• Proceedings of the Korea Crystallographic Association Conference
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• 2002.11a
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• pp.45-47
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• 2002

반도체 소자의 고집적화 및 고속화가 요구됨에 따라 MOSFET 구조의 게이트 절연막으로 사용되고 있는 SiO₂ 박막의 두께를 감소시키려는 노력이 이루어지고 있다. 0.1㎛ 이하의 소자를 위해서는 15Å 이하의 두께를 갖는 SiO₂가 요구된다. 하지만 두께감소는 절연체의 두께와 지수적인 관계가 있는 누설전류를 증가시킨다[1-3]. 따라서 같은 게이트 개패시턴스를 유지하면서 누설전류를 감소시키기 위해서는 높은 유전상수를 갖는 두꺼운 박막이 요구되는 것이다. 그러므로 약 25정도의 높은 유전상수를 갖고 5.2～7.8 eV 정도의 비교적 높은 bandgap을 갖으며, 실리콘과 열역학적으로 안정한 물질로 알려진 HfO2[4-5]가 최근 큰 관심을 끌고 있다. 본 연구에서는 HfO₂ 박막을 실제 소자에 적용하기 위하여 전극 및 열처리에 따른 HfO₂ 박막의 미세구조 및 전기적 특성에 관한 연구를 수행하였다. 이를 위해, HfO₂ 박막을 reactive DC magnetron sputtering 방법으로 증착하고, XRD, TEM, XPS를 사용하여 ZrO₂ 박막의 미세구조를 관찰하였으며, MOS 캐패시터 구조의 C-V 및 I-V 특성을 측정하여 HfO₂ 박막의 전기적 특성을 관찰하였다. HfO₂ 타겟을 스퍼터링하면 Ar 스퍼터링에 의해 에너지를 가진 산소가 기판에 스퍼터링되어 Si 기판과 반응하기 때문에 HfO₂ 박막 형성과 더불어 Si 기판이 산화된다[6]. 그래서 HfO₂같은 금속 산화물 타겟 대신에 순수 금속인 Hf 타겟을 사용하고 반응성 기체로 O₂를 유입시켜 타겟이나 시편위에서 high-k 산화물을 만들면 SiO/sub X/ 계면층을 제어할 수 있다. 이때 저유전율을 갖는 계면층은 증착과 열처리 과정에서 형성되고 특히 500℃ 이상에서 high-k/Si를 열처리하면 계면 SiO₂층은 증가하는 데, 이것은 산소가 HfO₂의 high-k 박막층을 뚫고 확산하여 Si 기판을 급속히 산화시키기 때문이다. 본 방법은 증착에 앞서 Si 표면을 희석된 HF를 이용해 자연 산화막과 오염원을 제거한 후 Hf 금속층과 HfO₂ 박막을 직류 스퍼터링으로 증착하였다. 우선 Hf 긍속층이 Ar 가스 만의 분위기에서 증착되고 난 후 공기중에 노출되지 않고 연속으로 Ar/O₂ 가스 혼합 분위기에서 반응 스퍼터링 방법으로 HfO₂를 형성하였다. 일반적으로 Si 기판의 표면 위에 자연적으로 생기는 비정질 자연 산화막의 두께는 10～15Å이다. 그러나 Hf을 증착한 후 단면 TEM으로 HfO₂/Si 계면을 관찰하면 자연 산화막이 Hf 환원으로 제거되기 때문에 비정질 SiO₂ 층은 관찰되지 않았다. 본 실험에서는 HfO2의 두께를 고정하고 Hf층의 두께를 변수로 한 게이트 stack의 물리적 특성을 살펴보았다. 선증착되는 Hf 금속층을 0, 10, 25Å의 두께 (TEM 기준으로 한 실제 물리적 두께) 로 증착시키고 미세구조를 관찰하였다. Fig. 1(a)에서 볼 수 있듯이 Hf 금속층의 두께가 0Å일때 13Å의 HfO₂를 반응성 스퍼터링 방법으로 증착하면 HfO₂와 Si 기판 사이에는 25Å의 계면층이 생기며, 이것은 Ar/O₂의 혼합 분위기에서의 스퍼터링으로 인한 Si-rich 산화막 또는 SiO₂ 박막일 것이다. Hf 금속층의 두께를 증가시키면 계면층의 성장은 억제되는데 25Å의 Hf 금속을 증착시키면 HfO₂ 계면층은 10Å미만으로 관찰된다. 그러므로 Hf 금속층이 충분히 얇으면 플라즈마내 산소 라디칼, 이온, 그리고 분자가 HfO₂ 층을 뚫고 Si 기판으로 확산되어 SiO₂의 계면층을 성장시키고 Hf 금속층이 두꺼우면 SiO/sub X/ 계면층을 환원시키면서 Si 기판으로의 산소의 확산은 막기 때문에 계면층의 성장은 억제된다. 따라서 HfO₂/Hf(Variable)/Si 계에서 HfO₂ 박막이 Si 기판위에 직접 증착되면, 순수 HfO₂ 박막의 두께보다 높은 CET값을 보이고 Hf 금속층의 두께를 증가시키면 CET는 급격하게 감소한다. 그러므로 HfO₂/Hf 박막의 유효 유전율은 단순 반응성 스퍼터링에 의해 형성된 HfO₂ 박막의 유전율보다 크다. Fig. 2에서 볼 수 있듯이 Hf 금속층이 너무 얇으면 계면층의 두께가 두꺼워 지고 Hf 금속층이 두꺼우면 HfO₂층의 물리적 두께가 두꺼워지므로 CET나 EOT 곡선은 U자 형태를 그린다. Fig. 3에서 Hf 10초 (THf=25Å) 에서 정전 용량이 최대가 되고 CET가 20Å 이상일 때는 high-k 두께를 제어해야 하지만 20Å 미만의 두께를 유지하려면 계면층의 두께를 제어해야 한다.

