• Journal of the Microelectronics and Packaging Society
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• v.16 no.3
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• pp.45-51
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• 2009

Vertical wet equipment was newly developed in stead of horizontal wet equipment which has been widely used for BGA develop process. We intended to eliminate the collision problem between equipment's transferring rollers and fine circuit patterns, which could be achieved by fixing the BGA panel vertically using jig unit. The process characteristics of vertical wet equipment were evaluated by conducting uniformity evaluation, pattern damage evaluation and defect analysis. The process uniformity of the vertical equipment was measured to be the same level as the uniformity of horizontal equipment. And it was measured that $3{\sim}4{\mu}m$ finer circuit pattern could be processed adopting vertical equipment rather than horizontal equipment.

• Journal of IKEEE
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• v.23 no.1
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• pp.107-111
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• 2019

In FPD WET equipment, heaters are used a lot. There are many electric accidents caused by short circuit and overheating due to the use of heater, so it is necessary to have a safe electric system and interlock. Therefore, in this paper, we propose an electrical schematic and interlock for FPD WET equipment. In this paper, a hardware interlock such as a level sensor, an overheat protector, and an SSR heater sink is inserted, and the electric system is composed of ELB - MC - SSR - EOCR - heater. When the interlock occurs, the magnetic contactor (MC) is turned off and the power of the heater is cut off.EOCR, an electric overcurrent protection device, has an interlock to shut down the MC when there is an abnormality in the heater while checking the overcurrent, undercurrent and disconnection. These circuit configurations and interlocks are likely to be useful not only for WET equipment but also for any equipment in which the heater is placed.

• Journal of the Korean Vacuum Society
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• v.18 no.4
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• pp.310-317
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• 2009

Vertical wet equipment for the BGA develop process was newly developed substituted for conventional horizontal wet equipment. The benefits of vertical equipment are that the pattern damages generated by the collision between the patterns and transferring rollers can be eliminated because the direct contact between the equipment's transferring units and the soft dry film patterns does not occurs. Taguchi experiment was conducted to optimize the process characteristics for the vertical equipment. The experiment was organized as the smaller the better problem which includes adequate uncontrollable factor and controllable factors. The uncontrollable factors are the 4 sides of two panels which are loaded to the equipment at the same time. By the analysis of the experiment, temperature of the develop chemicals and develop spraying time are analyzed as the main controllable factors. Finally, line pattern's minimum width which is not damaged for the develop process was improved from $13.8{\mu}m$ for the horizontal equipment to $10.4{\mu}m$ for the vertical equipment. And dot pattern's minimum width is improved from $22.1{\mu}m$ to $16.3{\mu}m$.

• Proceedings of the Korean Society for Agricultural Machinery Conference
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• 1996.06c
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• pp.711-714
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• 1996

The energy saving base technological processes were substantiated and high efficient equipment for the wet fractionation of the leafstalk biomass of the annual and perennial sown grasses into the multipurpose products was designed.

• The Transactions of the Korea Information Processing Society
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• v.6 no.5
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• pp.1385-1392
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• 1999

This paper describes the design of the monitoring system for monitoring the current status and indirect controlling of the Wet Station Equipment which is used for cleaning the wafer. Most of the conventional monitoring system depend on the special hardware and software. Basic design goal of monitoring system is provide the convenience for the use and the portability for the system. In order for the system to fulfil its requirements, it was designed using GUI (Graphical User Interface) facility based on the windows NT environment of IBM PC compatible and EtherNet board based on the TCP/IP protocol.

• Journal of Ocean Engineering and Technology
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• v.6 no.2
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• pp.113-124
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• 1992

The offshore industry created a need for quality wet weld repairs. Wet welding is a fast method of repair providing sound, structural quality welds. It requires less support equipment than a similar underwater dry weld repair or the alternative mechanical connections. Compared to welds made in air, underwater wet welds are plagued by increased hardness due to rapid quenching by the surrounding water. In this paper is described the experimntal study of improving the cooling rates of wet welds of TMCP steel plate by shielding around weld arc surroundings. The principal results of this experimental investigation can be summarized as follows : By shielding around weld arc surrounding, the cooling rates resulting from wet welds on TMCP steel plate could be lower than that of nonshielded wet welds and the fesibility on high quality of mecanical properties of wet weld on TMCP steel plate was carried out with shielded weld arc surrounding.

• Journal of environmental and Sanitary engineering
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• v.17 no.4
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• pp.1-9
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• 2002

In order to define about concern with discharge and water-quality, it is calculated drought flow, low flow, normal flow and wet flow in Chungju watershed from flow duration analysis. Water quality modeling study is performed for forecasting at upstream of Chungju lake. It is devided method of modeling into before and after the equipment of environmental treatment institution. And it is estimated the change of water quality. Before the equipment of environmental treatment, BOD concentration is increased from 23000 to 2006 years at all site and decrease on 2012 years. The rate of increasing BOD concentration is showed height between 2000 years and 2003 years most of all site. And after the equipment of environmental treatment, it is showed first grade of BOD water quality in most of sample site beside Jucheon river. The result of water quality modeling using drought flow showed that a lot of pollution occurred. And water quality using wet flow is good, so much discharge make more improve water quality than little discharge.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.2
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• pp.193-201
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• 2011

Clamp type transferring mechanism for package substrate's wet processes was newly developed instead of conventional roller type transferring mechanism. Clamp type transferring mechanism has the advantages of reducing the panel deflection and of minimizing the contact problem between the panel and the transferring mechanism. Individual clamp of the mechanism has two distinct mechanical functions which are perfectly fixing a panel during the transferring and generating adequate tension for the panel. To determine the mechanical parameters of the clamp, panel deflection simulation was conducted and the result was verified by the panel deflection measurement. Also, fixing angle of a clamp could be determined by the free body force analysis of individual clamp. Finally clamp type transferring mechanism was actually manufactured and the transferring performance was verified during the water spraying condition of the package substrate's wet processes.

• Journal of Drive and Control
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• v.17 no.1
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• pp.76-80
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• 2020

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.12a
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• pp.186-191
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• 2003