• Title/Summary/Keyword: X-ray fluorescence analyzer

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Improvement of detection sensitivity of impurities on Si wafer surface using synchrotron radiation (방사광을 이용한 Si 웨이퍼 표면불순물 검출감도 향상)

  • 김흥락;김광일;강성건;김동수;윤화식;류근걸;김영주
    • Journal of the Korean Vacuum Society
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    • v.8 no.1
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    • pp.13-19
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    • 1999
  • Total reflection X-ray fluorescence spectroscopy using synchrotron radiation source called as TRSFA was explored to achieve high sensitivities to impurity metals on Si wafer surface. It consists of monochromating part to select a specific wavelength, slit part to shield direct beam and to control monochromated beam, and main chamber to dectect fluorescent X-ray counts of impurities on si wafer. Monochromated X-ray of 10.90 KeV was selected and the optimum total reflection condition on silicon wafer was obtained through tuning the dead time and fluorescent X-ray count of Si and Fe. TRSFA system could increase the sensitivity as high as 50 times in comparision with TRXFA using normal X-ray source. But the trend was varied since the surface conditions of Si wafers and, therefore, the reflectivities were different. Furthemore, there seems to be a promising path to reaching a detection limit useful to the next generation metal impurities control, because Fe impurity below to the $5\times10^{9}\textrm{atomas/cm}^2$ can be detectable through the developed TRSFA system.

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Physical and γ-ray shielding properties of Vietnam's natural stones: An extensive experimental and theoretical study

  • Ta Van Thuong;O.L. Tashlykov;A.M. Shironina;I.P. Voronin;E.V. Kuvshinova;D.O. Pyltsova;E.I. Nazarov;K.A. Mahmoud
    • Nuclear Engineering and Technology
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    • v.56 no.5
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    • pp.1932-1940
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    • 2024
  • The current work deals with investigation of the gamma ray shielding properties for various natural stones from Vietnam to be applied in the radiation shielding applications. The physical and chemical properties affecting the γ-ray shielding performance were examined. The MH-300A density meter was utilized to measure the density (ρ, g/cm3) of stone samples, as well as the chemical composition of Vietnamese natural stones was measured using the X-ray fluorescence analyzer (Olympus X-5000). The study shows that the increase in Fe + Ca concentrations within the stone samples increases their density (from 2.48 to 2.86 g/cm3) accompanied with a reduction in the porosity (Φ, %) (from 8.23 to 0.15%) and water absorption (K, %) (from 3.42 to 0.05%) factors. Additionally, the increase in Fe + Ca concentrations increases the linear attenuation coefficient (μ, cm-1) of the studied stones, where the Vietnamese marble stone (M 3.1) with the highest Fe + Ca concentration (65.97 wt%) has the highest linear attenuation coefficient which varied between 3.781 and 0.155 cm-1 with raising the gamma ray energy between 0.040 and 1.332 MeV.

Comparative study of Pb (II) adsorption from water on used cardboard and powdered activated carbon

  • Benhafsa, Fouad. Mekhalef;Bouchama, Abdelghani.;Chadli, Aicha.;Tadjer, Belgacem.;Addad, Djelloul.
    • Membrane and Water Treatment
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    • v.13 no.2
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    • pp.73-83
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    • 2022
  • In the present study, we compared the adsorption capacity of Pb (II) from contaminated water of used cardboard (UC) and a commercial powdered activated carbon (PAC), the latter has been characterized by different techniques, namely X-ray diffraction (XRD), scanning electron microscopy with energy dispersive spectroscopy (SEM/EDS), wavelength dispersion x-ray fluorescence (WDXRF), infrared spectroscopy (IR) and surface area B.E.T analyzer. The effect of various parameters, such as the pH, the contact time, the amount of adsorbent, and the temperature on the adsorption of Pb (II) on both materials was investigated. The Pb (II) adsorptions are perfectly described by a pseudo-second-order model, while the intraparticle diffusion is a decisive step after the first minutes of contact. The fit to the Langmuir and Redlich-Peterson models seems perfect for these adsorption reactions. (PAC) showed a greater affinity for Pb (II) compared to (UC) and the adsorption of Pb (II) ions is strongly pH-dependent, on the other hand, the increase in temperature doesn't have much influence on the two solids. This study showed that the capacity of (UC) to adsorb Pb (II) from an aqueous solution is greater than two-thirds of that of (PAC).

