• Title/Summary/Keyword: W-HfC

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Effect of Composition on Cutting Characteristics of Ti(C,N) Cermet Tool (Ti(C,N)계 서메트 공구의 조성변화가 절삭성능에 미치는 영향)

  • 박준석;김경재;김성원;권원태;강신후
    • Journal of the Korean Society for Precision Engineering
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    • v.20 no.1
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    • pp.144-150
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    • 2003
  • When WC and group IV elements are added to Ti(C,N)-Ni substrate, microstructures of the cermet is changed. The microstructure gives direct effect on the property of the material. In this study, the amount of WC and group W elements of Ti(C,N) cermet tool was investigated. The composition of WC was changed from 5 to 20wt% to determine the effect of WC on the cutting performance of cermet tool. The more WC was added, the longer the tool life of the cermet tool was. The cermet with 20wt% WC showed the best fracture toughness. The effect of group W elements; ZrC, ZrN and HfC was also investigated by adding each of them to manufacture the cermet tool with fixed l4wt% WC composition. The cermet with 1wt% ZrC and 14wt% WC showed the best cutting performance among the investigated cermet tools.

Study of etching properties of the $HfAlO_3$ thin film using the inductively coupled plasma (유도결합 플라즈마를 이용한 $HfAlO_3$ 박막의 식각특성 연구)

  • Ha, Tae-Kyung;Kim, Dong-Pyo;Woo, Jong-Chang;Um, Doo-Seung;Yang, Xue;Joo, Young-Hee;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.73-73
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    • 2009
  • 트렌지스터의 채널 길이가 줄어듦에 따라 절연층으로 쓰이는 $SiO_2$의 두께는 얇아져야 한다. 이에 따라 얇아진 절연층에서 터널링이 발생하여 누설전류가 증가하게 되어 소자의 오동작을 유발한다. 절연층에서의 터널링을 줄여주기 위해서는 High-K와 같은 유전율이 높은 물질을 이용하여 절연층의 두께를 높여주어야 한다. 최근에 각광 받고 있는 High-K의 대표적인 물질은 $HfO_2$, $ZrO_2$$Al_2O_3$등이 있다. $HfO_2$, $ZrO_2$$Al_2O_3$$SiO_2$보다 유전상 수는 높지만 밴드갭 에너지, 열역학적 안정성, 재결정 온도와 같은 특성 면에서 $SiO_2$를 완전히 대체하기는 어려운 실정이다. 최근 연구에 따르면 기존의 High-K물질에 금속을 첨가한 금속산화물의 경우 밴드갭 에너지, 열역학적 안정성, 재결정 온도의 특성이 향상되었다는 결과가 있다. 이 금속 산화물 중 $HfAlO_3$가 대표적이다. $HfAlO_3$는 유전상수 18.2, 밴드캡 에너지 6.5 eV, 재결정 온도 $900\;^{\circ}C$이고 열역학적 안전성이 개선되었다. 게이트 절연층으로 사용될 수 있는 $HfAlO_3$는 전극과 기판사이에 적층구조를 이루고 있어, 이방성 식각인 건식 식각에 대한 연구가 필요하다. 본 연구는 $BCl_3$/Ar 유도결합 플라즈마를 이용하여 $HfAlO_3$ 박막의 식각 특성을 알아보았다. RF Power 700 W, DC-bias -150 V, 공정압력 15 mTorr, 기판온도 $40\;^{\circ}C$를 기본 조건으로 하여, $BCl_3$/Ar 가스비율, RF Power, DC-bias 전압, 공정압력에 의한 식각율 조건과 마스크물질과의 선택비를 알아보았다. 플라즈마 분석은 Optical 이용하여 진행하였고, 식각 후 표면의 화학적 구조는 X-ray Photoelectron Spectroscoopy(XPS) 분석을 통하여 알아보았다.

