• Title/Summary/Keyword: X-Y stage

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Orthogonality Calibration of a High Precision Stage using Self-calibration Method (자가보정법을 이용한 정밀 스테이지의 직각도 보정)

  • Kim, Ki-Hyun;Park, Sang-Hyun;Kim, Dong-Min;Jang, Sang-Don
    • Journal of the Korean Society for Precision Engineering
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    • v.27 no.3
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    • pp.50-57
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    • 2010
  • A high precision air bearing stage has been developed and calibrated. This linear-motor driven stage was designed to transport a glass or wafer with the X and Y following errors in nanometer regime. To achieve this level of precision, bar type mirrors were adopted for real time ${\Delta}X$ and ${\Delta}Y$ laser measurement and feedback control. With the laser wavelength variation and instability being kept minimized through strict environment control, the orthogonality of this type of control system becomes purely dependent upon the surface flatness, distortion, and assembly of the bar mirrors. Compensations for the bar mirror distortions and assembly have been performed using the self-calibration method. As a result, the orthogonality error of the stage was successfully decreased from $0.04^{\circ}$ to 2.48 arcsec.

Studies on Screening Rice Cultivars for Drought Resistance I. Screening at Seedling Stage (수도 한발저항성 품종 선발에 관한 연구)

  • Hak-Soo SUH
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.24 no.3
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    • pp.7-12
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    • 1979
  • Seven hundred and forty eight rice cultivars were screened for drought tolerance at seedling stage in a special green house. A number of cultivars such as Wonkiljo, Hanyangdo, YR 52-$_{x}\textrm{BF}_7-67, Satominori, Mamoriaka, Akanomochi 114, Thkebenimochi, IR 937-55-3, IR2735-F_3B-6-2, IR 2871-53-2, $_{x}\textrm{BFI76}^9/Dwan, Khoo lliok Mali-4-2-105, Os6, Palawan, IRAT10, TOS 2583 and H-l05 seemed to be tolerant to drought at seedling stage. There was negative correlation between drought resistance score and growth of plant height and water content of culm and leaf after drought treatment, and highly positive correlation between resistance to blast and resistance to drought at seedling stage. There was no relationship between drought resistance and germination speed, plant height before drought treatment.

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Strain Analysis of Crust at the Stabilization Stage Using and Applied Statistical Analysis

  • Kim, Hyeong-Sin;Yun, Hyun-Seok;Chae, Byung-Gon;Choi, Jung-Hae;Seo, Yong-Seok
    • The Journal of Engineering Geology
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    • v.25 no.1
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    • pp.9-20
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    • 2015
  • A strainmeter goes through a period of instability immediately after installation. To determine the stability of strainmeters installed around the Andong fault zone, South Korea, an x-MR control chart analysis and a T2 control chart analysis were conducted. The x-MR control chart analysis used an empirically determined 3σ control limit line to identify abnormal data in recently installed strain gauges. In the T2 control chart analysis, the control limit line was set at a confidence of 95%. A comparison of the early stage of measurement with the terminal stage of measurement for three months after installation indicates that stabilization depends on the location and direction of each strain gauge in x-MR control chart analysis. In the T2 control chart analysis, the number of values exceeding the control limit line decreased as the terminal stage was approached. Based on these results, it is suggested that the 3σ control limit line of an x-MR control chart can be used as a standard for single gauge stability, and that the 95% confidence limit of a T2 control chart analysis could be used as the standard for the stability of multi-gauge strainmeters.

X-ray Radiography에 적합한 Double Multilayer Monochromaotr (DMM) 설계와 제작

  • Jeong, Sun-Yong;Yang, Seong-Seon;Im, Jae-Hong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.118-118
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    • 2013
  • DMM은 방사광가속기의 백색광으로부터 단색광을 추출하기 위해 두 개의 다층 박막 (multilayer) 거울을 사용하는데, 첫 번째 거울은 Bragg 반사를 통해 분광을 하여 단색광을 생산하는 용도이고, 두 번째 거울은 이 단색광을 반사시켜 지면과 평행하게 출사되게 하기 위함이다. 일반적으로 사용되는 DCM (Double Crystal Monochromator)과의 차이점은, Bragg 반사를 위해 DCM에서는 결정을 사용하는 반면 DMM은 밀도차이가 많이나는 두 종류의 물질을 교대로 쌓아 올린 다층 박막을 사용한다는 것이다. 다층 박막의 주기가 곧 Bragg 반사에서의 d-spacing이 되며, X-선 분광의 목적으로 사용되는 d-spacing은 10-50 $\AA$ 사이이다. DCM이 0.01% 대의 우수한 에너지 분해능을 보이는데 비해, DMM은 1% 정도이다. 이 때문에 출사광의 밝기가 DCM에 비해 100배 밝은 특징이 있어서 에너지 분해능보다 광량이 더 중요한 응용에서 DMM이 사용된다. X-선 영상이나 방사선치료가 바로 이러한 응용에 해당한다. DMM은 포항가속기연구소와 (주) 벡트론에서 공동 설계하였으며, (주)벡트론에서 제작하였다. 그림 1에 DMM의 외형과 내부 구조를 나타내었다. Bragg 각의 조절 범위는 0.24-0.9도 이다. 입사광과 출사광의 수직 방향 offset을 10 mm로 유지하기 위해 두 번째 다층 박막이 수평방향으로 1,000 mm 가량 이동할 수 있어야 한다. 이를 위해 두 대의 고니오미터 stage를 사용하여 각각 첫 번째 및 두 번째 다층 박막의 위치와 방향을 제어한다. 첫 번째 다층 박막을 제어하는 고니오미터 stage는 하부가 전체 프레임에 고정되어 있고, 이 고니오미터의 회전축에서 Bragg 각을 조절한다. 두 번째 다층 박막을 제어하는 고니오미터 stage는 높이방향과 수평방향으로 이동이 가능하다. 다층 박막의 pitch는 고니오미터의 회전축에서 조절한다. 그리고 tilt stage를 사용하여 다층 박막의 roll을 조절한다.

