• 한국전기전자재료학회논문지
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• 제17권10호
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• pp.1041-1048
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• 2004

Chemical mechanical polishing (CMP) process was studied in terms of tribology in this paper. CMP performed by the down force and the relative motion of pad and wafer with slurry is typically tribological system composed of friction, wear and lubrication. The piezoelectric quartz sensor for friction force measurement was installed and the friction force was detected during CMP process. Various friction signals were attained and analyzed with the kind of pad, abrasive and abrasive concentration. As a result of experiment, the lubrication regime is classified with ηv/p(η, v and p; the viscosity, relative velocity and pressure). The characteristics of friction and material removal mechanism is also different as a function of the kind of abrasive and the abrasive concentration in slurry. Especially, the material removal per unit distance is directly proportional to the friction force and the non~uniformity has relation to the coefficient of friction.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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• pp.231-234
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• 2004

Chemical mechanical polishing(CMP) process was studied in terms of tribology in this paper. CMP performed by the down force and the relative motion of pad and wafer with the slurry is typically tribological system composed of friction, wear and lubrication. The piezoelectric quartz sensor for friction force measurement was installed and the friction force was detected during CMP process. Various coefficient of friction was attained and analyzed with the kind of pad, abrasive and the abrasive concentration. The lubrication regime is also classified with ${\eta}v/p(\eta,\;v\;and\;p;$ the viscosity, relative velocity and pressure). Especially, the co-relation not only between the friction force and the removal per unit distance but also between the coefficient of friction and within-wafer-nonuniformity was estimated.

• 한국지하수토양환경학회지:지하수토양환경
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• 제6권2호
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• pp.69-81
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• 2001

매질에서 불혼합성인 물과 가스의 동시거동 해석을 위해서는 모세관압, 포화도, 상대투과계수의 구성관계가 선결되어야 한다. 그러나 모세관력이 무시될 수 있는 흐름에서는 점성마찰력이 흐름을 지배하게 되고 포화도와 상대투과계수의 구성관계가 상대적으로 중요하게 된다. 본 연구에서는 압력에 따른 점성의 변화와 포화도에 따른 상대투과계수의 변화를 절리간극의 크기별로 고려할 수 있는 2차원 유한차분 수치모형을 개발하였다. 수치모형에 이용할 상대투과계수 특성식은 일곱가지의 간극크기별 평판모형실험으로부터 구하였다. 실험으로부터 도출된 포화도와 상대투과계수 관계곡선은 기존의 경험식으로는 표현되기 어려웠으며, 따라서 새로운 경험식으로 로지스틱 방정식을 제시하였다. 이 방정식은 간극의 크기가 포함된 매개변수를 사용하였기 때문에 임의의 절리 간극크기의 적용이 가능한 형태이다. 수치모형의 검증을 위해서 상대투과계수 특성식을 수치모형에 적용하여 가스의 이동을 해석한 후, 모형실험 결과와 비교하였다. 수치모형의 현장적용성을 검토하기 위하여 지하 LPG 저장공동에 인접한 단일절리에 적용한 결과, 지하수와 프로판가스의 동시거동을 적절히 모사할 수 있었다.

• Korea-Australia Rheology Journal
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• 제21권1호
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• pp.59-69
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• 2009

