• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1236-1238
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• 1994

TiAlN thin films were prepared by a multi target r.f magnetron sputtering system under different conditions. We have investigated the resistivity and T.C.R. (Temperature Coefficient of Resistance) characteristics of TiAlN films deposited on $Al_2O_3$ and glass substrates by sputtering in an $Ar:N_2$ gas mixture. We used Al and Ti metal as Target Material and $Ar:N_2$ gas as working gas. We varied the partial pressure ratio of $N_2/Ar$ from 0.2/7 to 1.0/6.2 (SCCM). And the R.F power of Ti and Al Target also were varied as 160/240, 200/200 and 240/160(W). In this experiment, we can get the precision thin film resistor with a very low T.C.R. (Temperature Coefficient of Resistance) below 25 ppm ${\Omega}/^{\circ}C$.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.9
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• pp.1185-1194
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• 2000

The characteristics of intake port flow and engine performance with swirl ratio variance in a turbocharged D.I. diesel engine were studied in this paper. The intake port flow is important factor which have influence on the engine performance and exhaust emission because the properties in the injected fuel depend on the combustion characteristics. Through these experiments it can be expected to satisfy performance and emission by optimizing the main parameters; the swirl ratio of intake port, injection timing and compression ratio. The swirl ratio for ports was modified by hand-working and measured by impulse swirl meter. For the effects on performance and emission, the brake torque and brake specific fuel consumption were measured by engine dynamometer, NOx and smoke were measured by gas analyzer and smoke meter. The results of steady flow test are as follows; as the valve eccentricity ratio are closed to cylinder wall, the flow coefficient and swirl intensity are increased. Also we realized that there is a trade-off that the increase of swirl ratio decreases mean flow coefficient and increases the Gulf factor. And the optimum parameters to meet performance and emission through engine test are as follows; the swirl ratio 2.43, injection timing BTDC 13oCA and compression ratio 15.5.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.3 no.2
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• pp.188-193
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• 1993

Toluene in air and blood and hippuric acid in urine were checked for the 41 female workers who are exposed to toluene and have normal liver function in shoe making factories in July, 1993. Toluene in air was sampled with charcoal by personal air sampler at least 4 times and analyzed by gas chromatography. At the end of shift, blood and spot urine were collected with a vacuum tube containing EDTA and a polyethylene bottle for detecting blood toluene and urine hippuric acid and analyzed by gas chromatography and high performance liquid chromatography. Means of air and blood toluene and urine hippuric acid concentrations were 34.35ppm, 0.360mg/L, and 1.78g/g creatinine, respectively. Toluene in air showed a good correlation with hippuric acid in urine(r=0.4503) and toluene in blood(r=0.4596). The hippuric acid in urine and toluene in blood corresponded 10 exposure of 100ppm toluene in air were 2.628g/g creatinine and 0.481mg/L. Blood toluene and urine hippuric acid expected ratio were not correlated to the obesity index and working duration, however increased with age.

• Clean Technology
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• v.7 no.3
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• pp.203-214
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• 2001

A silicon oxide cleaning characteristic and its mechanism were studied in RF plasma cleaning system with various gases such as $CHF_3$, $CF_4$, Argon, oxygen and mixing gas. The experimental parameters - working pressure (100 mTorr), RF power (300 W, 500 W), electrode distance (5cm, 8cm, 11.5cm), cleaning time (90, 180 seconds), gas flow (50 sccm) were fixed to compare cleaning efficiency by gas types. The results were as follows. First, the argon plasma is retaining only physical sputtering effect and etch rate was low. Second, the oxygen plasma showed good cleaning efficiency in electrode distace of 5cm, 300W, 180secs, but surface roughness increased. Third, $CF_4$ Plasma could get the best cleaning efficiency. Fourth, $CHF_3$ plasma could know that addition gas that can lower the CFx/F ratio need. We could not get good cleaning efficiency in case of added argon to $CHF_3$. But, we could get good cleaning efficiency in case added oxygen.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.32 no.3
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• pp.66-73
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• 2004

As a rocket propellent of hydrocarbon fuels, the characteristics of liquefied natural gas was evaluated with the viewpoint of the constituents and content, the cooling performance as a coolant, and characteristic velocity and specific impulse as parameters of the engine performance. Content of methane was a principal factor to determine the characteristics as a rocket propellant and more than 90% of it was needed as a fuel and coolant in the regenerative cooled liquid rocket engine. Some constituents of the liquefied natural gas can be frozen by the pre-cooling of the pipe lines, therefore they can be a factor disturbing the normal working of engine. In case the content of methane is around 90% in the liquefied natural gas, a normalized stoichiometric O/F mixture ratio of 0.75 is suggested for a nominal operation condition to get the maximum specific impulse and characteristic velocity.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07a
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• pp.22-25
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• 2002