• Journal of Conservation Science
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• v.32 no.4
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• pp.471-490
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• 2016

This study investigated provenance of raw materials and making technique of lime-based materials used in the tomb barriers of the Yesan Mokri tombs from Joseon dynasty on the basis of analysis to material characteristics and physical properties. In the barrier materials, dry density and porosity are the highest value ($1.82g/cm^3$) and the lowest value (25.20%) in the south wall of No. 1 tomb, respectively. Dry density and porosity are inversely proportional in all barrier materials, but unconfined compressive strength, which is the highest value of $182.36kg/cm^2$ in the No. 2 tomb, does not show an interrelation with porosity and density. Mineral components in the lime-soil mixtures of the tomb barrier are mainly quartz, feldspar, mica and calcite about 200 to $600{\mu}m$ size with yellowish brown matrix. Hydrotalcite and portlandite are detected in the lime mixture, and kaolinite in the soils. The lime materials of the tomb barrier occurred in large quantities weight loss and variable endothermic peaks caused by decarbonization reaction of $CaCO_3$ in the range from 600 to $800^{\circ}C$ in thermal analysis. Making temperature of lime for the tomb barrier is presumed approximately about $800^{\circ}C$ based on the occurrences, compositions and thermal analysis. The tomb barriers are revealed to very wide composition ranges of major elements and loss-on-ignition (22.5 to 33.6 wt.%) owing to mixture of the three materials (lime, sand and clay). It is interpreted that low quality construction technique was applied as the limes are very heterogeneous mixture with aggregates, and curing of the lime was poorly processed in the tomb barriers. Possible limestone sources are distributed in many areas around the Mokri site where limestone conformation and quarries for commercial production are found within Yesan and Hongseong areas. Therefore, we estimated that raw materials were possibly supplied from the local mines near the Mokri site.

• Journal of Distribution Science
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• v.10 no.5
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• pp.37-44
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• 2012

In this paper, we investigate several factors that affect the locational decision of discount stores by using previous studies on the marketing area and the location of commercial facilities. We selected 21 primary variables that are expected to influence the decision of store location and, by factor analysis, grouped them into five underlying factors. Among these, the demographic factor, which shows the potential purchasing power level, had the greatest impact on the locational decision for the store. However, we found individual stores positioned according to unique locational characteristics in addition to the demographic factor. It means that we have to additionally consider if the vicinity of the market is based on any physical properties. Many previous studies proposed four decision factors for store location: the economic factor, the demographic factor, the land utilization factor, and traffic factor. However, the fivefold factors-our distinctive contribution-are more concrete and persuasive according to Korean reality. We show that location preference is based on the following criteria: (1) the area is densely populated, (2) houses stand close together, (3) residents have a high income level, (4) road traffic is developed and easy to access, and (5) public transportation is well developed. The demographic factor has the greatest impact on the location of a discount store. The number of households has a greater relevance to the demographic factor than does the individual consumer. Second, discount stores relatively prefer places where houses are located close together because such places offer easy access to the market. Third, a place whose residents have a high income level will be preferred, with its large cars and excellent traffic conditions. Fourth, a location would be highly rated if the roads around commercial facilities are well developed and their accessibility is good. Finally, discount stores must be located close to bus stops because female consumers, including housewives-the most important customers-evaluate stores based on distance. In this research, the variable of consumer attitude and preference was excluded, and the location factors of discount stores were analyzed according to a microscopic view through physical spatial data. In the future, the opening of new discount stores based on the five factors indicated above will require a comparatively shorter time from the first project feasibility analysis. In addition, the result of our study can be applied to the field of public policy for constructing and attracting large-scale distribution facilities.

