• Proceedings of the Korea Crystallographic Association Conference
• /
• 2002.11a
• /
• pp.51-51
• /
• 2002

나노기공물질은 특정 기반물질(matrix) 내부에 대략 나노미터크기의 기공을 함유하고 있는 물질이며 나노기공물질의 특성은 기반물질의 특성과 더불어 기공의 형태, 크기, 분포에 의해서 결정된다. 나노기공물질의 기공에 대한 정보를 측정하는 방법으로는 TEM, 흡착법, FE-SEM과 더불어 중성자 또는 X-ray 빔의 산란을 이용하는 소각중성자산란 (Small-Angle Neutron Scatering, SANS), 소각 X-ray 산란 (Small-Angle X-ray Scattering, SAXS), 중성자반사율측정 (Neutron Relfectimetry, NR), X-ray 반사율측정 (X-Ray Reflectometry, XRR) 등이 사용되고 있다. 본 발표는 대략 1 nm - 100 nm 영역의 bulk 구조와 층상구조를 측정할 수 있는 소각 중성자 산란과 중성자 반사율 측정기법을 이용한 나노기공 측정기술을 다룬다.

• Journal of radiological science and technology
• /
• v.33 no.3
• /
• pp.179-184
• /
• 2010

A hard X-ray microscope system for obtaining images of nano-spatial resolution has been widely studied and requires monochromatic X-ray. A multilayer mirror of 84% reflectivity was designed to acquire tungsten characteristic X-ray of 8.4 keV from the white beam generated from an X-ray tube, and the C/W multilayer mirror of $50{\times}50\;mm$ size and 5.65 nm d-spacing was fabricated by the ion-beam sputtering system. The C/W multilayer had a uniformity of 99.5%, and the structure of the multilayer mirror was verified by a TEM image. The obtainable x-ray reflectivity for the C/W multilayer mirror at 8.4 keV was estimated from measuring the X-ray reflectivity using the copper characteristic X-ray of 8.05 keV. Monochromatic X-ray of 8.4 keV was generated by combining a X-ray tube, and the reflectivity and monochromaticity were 77.1% and 0.21 keV, respectively. Monochromatic X-ray generated from the combination of an X-ray tube and an C/W multilayer mirror has enough potential to use X-ray source for hard X-ray microscope system of laboratory size. If the C/W multilayer mirror of d-spacing of a few nanometers can be fabricated, monochromatic X-ray corresponded to 17.5 keV, molybdenum characteristic X-ray, can be obtained and applied to mammography in the medical application.

• Journal of the Korean Society of Radiology
• /
• v.3 no.4
• /
• pp.23-28
• /
• 2009

Monochromatic X-ray can make a medical image of high contrast under a low radiation dose and can be easily generated by combining an X-ray tube and a multilayer mirror. A W/C multilayer mirror was optimally designed for a characteristic X-ray generated from a X-ray tube with Mo target. The d-spacing and the thickness ratio in design parameters were determined under the maximum-reflectivity condition. Tolerances for deposition and alignment of the W/C multilayer mirror were calculated. Within a deposition tolerance of 0.2nm and a alignment tolerance of ${\pm}0.01^{\circ}$, 85% of the theoretical peak reflectivity could be achieved. A multilayer mirror can be widely used for making medical images because of generating high fluence monochromatic X-ray.

• Polymer(Korea)
• /
• v.33 no.3
• /
• pp.263-267
• /
• 2009

In order to improve the hydrophilic property on the surface of d-PMMA(deuterated poly-(methyl methacrylate)) film, it was exposed to oxygen plasma, All experimental conditions were same except to plasma exposure time that was varied from 0 to 180 s, The effects according to the exposure time were identified using contact angles, X-ray reflectometer(XRR), neutron reflectometer(NR), and X-ray photoelectron spectroscopy(XPS). By confirming that as the exposure time increases, water contact angle decreases while the composition of oxygen increases, it was confirmed that the composition of oxygen has a huge influence on improving the hydrophilic property. The physical characters as a function of the exposure time were investigated by the XRR. By analyzing complementally the results of the XRR, NR, and XPS, more detailed chemical bonding conditions were studied by obtaining not only composition of the carbon and oxygen but that of the hydrogen.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.24 no.12
• /
• pp.1704-1710
• /
• 2020

The high-energy X-ray imaging detector used for container inspection uses a thick scintillator to effectively acquire X-rays. X-ray incident on the scintillator is generally up to 9MeV. Therefore, to effectively collect X-ray, it is necessary to use a thick scintillator. To collect the light generated by the reaction between X-ray and scintillator, an optical-sensor must be combined with the scintillator. In this study, a study on the design conditions of the detector using a CdWO4 and a small sensor is described. To calculate the collected light according to the change of the scintillator thickness and the reflectance of surface, MCNP6 and DETECT2000 were used. As a result of calculating, it was confirmed that when the reflectance of the surface was low, it was appropriate to select a scintillator with a thickness of 15 to 20-mm, but as the reflectance increased, it was confirmed that it was appropriate to select a CdWO4 with a thickness of 25 to 30-mm.