The prediction of pressure drop for a droplet flow in a confined micro channel is presented using FE-FTM (Finite Element - Front Tracking Method). A single droplet is passing through 5:1:5 contraction - straight narrow channel - expansion flow domain. The pressure drop is investigated especially when the droplet flows in the straight narrow channel. We explore the effects of droplet size, capillary number (Ca), viscosity ratio ($\chi$) between droplet and medium, and fluid elasticity represented by the Oldroyd-B constitutive model on the excess pressure drop (${\Delta}p^+$) against single phase flow. The tightly fitted droplets in the narrow channel are mainly considered in the range of $0.001{\leq}Ca{\leq}1$ and $0.01{\leq}{\chi}{\leq}100$. In Newtonian droplet/Newtonian medium, two characteristic features are observed. First, an approximate relation ${\Delta}p^+{\sim}{\chi}$ observed for ${\chi}{\geq}1$. The excess pressure drop necessary for droplet flow is roughly proportional to $\chi$. Second, ${\Delta}p^+$ seems inversely proportional to Ca, which is represented as ${\Delta}p^+{\sim}Ca^m$ with negative m irrespective of $\chi$. In addition, we observe that the film thickness (${\delta}_f$) between droplet interface and channel wall decreases with decreasing Ca, showing ${\delta}_f{\sim}Ca^n$ Can with positive n independent of $\chi$. Consequently, the excess pressure drop (${\Delta}p^+$) is strongly dependent on the film thickness (${\delta}_f$). The droplets larger than the channel width show enhancement of ${\Delta}p^+$, whereas the smaller droplets show no significant change in ${\Delta}p^+$. Also, the droplet deformation in the narrow channel is affected by the flow history of the contraction flow at the entrance region, but rather surprisingly ${\Delta}p^+$ is not affected by this flow history. Instead, ${\Delta}p^+$ is more dependent on ${\delta}_f$ irrespective of the droplet shape. As for the effect of fluid elasticity, an increase in ${\delta}_f$ induced by the normal stress difference in viscoelastic medium results in a drastic reduction of ${\Delta}p^+$.

• 터널과지하공간
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• 제23권6호
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• pp.493-505
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• 2013

본 수치해석논문에서는 절리와 단층대를 포함한 지열저류층에 수리자극을 가할 시 수반되는 유도지진과 단층대의 변형을 개별요소법을 사용하여 모델링하였다. 수채해석기법은 2차원 입자유동코드를 기반으로 하며 수리역학적 상호작용기법과 미소파괴음의 모멘트텐서 역산알고리즘이 결합되었다. 수치해석의 주요결과로는 시공간적으로 변하는 유도지진의 분포와 규모 그리고 단층대의 변형(파괴 및 전단변위)과 주입유체압력의 시공간적 분포와의 상관관계이다. 첫 번째 수치해석으로부터 절리가 분포하는 지열저류층에서의 수리자극에 의한 유도지진의 분포는 주입유체의 점성에 상당한 영향을 받는 것으로 나타났다. 주입유체의 점성이 낮은 경우 (1 cP), 유도지진의 발생범위가 큰 것으로 나타났으며, 주입 후 발생하는 유도지진의 개수와 규모 또한 높게 나타났다. 단층대가 존재하는 지열저류층의 수리자극 모델링의 결과, 주입정의 위치가 단층대와 가까운 경우 작은 주입수 압력분포(<0.1 MPa)로도 단층대의 파괴와 전단변형을 일으킬 수 있는 것으로 나타났다. 본 논문에서 소개한 수치해석기법은 수리자극을 통한 지열저류층 개발 시 유도지진의 분포와 규모를 실제 유체주입작업전에 예측할 수 있게 함으로써 지열에너지개발 분야에서 유용하게 사용될 수 있을 것으로 기대한다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.150.1-150.1
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• 2014

