• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2006년도 춘계학술대회
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• pp.105-108
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• 2006

We investigated the fluidic gas-driven carbon-nanotube motor based on multi-wall carbon nanotubes and fluidic gas flow. Since the origination of the torque was the friction between the carbon nanotube surface and the fluidic gases, the density and the flow rate of the working gas or liquid were very important for the carbon nanotube motor. Molecular simulation results showed that multi-wall carbon nanotubes with very low rotating energy barriers could be effectively used for fluidic gas-driven carbon-nanotube motors.

• 대한전자공학회논문지SD
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• 제47권2호
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• pp.15-20
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• 2010

본 연구에서는 RF magnetron sputtering법으로 기판온도 $200^{\circ}C$에서 공정 압력 (5~20 mTorr)과 산소 가스비 (0~3%)를 변화시켜가며 PES 플라스틱 기판 위에 AZO (Al:3wt%) 박막을 제작하여 광학적 및 전기적 특성을 조사하였다. XRD 측정을 통해 공정 조건에 관계없이 모든 AZO박막이 c 축으로 우선 성장함을 확인할 수 있었다. 박막의 표면을 AFM 으로 조사한 결과, 표면 거칠기 값은 공정압력 5 mTorr, 산소 가스비 3%에서 제작한 박막에서 가장 낮은 값 (3.49 nm) 을 나타내었다. 모든 AZO 박막이 가시광 영역에서 80% 정도의 투과율을 보였으며, 공정 압력과 산소 가스비가 감소할수록 에너지 밴드갭이 증가하는 Burstein-Moss 효과를 관찰할 수 있었다. Hall 측정 결과, 공정 압력 5 mTorr와 산소 가스비 0%에서 제작한 AZO 박막에서 가장 높은 캐리어 농도 $2.63\;{\times}\;10^{20}\;cm^{-3}$ 값과 가장 낮은 비저항 $4.35\;{\times}\;10^{-3}\;{\Omega}cm$ 값을 나타내었다.

• 한국안전학회지
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• 제15권1호
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• pp.72-79
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• 2000

In recent, occupational diseases in harmful working places become a social issue. It is the well-known fact that a respiration in polluted working places exert a serious effect on health of workers. Accordingly, the cutting off contaminants air originally is the best way to improve working environments. In these cases, ventilation systems should be essentially installed to dilute or exhaust the contaminated indoor air. In this study, we investigated the characteristics of ventilation system of the noxious gas in working indoor places with natural ventilation by using COMET. The numerical simulations were carried out the natural ventilation with two phase(air, dust). For turbulent flow, Reynolds stresses were closed by the standard $\kappa$-$\varepsilon$ model. The results are as follows ; 1) In the natural exhaust in the working place, the flows of the central region have a more rapid velocity vector than the right and left one. 2) Numerical results show that the distribution of contaminants concentration have greater influence on convection than the case of diffusion by government of velocity vectors. 3) To observe the velocity variation with distance, three location of distance are considered. As results, it shows that the velocity are 0.075(m/s) at y=5(m), 10(m) and mean concentration are raised 10.6% at y=5(m), 10(m). 4) We have presented the useful data for the adequate counterplan in the harmful working places by carrying out the various investigation of the natural ventilation.

• 센서학회지
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• 제32권3호
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• pp.194-198
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• 2023

With the recent development of industrial technology, the problem of odor due to leakage of toxic gas discharged from industrial complexes is gradually increasing. Among them, hydrogen sulfide is a colorless representative odorous substance that can cause pain through irritation of the mucous membranes of the eyes and respiratory tract, and is a gas that can cause central nervous system paralysis and suffocation when exposed to high concentrations. Therefore, in order to improve the odor problem, research on a gas sensor capable of quickly and reliably detecting a leak of hydrogen sulfide is being actively conducted. A lot of research has been done on the existing metal oxide-based hydrogen sulfide gas sensor, but it has the disadvantage of requiring low selectivity and high temperature operating conditions. Therefore, in this study, a Pt/CNT-based electrochemical hydrogen sulfide gas sensor capable of detecting at low temperatures with high selectivity for hydrogen sulfide was developed. A working electrode capable of selectively detecting only hydrogen sulfide was fabricated by synthesizing Pt nanoparticles as a catalyst on functionalized CNT and applied to an electrochemical hydrogen sulfide gas sensor. It was confirmed that the manufactured Pt/CNT-based electrochemical hydrogen sulfide gas sensor has a current change of up to 100uA for hydrogen sulfide, and the both response time and recovery time were within 15 seconds.

• 센서학회지
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• 제32권5호
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• pp.290-294
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• 2023

Among various types of harmful gases, hydrogen sulfide is a strong toxic gas that is mainly generated during spillage and wastewater treatment at industrial sites. Hydrogen sulfide can irritate the conjunctiva even at low concentrations of less than 10 ppm, cause coughing, paralysis of smell and respiratory failure at a concentration of 100 ppm, and coma and permanent brain loss at concentrations above 1000 ppm. Therefore, rapid detection of hydrogen sulfide among harmful gases is extremely important for our safety, health, and comfortable living environment. Most hydrogen sulfide gas sensors that have been reported are electrical resistive metal oxide-based semiconductor gas sensors that are easy to manufacture and mass-produce and have the advantage of high sensitivity; however, they have low gas selectivity. In contrast, the electrochemical sensor measures the concentration of hydrogen sulfide using an electrochemical reaction between hydrogen sulfide, an electrode, and an electrolyte. Electrochemical sensors have various advantages, including sensitivity, selectivity, fast response time, and the ability to measure room temperature. However, most electrochemical hydrogen sulfide gas sensors depend on imports. Although domestic technologies and products exist, more research is required on their long-term stability and reliability. Therefore, this study includes the processes from electrode material synthesis to sensor fabrication and characteristic evaluation, and introduces the sensor structure design and material selection to improve the sensitivity and selectivity of the sensor. A sensor case was fabricated using a 3D printer, and an Ag reference electrode, and a Pt counter electrode were deposited and applied to a Polytetrafluoroethylene (PTFE) filter using PVD. The working electrode was also deposited on a PTFE filter using vacuum filtration, and an electrochemical hydrogen sulfide gas sensor capable of measuring concentrations as low as 0.6 ppm was developed.

