Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
권호 표지
DOI QR코드

DOI QR Code

The characteristics of Pt thin films prepared by DC magnetron sputter

DC Magnetron Sputter로 제조된 Pt 박막의 특성

  • Na, Dong-Myong (Department of Materials science and Engineering, Chosun University) ;
  • Kim, Young-Bok (Department of Materials science and Engineering, Chosun University) ;
  • Park, Jin-Seong (Department of Materials science and Engineering, Chosun University)
  • 나동명 (조선대학교 첨단소재공학과) ;
  • 김영복 (조선대학교 첨단소재공학과) ;
  • 박진성 (조선대학교 첨단소재공학과)
  • Published : 2007.03.31
Download PDF
⟨ Previous Next ⟩

Abstract

Thin films of platinum were deposited on a $Al_{2}O_{3}/ONO(SiO_{2}-Si_{3}N_{4}-SiO_{2})/Si$-substrate with an 2-inch Pt(99.99 %) target at room temperature for 20, 30 and 60 min by DC magnetron sputtering, respectively X-ray diffract meter (XRD) was used to analyze the crystallanity of the thin films and field emission scanning electron microscopy (FE-SEM) was employed for the investigation on crystal growth. The densification and the grain growth of the sputtered films have a considerable effect on sputtering time and annealing temperatures. The resistance of the Pt thin films was decreased with increasing deposition time and sintering temperature. Pt micro heater thin film deposited for 60 min by DC magnetron sputtering on an $Al_{2}O_{3}$/ONO-Si substrate and annealed at $600^{\circ}C$ for 1 h in air is found to be a most suitable micro heater with a generation capacity of $350^{\circ}C$ temperature and 645 mW power at 5.0 V input voltage. Adherence of Pt thin film and $Al_{2}O_{3}$ substrate was also found excellent. This characteristic is in good agreement with the uniform densification and good crystallanity of the Pt film. Efforts are on progress to find the parameters further reduce the power consumption and the results will be presented as soon as possible.

Keywords

References

  1. A. Glaniger, A. Jachimowicz, F. Kohl, R., Chabicovsky, and G. Urban, 'Wide range semiconductor flow sensors?', Sensors & Actuators A, vol. A85, pp. 139-146, 2000
  2. G. Bedo, H. Fannasch, and R. Muller, 'A silicon flow sensor for gases and liquids using AC measurements?', Sensors & Actuators, vol. A85, pp. 124-132, 2000
  3. S. Astie, A. M. Gue, E. Scheid, and J. P. Guillemet, 'Design of a low power $SnO_2$ gas sensor integrated on silicon oxynitride membrane', Sensors & Actuators B, vol. 67, pp. 84-88, 2000 https://doi.org/10.1016/S0925-4005(00)00403-2
  4. M. A. Gajda and H. Ahmed, 'Applications of thermal silicon sensors on membranes', Sensors & Actuators A, vol. 49, pp. 1-9, 1995 https://doi.org/10.1016/0924-4247(96)80025-2
  5. Li Qiu, Obermeier E., and Schubert, 'A micros ens or with integrated heat sink and flow guide for gas sensing application', Trans. Eurosensor. IX, vol. 130-C2, pp. 520-523, 1995
  6. U. Dibbern, 'A substrate for thin-film gas sensors in microelectronic technology', Sensors & Actuator B, vol. 2 pp. 63-70, 1990 https://doi.org/10.1016/0925-4005(90)80010-W
  7. Mutschall, D. Scheibe and C. Obermeier, E., 'Basic micro module for chemical with on chip heater and buried sensor structure', Trans. Eurosensor. IX, vol. 57-PA6, pp. 139-143, 1994
  8. W.-Y. Chung, C.-H. Shim, D.-D. Lee, and S.-D. Choi, 'Tin oxide microsensor for LPG monitoring', Sensor & Actuators B, vol. 20, pp. 139-143, 1994 https://doi.org/10.1016/0925-4005(94)01173-7
  9. 정귀상, 노상수, 최영규, 김진한, '알루미늄산화막을 매개층으로 이용한 백금 미세 발열체의 특성', 센서학회지, 제6권, 제5호, pp. 400-406, 1997
  10. 공대영, 은덕수, 배영호, 이종현, '직접 접함에 의한 $Al_2O_3$ SOl 구조 제작', 센서학회지, 제14권, 제3호, pp. 206-210, 2005 https://doi.org/10.5369/JSST.2005.14.3.206