Showerhead is used as a main part in the semiconductor equipment. The face plate flatness should remain constant and the cleaning performance must be gained to keep the uniformity level of etching or deposition in chemical vapor deposition process. High operating temperature or long period of thermal loading could lead the showerhead to be deformed thermally. In some case, the thermal deformation appears very sensitive to showerhead performance. This paper describes the methods for robust design using computational fluid dynamics. To reveal the influence of the post distribution on flow pattern in the showerhead cavity, numerical simulation was performed for several post distributions. The flow structure appears similar to an impinging flow near a centered baffle in showerhead cavity. We took the structure as an index to estimate diffusion path. A robust design to reduce the thermal deformation of showerhead can be achieved using post number increase without ill effect on flow. To prevent the showerhead deformation by heat loading, its face plate thickness was determined additionally using numerical simulation. The face plate has thousands of impinging holes. The design key is to keep pressure drop distribution on the showerhead face plate with the holes. This study reads the methodology to apply to a showerhead hole design. A Hagen-Poiseuille equation gives the pressure drop in a fluid flowing through such hole. The assumptions of the equation are the fluid is viscous-incompressible and the flow is laminar fully developed in a through hole. An equation can be expressed with radius R and length L related to the volume flow rate Q from the Hagen-Poiseuille equation, $Q={\pi}R4{\Delta}p/8{\mu}L$, where ${\mu}$ is the viscosity and ${\Delta}p$ is the pressure drop. In present case, each hole has steps at both the inlet and the outlet, and the fluid appears compressible. So we simplify the equation as $Q=C(R,L){\Delta}p$. A series of performance curves for a through hole with geometric parameters were obtained using two-dimensional numerical simulation. We obtained a relation between the hole diameter and hole length from the test cases to determine hole diameter at fixed hole length. A numerical simulation has been performed as a tool for enhancing showerhead robust design from flow structure. Geometric parameters for the design were post distribution and face plate thickness. The reinforced showerhead has been installed and its effective deposition profile is being shown in factory.

• 한국지반공학회논문집
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• 제24권5호
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• pp.107-115
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• 2008

본 연구는 1차압밀 중의 크리프의 영향과 Yin이 제안한 탄-점-소성 모델에 대한 적용성을 검토하였다. 탄성모델을 이용한 일반적인 압밀이론은, 1차압밀 과정을 표현할 수 있으나 2차압밀을 표현할 수 없다. 이러한 결과는 2차압축을 표현할 수 있는 점성에 기인하며, 때로는 Ladd 등(1977)이 제안한 가정 A 및 B와 같은 스케일효과(실험실 공시체와 현장조건 사이의 점토층 두께의 차이)와 관련되어진다. 통상적으로 1차압밀 중의 크리프의 존재는 많은 연구자에 의해 확인되어졌으며, 가정 B가 잘 맞는 것으로 되어있다. 한편, 대형압밀시험을 통해 가정 A와 B의 중간적인 특성이 Aboshi(1973)에 의한 가정 C로써 제안되어졌다. 본 연구에서는 1차압밀 중의 침하-시간관계에 대한 크리프의 영향을 명백히 하기 위해, peat와 점토에 대해 분할형 압밀시험기를 이용하여 가정 B의 압밀시험을 행하였다. 그리고 Yin의 탄-점-소성 모델을 이용하여 실험결과를 해석하였다. 얻어진 결과는 다음과 같다. 1차압밀 종료시에 분할 공시체의 압축은 과잉간극수압 소산속도의 차이에 의해 동일하지 않았다. 또한 분할형 압밀시험기에 의해 측정된 평균변형률과 Yin의 EVP 모델을 이용한 해석치는 잘 일치하였다. 그러나 과잉간극수압의 소산에 대해서는 측정치가 Yin 모델에 비해 빨리 소산되었다.

• Tribology and Lubricants
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• 제30권5호
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• pp.303-310
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• 2014

In order to reduce friction and improve reliability, researchers have applied various surface texturing methods to highly sliding machine elements such as mechanical seals and piston rings. Despite extensive theoretical research on surface texturing, previous numerical results are only applicable to isothermal and iso-viscous conditions. Because the lubricant flow pattern of textured bearing surfaces is much more complicated than that for non-textured bearings, the Navier?Stokes equation is more suitable than the Reynolds equation for the former. This study carries out a thermohydrodynamic (THD) lubrication analysis to investigate the lubrication characteristics of a single micro-dimpled parallel thrust bearing cell. The analysis involves using the continuity, Navier?Stokes, energy, temperature?viscosity relation, and heat conduction equations with the commercial computational fluid dynamics (CFD) code FLUENT. This study discretizes these equations using the finite volume method and solves them using the SIMPLE algorithm. The results include finding the streamlines, pressure and temperature distributions, and variations in the friction force and leakage for various dimple radii and depths. Increasing the dimple radius and decreasing the depth causes a recirculation flow to form because of a strong vortex, and the oil temperature greatly increases compared with the non-textured case. The present numerical scheme and results are applicable to THD analysis of various surface-textured sliding bearings and can lead to further study.