• The Korean Journal of Mycology
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• v.38 no.2
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• pp.130-135
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• 2010

To select the viable alternative substrates among the variable organic substrates for productivity enhancement and production cost-reduction of oyster mushroom in bottle culture, this study was carried out at mushroom research institute of GGRDA in 2007. In bottle culture of oyster mushroom (Plerutus ostreatus), the seedcakes of rape (RS), soybean (SS), coconut (CCS), and kapok (KS) were examined as substitute of cotton seedcake which was primary nutritive material of mushroom growing substrate. The chemical properties of substrate mixed with kapok seedcake is similar to the mixture with cotton seedcake in T-C, T-N, C/N ratio, and other nutrients. Mixed growing substrate containing cotton seedcake and kapok seedcake was superior to other mixtures 99.2% and 99.5%, respectively in spawning ratio and was faster mycellium growth in column test than that of soybeen seedcake, cotton + soybeen seedcake, and coconut seedcake. The period required in first pin-heading was 1-2 days longer in rape and soybeen seedcake mixture. Also there wad no primodia and fruitbody formation at soybeen seedcake mixture which had highest T-N content among the other mixed substrates. Yield per bottle and biological efficiency were highest of 144.6 g and 75.4%, respectively at kapok seedcake mixture. As a result, this study found that cotton seedcake can be replaced with kapok seedcake in bottle culture of oyster mushroom.

• Korean Journal of Environment and Ecology
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• v.33 no.2
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• pp.187-201
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• 2019

This study examined the physicochemical water quality and evaluated the ecological health in 14 sites of Geum River (upstream, mid-stream, and downstream) using the fish community distribution and guilds and eight multi-variable matrices of FAI (Fish Assessment Index) during June 2008-May 2009. The analysis of the water quality variables showed no significant variation in the upstream and mid-stream but a sharp variation due to the accumulation of organic matter from the point where the treated water of Gap and Miho streams flew. The analysis of physicochemical water properties showed that BOD, COD, TN, TP, Cond, and Chl-a tended to increase while DO decreased to cause eutrophication and algae development from the downstream where Miho and Gap stream merged. The analysis of fish community showed that the species richness index and species diversity index increased in the mid-stream area but decreased in the downstream area, indicating the stable ecosystem in the upper stream and the relatively unstable ecosystem in the downstream. The analysis of the species distribution showed that the dominant species were Zacco platypus that accounted for 20.9% of all fish species and Zacco koreanus that accounted for 13.1%. The analysis of the fish tolerance and feeding guild characteristics showed that the sensitive species, the insectivore species, and the aquatic species were dominant in the mid-stream point. On the other hand, contaminants from the sewage water treatment plant of Miho stream had a profound effect in the downstream to show the dominance of tolerant species, omnivorous species, and lentic species. Therefore, it is necessary to improve water quality by reducing the load of urban pollutants and to pay attention to the conservation and restoration of aquatic ecosystems.

• Journal of Korean Society of Forest Science
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• v.110 no.2
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• pp.217-232
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• 2021

