼈의 크기와 비율을 특징값으로 사용하였다. 성능 평가를 위해서 한양대학교 부속병원에서 제공한 영상에 대해 전문가가 평가한 나이와 제안한 알고리즘을 이용하여 측정된 나이를 통계적으로 비교 분석하였다. 실험을 통하여 본 논문에서 제안한 특징값과 알고리즘으로 뼈 나이를 진단한 결과, 전문가에 의한 결과와 평균 0.679살의 오차 이내의 뛰어난 뼈 나이 측정 성능을 보였다.

• 대한의생명과학회지
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• 제19권4호
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• pp.330-337
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• 2013

There are several methods currently being used to diagnose tuberculosis in patients, such as smear, PCR, tuberculosis culture and X-ray. For a proper medical treatment, antimicrobial susceptibility test and rapid drug susceptibility testing have been operated. Tuberculosis bacilli usually need 3~8 weeks of culture period because of delay in RNA synthesis and require 15~22 hours for generation. After a germ raises in culture, we initiated antimicrobial susceptibility test for a proper treatment. It has some difficulties to give a proper prescription for a tuberculosis patient because antimicrobial susceptibility test requires 4 weeks. To supplement this, we are practicing drug susceptibility testing which allow us to know the sensibility of RMP and INH after 2 or 3 days. But this is only possible when more than 2 positive germ. Therefore, we should practice rapid drug susceptibility testing with culture test. But if media is contaminated by other germs except Mycobacterium tuberculosis, it's hard to interpret result about culture test and to practice antimicrobial susceptibility test and rapid drug susceptibility testing. Because we have to practice again smear, culture test after extracting specimen from the patient, time is consumed and proper patient treatment is postponed. To address these problems and quick patient treatment, rapid drug susceptibility testing is practiced by using GenoType$^{(R)}$ MTDRplus method. As a result of this method we detected sensibility 10 and 7 cases and resistance 0 and 3 cases using RIM and INH respectively with other 1 case toward medicals out of the total 11 test. In conclusion rapid drug susceptibility testing can be used from the contaminated specimen after elimination of contaminated source from culture and proved that it can be practiced for rapid examination of a tuberculosis patient.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.489.2-489.2
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• 2014

The planar type flexible piezoelectric energy harvesters (PEH) based on PbZr0.52Ti0.48O3 (PZT) thin films on the flexible substrates are demonstrated to convert mechanical energy to electrical energy. The planar type energy harvesters have been realized, which have an electrode pair on the PZT thin films. The PZT thin films were deposited on double side polished sapphire substrates using conventional RF-magnetron sputtering. The PZT thin films on the sapphire substrates were transferred by PDMS stamp with laser lift-off (LLO) process. KrF excimer laser (wavelength: 248nm) were used for the LLO process. The PDMS stamp was attached to the top of the PZT thin films and the excimer laser induced onto back side of the sapphire substrate to detach the thin films. The detached thin films on the PDMS stamp transferred to adhesive layer coated on the flexible polyimide substrate. Structural properties of the PZT thin films were characterized using X-ray diffraction (XRD) and scanning electron microscopy (SEM). To measure piezoelectric power generation characteristics, Au/Cr inter digital electrode (IDE) was formed on the PZT thin films using the e-beam evaporation. The ferroelectric and piezoelectric properties were measured by a ferroelectric test system (Precision Premier-II) and piezoelectric force microscopy (PFM), respectively. The output signals of the flexible PEHs were evaluated by electrometer (6517A, Keithley). In the result, the transferred PZT thin films showed the ferroelectric and piezoelectric characteristics without electrical degradation and the fabricated flexible PEHs generated an AC-type output power electrical energy during periodically bending and releasing motion. We expect that the flexible PEHs based on laser transferred PZT thin film is able to be applied on self-powered electronic devices in wireless sensor networks technologies. Also, it has a lot of potential for high performance flexible piezoelectric energy harvester.