• 제목/요약/키워드: W-Ni

검색결과 865건 처리시간 0.027초

유도결합 플라즈마 화학기상증착법을 이용한 Ni/SiO2/Si 기판에서 그라핀 제조 (Synthesis of Graphene on Ni/SiO2/Si Substrate by Inductively-Coupled Plasma-Enhanced Chemical Vapor Deposition)

  • 박영수;허훈회;김의태
    • 한국재료학회지
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    • 제19권10호
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    • pp.522-526
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    • 2009
  • Graphene has been effectively synthesized on Ni/SiO$_2$/Si substrates with CH$_4$ (1 SCCM) diluted in Ar/H$_2$(10%) (99 SCCM) by using an inductively-coupled plasma-enhanced chemical vapor deposition. Graphene was formed on the entire surface of the 500 nm thick Ni substrate even at 700 $^{\circ}C$, although CH$_4$ and Ar/H$_2$ gas were supplied under plasma of 600 W for 1 second. The Raman spectrum showed typical graphene features with D, G, and 2D peaks at 1356, 1584, and 2710 cm$^{-1}$, respectively. With increase of growth temperature to 900 $^{\circ}C$, the ratios of the D band intensity to the G band intensity and the 2D band intensity to the G band intensity were increased and decreased, respectively. The results were strongly correlated to a rougher and coarser Ni surface due to the enhanced recrystallization process at higher temperatures. In contrast, highquality graphene was synthesized at 1000 $^{\circ}C$ on smooth and large Ni grains, which were formed by decreasing Ni deposition thickness to 300 nm.

Ti-Ni-Cu 합금의 상변태 및 가역형상기억효과 (Phase Transformation and Reversible Shape Memory Effect of Ti-Ni-Cu Alloys)

  • 홍성원;이오연;김동건
    • 열처리공학회지
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    • 제5권3호
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    • pp.149-156
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    • 1992
  • Transformation behavior and reversible shape memory effct of Ti-Ni-Cu alloys with various Cu content has been investigated by means of electrical resistivity measurement, differential scanning calorimetry. X-ray diffraction and strain gage sensor. The transformation sequence in Ti-Ni-Cu alloys substituted by Cu for Ni up to 5at.% occurs to $B2{\leftrightarrow}B19^{\prime}$ and it proceeds in two stages by addition of 10 at.%Cu. i.e. $B2{\leftrightarrow}B19{\leftrightarrow}B19^{\prime}$. But the content of Cu increases up to 20at.%, it has been transformed in one stage ; $B2{\leftrightarrow}B19$. The shape change of Ti-40Ni-10Cu alloy which was constrain aged in circular form bended in $B2{\leftrightarrow}B19$ transformation but it spreaded out in $B19{\leftrightarrow}B19^{\prime}$ transformation. The amount of reversible shape change (${\Delta}{\varepsilon}$) of Ti-47Ni-3Cu alloy constrain aged at $400^{\circ}C$ after solution treatment has a maximum value of about $5.6{\times}10^{-3}$, but that of cold rolled and constrain aged specimens exhibits a little value independent of Cu concentrations.

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Ni과 Pd을 이용한 비정질 실리콘의 저온 측면 결정화에 관한 연구 (Low Temperature lateral Crystallization of Amorphous Silicon Films Induced by Ni and Pd.)

  • 이병일;김광호;정원철;신진욱;안평수;주승기
    • 한국재료학회지
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    • 제6권9호
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    • pp.900-904
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    • 1996
  • 비정질 실리콘의 표면에 Ni과 Pd를 형성하여 측면으로의 결정화 속도를 향상시켰다. Ni에 의해 비정질 실리콘이 측면으로 결정화될 때 그 성장 속도는 50$0^{\circ}C$에서 3w$\mu\textrm{m}$/hour였으며 이때의 활성화 에너지는 2.87eV로 나타났다. Pd의 경우는 Pd2Si의 형성에 의해 압축 응력이 유발되어 Pdrks의 간격이 좁을수록 측면으로의 결정화 속도가 증가하였다. Ni과 Pd을 각각 다른 부분에 증착시키고 결정화시키면 Ni에 의해 측면으로 결정화되는 속도가 Ni만으로 결정화시킬 때 보다 약 2배 이상의 측면결정화 속도를 보였다.

