• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.236-236
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• 2011

Silicon oxynitride (SiON) was deposited for gas barrier film on polyethylene terephthalate (PET) using octamethylycyclodisiloxane (Si4O4C8H24, OMCTS) precursor by plasma enhanced chemical vapor deposition (PECVD) at low temperature. The ion flux and substrate temperature were measured by oscilloscope and thermometer. The chemical bonding structure and barrier property of films were characterized by Fourier transform infrared (FT-IR) spectroscopy and the water vapor transmission rate (WVTR), respectively. The deposition rate of films increases with RF bias and nitrogen dilution due to increase of dissociated precursor and nitrogen ion incident to the substrate. In addition, we confirmed that the increase of nitrogen dilution and RF bias reduced WVTR of films. Because, on the basis of FT-IR analysis, the increase of the nitrogen gas flow rate and RF bias caused the increase of the C=N stretching vibration resulting in the decrease of macro and nano defects.

• Journal of Korean Vacuum Science & Technology
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• 제6권2호
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• pp.105-107
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• 2002

a-C:H films were coated on windows of mobile telephone by RF plasma chemical vapor deposition equipment made in our company. Thickness of the coatings is about 0.7 micrometers and they have high hardness, low friction coefficient, good adhesion, high optical transparency and chemical inertness. Knoop hardness of the diamond-like carbon films on glass substrate is 2328 kg/mm$^2$. The adherence between films and substrate is good and shows to be 69 N by scratching test. The optical performance is improved obviously owing to coat the film on it. The index of the coated windows is 2.5, transmission of visible light is larger than 90%, and transmission of ultraviolet light decreases by 30% and the ultraviolet light can be obstructed obviously. The coated glass also has self-clean effect and decontamination ability. The films have hydrophobic character and the soakage angle of water drop is larger than 90 degrees. The windows have fog-proof ability owing to eliminate the capillary phenomena in the inner surface. The physics and chemical properties of the coated windows are steady. Study indicates that the performance of a-C:H coated mobile phone windows are improved notably on wear-resistance, corrosion-proof and optical properties and it is excellent mobile windows protective coatings.

• 한국결정성장학회지
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• 제33권3호
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• pp.97-103
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• 2023

수분 차단성이 우수한 투명 포장재용 배리어성 필름을 개발하기 위하여, 상온 진공하에서 플라즈마 활성화 표면처리 공정의 전처리 공정을 거친 후에, 나노클레이 분산 적층 코팅층을 형성한다. 접착력 향상을 위한 코팅 공정의 적절한 가교공정과 최적분산공정을 통한 커플링 첨가제를 최적화하는 데 중점을 두었다. 기능성 코팅 박막에 대하여 분석한 결과는 수분 투과도 10 g/m²/24 hrs(ASTM F-1249) 이하, 산소 투과도 30 cc/m²/24 hrs(ASTM D3985) 이하임을 보여주었다. 이는 종래의 무처리 필름의 10배 이상 수분 차단성이 우수한 투명 포장용 표면기능성 코팅박막에 해당됨을 보였다. 아울러, 투명가스 차단 필름의 두께는 0.1 mm 이내이며, 투명가스차단 복합층은 2개의 층으로 구성되었다. PET 박막 계면 특성연구에서, FT-IR의 실험분석에 의하면 R DS 1.125 %에서 반응 활성도가 최적화임을 나타내고 있다.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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• pp.91-94
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• 2004

We report on the opto-electronic properties of red, green, and blue poly (fluorene) co-polymer light-emitting devices (PLEDs) fabricated on a flexible plastic substrate. The plastic substrate used has a multi-layer structure with water vapor and oxygen transmission rates of less than $10^{-5}$ g/$cm^2$-day-atm and $10^{-7}$ cc/$cm^2$-day-atm, respectively. We obtained a wide range of color gamut and a maximum emission efficiency of 0.7, 10, and 1.7 cd/A for red, green, and blue PLEDs, respectively. Finally, a simple equivalent circuit model is proposed to simulate PLED current density-voltage characteristics.

