• Korean Journal of Optics and Photonics
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• v.4 no.1
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• pp.15-21
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• 1993

This paper describes the design and development of a KrF excimer laser stepper and discusses the detailed system parameters and characterization data obtained from the performance test. We have developed a deep UV step-and-repeat system, operating at 248 nm, by retrofitting a commercial modules such as KrF excimer laser, precision wafer stage and fused silica illumination and 5X projection optics of numerical aperture 0.42. What we have developed, to the basic structure, are wafer alignment optics, reticle alignment system, autofocusing/leveling mechanisms and environment chamber. Finally, all these subsystem were integrated under the control of microprocessor-based controllers and computer. The wafer alignment system comprises the OFF-AXIS and the TTL alignment. The OFF-AXIS alignment system was realized with two kinds of optics. One is the magnification system with the image processing technique and the other is He-Ne laser diffraction type system using the alignment grating on the wafer. 'The TTL alignment system employs a dual beam inteferometric method, which takes advantages of higher diffraction efficiency compared with other TTL type alignment systems. As the results, alignment accuracy for OFF-AXIS and TTL alignment system were obtained within 0.1 $\mu\textrm{m}$/ 3 $\sigma$ for the various substrate on the wafers. The wafer focusing and leveling system is modified version of the conventional systems using position sensitive detectors (PSD). This type of detection method showed focusing and leveling accuracies of about $\pm$ 0.1 $\mu\textrm{m}$ and $\pm$ 0.5 arcsec, respectively. From the CD measurement, we obtained 0.4 $\mu\textrm{m}$ resolution features over the full field with routine use, and 0.3 $\mu\textrm{m}$ resolution was attainable under more strict conditions.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.5 no.4
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• pp.777-790
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• 2001

Theoretical analyses have been tried to design high power and stable operating SLD at 1.55${\mu}{\textrm}{m}$ wavelength range which is the lowest absorption wavelength in optical fiber. The materials of active layer and SCH layer were chosen as conventional In1-xGaxAsyPl-y quaternary composition systems. From the transverse mode and the lateral mode analyses of waveguide, the optical power distributions and the optical confinement factor have been studied for single-mode high power operation. According to these analyses, it was calculated the composition and the thickness of SCH layer to obtain the maximum optical confinement factor. In order to obtain low values of the reflectivity, we used the window region and the lateral tilted angle between tile active region and window region. And the reflectivity of SLD was calculated with the gaussian beam approximation and mode analysis. From these researches, it was confirmed for several results to fabricate the efficient and stable SLD. In case of using $1.3\mum$, InGaAsP SCH layer, the layer thickness was obtained $0.08\mum$, to get the maximum optical confinement factor. Using $0.2\mum$, active layer thickness and $0.08\mum$, SCH layer thickness, the window region length is about $100\mum$ without An coating, $10\mum$ in 1% AR coating to obtain about 10-4 reflectivity. When the tilted angle is about $10~15^{\circ}$, the reflectivity is about 10-3. From these results, if the window region length and tilted angle were controlled appropriately in given device structure, it was confirmed that it is possible to fabricate the stable SLD without AR coating analytically.

• Journal of Korean Society of Steel Construction
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• v.26 no.1
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• pp.43-53
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• 2014

A single plate connection(SPC) consists of a plate welded to the columns and bolts connected to the beam web. The SPC is widely used for a simple shear connection of steel structure because it is easy-to-fabricated, easy-to-installed and economical. The conventional SPC is used for 2 to 12 bolts in a single vertical row. It is designed to limit the plate thickness by bolt diameter to obtain flexible and ductile connections. The design strength for eccentric shear shall be the lesser of the shear strength of bolts or bearing strength of plate and when the design strength is decided by edge distance failure, the results can be very conservative. Although the research on special solution for 'weak-plate/strong-bolt' model with 2 to 4 bolts has been conducted by L. S. Muir, and W. A. Thonton, 2004, study on generalized design procedures did not conduct. This study proposed design procedure for evaluation of the design strength of eccentric shear bolt groups on a single plate connection based on the actual edge distance and the direction of bolt reaction forces by using elastic vector method(EVM) and instantaneous center of rotation method(ICM).

