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RTN과 Wet Oxidation에 의한 $Ta_2O_5$의 전기적 특성의 최적화

  • 정형석;임기주;양두영;황현상
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.104-104
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    • 2000
  • MOS소자의 크기가 작아짐에 따라 gate 유전막의 두께 또한 얇아져야 한다. 두께가 얇아짐에 따라 gate 유전막으로써 기존의 SiO2는 direct tunneling으로 인해 높은 누설전류를 수반한다. 그래서 높은 유전상술르 가지는 물질들에 대한 연구의 필요성이 대두되고 있다. 그중 CVD-Ta2O5는 차세대 MOSFET소자기술에 있어서 높은 유전상수($\varepsilon$r+25)와 우수한 step coverage 때문에 각광을 받고 있는 물질중에 하나이다. 본 연구에서는 Ta2O5를 gate를 유전막으로 사용하고 RTN처리와 wet oxidation을 접목시켜 이들의 전기적인 특성을 향상시킬 수 있었다. p-형 wafer 위에 D2와 O2를 사용하여 SiO2(100 )를, NH3를 이용하여 Nitridation(10 )을 전처리로써 각각 실시하였고 그 위에 MOCVD방법으로 Ta2O5를 80 성장시켰다. 첫 번째 시편은 45$0^{\circ}C$ 10min동안 wet oxidation을 시켰고, 두 번째 시편은 $700^{\circ}C$ 60sec동안 NH3 분위기에서 RTN 처리를 하였다. 세 번째 시편은 동일조건으로 RTN 처리후 wet oxidation을 하였다. 그 후 각각의 시편을 capacitor를 제작하고 그 전기적 특성을 관찰하였다. Wet oxidation만을 시킨 시편은 as-deposited Ta2O5 시편에 비해서 -1.5V에서 누설전류는 약 2~3 order정도 감소되었고 accumulation 영역에서의 capacitance 값은 oxide층의 성장(5 )을 무시하면 거의 변화하지 않았다. RTN처리만 된 시편의 경우는 -1.5V에서 누설전류는 2~3order 정도 증가되었지만, accumulation 영역에서 capacitance 값은 거의 2qwork 증가하였다. 이 두가지 공정을 접목시킨 즉 RTN 처리후 wet oxidation 처리된 시편의 경우는 as-deposited Ta2O5 시편에 비해서 -1.5V에서 누설전류는 1 order 정도 감소하였고, accumulation 지역에서의 capacitance 값은 약 2배 증가하였다. 즉 as deposited Ta2O5 시편의 accumulation 지역의 capacitance 값은 12.8 fF/um2으로써 그 유효두께는 27.0 이었지만, RTN 처리후에 wet oxidation 시킨 시편의 accumulation 지역의 capacitance값은 21.2fF/um2으로써 그 유효두께는 16.3 이 되었다. 결론적으로 as deposited Ta2O5 시편에 RTN 처리후 wet oxidation을 실시한 결과 capacitance 값이 약 2배정도 증가하였고 누설전류는 약 1 order 정도 감소됨을 확인하였다.

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Quality Characteristics of Baked Rice Cake using Dry and Wet Rice Powder (습식과 건식 쌀가루 종류를 달리하여 구운 떡의 품질 특성)

  • Park, Young Mi;Jung, Hyo Sun;Yoon, Hye Hyun
    • Culinary science and hospitality research
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    • v.23 no.7
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    • pp.129-139
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    • 2017
  • This study investigated the quality characteristics of baked rice cake using dry and wet rice flour. The moisture contents, color values, texture and sensory evaluation(attribute difference and acceptance) for the samples were tested. The moisture content of baked rice cake was the highest in rice cake baked with non- glutinous rice of dry type, and rice cake baked in dry type had weaker brownishness and therefore had higher brightness value compared to the rice cake baked in wet type. In relation to the texture, the hardness was found to be the highest in the rice cake baked with wet non- glutinous rice, and the rice cake baked with glutinous rice was found to be soft. The hardness was the lowest in both wet and dry glutinous rice, and was the highest in the wet non- glutinous rice. Attribute difference test of samples showed that, the rice cake baked with glutinous rice showed clear manifestation of springiness, moistness, adhesiveness, and gumminess (except for the harness). Although the cake baked with dry rice powder showed no significant difference, the dry glutinous rice flour was preferred the most. The rice cake baked with wet glutinous rice flour was preferred the most in terms of flavor, taste, texture, and overall acceptability.

