• 제목/요약/키워드: Wire Electric Discharge Machining

검색결과 43건 처리시간 0.034초

다양한 실리콘 웨이퍼 제조를 위한 와이어 전기 방전가공 (Wire Electric Discharge Machining Process of Various Crystalline Silicon Wafers)

  • 문희찬;최선호;박성희;장보윤;김준수;한문희
    • 한국전기전자재료학회논문지
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    • 제30권5호
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    • pp.301-306
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    • 2017
  • Wire electrical discharge machining (WEDM) process was evaluated to slice Silicon (Si) for various applications. Specifically, various Si workpieces with various resistances, such as single and multi crystalline Si bricks and wafers were used. As conventional slicing processes, such as slurry-on or diamond-on wire slicing, are based on mechanical abrasions between Si and abrasive, there is a limitation to decrease the wafer thickness as well as kerf-loss. Especially, when the wafer thickness is less than $150{\mu}m$, wafer breakage increases dramatically during the slicing process. Single crystalline P-type Si bricks and wafers were successively sliced with considerable slicing speed regardless of its growth direction. Also, typical defects, such as microcracks, craters, microholes, and debris, were introduced when Si was sliced by electrical discharge. Also, it was found that defect type is also dependent on resistance of Si. Consequently, this study confirmed the feasibility of slicing single crystalline Si by WEDM.

암석 절리면 거칠기의 정량화에 대한 연구(II) - 거칠기의 구분과 강도식의 제안 - (A New Quantification Method of Rock Joint Roughness (II) - Roughness classification and strength equation -)

  • 홍은수;조계춘;권태혁;이인모
    • 한국터널지하공간학회 논문집
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    • 제8권2호
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    • pp.183-196
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    • 2006
  • 카메라 방식의 3D 스캐너로부터 구한 암석 절리면의 거칠기를 만곡과 요철의 거칠기 성분으로 구분하였다. 거칠기의 구분 기준은 이전의 연구에서 도출된 것을 적용하였으며, 구분 방법으로는 디지털 필티링 기법을 사용하였다. 원래의 프로파일과 구분한 프로파일을 사용하여 금속 주형을 제작하였으며, 정밀한 가공을 위하여 WEDM(Wire-cut Electric Discharge Machining)을 사용하였다. 고강도 석고를 사용하여 시편을 복제하였고, 절리면 전단시험을 실시하였다. 낮은 연직응력 범위와 높은 연직응력 범위에서 전단시험을 실시하고, 거칠기의 규모와 연직응력에 따른 발현 특성을 분석하였다. 절리면 전단강도 예측을 위한 새로운 상관식을 제안하였으며, 이 상관식은 거칠기의 발현 특성과 거칠기 계수의 특성을 모두 효과적으로 고려할 수 있었다. 그러므로 거칠기의 구분에 의한 정량화가 절리면 전단강도 예측을 위한 효과적인 방법이 될 수 있음을 확인할 수 있었다.

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금형강 STD11의 가공방법이 표면특성에 미치는 영향 (Effects of Machining Methods on the Surface Characteristics of Die Steel STD11)

  • 최계광;남원종;이용신
    • 한국기계가공학회지
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    • 제3권3호
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    • pp.17-23
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    • 2004
  • The performance and life of a die are influenced by the machining methods. In order to examine the effects of machining methods on surface charactenstics, simple experiments are devised and performed. A die steel STD11, commonly used as a die material in press working, is selected. Three ways of machining methods to manufacture a die are considered. Those are (1) milling and then grinding, (2) wire-cut electric discharge dachining (W-EDM) and (3) heat treatment after W-EDM. The resulting surface roughnesses are measured. Also, the changes of surface microstructures are investigated using the scanning electron microscope(SEM) with energy dispersive X-ray spectrometer(EDS) and the results are discussed in details.

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가공액 환경에 따른 WEDG가공특성의 실험적 연구 (Experimental Study on the WEDG Machining Characteristics of Dielectric Conditions)

  • 정태현;배순흥;박규열
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2000년도 춘계학술대회 논문집
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    • pp.894-897
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    • 2000
  • 본 연구에서는 초미세 형상부품의 제작기술로서 방전가공기술의 활용을 전제로 하여, WEDG(Wire electric discharge grinding: WEDG)가공에 있어서 가공액의 공급방식을 포함한 공급환경이 표면상태에 미치는 영향에 관하여 조사하였다. WEDG법을 이용한 형상가공에 있어서는 단위 방전 펄스당의 에너지를 극소화하여 제거단위를 미세화함으로서 가공정밀도(가공표면 및 가공형상의 정밀도)를 향상시키는 것이 가능하다.(중략)

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티타늄합금의 와이어 방전가공시 방전가공 조건의 영향 (Effect of EDM Conditions when wire-EDM for Titanium Alloy)

  • 김종업;왕덕현;이윤경;김원일
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2001년도 춘계학술대회 논문집(한국공작기계학회)
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    • pp.281-286
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    • 2001
  • Titanium alloy conducted in this experimental study has superior corrosive resistant and is mainly used in aerospace, automotive and petro-chemical industries. It is also treated with important materials of domestic goods due to improvement of the standard of living. In this study specimens were processed in the wire EDM after annealing, solution treatment and aging. Results were obtained through repeated experments of main rough process and finish process with the change of process parameters. Processing characteristics such as surface hardness, surfaces roughness, shape of processed surface and components were measured. The results confirmed that the above mentioned elements were improved in accordance with the number of process. Therefore, the optimal wire EDM condition in accord with processing characteristics is proposed in this experiment.