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Ni-Ti합금의 표면개질에 미치는 시효처리 온도의 영향 (Effect of Aging Treatment Temperature on Surface Modifications in Ni-Ti alloy)

  • 박제민;김완철
    • 열처리공학회지
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    • 제22권6호
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    • pp.368-374
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    • 2009
  • Nickel titanium shape memory alloys (NiTi) have been investigated for applications in the biomedical industry. However, little is known about the influences of surface modifications on the propertise of these alloys. The effect of electropolishing and heat treatments was found to exhibit significant surface roughness. Change of phase was B2, r-phase and B19' by heat treatments. In this study, effect of the electropolishing conditions on surface roughness is investigated in Ni-Ti alloys (Nitinol). Variation in phases with heat treatment temperature is investigated for a Ni-Ti alloy by X-ray diffraction and DSC. Characteristic of the microstructure have been observed by SEM. Surface roughness have been measured by AFM. The results clearly show that significant different in surface property to heat treated at $500^{\circ}C$ (R-phase). $TiO_2$ phases preciritated all of the specimens. It is not good effect of surface roughness because made to surface relief. The surface roughness appears to be important in the property of Ni-Ti alloys for biomedical applications.

Ni-기 자융성합금의 코팅에 관한 기초적 연구(I) - 용사입자의 편평거동이 코팅층의 기계적 특성에 미치는 영향 - (Fundamental Study on Ni-Base Self-Fluxing Alloy Coating by Thermal Spraying(I) - Effect of Splat Behavior of Sprayed Particles on Mechanical Properties of Coating Layer -)

  • 김영식;김현수;남기우
    • 동력기계공학회지
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    • 제1권1호
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    • pp.70-79
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    • 1997
  • Ni-base self-fluxing alloy powder particles were flame sprayed onto the SS400 mild steel substrate surface. The effects of both substrate temperature and spraying distance on the splat behavior of sprayed particles were examined. The results obtained are summarized as follows: 1) In the splat behavior of Ni-base self-fulxing alloy particles sprayed onto the SS400 mild steel substrate, splashing was observed under the room temperature condition. On the contrary, it showed circular plate pattern in the substrate temperature range over 373K. 2) It was cleared that there was close relationship between mechanical properties of coating layer and splat behavior of sprayed particles. 3) From the experimental results, optimum spraying conditions showed excellent mechanical properties in the case of Ni-base self fluxing alloy sprayed onto the SS400 mild substrate were 473K of substrate temperature and 250mm of spraying distance.

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$Si_3N_4$상에 PECVD법으로 형성한 텅스텐 박막의 특성 (Characteristics of PECVD-W thin films deposited on $Si_3N_4$)

  • 이찬용;배성찬;최시영
    • 한국진공학회지
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    • 제7권2호
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    • pp.141-149
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    • 1998
  • $Si_3N_4$상에 PECVD법으로 W박막을 증착하였다. 기판온도와 소스가스의 유량비가 텅 스텐 박막에 미치는 영향을 조사하였다. $150^{\circ}C$~$250^{\circ}C$의 온도 범위 내에서 텅스텐 박막의 증착은 표면반응에 의하여 제한 되었으며, 기판온도와 $SiH_4/WF_6$ 유량비 변화에 따라 150~ 530$\AA$/min의 증착률과 스트레스에 영향을 주었고, 특히 과도한 Si3N4가스는 W박막의 구조, 화학적 결합, 스트레스등을 급격히 변화시켰다. TiN, Ti, Mo, NiCr, Al 등 여러 가지 부착층 상의 텅스텐 박막을 증착시킨 결과, Al이 가장 좋은 부착특성을 보였다.

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