The Role of Charge and Retention in Effective Wet end Management

  • Rantala, T.;Nokelainen J.;Ojala, T;Dr. Taina Sopenlehto
    • Proceedings of the Korea Technical Association of the Pulp and Paper Industry Conference
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    • 2000.06a
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    • pp.1-10
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    • 2000
  • The development of paper machines, increasing machine speeds with new, mostly low basis weight and/or high ash content paper grades, as well as the fact that several trends regarding process items have increased the sensitivity of papermaking. At the same time, papermakers are looking for flexibility in the production line. We can say that with all PMs the biggest benefits with the lowest capital spending can be achieved by focusing on improved wet end management. In order to manage wet end chemistry on a paper machine, our goal is to control sub-process through which we can influence the operation of the entire wet end with maximum effect. Key measurements and controls are-white water consistency control which is the most effective way to control retention - charge demand measurement and control which takes care of concentration of the anionic material entering to PM -ash measurements and controls which are deeply related to retention and paper quality This paper presents and concentrates to two of these key controls ; retention and charge. The purpose of charge control is to give the process control the tools to react to changes caused by amount of dissolved and colloida material incoming to wet end system. It is called coagulation or fixing control. Retention control is then taking care of retention aid flow to the process by responding any changes seen in white water consistency. It is called flocculation control. Each of these solutions separately , and even more effectively all together, stabilize the wet end operations and so greatly improve the produced paper quality and machine runnability. Practical results will be presented and they are referring to the latest mill cases. We have developed the first wet end measuring system in the late 1980s and control solutions based on this modern measuring technology were completely updated in 1990s. This paper introduces the principle, operation , and results of our unique wet end analyzers (retention and charge ) which are at the level of automation solutions as a part of paper machine quality control Especially our newest member of the platform , on-line charge analyzer has reached and set new standards to the on-line charge monitoring.

The Role of Charge and Retention in Effective Wet End Management

  • Rantala, T.;Nokelainen, J.;Ojala, T.;Sopenlehto, Taina
    • Journal of Korea Technical Association of The Pulp and Paper Industry
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    • v.32 no.5
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    • pp.44-53
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    • 2000
  • The development of paper machines, increasing machine speeds with new, mostly low basis weight and/or high ash content paper grades, as well as the fact that several trends regarding process items have increased the sensitivity of papermaking. At the same time, papermakers are looking for flexibility in the production line. We can say that with all PMs, the biggest benefits with the lowest capital spending can be achieved by focusing on improved wet end management. In order to manage wet end chemistry on a paper machine, our goal is to control subprocesses through which we can influence the operation of the entire wet end with maximum effect. Key measurements and controls are - white water consistency control which is the most effective way to control retention. - charge demand measurement and control which takes care of concentration of the anionic material entering to PM. - ash measurements and controls which are deeply related to retention and paper quality. This paper presents and concentrates to two of these key controls: retention and charge. The purpose of charge control is to give the process control the tools to react to changes caused by amount of dissolved and colloidal material incoming to wet end system. It is called coagulation or fixing control. Retention control is then taking care of retention aid flow to the process by responding any changes seen in white water consistency. It is called flocculation control. Each of these solutions separately, and even more effectively all together, stabilize the wet end operations and so greatly improve the produced paper quality and machine runnability. Practical results will be presented and they are referring to the latest mill cases. We have developed the first wet end measuring system in the late 1980s and control solutions based on this modern measuring technology were completely updated in 1990s. This paper introduces the principle, operation, and results of our unique wet end analyzers (retention and charge) which are at the level of automation solutions as a part of paper machine quality control. Especially our newest member of the platform, on-line charge analyzer has reached and set new standards to the on-line charge monitoring.