• 동의생리병리학회지
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• 제22권5호
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• pp.1057-1061
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• 2008

For the purpose of investigating the reasonable logics contained in physiognomy of east and old western medicine. hypothetical researches based on hydromechanics theory were performed concerning facial types of form and pathologic features, especially 4 types of Dr. Jisan-Essence, Qi energy. Emotional Activity and Blood(EQAB). In order to infer the functional relation between facial type forming and EQAB factors, EQAB were supposed as fluid grounded on their continual flowing or periodical change and pressure effect from its congestion. and a premise that there's a linear corresponding relationship between the appearance of organ and its physical conditions of its inner vessels is formed too. Through this work, the unit fluid model(UFM) of Essence can be assumed as circle shape formed by the high viscosity and surface tension, the UFM model of Qi energy as quadrangular shape by the scattering features to outer four directions, and the UFM of emotional activity as inverted triangular shape by the flippant and uprising features, and the UFM of blood as ellipsoid triangle by the heavy and descending features in spite of circulation. The shapes made from each UFM are reproduced in the process of human development and manifest respective facial shape through the self-reproduction method like fractal theory in the last. Conclusively. it is said that the facial form analysis method like EQAB type theory can be the useful methodology to understand the human pathological and physiological features in view of hydromechanics.

• 한국식품저장유통학회지
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• 제19권3호
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• pp.337-343
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• 2012

시판 3사의 A, B 및 C 제품의 시판 딸기잼과 제조방법을 달리하여 직접 제조한 수제 딸기잼 즉 상압잼(HM-AP)과 감압잼(HM-RP) 등 5가지 딸기잼을 대상으로 총당, pH, 총산, 총 폴리페놀, 안토시아닌, 색도, 물성 및 관능검사를 실시하였다. 총당은 62.33~68.33 $^{\circ}Brix$이었고, pH는 3.59~3.78 범위였으며, 총산은 0.51~1.01으로 나타났다. 딸기잼의 색도 중 명도(L)은 11.02~14.80, 적색도(a)는 3.91~13.68로 상압잼이 유의적으로 높게 나타났다. 색소 성분인 총 폴리페놀 함량은 시판 잼 A, B, C의 경우 56.10, 97.59 및 105.85 mg GAE/100 g, 상압잼과 감압잼의 경우 각각 156.13, 189.94 mg GAE/100 g로 조사되었다. 안토시아닌 함량은 시판 잼 A, B, C의 경우 1.51, 0.95 및 0.80 mg/100 g, 상압잼과 감압잼의 경우 각각 2.64, 9.16 mg/100 g으로 나타났다. 감압잼은 총 폴리페놀과 안토시아닌 함량에 있어 다른 잼에 비해 유의적으로 높게 나타났다. 물성 중 경도는 $5.67{\times}10^3$ (HM-AP 잼)~$41.91{\times}10^3$ (B 잼) dyne/$cm^2$, 젤리강도는 40.08 (HM-AP 잼)~180.33 (B 잼) dyne, 파단응력은 83.84 (C 잼)~302.93 (B 잼) g 이었다. 관능검사로 색, 향, 단맛, 신맛, 발림성 및 종합적 기호도를 조사한 결과 HM-RP 잼이 다른 잼에 비해서 평점이 높은 것으로 나타났으며, 특히 색의 평점은 6.95로 가장 높은 것으로 나타났다. 항산화 활성을 나타내는 DPPH 라디칼소거능은 A, B, C, 상압잼 및 감압잼 각각 44.27, 41.70, 53.06, 69.08, 73.21% 였다. 본 결과는 저산소 가공기술을 이용하여 감압하에서 저온에서 제조한 HM-RP 딸기잼은 폴리페놀화합물의 산화 안정화로 총 폴리페놀과 안토시아닌 등 그 함량이 다른 잼에 비해 유의적으로 높은 것으로 사료된다.