• Radiation Oncology Journal
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• v.10 no.1
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• pp.7-14
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• 1992

Between August 1988 and December 1991, 24 patients with intracranial tumors were treated with stereotactic radiosurgery(RS) using a 10 MV linear accelerator at Severance Hospital, Yonsei University College of Medicine. There were 5 meningiomas, 3 craniopharyngiomas, 9 glial tumors, 2 solitary metastases, 2 acoustic neurinomas, 2 pineal tumors, and 1 non-Hodgkin's lymphoma. Ten patients were treated as primary treatment after diagnosis with stereotactic biopsy or neuroimaging study. Nine patients underwent RS for post-op. residual tumors and three patients as a salvage treatment for recurrence after external irradiation. Two patients received RS as a boost followed by fractionated conventional radiotherapy. Among sixteen patients who were followed more than 6 months with neuroimage, seven patients (2 meningiomas, 4 benign glial tumors, one non-Hodgkin's lymphoma) showed complete response on neuroimage after RS and nine patients showed decreased tumor size. There was no acute treatment related side reaction. Late complications include three patients with symptomatic peritumoral brain edema and one craniopharyngioma with optic chiasmal injury. Through this early experience, we conclude that stereotactically directed single high doses of irradiation to the small intracranial tumors is effective for tumor control. However, in order to define the role of radiosurgery in the management of intracraniai tumors, we should get the long-term results available to demonstrate the benefits versus potential complications of this therapeutic modality.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.452-452
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• 2014

블랑켓 일차벽이나 디버터와 같은 핵융합로 플라즈마 대향부품은 플라즈마로부터 입사되는 중성자 및 입자들을 차폐하여 구조물을 보호하고, 발생열을 에너지로 변환하기 위해 냉각재를 활용한 열제거 기능을 담당한다. 특히, 고속중성자와 입사 열부하 및 여러 입자들로부터 블랑켓 및 내부 구조물을 보호하기 위해 차폐체와 구조물로 구성된다. 세계적으로 차폐체로서는 텅스텐 혹은 텅스텐 합금, 구조물용 재료로는 저방사화 Ferritic Martensitic (FM) 강이 유력한 후보재료로 개발, 연구 중에 있다. 국내에서는 국제핵융합로(ITER) 사업을 통해 고온등방가압(HIP, Hot Isostatic Pressing)을 이용한 이종금속간 접합기술과 한국형 저방사화 고온구조재료인 ARAA (Advanced Reduced Activation Alloy)가 개발되고 있으며, 이를 활용한 설계, 접합법 개발, 제작목업의 건전성 평가 등이 수행되고 있다. 한국원자력연구원에서는 핵융합 기초사업의 일환으로 전북대와 공동으로 수행 중인 건전성 평가체계 개발을 위해, 기 개발된 접합법을 활용한 $45mm(H){\times}45mm(W){\times}2mm(T)$의 W/FM강 목업을 제작한 바 있으며, 이를 국내 구축된 고열부하 시험 장비인 KoHLT-EB (Electron Beam)를 활용한 고열부하 인가 건전성 평가시험을 준비 중에 있다. 이종금속간 접합 특성은 기계적 평가를 위한 파괴시험을 통해 검증, 이를 활용한 목업이 제작되었으며, 제작된 목업에 대한 초음파를 이용한 접합면의 비파괴 검사를 통해 결함이 없음을 확인하였다. 최종적으로 실제 사용되는 핵융합 운전조건과 유사 혹은 가혹한 조건에서 고열부하를 인가하여, 그 건전성을 평가가 이루어질 것이다. 고열부하 시험을 위해서는 냉각조건, 인가 열부하, 수명평가를 통한 반복 고열부하 인가 횟수 등이 사전에 결정되어야 한다. 이를 위해 상업용 열수력, 구조해석 코드인 ANSYS-CFX와 -mechanical을 이용한 시험조건 모의 및 수명 평가가 수행되었다. 구축 장비의 냉각계통을 고려하여 냉각수의 온도 및 속도는 $25^{\circ}C$, 0.15 kg/sec로, 열부하는 0.5 및 $1.0MW/m^2$에 대해 모의를 수행하였다. 정상상태 시 텅스텐의 최대 온도는 각 열부하 조건에 따라 $285.3^{\circ}C$와 $546.8^{\circ}C$였으며, 이에 도달하는 시간을 구하기 위해 천이해석을 수행하였고, 이를 통해 30초에 최대온도 95 %이상의 정상상태 온도에 도달함을 확인하였다. 또한, 목업의 초기 온도에 도달하는 냉각시간도 동일한 천이해석을 통해 30초로 가능함을 확인하였고, 최종 시험 조건을 30초 가열, 30초 냉각으로 결정하였다. 결정된 반복 열부하 인가 조건에서 이종금속 접합체가 받는 다른 열팽창 정도에 따른 응력을 계산하여 목업의 수명을 도출하였고, 이를 시험해야 할 반복 횟수로 결정하였다. 각 열부하 조건에 따른 온도조건을 ANSYS-mechanical 코드를 활용하여 열팽창과 이에 따른 접합면의 응력분포로 계산하였다. 0.5 및 $1.0MW/m^2$에 대해, 목업이 받는 최대 응력은 334.3 MPa와 588.0 MPa 였으며, 이 때 텅스텐과 FM강이 받는 strain을 도출하여 물성치로 알려진 cycle to failure 값을 도출하였다. 열부하에서 예상되는 수명은 0.5 및 $1.0MW/m^2$에 대해, 100,000 사이클 이상과 2,655 사이클로 계산되었으며, 시간적 제약을 고려 최종 평가는 $1.0MW/m^2$에 대해, 3,000사이클 정도의 실험을 통해 그 수명까지 접합건전성이 유지되는 지 실험을 통해 평가할 예정이다.