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Acoustic analysis of wet voice among patients with swallowing disorders (삼킴장애 환자의 wet voice 관련 음향학적 분석)

  • Kang, Young Ae;Koo, Bon Seok;Kwon, In Sun;Seong, Cheoljae
    • Phonetics and Speech Sciences
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    • v.10 no.4
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    • pp.147-154
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    • 2018
  • Wet voice quality (WVQ) is a characteristic that appears after swallowing. Although the concept is accepted by many clinicians worldwide, it is nevertheless ambiguous. In this study, we investigated WVQ in patients with swallowing disorders using acoustic analysis. A total of 106 patients diagnosed with penetration-aspiration by the videofluoroscopic swallowing study (VFSS) were recruited. A voice recording of vowel /a/ was conducted before and after the VFSS, and an acoustic analysis was then performed using PRAAT. Voice after VFSS was used for a perceptual judgment and divided into two groups: the Wet group (48 patients) and the Non-wet group (58 patients). At the post-VFSS stage, the two groups displayed significant differences in many acoustic parameters including F0_SD, Jitter, RAP, Shimmer, APQ, HNR, NHR, FUF, DVB, and CPP. The parameter affecting judging wetness resulted into Jitter and NHR by the logistic regression test. At the pre-VFSS stage, the two groups differed significantly in many acoustic parameters including Intensity, Jitter, RAP, Shimmer, NHR, FUF, DVB, and CPP. Both pre-and post-VFSS, the mean values of all significant parameters, except Intensity, HNR, and CPP, were higher in the Wet group. According to pre-and post-VFSS, the two groups displayed interactions in many parameters (Intensity, F0_SD, Jitter, RAP, Shimmer, APQ, HNR, NHR, FUF, DVB, and CPP). In particular, Intensity increased in both groups after the VFSS, although the increase in the Non-wet group was greater. Based on these results, it was conjectured that the WVQ after swallowing resulted from the secretion effect of the mucous membrane due to the dry laryngeal characteristic of elderly patients, rather than aspiration resulting in food on the vocal cords.

Amount of bacteria over time according to the use of antibacterial and wet wipes behavior (항균티슈와 물티슈 사용에 따른 시간별 세균 수 변화의 차이)

  • Han, Su-Min;Kim, Eun-Ji;Seomoon, Hye-Ji;Lim, Su-Min;Han, Ji-Young;Koong, Hwasoo
    • Journal of Korean Dental Hygiene Science
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    • v.5 no.1
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    • pp.21-27
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    • 2022
  • Background: This study was conducted to analyze the time for re-detection of bacteria after surface disinfection using wet wipes, isopropyl alcohol, and benzalkonium chloride antibacterial tissue and provide standards for re-execution of surface disinfection with wet and antibacterial tissues. Methods: Seven laptops were wiped with wet tissue and isopropyl alcohol and benzalkonium chloride antibacterial tissues. Test areas were rubbed with a sterile cotton swab at baseline and after 30, 60, and 120 min. After plating on a tryptic soy agar medium, the number of colonies was counted by culturing at 36.5℃ for 24 h. Results: The average number of bacterial colonies was 5.85 ± 4.33 before isopropyl alcohol wiping and nil after wiping. The average number of bacterial colonies was 12.28 ± 14.67 benzalkonium chloride wiping and nil after wiping. Before wiping with wet wipes, the average number of bacterial colonies on laptop surfaces was 3.42 ± 5.22. Bacteria decreased after wiping with wet wipes but increased again over time. Conclusions: Wet wipes can temporarily reduce bacteria but are unsuitable for removing bacteria.