• Journal of the Korean Society of Radiology
• /
• v.12 no.1
• /
• pp.101-106
• /
• 2018

Multilayer mirrors have widely been used for monochromatization of X-ray with high reflection efficiency. The reflected X-ray energy or wavelength is determined by the d-spacing of a multilayer mirror and the incidence angle. The reflectivity critically depends on the number of bilayers and surface roughness on each interface. The multilayer mirror has a structure of alternative deposition of high and low Z-elements on the substrate. Each interface should be considered in the calculation of reflectivity. In this paper, we examine the degradation of reflectivity by the inter-diffusion combined with surface roughness on each interface for a W/Si multilayer mirror. In the depth-graded W/Si multilayer mirror, the FWHMs for angle and energy were larger than them of the uniform multilayer mirror. Inter-diffusion considerable gave rise to the degradation of reflectivity. To obtain measured reflectivity closed to the expected reflectivity, the inter-diffusion on W-Si and Si-W interfaces should be considered.

• Proceedings of the Korean Vacuum Society Conference
• /
• 1999.02a
• /
• pp.68-68
• /
• 1999

• Journal of the Korean Magnetics Society
• /
• v.20 no.4
• /
• pp.160-166
• /
• 2010

X-ray resonant magnetic scattering (XRMS) allows us to extract magnetic depth profiles in magnetic multilayers and magnetization distribution in magnetic nanostructures in element-specific manner using x-ray reflectivity and diffraction. XRMS is explained with a brief introduction and examples of magnetic structures and magnetic switching mechanism in magnetic multilayers and nanostructures.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2011.05a
• /
• pp.62.2-62.2
• /
• 2011

산업화 이후, 석탄 석유를 중심으로 한 화석연료가 이산화탄소를 대량으로 배출하며 지구 온난화를 야기함에 따라, 기존의 화석연료를 대체할 청정하고 무한 재생 가능한 대체에너지로 가장 큰 기대를 받고 있는 것은 태양에너지이며, 이에 보조를 맞춰 태양광발전에 대한 연구개발이 국내외적으로 활발히 진행되고 있는 실정이다. 태양 전지는 빛 에너지를 직접 전기 에너지로 바꿔주는 소자로, 셀의 효율을 높이기 위해서는 최대한 많은 빛을 흡수시킬 수 있는 것이 중요하다. 빛의 반사를 줄이는 방법에는 texturing과 antireflecting coating이 있다. Antireflecting coating은 반도체와 공기의 중간 굴절율을 갖는 박막을 증착하여 측면 반사를 감소시킴으로서 빛의 손실을 감소시키는 역할을 한다. 과거에 반사방지막으로 가장 많이 사용되었던 물질은 SiO로써 굴절률은 1.8~1.9로서 최소의 반사율은 1% 미만이지만, 가시광선영역에서의 흡수에 의한 손실이 생기므로, SiNx가 대체 물질로 제안되었다. SiNx의 경우 굴절률이 약 1.5로서 Si에 쉽게 형성시킬 수 있고, texturing된 Si 표면에 적합하며 반사율을 10%에서 2%로 줄일 수 있는 장점을 가지고 있다. 따라서 본 연구에서는 high power, high frequency PECVD 방법으로 $SiH_4$와 $NH_3$ gas의 비율, $N_2$ carrier gas 등 공정 변수를 변화시켜 증착한 SiNx 박막의 결정학적 특성을 X-ray diffraction 분석과 XPS (X-ray photoelectron spectroscopy)를 통해 화학적 결합을 확인하였고, 이를 FT-IR (Fourier Transform-Infrared spectroscopy)를 통해 관찰한 결과와 연관시켜 분석하였다. 굴절율의 경우 ellipsometer를 이용하여 측정하였으며 위의 측정을 통하여 SiNx박막의 반사 방지막으로써의 가능성을 확인 하였다.

• Journal of the Korean Society of Radiology
• /
• v.14 no.1
• /
• pp.69-75
• /
• 2020

Multilayer mirrors have widely been used not only in the industry but also in the medical field. X-ray reflectivity was measured by X-ray diffractometer to evaluate the performance of W/C multilayer mirror with 40 layers. Genetic algorithm are used to obtain thickness, density, and interfacial roughness for each of the 40 layers. The existing uniform random selection causes a problem that the solution does not converge or the error increases even if it convergence. To reduce the time to calculate the fitness of the genetic algorithm, the genetic algorithm was written in C/C++ parallel programming. The genetic algorithm showed excellent scalability of linear time increase with increasing number of generation and population. The genetic algorithm was selected with uniform and Gaussian randomness of 1:1 to improve the convergence of solution. The improved genetic algorithm can be applied to characterize each layer of a sample with more than a few tens of layers, such as a multilayer mirror.