• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.1089-1092
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• 1995

A planar vibratory gyroscope using electrostatic actuation and electromagnetic detection is proposed. The gyroscope has large sensitivity and can be fabricated by using surface micrimachining, bulk micromachining and conventional machining technology. In this paper, the gyroscope and the electromagnetic detecting system equations are derived to determine the output characteristics for the planar vibratory gyroscope using electrostatic acturation and electromagnetic detection. The maximum output is obtained when the driving frequencyequals to the detecting frequency. The resonant frequencies of the resonator are determined by the beam stiffness, i.e. the material constants and spring dimensions. The dimensions of the beams are determined using the analytic vibration modelling. The expected resonant frequencies are 200Hz both and the sensitivity is 62mV/deg/sec with 4000 electronic circuit amplifying coefficient for an AC drive voltage of 3V bias voltage of 15V and DC field current of 50 mA.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1993년도 정기총회 및 추계학술대회 논문집 학회본부
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• pp.195-197
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• 1993

In this paper, a planar vibratory gyroscope is designed and fabricated in macro model. Elementary experiment and test are done for micro model. This gyroscope has a double gimbal structure with an active dimension $80{\times}120{\times}1\;mm^3$. Outer gimbal vibration is generated by electromagnetic force using ferrite E-core wounded by coil. Inner gimbal vibration is detected by inductive sensor. It is demonstrated' that mechanical and electrical symmetries are important for improvement of vibratory gyroscope.

• 제어로봇시스템학회논문지
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• 제10권8호
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• pp.669-672
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• 2004

This paper considers the implementation and experiments of an open-loop Cylindrical Vibratory Gyroscope(CGV). An open-loop CGV composed of thin cylindrical vibrating element, electromagnetic drive and pick-off element with open-loop control was designed and fabricated. The experimental performance tests of the open-loop CGV were done using a temperature chambered rate table. Also, the limitations of open-loop CGV were analyzed and the solution for the limitations was proposed.

• 전기학회논문지
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• 제63권8호
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• pp.1075-1079
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• 2014

In this paper, we describe the analysis and the compensation method of the g-sensitivity error for MEMS vibratory gyroscopes. Usually, the g-sensitivity error has been ignored in the commercial MEMS gyroscope, but it deserves our attention to apply for the missile application as a tactical grade performance. Thus, it is necessary to compensate for the g-sensitivity error to reach a tactical grade performance. Generally, the g-sensitivity error seems intuitively to be a gyroscope bias error proportional to the linear acceleration. However, we assert that the g-sensitivity error mainly causes not a bias error but a scale-factor error. And we verify that the g-sensitivity scale-factor error occurs due to the non-linearity of parallel plate electrodes. Therefore, we propose the compensation method to remove the g-sensitivity scale-factor error. The experimental result showed that a proposed compensation method improved successfully the performance of the MEMS vibratory gyroscope.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.1537-1541
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• 2003

In this paper, presented is a feedback control performance of vibratory gyroscope at various vacuum levels. Micro gyroscope, whose operation is based on the vibrating motion at the vacuum conditions, is highly influenced by the vacuum level of the operating circumstances. In general, we apply the feedback control scheme to the gyroscope in order to improve the performances of the sensor. And control performances of the gyroscope are related to those vacuum levels. So we need investigate the performances of the closed loop control at various vacuum conditions comparing with those of the open loop. The experimental results show that the sensitivity of the closed loop is less than that of the open loop especially in low vacuum conditions. Therefore, there should be trade-off between sensitivity and other sensor performances such as linearity, bandwidth when we apply feedback control to the gyroscope.

