• 제목/요약/키워드: X-ray 회절

Search Result 1,475, Processing Time 0.029 seconds

X-선 Lang 토포그래피를 이용한 사파이어 단결정 웨이퍼 결함 분석

  • Jeon, Hyeon-Gu;Bin, Seok-Min;Lee, Yu-Min;O, Byeong-Seong;Kim, Chang-Su
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2013.02a
    • /
    • pp.371-371
    • /
    • 2013
  • 사파이어 단결정 웨이퍼는 제조과정에서 결정 성장 조건 및 기계적 연마에 의하여 내부적인 결함이 발생할 수 있다. 사파이어 단결정은 일반적으로 LED용 기판 재료로 사용되며, 내부결함이 발생 시 기판 위의 GaN 등 layer의 결함도 함께 증가하므로 기판의 결함을 줄이는 과정이 중요한 이슈이다. 이 과정에 X-선 토포그래피는 단결정의 내부 결함을 모니터링 하는데 있어서 매우 유용한 방법이다. 이에 본 연구에서는 사파이어 단결정 웨이퍼에 내재하는 결함 형태를 X-선 Lang 토포그래피 방법(X-ray Lang Topography)으로 이미징하여 관찰, 분석하였다. Lang 토포그래피 방법은 X-선 투과법으로 넓은 부분을 우수한 강도와 분해능으로 내부 결함을 관찰할 수 있는 장점을 지니고 있다. X-선 source는 Mo $k{\alpha}$ 1을 사용하였으며, 시료는 c-plane 사파이어 웨이퍼를 사용하였다. 사파이어 웨이퍼의 (110), (102) 회절면의 X-선 토포그래피 이미지를 통해 전위 결함의 유형에 따른 이미지 패턴의 형성 메커니즘에 대해 연구하였고, 측정 회절면과 두께, 표면 데미지에 따른 전위 결함 이미지의 변화를 확인하였다. X-선 토포그래피 이미지를 통해 단결정 c-plane 사파이어 웨이퍼의 전위 결함의 형성 메카니즘 연구와 유형별 이미지와 회절면, 두께, 표면 데미지에 따른 이미지 변화 등을 확인하였다.

  • PDF

The X-Ray Study on Macrostress and Microstress for Two-Phase Stainless Steel (二相스테인리스鋼의 X線에 의한 巨視的.微視的 應力에 關한 硏究)

  • ;;廣賴幸雄
    • Journal of Welding and Joining
    • /
    • v.12 no.4
    • /
    • pp.141-150
    • /
    • 1994
  • The residual stress is inevitably introduced into composites because of the mismatch of the coefficient of thermal expansion, and it is different in each phase. The X-ray technique can detect separately the stress in each phase, so will wield useful information for analyzing the toughening mechanisms of composites. In order to apply the law of mixture to alloy steels with composite microstructures, two phase stainless steel, consisted of ferrite (.alpha.-Fe) and austenite (.gamma.-Fe) structures, was selected. The tensile elastic deformation was loaded, and then the X-ray diffraction technique was used to measure the X-ray elastic constants, the X-ray stress constants and the phase stresses. The law of mixture was investigated and the separation of macrostress and microstress was carried out. The phase stresses (the residual stresses of phase) in each phase, which were measured by X-ray technique, was directly proportional to the applied stress. The macrostress calculated from the phase stresses by using the law of mixture was nearly equal to the applied stress.

  • PDF

Studies on Elastic Deformation by X-ray Stress Measuremtnt of WC-Co Alloy (WC-Co합금의 X선 응력측정에 의한 탄성변형거동의 연구)

  • 부명환;오세욱;광조신
    • Journal of Ocean Engineering and Technology
    • /
    • v.8 no.2
    • /
    • pp.105-114
    • /
    • 1994
  • 초경합금은 기계적 성질이 다른 WC의 분상상과 Co의 결합상으로 구성되어 있다. 만일 이합금이 거시적으로 균일하게 변형을 하면, 각 상들은 이들의 응력상태에 따라 다르게 변형될 것이다. 따라서 WC-Co 합금의 변형특성과 강화기구를 명확히 알기 위해서는 각상의 미시적 변형과 파괴기구를 검토할 필요가 있다. 본 연구에서는 시편에 굽힘하중을 가하여, X선 회절로 분산상인 WC상 및 결합상인 Co상의 X선적 탄성정수와 응력정수를 측정하였다. WC-Co합금중의 WC상과 Co상의 상응력은 WC(112)면과 CO(311)면의 회절로서 결정하였다. 그리고 이 상응력들을 복합법칙의 적용가능성에 대하여 검토하였다.

  • PDF

A Study on the Measurement of Residual Stress in Rolled Steel for Automobile using X-ray Diffraction (X선 회절을 이용한 자동차 압연강의 잔류응력 측정에 관한 연구)

  • 홍순혁;이동우;조석수;주원식
    • Transactions of the Korean Society of Automotive Engineers
    • /
    • v.10 no.6
    • /
    • pp.150-157
    • /
    • 2002
  • In textured material, diffraction angle $2{\theta}$ usually shows a nonlinear relation against $sin^2{\psi}$ due to elastic anisotropy of crystals. SPHD and SPCD steel is cold-rolled carbon steel for automobile. The characteristics X-ray for stress measurement is Cr $K_{\alpha}\;and\;Mo\;K_{\alpha}$ characteristic X-ray. The $2{\theta}-sin^2{\psi}$ diagram under elastic strain seems to have a linear behavior using regression line of data but has a nonlinear behavior in distribution of data by Cr $K_{\alpha}$ characteristic X-ray. As the plastic strain of specimen increases, the nonlinearity of $2{\theta}$ with respect to $sin^2{\psi}$ increases remarkably. On the other hand, the diffraction angle $2{\theta}$ by Mo $K_{\alpha}$ characteristic X-ray shows a good linearity on $2{\theta}-sin^2{\psi}$ diagram under plastic strain as well as elastic strain. Therefore, this paper presents the measurement of residual stress in cold-rolled carbon steel for automobile using penetration depth of Mo $K_{\alpha1}$ characteristic X-ray and multiplicity factor of crystal diffraction plane.

