• Electrical & Electronic Materials
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• v.8 no.1
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• pp.90-94
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• 1995

Reactive Ion Etching(RIE) of Si$_{3}$N$_{4}$ in a CF$_{4}$/O$_{2}$ gas plasma exhibits such good anisotropic etching properties that it is widely employed in current VLSI technology. However, the RIE process can cause serious damage to the silicon surface under the Si$_{3}$N$_{4}$ layer. When an atmospheric pressure chemical vapor deposited(APCVD) SiO$_{2}$ layer is used as a etch-stop material for Si$_{3}$N$_{4}$, it seems inevitable to get a good etch selectivity of Si$_{3}$N$_{4}$ with respect to SiO$_{2}$. Therefore, we have undertaken thorough study of the dependence of the etch rate of Si$_{3}$N$_{4}$ plasmas on $O_{2}$ dilution, RF power, and chamber pressure. The etch selectivity of Si$_{3}$N$_{4}$ with respect to SiO$_{2}$ has been obtained its value of 2.13 at the RF power of 150 W and the pressure of 110 mTorr in CF$_{4}$ gas plasma diluted with 25% $O_{2}$ by flow rate.

• JSTS:Journal of Semiconductor Technology and Science
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• v.13 no.3
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• pp.198-206
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• 2013

This paper presents a wide band, fine-resolution digitally controlled oscillator (DCO) with an on-chip 3-D solenoid inductor using the 0.13 ${\mu}m$ digital CMOS process. The on-chip solenoid inductor is vertically constructed by using Metal and Via layers with a horizontal scalability. Compared to a spiral inductor, it has the advantage of occupying a small area and this is due to its 3-D structure. To control the frequency of the DCO, active capacitor and active inductor are tuned digitally. To cover the wide tuning range, a three-step coarse tuning scheme is used. In addition, the DCO gain needs to be calibrated digitally to compensate for gain variations. The DCO with solenoid inductor is fabricated in 0.13 ${\mu}m$ process and the die area of the solenoid inductor is 0.013 $mm^2$. The DCO tuning range is about 54 % at 4.1 GHz, and the power consumption is 6.6 mW from a 1.2 V supply voltage. An effective frequency resolution is 0.14 kHz. The measured phase noise of the DCO output at 5.195 GHz is -110.61 dBc/Hz at 1 MHz offset.

• Publications of The Korean Astronomical Society
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• v.9 no.1
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• pp.101-110
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• 1994

We have investigated intensively an optical telescope with 76cm diameter and CCD camera system in astronomical observatory of Kyung Hee university, in order to maximize instrumental functions of our observational equipments and to construct a more reliable photometric system. And computer softwares AUTO DOME, KH CCD and KH PHO for astronomical image observations and their automatic photometries with high accuracy have been made for observers w use our observational system conveniently and efficiently. Throughout careful examinations of these programs, it has been proved that the observing time by our program is shorter than that by manual operations, so that, fast and accurate observations can be executed with ease. For open cluster NGC 7063 observed with S/N value of 350 or more by KH PHO, we have found the magnitude measurements of 11 object stars would show 0.007 magnitude difference, comparing with magnitude data from IRAF/APPHOT. From automatic photometry of eclipsing binary, AB And observed by our software, total 220 data points with good quality have been acquired during 8 hours and so we could make a better light curve than that obtained from any observational results by domestic photoelectric photometry system.

• Current Optics and Photonics
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• v.3 no.6
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• pp.510-515
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• 2019

In this paper, we introduce a 1.3-㎛ 25-GHz waveguide-integrated vertical PIN type Ge-on-Si photodetector fabricated using a multi-project wafers service based on fringing field analysis in the depletion region. In general, 1.3-㎛ photodetectors fabricated using a commercial foundry service can achieve limited bandwidths because a significant amount of photo-generated carriers are located within a few microns from the input along the device length, and they are influenced by the fringing field, leading to a longer transit time. To estimate the response time, we calculate the fringing field in that region and the transit time using the drift velocity caused by the field. Finally, we compare the estimated value with the measured one. The photodetector fabricated has a bandwidth of 20.75 GHz at -1 V with an estimation error of <3 GHz and dark current and responsivity of 110 nA and 0.704 A/W, respectively.

• Textile Coloration and Finishing
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• v.21 no.2
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• pp.1-6
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• 2009

Recently, polyester is widely used in textile fabrics due to its application potentials in various fields. It is known that askin fabric is prepared with mainly polyester and is enjoyed with various end uses such as marine clothing, underwear, shirts, swimming suits and so on. For this purpose, color fastness should be considered with great importance during its wet processing step. In this context, vat dyes were very much attracted due to the advantage of superior fastness property. Thus, we have used indigo dye towards askin fabric dyeings and investigated corresponding properties namely, dyeing temperature, concentration of dye, reducing agent amount and alkali amount. The results showed that higher color strengths of indigo dyeing on askin fabric were obtained at $110^{\circ}C$, 8% o.w.f, 3g/l, 5g/l, respectively. The color fastness to washing was considerable generally.