Reproductive Progress and Heavy Metal Contamination of Feral Pigeons (Columba livia) in Seoul and the Ansan Industrial Complex areas (도심 및 공단지역에 서식하는 비둘기의 중금속 축적과 번식 경과 비교)

  • 남동하;이두표;구태회
    • Korean Journal of Environmental Biology
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    • v.21 no.2
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    • pp.149-157
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    • 2003
  • This study focused on relationships between Pb and Cd concentrations and the difference of success reproductive progress in urban (Seoul) and industrial complex (Ansan) areas. Results of the Pb analysis for the feral pigeons from Seoul (egg contents:1.64 $\mu\textrm{g}$ wet $g^{-1}$, adults in bones: 29.5 $\mu\textrm{g}$ wet $g^{-1}$ and the Ansan industrial complex (egg contents: 1.13 $\mu\textrm{g}$ wet $g^{-1}$, adults in bones: 10.5 $\mu\textrm{g}$ wet g-1) showed that the Pb level of eggs and adults is significantly different between the two colonies (p<0.05). Cd concentrations in liver and kidneys of adult pigeons were also significantly different between Seoul(liver: 0.24 ${\mu}g$ wet $g^{-1}$, kidney: 1.05 $\mu\textrm{g}$ wet $g^{-1}$ and the Ansan (liver: 0.14 $\mu\textrm{g}$ wet $g^{-1}$, kidney: 0.43 $\mu\textrm{g}$ wet $g^{-1}$ colonies (P<0.05). Clutch size of Feral Pigeons living in Seoul was similar between the two colonies, 1.9$\pm$0.3 in Seoul and 2.0$\pm$0.0 in Ansan. The length, breadth, and thickness of eggs were not significantly different between the two colonies (p>0.05). Incubation period in Seoul (17.8 days) did not differ from the Ansan (17.4 days). No difference in growth rate (body weight, wing length, and tarsus length) was found between the two test groups (p>0.05). In Seoul, 65.2% were hatching, and 42.1% fledging. The Proportion of hatching and fledging in the Ansan was 60.7% and 45.0%, respectively. The significant differences between the two colonies for reproductive sucess were not found (p>0.05). With regard to the reproductive effects to the heavy metals, the Pb and Cd concentrations feund in the two colonies were not as high as those considered in results of toxic effects in other species.

ON THE STABILITY OF A WET-LAND MODEL

  • Hashem, Ali A.
    • Journal of applied mathematics & informatics
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    • v.8 no.3
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    • pp.841-853
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    • 2001
  • Mathematical models for studying the effect of ecological changes caused by the excessive growth of wild changes on the existence of various species in wet-land are investigated. Local stability criteria is also discussed.

Reduction of the Wet Surface Heat Transfer Coefficients from Experimental Data

  • Kim, Nae-Hyun;Sim, Yong-Sub
    • International Journal of Air-Conditioning and Refrigeration
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    • v.12 no.1
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    • pp.37-49
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    • 2004
  • Four different data reduction methods for the heat transfer coefficients from experimental data under dehumidifying conditions are compared. The four methods consist of two heat and mass transfer models and two fin efficiency models. Data are obtained from two heat exchanger samples having plain fins or wave fins. Comparison of the reduced heat transfer coefficients revealed that the single potential heat and mass transfer model yielded the humidity-independent heat transfer coefficients. Two fin efficiency models-enthalpy model and humidity model-yielded approximately the same fin efficiencies, and accordingly approximately the same heat transfer coefficients. The heat transfer coefficients under wet conditions were approximately the same as those of the dry conditions for the plain fin configuration. For the wave fin configuration, however, wet surface heat transfer coefficients were approximately 12% higher. The pressure drops of the wet surface were 10% to 45% larger than those of the dry surface.

Braking Characteristics of Friction Disk made of Carbon Paper for Wet-type Multiple Disk Brakes of Crane Turning Decelerator (크레인 선회감속기의 습식 다판 브레이크를 위한 카본 페이퍼 마찰 디스크의 제동 특성)

  • Cho, Yonsang;Bae, Myongho
    • Tribology and Lubricants
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    • v.28 no.3
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    • pp.112-116
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    • 2012
  • wet-type multiple disk brakes are very important parts of turning decelerator for deck crane, because they are advanced in durability and braking power, and can be designed compactly. Thus, we designed and made wet-type multiple disk brakes of turning decelerator for deck crane to be localization of these imported all. In this study, wet multiple disk brakes were made a comparative test with the 2 types materials of friction disk by the SAE No.2 dynamometer. The friction characteristics were measured and analyzed to decide a suitable material as wear depth of friction disk and dynamic and static friction coefficient.