The Study on the Quantitative Analysis of Accident Fracture Surface by X-ray Diffraction (X-ray 회절에 의한 사고파면의 정량적 해석에 관한 연구)

  • Choi, Seong-Dae;Kweon, Hyun-Kyu;Cheong, Seon-Hwan
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.19 no.4
    • /
    • pp.117-123
    • /
    • 2002
  • X-ray diffraction observation of fracture surfaces yields useful information to analyze the causes of failure accidents of engineering structures. This experimental technique, named X-ray fractography, has been developed especially in metal and mechanical engineering fields. The distributions of the residual stress and the half value breadth of diffraction profiles beneath the fatigue fracture surface were measured with SNCM 439, HT100 and Ti-6Al-4V alloy. The size of the maximum plastic zone was successfully determined on the basis of the measured distributions. This size was correlated to maximum stress intensity factor. The distributions of the half value breadth of diffraction profiles on the fatigue fracture surfaces were measured with SNCM 439. HT100. The equations of x-ray parameter distribution were possible to estimated fracture parameters of fatigue fracture surfaces.

A Study of Practical and Optimized Mineral Quantification (실용적이고 최적화된 광물정량분석법 연구)

  • Son, Byeong-Kook;An, Gi-O
    • Korean Journal of Mineralogy and Petrology
    • /
    • v.34 no.4
    • /
    • pp.227-239
    • /
    • 2021
  • A practical and effective method of X-ray powder diffraction analysis was investigated for quantitative analysis of the mineral content of natural samples. Sample mounting experiments were conducted to select the best randomly oriented powder sample mount. A comparative experiment was also made between a reference intensity ratio (RIR) method, which compares a single peak intensity with standard material, and the Rietveld method, which calculates a full X-ray diffraction pattern, to search for the effective method of mineral quantification. In addition, samples containing amorphous minerals were quantitatively analyzed by the Rietveld method and the efficiency was reviewed. As a result of the study, the optimal random orientation could be reached by the side mounting method. The Rietveld method using the full pattern of X-ray diffraction was more suitable for mineral quantitative analysis, rather than the RIR method using a specific peak. However, either method could depend on the analyst's experience in addition to analytical technique. Moreover, amorphous minerals can be quantitatively analyzed by the Rietveld method, and the analysis results make the geological analysis possible.

Survey on ultrafast time resolved X-ray diffraction measurements of crystal structure (X선의 초고속 결정구조 측정법)

  • Koo, Y.D.;Kim, Y.C.;Oh, C.S.
    • Journal of Energy Engineering
    • /
    • v.23 no.3
    • /
    • pp.13-16
    • /
    • 2014
  • We have surveyed on significant progress in recent developments of accelerator-based pulsed X-ray sources has offered the opportunity for time-resolved studies on fast structure dynamics on the nanometer scale. The required and currently available techniques for time resolved X-ray diffraction measurements using the third-generation synchrotron radiation sources are summarized. Ultrafast X-ray experimental techniques are discussed for femtosecond studies at future synchrotron radiation sources.

On the Crystalline Structures of Iron Oxides formed During Removal Process of Iron in Water (수중의 철 제거 시 생기는 산화철의 결정구조에 관한 연구)

  • Cho, Bong-Yeon
    • KSCE Journal of Civil and Environmental Engineering Research
    • /
    • v.26 no.1B
    • /
    • pp.107-111
    • /
    • 2006
  • The samples collected from two reactors are analyzed by X-ray diffraction and M$\ddot{o}$ssbauer spectroscopy in this study. It is concluded that the iron oxide crystal attached on anthracite media which possesses catalytic ability is identified to be Ferrihydrite, regardless of the value of pH from the analysis of the iron oxide. Iron oxide in Batch reactor is identified to be Microcrystalline goethite.

6H-SiC epitaxial growth and crystal structure analysis (6H-SiC 에피층 성장과 결정구조 해석)

  • Kook-Sang Park;Ky-Am Lee
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.7 no.2
    • /
    • pp.197-206
    • /
    • 1997
  • A SiC epilayer on the 6H-SiC crystal substrate was grown by chemical vapor deposition (CVD). The crystal structure of the SiC epilayer was investigated by using the X-ray diffraction patterns and the Roman scattering spectroscopy. The SiC epilayer on the 6H-SiC substrate was grown to be homoepilayer by CVD. In order to distinguish a certain SiC polytype mixed in the SiC crystal grown by the modified Lely method, we have calculated the X-ray diffraction intensities and Brags angles of the typical SiC crystal powders. By comparing the measured X-ray diffraction pattern with the calculated ones, it was identified that the SiC crystal grown by the modified Lely method was the 6H-SiC crystal mixed some 15R-SiC.

  • PDF