• 제어로봇시스템학회논문지
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• 제9권1호
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• pp.30-36
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• 2003

Driving and pick-off using electromagnetic force for a cylindrical vibratory gyroscope is considered. A gyroscope consisting of thin cylindrical vibrating element and electromagnetic drive and pick-off element is designed, fabricated and tested. The results of the proposed pick-off method were compared with the results of the highly precise laser interferometer and eddy current sensor as it was used as the reference standard. Through the experiment, it is verified that the proposed electromagnetic driving and pick-off method can be an effective alternative to conventional electrostatic or piezo-electric methods.

• 한국정밀공학회지
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• 제22권11호
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• pp.165-172
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• 2005

In MEMS (Micro-Electro-Mechanical System), packaging induced stress or stress induced structure deformation becomes increasing concerns since it directly affects the performance of the device. In the decoupled vibratory MEMS gyroscope, the main factor that determines the yield rate is the frequency difference between the sensing and driving modes. The gyroscope, packaged using the anodic bonding at the wafer level and EMC (epoxy molding compound) molding, has a deformation of MEMS structure caused by thermal expansion mismatch. This effect results in large distribution in the frequency difference, and thereby a lower yield rate. To improve the yield rate we propose a packaged SiOG (Silicon On Glass) process technology. It uses a silicon wafer and two glass wafers to minimize the wafer warpage. Thus the warpage of the wafer is greatly reduced and the frequency difference is more uniformly distributed. In addition. in order to increase robustness of the structure against deformation caused by EMC molding, a 'crab-leg' type spring is replaced with a semi-folded spring. The results show that the frequency shift is greatly reduced after applying the semi-folded spring. Therefore we can achieve a more robust vibratory MEMS gyroscope with a higher yield rate.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 추계학술대회 논문집 전기물성,응용부문
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• pp.40-42
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• 2004

This paper describes a method to find an optimal driving condition of vibratory gyroscope. Mechanical coupling between driving and sensing mode degrades the performance of vibratory gyroscope. When the resonant frequencies of driving and sensing parts are fixed, frequency and amplitude of driving source affect mechanical coupling. Thus, they should be optimally tuned. To investigate the influence of driving source on mechanical coupling, we measured frequency response and displacement of driving and sensing mode using laser vibromenter. The measured frequency response and displacement show that the gyroscope has minimum mechanical coupling when the frequency of driving source is set to the intermediate value of driving and sensing part resonant frequency. Measurement also shows that the mechanical coupling increases abruptly at a certain driving voltage as the voltage increases.

• 제어로봇시스템학회논문지
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• 제11권3호
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• pp.187-192
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• 2005

This paper presents the design of the Automatic Gain Control (AGC) system for the drive axis of a electro-magnetic driven cylinder gyroscope. The simulation and experimental results show that the designed AGC excites the cylinder at its natural frequency and maintains a specified amplitude of oscillations, and also track the natural frequency shifts due to temperature variations. The sensing performance of the AGC driven gyroscope is shown to be greatly improved compared to that of the open-loop driven one.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.2090-2092
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• 2004

In this paper, the new measurement methodology of characteristics of the vibratory micro gyroscope using Quality factor and the resonant displacement was proposed. Because the Quality factor has a large error under the high Quality factor condition, it is difficult to analyze the characteristics of the vacuum packaged vibratory micro gyroscopes with the Quality factor. We analyzed mechanical characteristics of gyroscope with the value of Quality factor. We described measurement errors of mechanical characteristics of micro gyroscopes. The measured value of Quality factor is 47532 and error range of Quality factor is from -29.8 % to 73.9 %. The value of resonant displacement is 3.4${\mu}m$ and the measurement error is 2.9 %. From the result of Quality factor degradation and resonant displacement degradation, 1698 days and 1503 days were estimated as Time To Failure (TTF), respectively. The range of estimation error of Quality factor degradation and resonant displacement degradation is calculated from 1246 days to 1832 days and from 1456 days to 1537 days, respectively. We can analyze the characteristics of the vibratory gyroscope using the quality factor when the Quality factor is smaller than 10,000. Also we can analyze that using the resonant displacement when the Quality factor is larger than 10,000.