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변형해석 및 공리적 설계에 의한 와이어 방전가공기의 설계평가 (Design Evaluation of WEDM Based on Deformation Analyses and Axiomatic Design)

  • 이형일;우상우;김주원;김충연
    • 대한기계학회논문집A
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    • 제26권5호
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    • pp.851-863
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    • 2002
  • Recent industrial requirements for highly precise shape processing have brought the electric discharge machining (EDM) in great need. High precision in EDM is primarily achieved by high performance controllers. However there exists inherent precision loss due to structural micro-deformation. On this background, we study structural deformation characteristics of wire cut EDM via finite element (FE) analysis and axiomatic design. Two different wire cut EDMs are selected as analysis models. 3D CAD package I-Deas is first used to construct FE models of wire cut EDMs, and then ABAQUS FE code is used for following structural analysis. Pertinency of FE mesh refinement is discussed in terms of η -factor. It is shown that performance accuracy of EDM depends strongly on the structural characteristics. Some design enhancements are suggested in an axiomatic design point of view. Finally we provide weight and temperature induced displacement discrepancies between wire end points as position functions of each subframe.

고온 열처리가 와이어 컷 가공면에 미치는 영향 (Effect of Heat Treatment on the Surface Machined by W-EDM)

  • 최계광;이용신
    • 소성∙가공
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    • 제15권8호
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    • pp.539-543
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    • 2006
  • Experimental studies are carried out in order to investigate the effects of heat treatment on the surface machined by W-EDM. In this work, two ways of heat treatment after W-EDM are considered. As a comparison, the machined surface by a traditional method such as milling/grinding is also considered. Thereby, specimens are prepared by four different machining methods. Those are (1) milling and then grinding, (2) wire-cut electric discharge machining (W-EDM), and (3) low temperature heat treatment or (4) high temperature heat treatment after W-EDM. The resulting surface roughness are measured and the changes of surface microstructures are investigated using the scanning electron microscope (SEM) with energy dispersive X-ray spectrometer (EDS). In general, heat treatment after W-EDM result in smoother surface and better chemical composition at the machined surface. Especially, high temperature tempering could remove defects in the thermally affected zone, which cause an overall deterioration of the surface machined by W-EDM.

기어 와어어 컷 가공시 가공오차에 대한 역설계 적용 (Application of Reverse Engineering for Manufacturing Errors at Manufacturing Gear using W-EDM)

  • 한민식;김민주;김진남;박정보;전언찬
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.460-463
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    • 2005
  • Gear is an important machine element to be used transmission in case short between axis. We drew gear using automatic design program to solve problem when it draw gear. We manufactured gears that it have different pressure angles using W-EDM. And we got a 2D profile of manufactured gear using reverse engineering. So we got to manufacturing error in comparison with CAD data and measured data. In result we could manufacture precise gear through improvement of manufacturing processes.

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와이어 컷 방전가공(W-EDM)후의 가공면 조도 고찰 (A Study on Surface Roughness in Wire - Cut Electric Discharge Machining)

  • 최계광;김세환
    • 한국산학기술학회:학술대회논문집
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    • 한국산학기술학회 2002년도 춘계학술발표논문집
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    • pp.59-64
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    • 2002
  • 프레스 금형의 부품제작에 주로 사용되는 와이어 컷 방전가공에서 가공횟수가 펀치와 다이 블록의 가공면조도에 미치는 영향을 고찰하고자 수행하였다. 본 연구의 수행을 위해 정 밀 가공 기술로 활용도가 증가되고 있는 와이어 컷 방전가공기(Sodic A500H)를 사용하여 1차, 2차, 3차 총 3회 가공을 실시하였다. 3회에 걸쳐 가공된 펀치와 다이블록의 가공면조도 고찰을 위해 표면조도거칠기 측정기(Federal 사의 System5000)를 사용하여 연구를 수행하였다.

3D CAD/CAM을 활용한 다이 플레이트의 설계 및 가공 (Study on die plate design and machining using the 3D CAD/CAM system)

  • 최계광
    • 한국산학기술학회논문지
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    • 제7권4호
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    • pp.550-553
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    • 2006
  • 본 논문에서는 다이 플레이트(Die Plate)를 제작할 때 생산성 향상을 위해서 3D CAD/CAM 시스템을 적용하였다. 사용된 3D CAD/CAM 소프트웨어는 UG NX 3.0이며 생성된 NC 코드는 CNC밀링 및 와이어 컷 방전가공기에 전송되어 다이 플레이트를 자동 가공한다.

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