• 천문학회보
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• 제38권2호
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• pp.62.1-62.1
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• 2013

We present the Exposure Time Calculator of IGRINS (Immersion Grating Infrared Spectrograph). The noises of IGRINS and the simulated emission line can be calculated from the combination of Telluric background emission and absorptions, the emission and transmission of the telescope and instrument optics, and the dark noise and the read noise of the infrared arrays. For the atmospheric transmissions, we apply the simulated spectra depending on the Precipitable Water Vapor (PWV) values. In case of calculation of noises, the user needs to input the expected target magnitude, the weather conditions, and the desired exposure time. In addition to the simulated emission line, the parameters of rest wavelength, line-flux, Doppler shift and line-width are needed. The output would be the expected signal-to-noise for each spectral resolution element. The source-code of IGRINS-ETC v2.1.1 is available to be downloaded on the World Wide Web.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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• pp.746-749
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• 2002

Aluminum oxide thin films were grown on a poly ethylene naphthalate (PEN) substrate at the temperature of 100$^{\circ}C$ using atomic layer deposition method. The film showed very flat morphology and good adhesion to the substrate. The visible spectrum showed higher transmittance in the range from 400 nm to 800 nm than that of PEN. The water vapor transmission value measured with MOCON for 230nm oxide-deposited PEN was 0.62g/$m^2$/day @ 38$^{\circ}C$, while that of PEN substrate was 1.4g/$m^2$/day @ 38$^{\circ}C$.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.465-465
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• 2012

In this study, we developed an Al2O3 nanolaminated single gas barrier layer using a Neutral Beam Assisted Sputtering (NBAS) process. The NBAS process can continuously change crystalline structures from an amorphous phase to a nanocrystal phase with various grain sizes and lead to the formation of a nanolaminated structure in the single inorganic thin film. As a result, the water vapor transmission rates (WVTR) of the nanolaminated Al2O3 thin films by NBAS process have improved more than 40% compared with that of conventional Al2O3 layers by the RF magnetron sputtering process under the same sputtering conditions.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.163-163
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• 2012

차세대 모바일용 전자디스플레이로 각광받고 있는 FOLED (flexible organic light emitting display)의 연구에서 display의 신뢰성과 수명은 매우 중요한 연구 테마이다. OLED의 수명단축에 영향을 미치는 요소는 수분에 의한 열화가 가장 치명적이다. Barrier layer를 통한 수분의 주요 침투경로는 pin-hole과 void 등과 같은 defect에 의한 것으로 보인다. 수분의 침투 경로를 제어하는 OLED용 barrier layer의 요구조건은 WVTR (water vapor transmission rate)이 $10^{-6}g/m^2{\cdot}day$ 이하로 낮아야 한다. Barrier layer가 가져야 할 핵심적인 조건은 유연성을 가지면서 동시에 WVTR 값이 매우 낮아야 하는데, 아직까지 이를 만족하는 barrier layer의 개발은 아직 덜된 실정이다. 본 연구에서는 PET (polyethylene terephthalate) 기판에 sputtering법으로 barrier layer를 제조하였다. 증착에 이용한 타겟은 두가지 종류인 Al과 $Al_2O_3$를 사용하였으며, 다층박막으로 제조하였다. 제조된 barrier layer의 수분침투 특성은 WVTR의 측정으로, 유연성의 평가는 in-situ fatigue test를 수행하여 측정하였다. 종합적인 특성 평가를 위하여 SEM과 AFM (atomic force microscope) 관찰도 하였다.

• 천문학회보
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• 제36권2호
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• pp.151.1-151.1
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• 2011

We present the Exposure Time Calculator of IGRINS. The noises of IGRINS can be calculated from the combination of Telluric background emission and absorptions, the emission and transmission of the telescope and instrument optics, and the dark noise and the read noise of the infrared arrays. For the atmospheric transmissions, we apply the simulated spectra depending on the Precipitable Water Vapor (PWV) values. The user needs to input the expected target magnitude, the weather conditions, and the desired exposure time. The output would be the expected signal-to-noise for each spectral resolution element.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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• pp.496-498
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• 2005

We reported that high dielectric hafnium oxide nano-film deposited by thermal atomic layer deposition on the poly-silicon film (poly-Si). The poly -Si film was produced by plasma enhanced chemical vapor deposition and excimer laser annealing. We used the hafniu m chloride ($HfCl_4$) and water as the precursors and analyzed the hafnium oxide film by transmission electron microscope and secondary ion mass spectrometer. Hafnium oxide produced by the ALD method showed very good coverage on the rough surface of poly-Si film. While deposited with 200 cycles, these hafnium oxide films revealed a relatively smooth surface and good uniformity, but the cumulative roughness produced by the incomplete reaction was apparent when the amount of deposition cycle increased to 600 cycles.