• Nuclear Engineering and Technology
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• 제39권1호
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• pp.21-30
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• 2007

Current high-temperature gas-cooled reactors (HTGRs) are based on a closed Brayton cycle with helium gas as the working fluid. Thermodynamic performance of the axial-flow helium gas turbines is of critical concern as it considerably affects the overall cycle efficiency. Helium gas turbines pose some design challenges compared to steam or air turbomachinery because of the physical properties of helium and the uniqueness of the operating conditions at high pressure with low pressure ratio. This report present a review of the helium Brayton cycle experiences in Germany and in Japan. The design and availability of helium gas turbines for HTGR are also presented in this study. We have developed a new throughflow calculation code to calculate the design-point performance of helium gas turbines. Use of the method has been illustrated by applying it to the GTHTR300 reference.

• 한국전기전자재료학회논문지
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• 제18권10호
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• pp.909-916
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• 2005

The structural and electrical property of RF magnetron sputtered ZnO thin film have been studied as a function of RF power, substrate temperature, oxygen/argon gas ratio and film thickness at constant sputtering power, sputtering working pressure and target-substrate distance. To analyze a crystallo-graphic properties of the films, $\theta$/2$\theta$ mode X-ray diffraction, SEM, and AFM analyses. C-axis preferred orientation, resistivity and surface roughness highly depended on oxygen/argon gas ratio. The resistivity of ZnO thin film(6000 ${\AA}$) rapidly increased with increasing oxygen ratio and the resistivity value of $9 {\ast} 10^7 {\Omega}cm$ was obtained at a working pressure of 10 mTorr with the same oxygen/argon gas ratio. The surface roughness was also improved with increasing oxygen ratio and the ZnO films deposited with the same oxygen/argon gas ratio showed the excellent roughness value of 28.7 ${\AA}$. With increase of the substrate temperature, The C-axis preferred orientation of ZnO thin film increases and the resistivity decreases due to deviation from the stoichiometric ZnO due to oxygen deficiency.

• 반도체디스플레이기술학회지
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• 제5권1호
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• pp.13-16
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• 2006

AIN thin films were prepared on amorphous glass and $SiO_2(1{\mu}m)/Si(100)$ substrate by the facing targets sputtering (FTS) apparatus, which can provide high density plasma, a high deposition rate at a low working gas pressure. The AIN thin films were deposited at a different nitrogen gas flow rate ($1.0{\sim}0.3$) and other sputtering parameters were fixed such as sputtering power of 200w, working pressures of 1mTorr and AIN thin film thickness of 800 nm, respectively. The thickness and crystallographic characteristics of AIN thin films as a function of $N_2$ gas flow rate $[N_2/(N_2+Ar)]$ were measured by $\alpha$-step and an X-ray diffraction (XRD) instrument. And the c-axis preferred orientations were evaluated by rocking curve. In the results, we could prepared the AIN thin film with c-axis preferred orientation of about $5^{\circ}$ on substrate temperature R.T. at nitrogen gas flow rate 0.7.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.460-463
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• 2002

$MoO_3$ thin films were deposited on electrode and heater screen-printed alumina substrates in $O_2$ atmosphere by RF reactive sputtering using Molybdenum metal target. The deposition was performed at $300^{\circ}C$ with 350W of a forward power in an $Ar-O_2$ atmosphere. The working pressure was maintained at $3{\times}10^{-2}mtorr$ and all deposited films were annealed at $500^{\circ}C$ for 5hours. To investigate gas sensing characteristics of the addition doped $MoO_3$ thin film, Co, Ni and Pt were used as adding dopants. The sensing properties were investigated in tenn of gas concentration under exposure of reducing gases such as $H_2$, $NH_3$ and CO at optimum working temperature. Co-doped $MoO_3$ thin film shows the maximum 46.8% of sensitivity in $NH_3$ and Ni-doped $MoO_3$ thin film exhibits 49.7% of sensitivity in $H_2$.

• Transactions on Electrical and Electronic Materials
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• 제13권6호
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• pp.305-309
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• 2012

In this study, ZnO nanorods and $SnO_2$-CuO heterogeneous oxide were grown on membrane-type gas sensor platforms and the sensing characteristics for carbon monoxide (CO) were studied. Diaphragm-type gas sensor platforms with built-in Pt micro-heaters were made using a conventional bulk micromachining method. ZnO nanorods were grown from ZnO seed layers using the hydrothermal method, and the average diameter and length of the nanorods were adjusted by changing the concentration of the precursor. Thereafter, $SnO_2$-CuO heterogeneous oxide thin films were grown from evaporated Sn and Cu thin films. The average diameters of the ZnO nanorods obtained by changing the concentration of the precursor were between 30 and 200 nm and the ZnO nanorods showed a sensitivity value of 21% at a working temperature of $350^{\circ}C$ and a carbon monoxide concentration of 100 ppm. The $SnO_2$-CuO heterogeneous oxide thin films showed a sensitivity value of 18% at a working temperature of $200^{\circ}C$ and a carbon monoxide concentration of 100 ppm.