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Silicon Surface Micro-machining by Anhydrous HF Gas-phase Etching with Methanol (무수 불화수소와 메탄올의 기상식각에 의한 실리콘 표면 미세 가공)

  • Jang, W.I.;Choi, C.A.;Lee, C.S.;Hong, Y.S.;Lee, J.H.;Baek, J.T.;Kim, B.W.
    • Journal of Sensor Science and Technology
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    • v.7 no.1
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    • pp.73-82
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    • 1998
  • In silicon surface micro-machining, the newly developed GPE(gas-phase etching) process was verified as a very effective method for the release of highly compliant micro-structures. The developed GPE system with anhydrous HF gas and $CH_{3}OH$ vapor was characterized and the selective etching properties of sacrificial layers to release silicon micro-structures were discussed. P-doped polysilicon and SOI(silicon on insulator) substrate were used as a structural layer and TEOS(tetraethyorthdsilicate) oxide, thermal oxide and LTO(low temperature oxide) as a sacrificial layer. Compared with conventional wet-release, we successfully fabricated micro-structures with virtually no process-induced striction and residual product.

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The improvement of Cu metal film adhesion on polymer substrate by the low-power High-frequency ion thruster

  • Jung Cho;Elena Kralkina;Yoon, Ki-Hyun;Koh, Seok-Keun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.60-60
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    • 2000
  • The adhesion interface formation between copper and poly(ethylene terephthalate)(PET), poly(methyl methacrylate)(PMMA) and Polyimide films was treated using Ion assisted reaction system to sequential sputter deposition by High-Frequency ion source. The ion beam modification system used a new type of low power HF ion thruster for space application as new low thruster electric propulsion system. Low power HF ion thruster with diameter 100mm gives the opportunity to obtain beams of Ar+ with currents 20~150 mA (current density 0.5~3.5 mA/cm2) and energy 200~2500eV at HF power level 10~150 W. Using Ar as a working gas it is possible to obtain thrust within 3~8 mN. Contact angles for untreated films were over 95$^{\circ}$ and 80 for Pet, 10o for PMMA and 12o for PI samples as a condition of ion assisted reaction at the ion dose of 10$\times$1016 ions/cm2, the ion beam potential of 1.2 keV and 4 ml/min for environmental gas flow rate. 900o peel tests yielded values of 15 to 35 for PET, 18 to 40 and 12 to 36 g/min. respectively. High resolution X-ray photoelectron spectrocopy is the Cls region for Cu metal on these polymer substrates showed increases in C=O-O groups for polymide, whereas PET and PMMA treated samples showed only C=O groups with increase the ion dose. Finally, unstable polymer surface can be changed from hydrophobic to hydrophilic formation such as C-O and C=O that were confirmed by the XPS analysis, conclusionally, the ion assisted reaction is very effective tools to attach reactive ion species to form functional groups on C-C bond chains of PET, PMMA and PI.

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Egg phospholipids exert an inhibitory effect on intestinal cholesterol absorption in mice

  • Lee, Yoojin;Han, Catherine Y.;Bae, Minkyung;Park, Young-Ki;Lee, Ji-Young
    • Nutrition Research and Practice
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    • v.13 no.4
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    • pp.295-301
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    • 2019
  • BACKGROUND/OBJECTIVES: Consumption of cholesterol-rich foods, such as eggs, has a minimal effect on circulating cholesterol levels in healthy humans. To gain insight, we investigated whether phospholipids rich in eggs (EPL) interfere with intestinal cholesterol absorption in vivo. MATERIALS/METHODS: To investigate the acute effect of EPL on intestinal cholesterol absorption, male C57BL/6J mice were orally administered with 6, 11, or 19 mg of EPL for three days. We also tested the effect of chronic EPL consumption on cholesterol metabolism in the small intestine and the liver in mice with diet-induced hypercholesterolemia. Male C57BL/6J mice were fed a high fat/high cholesterol (HF/HC; 35% fat, 0.25% cholesterol, w/w) diet for 4 weeks to induce hypercholesterolemia, and subsequently the mice were either fed 0, 0.4 or 0.8% (w/w) of EPL for 6 weeks. RESULTS: Intestinal cholesterol absorption was significantly decreased by the highest dose of acute EPL administration compared to control. Chronic EPL supplementation did not significantly alter intestinal cholesterol absorption nor plasma levels of total cholesterol and low-density lipoprotein cholesterol. In the small intestine and the liver, EPL supplementation minimally altered the expression of genes which regulate cellular cholesterol levels. CONCLUSION: Although chronic EPL consumption was not able to counteract hypercholesterolemia in HF/HC-fed mice, acute EPL administration decreased intestinal cholesterol absorption. This study provides in vivo evidence that acute administration of PLs in eggs prevent cholesterol absorption in the intestine, suggesting a mechanism for a minimal effect of egg consumption on circulating cholesterol levels.