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Design optimization of vibration isolation system through minimization of vibration power flow

  • Xie, Shilin;Or, Siu Wing;Chan, Helen Lai Wa;Choy, Ping Kong;Liu, Peter Chou Kee
    • Structural Engineering and Mechanics
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    • v.28 no.6
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    • pp.677-694
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    • 2008
  • A vibration power minimization model is developed, based on the mobility matrix method, for a vibration isolation system consisting of a vibrating source placed on an elastic support structure through multiple resilient mounts. This model is applied to investigate the design optimization of an X-Y motion stage-based vibration isolation system used in semiconductor wire-bonding equipment. By varying the stiffness coefficients of the resilient mounts while constraining the dynamic displacement amplitudes of the X-Y motion stage, the total power flow from the X-Y motion stage (the vibrating source) to the equipment table (the elastic support structure) is minimized at each frequency interval in the concerned frequency range for different stiffnesses of the equipment table. The results show that when the equipment table is relatively flexible, the optimal design based on the proposed vibration power inimization model gives significantly little power flow than that obtained using a conventional vibration force minimization model at some critical frequencies. When the equipment table is rigid enough, both models provide almost the same predictions on the total power flow.

The Austempering Transformation Behavior of Fe-0.7wt.%C-2.3wt.%Si-0.3wt.%Mn Steel (Fe-0.7wt.%C-2.3wt.%Si-0.3wt.%Mn 강의 오스템퍼링 변태 거동)

  • Shin, Sang-Yun;Lee, Do-Hoon;Kim, Seo-Eun;Ye, Byung-Joon
    • Journal of Korea Foundry Society
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    • v.34 no.1
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    • pp.1-5
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    • 2014
  • The austempering transformation behavior in Fe-0.7wt.%C-2.3wt.%Si-0.3wt.%Mn steel is investigated. Each specimen was austenitized for 60 min at $900^{\circ}C$, and austempered at $380^{\circ}C$ for different time periods varying from 2 min to 256 min. After the austempering heat treatment, the Stage I and II evolutions are performed using optical metallography, X-ray diffraction and image analyses. Variations in the X-ray diffraction patterns and lattice parameters of the ferrite and austenite demonstrate that the residual austenite decomposes into ferrite and carbide during the Stage II evolution; moreover the amount of ferrite increases during the Stage I evolution. While the amount of austenite increases during Stage I, it dicreases during Stage II. Overall, the variations in the volume fractions of the microstructure and carbide formation in stages I and II meet high temperature austempering reaction of the ausferrite microstructure.

A Prediction Model for Stage of Change of Exercise In the Korean Elderly -Based on the Transtheoretical Model- (한국노인의 운동행위 변화단계의 예측모형구축 -범이론적 모델(Transtheoretical Model)을 기반으로-)

  • 김순용;김소인;전영자;이평숙;이숙자;박은숙;장성옥
    • Journal of Korean Academy of Nursing
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    • v.30 no.2
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    • pp.366-379
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    • 2000
  • The purpose of this study was to identify causal relationships among variables of transtheoretical model for exercise in the elderly A predictivel model explaining the stage of change was constructed based on a transtheoretical model. Empirical data for testing the hypothetical model was collected from 198 old adults over 60 years old in a community setting in Seoul, Korea in April and May,1999. Data were analyzed by descriptive statistics and correlational analysis using pc-SAS program. The Linear Structural Modeling (LISREL) 8.0 program was used to find the best fit model which predicts causal relationship of variables. The fit of the hypothetical model to the data was X2=132.85. (df=22, p=.000). GFI=.88, NNFI=.35, NFI=.77, AGFI=.59 which was not favorable but the fit of modified model to the data was X2=46.90. (df=27, p=.01).GFI= .95, NNFI=.91, NFI=.92, AGFI=.87) which was more than moderate. The predictable variables of stage of change for exercise of the Korean elderly were helping relationship, self cognitive determination, conversion of negative condition in process of change and efficacy for exercise. These variables explained 68% of stage of change for exercise of the Korean elderly.