In this paper, we deposited MgO buffer layer on p-type (100)Si substrate in the condition of substrate temperature 400$^{\circ}C$, working gas ratio Ar:O$_2$=80:20, RF Power 50W, working pressure 10mtorr, and the thickness of the film was about 300${\AA}$. Then we deposited Ba$\sub$0.5/Sr$\sub$0.5/TiO$_3$ thin film using RF Magnetron sputtering method on the MgO/Si substrate in various RF power of 25W, 50W, 75W. The film deposited in 50W showed the best crystalline from the XRD measurement. To know the electrical properties of the film, we manufactured Al/BSTMgO(300${\AA}$)/Si/Al structure capacitor. In the result of I-V measurement, The leakage current density of the capacitor was lower than 10$\^$-7/A/$\textrm{cm}^2$ at the range of ${\pm}$150kV/cm. From C-V characteristics of the capacitor, can calculate the dielectric constant and it was 305. Finally we deposited BST thin film on bare Si substrate and (100)MgO substrate in the same deposition condition. From the comparate of the properties of these samples, we found the properties of BST thin film which deposited on MgO/Si substrate were better than on bare Si substrate and similar to on MgO substrate.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.51-54
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• 2000

In this paper, $Ba_{0.5}$Sr$_{0.5}$TiO$_3$ thin films were prepared on Pt/Ti/SiO$_2$/Si substrate by RF magnetron sputtering method. We investigated effect of deposition conditions (especially RF input power) on structural properties of BST thin films. Deposit conditions of BST films were set working gas ratio, Ar:O$_2$= 70 : 30, working pressure 10mTorr, and RF input power 25W, 50W, 75W and 100W. Post-annealing using rapid thermal annealing(RTA) performed at 45$0^{\circ}C$, 55$0^{\circ}C$, $650^{\circ}C$, and 75$0^{\circ}C$ in oxigen ambient for 60 sec, respectively. The structural properties of BST films on Pt/Ti/SiO$_2$/Si substrate analysed by X-ray diffraction(XRD).).).

• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.9
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• pp.937-944
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• 2012

The thermodynamic characteristics of a trilateral cycle with water as a working fluid have been theoretically investigated for an electric generation system to recover the waste heat of the exhaust gas from a diesel engine used for the propulsion of a large ship. As a result, when a heat source was given, the efficiencies of energy and exergy were maximized by the specific conditions of the pressure and mass flow rate for the working fluid at the turbine(expander) inlet. In this case, as the condensation temperature increased, the volume expansion ratio of the turbine could be reduced properly; however, the exergy loss of the heat source and exergy destruction of the condenser increased. Therefore, in order to recover the waste exergy from the topping cycle, the combined cycle with a bottoming cycle such as an organic Rankine cycle, which is utilized at relatively low temperatures, was found to be useful.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.1980-1985
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• 2007

The purpose of this study is to investigate the performance of an autocascade refrigeration system using the refrigerant mixtures of R-134a(64${\sim}$72wt%), R-23(20${\sim}$25wt%) and R-14(8${\sim}$12wt%) as working fluids by experiment. The experimental apparatus consisted of a autocascade system with a compressor, condenser, evaporator, gas-liquid separator and cascade condenser, etc. Two main causes to this failure were considered as follows. First, the pressure ratio in the compressor was extremely increased at the beginning of the experiment. Second, the outlet temperature in compressor was higher than its limited temperature. For a stable operation of the compressor, a portion of the mixed refrigerant was by-passed at the inlet of the heat exchanger and transferred directly to the suction of the compressor in the modified system. The experimental parameters were changed weight of R-134a(1800g, 2800g), R-23(700, 800, 900g) and R-14(300, 400, 500g). The results showed that the best performance in case of R-134a of 2800g, R-23 of 900g and R-14 of 500g.

• Journal of Environmental Science International
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• v.23 no.5
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• pp.943-962
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• 2014

Industrial gas drying, dilute gas mixtures purification, air fractionation, hydrogen production from steam reformers and petroleum refinery off-gases, etc are conducted by using adsorptive separation technology. The pressure swing adsorption (PSA) has certain advantages over the other methods, such as absorption and membrane, that are a low energy requirement and cost-effectiveness. A key component of PSA systems is adsorbents that should be highly selective to a gas being separated from its mixture streams and have isotherms suitable for the operation principle. The six standard types of isotherms have been examined in this review, and among them the best behavior in the adsorption of $CO_2$ as a function of pressure was proposed in aspects of maximizing a working capacity upon excursion between adsorption and desorption cycles. Zeolites and molecular sieves are historically typical adsorbents for such PSA applications in gas and related industries, and their physicochemical features, e.g., framework, channel structure, pore size, Si-to-Al ratio (SAR), and specific surface area, are strongly associated with the extent of $CO_2$ adsorption at given conditions and those points have been extensively described with literature data. A great body of data of $CO_2$ adsorption on the nanoporous zeolitic materials have been collected according to pressure ranges adsorbed, and these isotherms have been discussed to get an insight into a better $CO_2$ adsorbent for PSA processes.