Application of Microwave Digestion Pretreatment Techniques for ICP-AES Analysis of Used Monolithic Automobile Catalysts Having Platinum Group-Metals and Silicates (백금족 금속과 규산염을 포함하는 모노리스형 자동차 폐촉매의 ICP-AES 분석을 위한 극초단파 분해 전처리 기법의 응용)

  • Kim, Choong-Hyon;Woo, Seong Ihl;Jeon, Sung Hwan
    • Applied Chemistry for Engineering
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    • v.10 no.4
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    • pp.568-575
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    • 1999
  • Two different digestion procedures for the simultaneous determination of major and platinum-group element(PGE) in spent automobile catalysts containing PGE and silicates by inductively coupled plasma atomic emission spectrometry(ICP-AES) are compared. Combinations of mixed aids using HF, $HNO_3$, HCl, $HClO_4$, $H_2O_2$, and $H_3BO_3$ are utilized for the hot plate dissolution method and the closed-vessel microwave digestion method, The latter method has been shown to be relatively superior in terms of recovery, analysis time, and amount of aqua regia (3 parts HCl + part $HNO_3$ required to dissolve PGE in comparison with conventional open vessel hot-plate dissolution. The best results were drawn from the following conditions: In closed Teflon PFA vessels under microwave heating with temperature/pressure regulation, a 0.25 g portion of sample was digested in 2 mL of HF, 2 mL of $HNO_3$ and 6mL of HCl under the pressure of 200 psi(13.79 bar) at $180^{\circ}C$ for 1hr, followed by a second digestion stage with 16 mL of 5%(w/v) boric acid under the pressure of 20 psi(1.38 bar) at $100^{\circ}C$ for 10 min. After the microwave heating, the sample was post-treated with 10 mL of aqua regia twice by hot-plate heating. This condition gives the PGE recovery within 85~110% and the relative standard deviations within 2%. The method developed can therefore be regarded as an alternative method for routine analysis of spent automobile catalysts.

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Observation of Growth Behavior of Induced Hillock for Nano/Micro Patterning on Surface of Borosilicate with Etching Time and Load (보로실리케이트 표면의 나노/마이크로 패터닝을 위한 식각 시간, 하중에 따른 유기 힐록의 성장거동 관찰)

  • Cho S. H.;Youn S. W.;Kang C. G.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2005.10a
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    • pp.182-185
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    • 2005
  • Indentation pattern and line pattern were machined on borosilicate(Pyrex 7740 glass) surface using the combination of mechanical machining by $Nanoi-indenter\circledR$ XP and HF wet etching, and a etch-mask effect of the affected layer of the nano-scratched and indented Pyrex 7740 glass surface was investigated. In this study, effects of indentation and scratch process with etching time on the morphologies of the indented and scratched surfaces after isotropic etching were investigated from an angle of deformation energies.

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The Effects of Medicinal Herb-made Sikhe on Damage and Lipid Levels of Liver in Rats Fed High-cholesterol Diets (한약제 추출물로 제조된 식혜가 고지방식이에 의한 흰주의 간 손상과 간 지질 함량에 미치는 영향)

  • Park, Hyun-Suk;Yang, Kyung-Chun;Yang, Kyung-Mi
    • Journal of Life Science
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    • v.19 no.8
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    • pp.1104-1111
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    • 2009
  • This study was conducted to evaluate the effect of Sikhe made by medicinal herb on the functional level of liver. Water extract I (12.9% W/W) and II (25.8% W/W) were obtained from medicinal materials: Caragana Sinica, Glycyrrhiza uralensis, Atractylodes rhizoma alba, Atractylodes rhizoma alba, Crataegus pinnatifida, Paeonia lactiflora Pasll., Hordeum vulgare Linne, Oryza sativa Linne, ginger, peer and jujube. Experimental groups were divided into the control diet group (C), high fat diet group (HF), high fat diet treated with 5% extract I group (HFE I ) and high fat diet treated with 5% extract II group (HFE II). In sensory evaluation, overall quality scores associated with color, aroma, flavor and taste were significantly higher in water extract II than in water extract 1. After investigating functional and lipid levels of livers in rats, we found that the administration of water extract I or water extract II to the high fat diet group (HF) did not affect the gain of body weight but mildly reduced GOT or GPT activity in the high diet group. Moreover, administration of these medicinal herbal extracts significantly decreased the levels of total lipid, triglyceride and total cholesterol in the high fat diet group (HF). However, administration of these medicinal herbal extracts did not affect the level of phospholipid. In conclusion, as Sikhe made by medicinal herb slightly decreased the activity of GOT or GPT and amount of lipid in liver, prevention against high fat diet is thought to be important for liver protection.