Conservation Treatment of the Seated Stone Bodhisattva Discovered in Pyeongchang and Restoration of the Statue Using 3D Digital Technologies (평창 발견 석조보살좌상의 보존처리와 3차원 디지털기술을 활용한 복원)

  • Jo, Seongyeon;Kwon, Yoonmi;Choi, Bobae
    • Conservation Science in Museum
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    • v.20
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    • pp.77-92
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    • 2018
  • A stone seated bodhisattva (Sinsu5971) was discovered in Pyeongchang-gun, Gangwon-do in 1974 and was transferred to the Chuncheon National Museum upon its opening in 2002. The statue had damage to wide areas and was thus difficult to restore. This study utilized 3D scanning and 3D printing technologies to identify the overall form of the statue and the degree of damage, which allowed the restoration of lost portions that otherwise could not have been accurately restored to their original shape. Prior to the conservation treatment, the pigments used to decorate the surface were investigated using an optical microscope, and their main components were analyzed with a p-XRF (Potable X-ray Fluorescence Analyzer). The deteriorated lacquered surface was stabilized using animal glue and consolidated with stone strengthener (OH-100). The investigation found that the surface of the statue was made of zeolite that was lacquered and then gilded. As for pigments, white lead was used for the white color and red lead and cinnabar were used for red. The lost portions were redesigned by mirroring the remaining parts with 3D technologies. However, it was difficult to affix the 3D printing outputs to the statue without visible gaps since the damaged parts suffered flection. The portions of the outputs to be connected to the statue were thus modified and supplemented. It was also difficult to collect data on the properties of 3D printing materials due to the lack of previous in-depth study. These obstacles are subjects for further study.

A Study on Comparison Experiments for Judgement to the Nondestructive Analysis of Gold Plated Silverware Remains (비파괴분석법에 의한 은제금도금유물의 판단을 위한 비교실험 연구)

  • Sim, Myung-Bo;Yu, Hei-Sun;Kim, Soo-Ki
    • Journal of Conservation Science
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    • v.27 no.1
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    • pp.41-47
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    • 2011
  • If the nondestructive analysis is carried out by using an X-ray Fluorescence Analyzer(XRF) for ingredient analysis with the target of gold plated silverware that plates gold on a silver basis, a singular point showing big difference at the value of weight percent(wt.%) according to the electron orbit of the principal ingredient can be confirmed. The present research made reproduced samples and carried out comparative analysis in order to suggest a basis that can judge whether the technique of gold plated silverware was used in case of remains uneasy to understand with eyes by using this singular point. As a result, the same result as analysis results of actual remains could be seen in specimens manufactured by a mercury amalgam plating method. However, in case of gold and silver alloy specimens, it could be confirmed that the difference according to the electron orbit of the principal ingredients is slight unlike plated specimens. The reason appearing at plated specimens seems to be generated while absorbing XRF beam at plated layers by double structure due to plating instead of single material. Accordingly, if this result appearing at nondestructive analysis is used, it was confirmed that the application of the technique of gold plated silverware can be judged without observing its section.

The study of non-destructive analysis of objects excavated at the tomb of Mich’un-ri in Ch’ung-won (유물의 비파괴 조사 연구-청원 미천리 고분 출토 유물을 중심으로)

  • Moon, Whan-Suk;Jo, Nam-Cheol;Kim, Seong-Bae
    • 보존과학연구
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    • s.20
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    • pp.81-90
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    • 1999
  • We performed the non-destructive analysis of objects excavated at the Tomb of Mich’un-ri in Ch’ung-won. We analysed components using of Energy Dispersive X-Ray Micro-Fluorescence Analyzer. Glass bead inlaid with silver was classified as K2O-CaO-SiO2 type of glass. Purity of silver inlaid in the surface was verified above 97%.All small ear-ring were made by rolling up gold broad to a bronze wick. The composition ratio of Au : Ag has significantly higher 87 : 11 than bigear-ring. As a result of composition analysis of a welded part with big ear-ring, it contained the more Cu, Hg contents and the less Au, Ag contents than the surface of big ear-ring.