• Nuclear Engineering and Technology
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• v.5 no.1
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• pp.38-43
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• 1973

The spin-rotation constants of the proton and tile fluorine nucleus in C $H_4$, Si $H_4$, Ge $H_4$, C $F_4$, Si $F_4$ and Ge $F_4$ were determined experimentally by the molecular beam magnetic resonance method. From the Hamiltonian and the high field approximation, the quantized energy level is given by the following equation. W $m_{I}$ $m_{J}$=- $g_{I}$ $m_{I}$H- $g_{J}$ $m_{J}$H- $C_{av}$ $m_{I}$ $m_{J}$, where $c_{av}$ is one third of the trace of the C tensor. In the nuclear resonance experiment, the proton and the fluorine nuclear resonance curves consist of many unresolved lines given by v=- $g_{J}$H- $C_{av}$ $m_{I}$, and a Gaussian approximation is made to correlate $c_{av}$ to the experimentally obtained half-width of the resonance curve. In the rotational resonance experiment, the five resonance peaks as predicted by v=- $g_{I}$H- $c_{av}$ $m_{I}$, $m_{I}$=0, $\pm$1 and $\pm$2, were all observed. The magnitude of car was determined by measuring the frequency distance between two adjacent peaks. The sign of $c_{av}$ was determined by the side peak suppression technique. The technique is described, and the sign and magnitude of the spin-rotation constant cav are summarized as following: for C $H_4$ -10.3$\pm$0.4tHz(from the rotational resonance), for SiH +3.71$\pm$0.08kHz(from the nuclear resonance), for Ge $H_4$+3.79$\pm$0.13kHz(from the nuclear resonance), for C $F_4$, -6.81$\pm$0.08kHz(from the rotational resonance), for Si $F_4$, -2.46$\pm$0.06kHz(from the rotational resonance), and finally for Ge $F_4$-1.84$\pm$0.04kHz(from the rotational resonance).onal resonance).esonance).

• Geophysics and Geophysical Exploration
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• v.10 no.3
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• pp.173-182
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• 2007

It is well known that manganese nodules enriched with valuable metals are abundantly distributed in the abyssal plain area in the Clarion-Clipperton (C-C) fracture zone of the northeast Pacific. Previous studies using deep-sea camera (DSC) system reported different observations about the relation of seafloor topographic change and nodule abundance, and they were sometimes contradictory. Moreover, proper foundation on the estimation of DSC underwater position, was not introduced clearly. The variability of the mining condition of manganese nodule according to seafloor topography was examined in the Korea Deep Ocean Study (KODOS) area, located in the C-C zone. In this paper, it is suggested that the utilization of deep towing system such as DSC is very useful approach to whom are interested in analysing the distributional characteristics of manganese nodule filed and in selecting promising minable area. To this purpose, nodule abundance and detailed bathymetry were acquired using deep-sea camera system and multi-beam echo sounder, respectively on the seamount free abyssal hill area of southern part ($132^{\circ}10'W$, $9^{\circ}45'N$) in KODOS regime. Some reasonable assumptions were introduced to enhance the accuracy of estimated DSC sampling position. The accuracy in the result of estimated underwater position was verified indirectly through the comparison of measured abundances on the crossing point of neighboring DSC tracks. From the recorded seafloor images, not only nodules and sediments but cracks and cliffs could be also found frequently. The positions of these probable unminable area were calculated by use of the recorded time being encountered with them from the seafloor images of DSC. The results suggest that the unminable areas are mostly distributed on the slope sides and hill tops, where nodule collector can not travel over.