Preparation of Hafnium Oxide Thin Films grown by Atomic Layer Deposition (원자층 증착법으로 성장한 HfO2 박막의 제조)

  • Kim Hie-Chul;Kim Min-Wan;Kim Hyung-Su;Kim Hyug-Jong;Sohn Woo-Keun;Jeong Bong-Kyo;Kim Suk-Whan;Lee Sang-Woo;Choi Byung-Ho
    • Korean Journal of Materials Research
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    • v.15 no.4
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    • pp.275-280
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    • 2005
  • The growth of hafnium oxide thin films by atomic layer deposition was investigated in the temperature range of $175-350^{\circ}C$ using $Hf[N(CH_3)_2]_4\;and\;O_2$ as precursors. A self-limiting growth of $0.6\AA/cycle$ was achieved at the substrate temperature of $240-280^{\circ}C$. The films were amorphous and very smooth (0.76-0.80 nm) as examined by X-ray diffractometer and atomic force microscopy, respectively. X-ray photoelectron spectroscopy analysis showed that the films grown at $300^{\circ}C$ was almost stoichiometric. Electrical measurements performed on $MoW/HfO_2$(20 nm)/Si MOS structures exhibited high dielectric constant$(\~17)$ and a remarkably low leakage current density of at an applied field of $1.5-6.2\times10^{-7}A/cm^2$ MV/cm, probably due to the stoichiometry of the films.

Morphology of RF-sputtered Mn-Coatings for Ti-29Nb-xHf Alloys after Micro-Pore Form by PEO

  • Park, Min-Gyu;Park, Seon-Yeong;Choe, Han-Cheol
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2016.11a
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    • pp.197-197
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    • 2016
  • Commercially pure titanium (CP Ti) and Ti-6Al-4V alloys have been widely used for biomedical applications. However, the use of the Ti-6Al-4V alloy in biomaterial is then a subject of controversy because aluminum ions and vanadium oxide have potential detrimental influence on the human body due to vanadium and aluminum. Hence, recent works showed that the synthesis of new Ti-based alloys for implant application involves more biocompatible metallic alloying element, such as, Nb, Hf, Zr and Mo. In particular, Nb and Hf are one of the most effective Ti ${\beta}-stabilizer$ and reducing the elastic modulus. Plasma electrolyte oxidation (PEO) is known as excellent method in the biocompatibility of biomaterial due to quickly coating time and controlled coating condition. The anodized oxide layer and diameter modulation of Ti alloys can be obtained function of improvement of cell adhesion. Manganese(Mn) plays very important roles in essential for normal growth and metabolism of skeletal tissue in vertebrates and can be detected as minor constituents in teeth and bone. Radio frequency(RF) magnetron sputtering in the various PVD methods has high deposition rates, high-purity films, extremely high adhesion of films, and excellent uniform layers for depositing a wide range of materials, including metals, alloys and ceramics like a hydroxyapatite. The aim of this study is to research the Mn coatings on the micro-pore formed Ti-29Nb-xHf alloys by RF-magnetron sputtering for dental applications. Ti-29Nb-xHf (x= 0, 3, 7 and 15wt%, mass fraction) alloys were prepared Ti-29Nb-xHf alloys of containing Hf up from 0 wt% to 15 wt% were melted by using a vacuum furnace. Ti-29Nb-xHf alloys were homogenized for 2 hr at $1050^{\circ}C$. Each alloy was anodized in solution containing typically 0.15 M calcium acetate monohydrate + 0.02 M calcium glycerophosphate at room temperature. A direct current power source was used for the process of anodization. Anodized alloys was prepared using 270V~300V anodization voltage at room. Mn coatings was produced by RF-magnetron sputtering system. RF power of 100W was applied to the target for 1h at room temperature. The microstructure, phase and composition of Mn coated oxide surface of Ti-29Nb-xHf alloys were examined by FE-SEM, EDS, and XRD.

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