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COMPARISON OF PLASMA-INDUCED SURFACE DAMAGES IN VARIOUS PLASMA SOURCES

  • Yi, Dong-Hyen;Lee, Jun-Sik;Kim, Sang-Kyun;Kim, Jae-Jeong
    • Journal of the Korean institute of surface engineering
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    • v.29 no.5
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    • pp.338-344
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    • 1996
  • This study was an investigation of plasma-induced damages on silicon substrate in the semiconductor manufacturing technology. The plasma-induced damage level on silicon substrate was analyzed and compared in various plasma etching systems. The analysis methods were therma wave, life-time recovery, SCA (Surface Charge Analyzer) and TRXF (Total Reflection X-ray Fluorescence) measurements, and the measured values were compared for each systems. In the comparison of the values which were obtained by a system that had low life-time recovery, there was not any differences in DC parameters. However, the reflesh time distribution of device of that system had decreased about 10 to 20m sec compared to a system which had high life-time recovery.

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Compositional and Microstructural Study of Punchong from Hakbongni, Kongju (공주 학봉리 분청에 대한 성분과 미세구조의 분석)

  • Lee, Young Eun;Koh, Kyongshin
    • Journal of Conservation Science
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    • v.6 no.1 s.7
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    • pp.3-14
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    • 1997
  • Twelve Punchong sherds collected in Hakbongni, Kongju where the well known iron-painted on white slip were manufactured from late 15C to early 16C were analyzed for their composition and microstructure. The composition of the body was analyzed by X-ray fluorescence and that of glaze by electron probe micro-analyzer. Microstructure was observed by optical microscope, polarizing microscope, EPMA, and X-ray diffractometer. The results of composition of body and glaze of Hakbongni were compared with those of Punchong from Yongsuri, Boryong which was close to Hakbongni. The composition of body and glaze of these two areas were compared by principal component analysis using SPSS program. Hakbongni bodies have higher silica and flux materials but lower alumina and their glaze have higher silica, soda, iron oxide but lower alumina, calcia. Hakbongni punchong itself is divided into two groups. Their glaze is lime type. There are many remnant minerals, such as quartz, large feldspar mass with partially melted surrounding area, albite, biotite, and iron-oxide. From such a microstructure we can assume that preparation of raw material was rather crude and firing temperature quite low. Iron-painted material is identified as Mg/Fe/Al spinel by composition analysis and XRD pattern.

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Comparing Thermal and Chemical Decomposition of Up-Cycled Ammonium Paratungstate(APT) (업싸이클링된 암모늄 파라텡스텐의 열적 및 화학적 분해법 비교)

  • Chung, Jun-Ki;On, Jin-Ho;Kim, Sung-Jin;Park, Sang-Yeup
    • Korean Journal of Materials Research
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    • v.25 no.6
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    • pp.274-278
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    • 2015
  • The possibility of using the chemical precipitation method of up-cycled ammonium paratungstate (APT) was studied and compared with the thermal decomposition method. $WO_3$ particles were synthesized by chemical precipitation method using a 1:2 weight ratio of APT: Di-water. For thermal decomposition, APT powder was heated for 4h at $600^{\circ}C$ in air atmosphere. The reaction products were characterized by X-ray diffraction (XRD), X-ray fluorescence spectrometer (XRF), particle size analyzer (PSA), and field emission-scanning electron microscopy (FE-SEM). Thermogravimetric analysis (TGA) of the up-cycled APT allowed for the identification of the sequence of decomposition and reduction reactions that occurred during the heat treatment. TGA data indicated a total weight loss of 10.78% with the reactions completed in $658^{\circ}C$. The XRD results showed that APT completely decomposed to $WO_3$ by thermal decomposition and chemical precipitation. The particle size of the synthesized $WO_3$ powders by thermal decomposition with 2 h of planetary milling was around $2{\mu}m$ During the chemical precipitation process, the particle size of the synthesized $WO_3$ powders showed a round-shape with ${\sim}0.6{\mu}m$ size.