• Food Science and Preservation
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• v.18 no.4
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• pp.535-545
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• 2011

The nutrient composition, including the proximate composition and the mineral, vitamin, amino acid, and free-amino-acid levels, of baechu kimchi (Chinese cabbage kimchi) to which 14 kinds of seafood (flatfish, yellow corvina, sea beam, pollack gizzard shad, ray, gray mullet, skate, hairtail, anchovy, sea squit, pen shell, scallop, small octopus)were added was analyzed. The seafoods were added to salted cabbage at concentration of 10% (w/w) and the prepared seafood baechu Kimchi (BK) was stored at $5^{\circ}C$ for seven days. The levels of moisture (82.09-88.56%), crude lipid (0.31-0.64%), and crude ash (2.70-3.50%) did not differ much among the samples, but the level of crude protein of the BK-with-seafood samples (2.42-5.15%) was greater than that of the control BK (2%), without seafood. The Fe and Ca contents of BK with flatfish showed the highest values (4.1 and 74 mg/100 g, respectively). The vitamin A contents of BK samples with 14 different kinds of seafood were higher than that of the control BK. Moreover, the BK with sea squit had higher vitamin $B_2$ (0.90 mg/100 g) and vitamin C (8.48 mg/100 g) contents among all the BK-with-different-kinds-of-seafood samples. Total amino acids were detected in all BK-with-seafood samples, most of which had high levels of glutamic acid, aspartic acid, proline and alanine. Glutamic acid was the most abundant of all the amino acids. The major free amino acids were hydroxyproline, glutamic acid, alanine, proline, leucine, and valine, of which hydroxyproline was the most abundant. In conclusion, BK with seafood is thought to be a very good source of protein, which is very important from dietary life of humans.

• Proceedings of the Mineralogical Society of Korea Conference
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• 2001.06a
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• pp.141-142
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• 2001