• 한국초전도학회:학술대회논문집
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• v.10
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• pp.107-110
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• 2000

($^{11}$B NMR measurements have been performed on single crystals of LuNi$_2$B$_2$C superconductor to investigate vortex lattice structures and dynamical behavior. The spectrum in the superconducting state is significantly broadened by local field inhomogeneity due to the vortex lattice and the peak point of the spectrum shifts toward low magnetic field due to the imperfect field penetration. The linewidth of the spectrum reflecting local field variation is much smaller than expected for conventional vortex lattices and shows peculiar increase at low temperature. Furthermore, the transverse relaxation rate, 1/T$_2$, probing the slow motion of vortices, exhibits a single peak as temperature decreases. These prominent results highlight significant fluctuation of vortices even for this low T$_c$, and nearly isotropic 3D superconductor.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.188-188
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• 1999

The embedded atom method (EAM) of Daw and Baskes as a semiempirical method, has been successfully applied to the fcc or nearly filled d-band transition metals due to its computational feasibility and its methodological simplicity. Then Baskes modified the EAM (MEAM) to include directional bonding and applied it to metals, semiconductors, and diatomic gases, all of which have different types of bondings. Here, we present a detailed study of the energetics of adsorption on the fcc(111) surfaces and binary system within the framework of MEAM. In adsorption on fcc(111) surfaces, there are two energetically favored sites, so called, fcc site and hcp site, which may trigger stacking fault in the growth of films and might switch growth mode between 3D growth and layer by layer growth. We scrutinized the role of the hcp sites, which would offer dynamic growth pathways although the dynamics are not yet clear within the limited experimental resolution. Featuring these transient motions in the atomic level should contribute to the understanding the growth mechanisms on fcc(111) surface. And we also applied MEAM for initial stage energetics at the Cr coverage of sub- monolayer on W(110). We hope that recently observed extraordinary growth behavior at the Cr coverage of 0.7 monolayer, self- organized nano-scale lines, can be resolved in this MEAM binary system calculation.

• JSTS:Journal of Semiconductor Technology and Science
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• v.15 no.6
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• pp.594-600
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• 2015

A 1.25 GHz multi-phase phase-rotating PLL is proposed for oversampling CDR applications and implemented with a low power and small area. Eight equidistant clock phases are simultaneously adjusted by the phase interpolator inside the PLL. The phase interpolator uses only two complementary clocks from a VCO, but it can cover the whole range of phase from $0^{\circ}$ to $360^{\circ}$ with the help of a PFD timing controller. The output clock phases are digitally adjusted with the resolution of 25 ps and both INL and DNL are less than 0.44 LSB. The proposed PLL was implemented using a 110 nm CMOS technology. It consumes 3.36 mW from 1.2 V supply and occupies $0.047mm^2$. The $jitter_{rms}$ and $jitter_{pk-pk}$ of the output clock are 1.91 ps and 18 ps, respectively.

• Journal of the Korean Society of Food Science and Nutrition
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• v.26 no.3
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• pp.494-500
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• 1997

This study was conducted to investigate the effect of acorn extracts on the antioxidative enzyme system. Male Sprague-Dawley rats(110$\pm$10g) were fed on containing normal and high fat diets. They were orally administrated (0.02g/100g B.W) of acorn ethylacetate-extract and water-extract at the same time once a day, respectively. Net weight gain and feed efficiency ratio were increased in high fat diet groups and decreased by acorn extracts administration. The effect of acorn extracts on hepatic glutathione peroxidase(GSH-Px), glutathione S-transferase(GST) and catalase activities did not show significancy in normal fat diet groups. GST and catalase activities and lipid peroxidation content(LPO) were significantly increased in high fat diet groups and this increment were decreased by acorn extracts administration. However GSH-Px activity and GSH content were decreased in high fat diet groups but increased by acorn extracts administration. The activities of lactate dehydrogenase(LDH), alkaline phosphatase(ALP) and aminotransferase in serum were significantly increased in high fat diet group but these increment reduced in acorn extracts administration groups. These results indicate that acorn extracts could improve the liver function and prevent the metabolic diseases by hyperlipidemia.

• Journal of Microbiology and Biotechnology
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• v.1 no.2
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• pp.102-110
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• 1991

Alkalophilic Bacillus sp. YJ-451, which was isolated from soil at several area in Korea, produced a novel type of bacteriolytic enzyme (cell wall peptidoglycan hydrolase) extracellulary. The cell wall hydrolytic activity was identified as a clear zone on sodium dodecyl sulfate polyacrylamide gel electrophoresis containing 0.2% (w/v) cell wall of Bacillus sp. as substrate. This enzyme was successively purified 66 fold with 3.2% yield in culture broth by ammonium sulfate precipitation, CM-cellulose column chromatography, and gel filtration, followed by hydroxylapatite column chromatography. The molecular weight of the purified enzyme was estimated to be 27,000 by sodium dodecyl sulfate polyacrylamide gel electrophoresis and gel filtration column chromatography. The optimum pH and temperature for the activity of the enzyme were pH 10.0 and $50^{\circ}C$, respectively. The enzyme was stable between pH 5.0 and 10.0 and up to $40^{\circ}C$. Among the microorganisms used in this experiment the enzyme was active against most of gram negative strains and the genus Bacillus such as B. megaterium, B. licheniformis, B. circulans, B. pumilus, B. macerans, B. polymyxa. The release of dinitrophenylglutamic acid but not reducing group from cell wall peptidoglycan digested by the enzyme suggested that the enzyme is a kind of peptidase which hydrolyzes the peptide bond at the amino group of D-glutamic acid in the peptidoglycan.