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A Critical Contemplation on the Contents of Function in 7-first Stage of the 7th Mathematics Curriculum in Korea (우리 나라 제 7 차 수학과 교육과정의 7-가 단계 내용 중 함수 부분에 관한 비판적 고찰)

  • 박교식
    • School Mathematics
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    • v.1 no.2
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    • pp.401-415
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    • 1999
  • In this paper, 'relations of proportion are used in the introduction of function concept' in 7-first stage of 7th mathematics curriculum is focused. Under the assumption that above statement means dependence-centered view in the teaching of function, the contents of function In 7-first stage is interpreted. Some issues are critically contemplated, And, finally, statement of using relations of proportion in the introduction of function concept is interpreted as dependence-centered view in the teaching of function. Conclusions are as follows: (1) symbol y= f(x) is not inevitable. (2) Term 'codomain' must not be used. (3) Term 'range of x' and 'range of y' must be used. (4) Term 'independent variable' and 'dependent variable' must be used.

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A Study on the Electrical and Optical Characteristics of CLN-PZT Ceramics (CLN-PZT 세라믹스의 전기, 광학 특성에 관한 연구)

  • Kang, Won-Koo
    • Proceedings of the KIEE Conference
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    • 1988.07a
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    • pp.799-801
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    • 1988
  • This paper was studied on the effects of Ca-La-Nb substitution and Zr/Ti ratio variation to Pb(Zr, Ti)$O_3$ system on structural, electrical, optical and sound level characteristics in order to develope the piezoelectric and electrooptic ceramic devices. Also the specimens were prepared by the two stage sintering technique. The molecular formular was X($CaO{\cdot}1/4La_{2}O_{3}{\cdot}1/4Nb_{2}O_{5}){\cdot}(1-X)Pb(Zr_{Y}Ti_{1-Y})O_{3}$(x=100X, y=100Y), and the variation of x was $6{\sim}12$, y was 60${\sim}$49 and second stage sintering time was 20${\sim}$40 hours. The experimental results obtained from this study are as follows : 1. The density was decreased, the grain size was increased according to increase of Ca-La-Nb substitution. 2. The crystal structure was rhombohedral in composition 6/60/40, and the crystal structure was tetragonal and cubic according to increase of Ca-La-Nb substitution. 3. The Ca substitution of PZT system enhanced the sintering property. The Pb site vacancy resulting from the substitution of La-Nb increased the dielectrical constant, the piezoelectric charge constant, the dielectric loss and decreased the coercive field. 4. The resistivity of PZT system which has the P type conduction mechanism increased according to substitution of La-Nb because of the substituent acting as donor. 5. The PZT ceramics varied from ferroelectric substance according to increase of Ca-La-Nb substituent. The coercive field and saturation remanent polarization decreased, and at last straight line according to increase of La-Nb substitution. 6. The amount of Ca-La-Nb substitution to improve the light transmittance of speciment was 10 mol%, the Zr/Ti ratio was 49/51, and the second stage sintering time was 40 hours. 7. According to Ca-La-Nb substitution, the specimens was to be transparent. The 7.5/51/49 specimen was suitable for transparent sound vibrator because it had 58% light transmittance (thick 0.2[mm], wave length 700[mm]) and 48% electromechanical coupling factor.

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Economic Injury Levels for the Common Cutworm, Spodoptera litura (Fabricius) (Lepidoptera: Noctuidae) on Soybean (콩 담배거세미나방(Spodoptera litura)의 경제적 피해수준)

  • Lee, Geon-Hwi;Bae, Soon-Do;Kim, Hyun-Joo;Park, Sung-Tae;Choi, Man-Young
    • Korean journal of applied entomology
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    • v.45 no.3 s.144
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    • pp.333-337
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    • 2006
  • The damage aspects of soybean by common cutworm, Spodoptera litura (Fabricius) (Lepidoptera: Noctuidae) at different larval density and different growth stage of soybean were studied in soybean field. The percent yield reduction(Y) of soybean infested by different densities of S. litura (X, no. of larvae/plant) under outdoor conditions for a three week period were estimated by the following equations: (1) Y = 1.655X - 6.025 ($R^{2}=0.952$) for the R1 (flowering stage); (2) Y = 0.725X - 0.475 ($R^{2}=0.986$) for the R3 (beginning pod stage); and (3) Y = 0.635X - 1.325 ($R^{2}=0.986$) for the R5 (beginning seed stage). Based on the relationships between the densities of S. litura larvae and the yield index of soybean, the number of larvae (2nd-3rd instar) which caused 5% loss of yield (Tolerable injury level) was estimated to as approximately 6.7 for the R1, 7.5 for the R5, and 10.0 per plant for the R5, respectively. Average soybean leaf areas consumed by 1st, 2nd, 3rd, 4th, 5th and 6th larvae of Spodoptera litura during 24 hr at $28^{\circ}C$ was 0.3, 0.7, 2.6, 4.0, 20.1, and $55.8\;cm^{2}$, respectively.