남서부 경기육괴의 편마암류로부터 분리된 저어콘(zircon) 입자를 대상으로, 이온현미분석기(ion microprobe)를 사용한 U-Pb 연대를 구하였다. 그 결과는 후기 원생대(약 820 Ma) 뿐만 아니라 오르도비스기에 상당한 화성활동이 한반도에 있었음을 지시한다. 우리 나라 후기 원생대의 화성-변성 활동에 대해 알려져 있는 바는 극히 제한적이어서 후속연구가 필수적이며, 이러한 연구는 한반도의 지체구조적 변천사를 로디니아 초대륙(Rodinia supercontinent)의 생성-분리와 관련해 재조명할 수 있는 기회를 제공할 것이다. 또한 오르도비스기의 화성작용은 그동안 논란이 되어 왔던 소위 “칼레도니아(Caledonian)” 변동 (cf. 조문섭, 2000)에 대한 또 다른 증거를 제공해준다. 저어콘의 연대측정은 서호주의 커튼공업대학교에 설치되어 있는 SHRIMP-II(Sensitive High-Resolution Ion Microprobe-II; 고감도-고분해능 이온현미분석기)를 사용하였으며, 시료 준비 및 분석방법은 기존에 보고된 바와 같다 (e.g., Kinny et al., 1999). 분석된 3개의 암석 시료(1006-5, 8, 9)는 경기육괴의 남서부에 위치한 홍성 지역의 정편마암들이다. 1006-8 시료는 Turek and Kim (1996)이 전통적인 방법을 사용해 687$\pm$5 Ma의 U-Pb 저어콘 연대를 보고한 바 있는 화강암질 편마암 (시료번호, KJ43)에 해당된다. 두 개의 다른 시료는 1006-8 주변에서 산출하는 전형적인 경기육괴의 편마암류로서 화강암질 정편마암이다. 이들 시료로부터 분리된 저어콘 입자들은 대부분 화성기원의 누대구조와 자형의 결정형태를 보여준다. 과성장띠(overgrouth rims)는 1006-5 시료에서 흔하게, 그리고 1006-9 시료에서 매우 드물게 관찰된다. 음극선발광(cathodoluminescence) 영상의 해석을 통해 저어콘 결정의 성장사를 유추하였으며, 이를 바탕으로 이온현미분석 점(spot)을 정하였다. U-Pb-Th 자료는 퍼스(Perth) 저어콘 스탠다드 (CZ3, 564 Ma, $^{206}$Pb/$^{238}$U=0.0914)를 사용하였다. 아래에 기술하는 연대는 모두 $^{206}$Pb/$^{238}$U 연대에 해당된다. 두 개의 화강암질 편마암 시료로부터 구한 U-Pb 저어콘 연대는 각각 812 $\pm$ 14 Ma(1006-8)와 822 $\pm$ 17 Ma(1006-9)로 분석오차 내에서 서로 일치한다. 이 결과는 춘천 및 전곡 지역의 석류석 각섬암에서 보고된 Sm-Nd 전암연대(852 $\pm$ 24 Ma 및 824 $\pm$ 143 Ma; Lee and Cho, 1995; Ree et al., 1996)와 잘 부합한다. 따라서 후기 원생대 기간 중 화성활동이 한반도에서 광범위하게 일어났음을 시사한다. 한편, 1006-9 시료에서는 예외적으로 한 개의 저어콘 입자 주변부(rim)에서 매우 얇은 과성장띠가 관찰되었으며, 두 개의 점 분석으로부터 구한 U-Pb 저어콘 연대는 약 235 Ma이다. 이 띠는 또한 변성기원의 저어콘에서 흔히 관찰되는 작은 W (<0.05) 비를 보인다. 1006-5 시료는 위 두 시료로부터 수 km 떨어진 지점에서 채집하였으나, 저어콘 연대는 상이한 기록을 보여준다. 즉 매우 작은 Th/U (<0.01) 값을 갖는 저어콘의 주변부에서 223 $\pm$ 5 Ma의 연대가 잘 정의되며, 이는 1006-9 시료에서 관찰된 결과와 함께 트라이아스기의 고온변성작용이 백립암상에 가까운, 매우 높은 온도에 달하였음을 지시한다. 한편 저어콘의 중심부는 335-473 Ma의 비교적 넓은 연대 분포를 보인다. 이는 저어콘이 실제 성장한 연대를 지시하기보다는 트라이아스기의 변성작용에 따른 납손실(Pb loss) 그리고 누대 규모보다 더 큰 빔 크기(beam size, 약 30 $\mu\textrm{m}$)의 영향일 것으로 해석된다. 또한 저어콘이 다양한 외래물질로부터 기원했다는 증거가 관찰되지 않으므로, 이 정편마암의 모암은 오르도비스기(약 430-470 Ma)에 관입하였을 것으로 생각된다. 따라서 그동안 논란이 되어 왔던 소위 “칼레도니아” 변동이 한반도 내에 실존하였을 가능성을 시사한다. 이상의 결과를 종합하여 볼 때, 경기육괴의 변성암류는 후기 원생대 이후 다양한 저어콘의 성장사를 기록하고 있음을 알 수 있다: 즉 (1) 후기원생대(약 820 Ma)의 화성작용; (2) 오르도비스기(약 450 Ma)의 화성작용: 그리고 (3) 트라이아스기 (약 223 Ma)의 부분용융을 수반한 고온 변성작용으로 대표된다. 이러한 지질연대는, 옥천변성대에서 얻어진 756 Ma의 저어콘 연대(Lee et al., 1998)와 더불어, 친링-다비-수루(Qinling-Dabie-Sulu) 대륙 충돌대와 양쯔 지괴에서 보고된 지질연대 결과와 잘 부합한다. 따라서 지구연대학적으로 경기육괴가 북중국보다는 대륙충돌대를 포함하는 남중국지괴에 속할 것으로 결론지을 수 있다.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.29 no.6
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• pp.407-410
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• 2018

As the operating frequency of an electromagnetic wave increases, the maximum output and wavelength of the wave decreases, so that the size of the circuit cannot be reduced. As a result, the fabrication of a circuit with high power (of the order of or greater than kW range) and terahertz wave frequency band is limited, due to the problem of circuit size, to the order of ${\mu}m$ to mm. In order to overcome these limitations, we propose a source design technique for 0.1 THz~0.3 GW level with cylindrical shape (diameter ~2.4 cm). Modeling and computational simulations were performed to optimize the design of the high-power electromagnetic sources based on Cherenkov radiation generation technology using the principle of plasma wakefield acceleration with ponderomotive force and artificial dielectrics. An effective design guideline has been proposed to facilitate the fabrication of high-power terahertz wave vacuum devices of large diameter that are less restricted in circuit size through objective verification.