This study calculated the productivity and cost of extraction and processing of logging residues by cut-to-length (CTL) and whole-tree (WT) harvesting methods. In addition, the comparative analysis of the characteristics of wood chip fuel to examine whether it was suitable for the fuel conditions of the energy facility. In the harvesting and processing system to produce the wood chips of logging residues the system productivity and cost of the CTL harvesting system were 1.6 Gwt/SMH and 89,865 won/Gwt, respectively. The productivity and cost of the WT harvesting system were 2.9 Gwt/SMH and 72,974 won/Gwt, respectively. The WT harvesting productivity increased 1.3times while harvesting cost decreased by 18.7% compared to the CTL harvesting system. The logging residues of wood chips were not suitable for CTL wood chips based on International Organization for Standardization (ISO 17225-4:2021) and South Korea standard (NIFoS, 2020), but the quality (A2, Second class) was improved through screening operation. The WT-unscreened wood chips conformed to NIFoS standard (second class) and did not conform to ISO but were improved through screening operation (Second class). In addition to the energy facility in plant A, all wood chips except CTL-unscreened wood chips were available through drying processing. The WT-unscreened wood chips were the lowest at 99,408 won/Gwt. Plants B, C, and D had higher moisture content than plant A, so WT-unscreened wood chips without drying processing were the lowest at 57,204 won/Gwt. Therefore, the production of logging residues should improve with operation methods that improve the quality of wood chips required for applying the variable biomass and energy facility.

• Korean Journal of School Psychology
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• v.9 no.3
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• pp.485-503
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• 2012

Academic engagement has been known as a strong predictor of students' cognitive and affective outcomes in an educational context. Despite increasing interest and theoretical usefulness of this construct, a few researchers seem to be interested in the validation of instruments to measure academic engagement for Korean students. Thus, this study would like to introduce one of academic scales widely used, UWES-S(Utrecht Work Engagement Scale-Student) (Schaufeli et al., 2002a: 2002b) and to validate the UWES-S for Korean college students. To validate the Korean version of the UWES-S, 651 college students (285 for Field Trial, 366 for Main Study) were used. The procedure is as follows. First, we used an integrated adaptation procedure to produce a Korean version of the UWES-S. Second, EFA(exploratory factor analyses) was applied to explore the factor structure of the UWES-S on the field trial data. Third, the psychometric properties of the UWES-S items were examined by graded response model(GRM). Also CFA(confirmatory factor analysis) was used to examine its internal construct validity for the data from the main study. Finally, the external validity of the UWES-S was scrutinized with the related variables such as academic motivation and satisfaction. As a result, the Korean version of the UWES-S with 13 items was accepted that the four items were excluded from its original version. Second, the internal validity was supported that the 3 factor CFA model(vigor, dedication, absorption) fit the data well. Third, we supported the partial mediation model that academic engagement played as a mediating variable between academic motivation(internal/external) and academic satisfaction. Finally, the differences between a validation of UWES-S for Korean college and high school students, the necessity of construct equivalence testing, and direction for future research of scale validating were discussed.

• The Journal of Korean Society for Radiation Therapy
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• v.24 no.2
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• pp.67-75
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• 2012

Purpose: The study is to check the specialty of radiotherapists working in the department of radiation oncology and find job satisfaction, organizational commitment and job commitment having an effect on professional parts. After making analysis of the mutual relation, it is to provide radiotechnologists with making progress in the future. Materials and Methods: From March 2 to March 30, we had carried out a survey with email. It is possible to have 272 questionnaires answered in the survey. We make use of SPSS 13.0 for Windows to analyze the data collected for study. Frequency and a percentage are meant to show general characteristics, and t-test and ANOVA to do the difference between general properties and professionalism. Pearson's correlation coefficient also is meant to do the correlation of professionalism, organizational job commitment and job satisfaction, and multiple regression analysis to do the factor for a relevant variable to affect professionalism. Results: There are subdivisions in the professionalism informing us of the self-regulation $17.74{\pm}2.32/3.55{\pm}.46$, a sense of calling $17.58{\pm}2.63/3.52{\pm}.53$, reference of the professional $17.14{\pm}2.39/3.43{\pm}.48$, service to the public $15.97{\pm}2.48/3.19{\pm}50$, and autonomy $15.68{\pm}2.28/3.14{\pm}46$. Grand mean turns out to be $83.89{\pm}7.63$(Summation of items)/$3.37{\pm}0.49$ (Numbers of items). When it comes to a statistical relation between general characteristics and professionalism, the statistics have it that these come within age (P<.001), period of employment (P<.001), education status (P<.05), a monthly income (P<.001), radiotherapists who get a special license (P<.001), the position (P<.001), and an opportunity for developing (P<.001). As a result of organizational commitment, job commitment, and job satisfaction, grand mean in organizational commitment proves to be $80.10{\pm}8.15/3.34{\pm}.34$. There are subvisions showing affective commitment $28.64{\pm}4.61$/3.58, continuance commitment $27.54{\pm}4.22/3.44{\pm}.53$, and normative commitment $23.95{\pm}2.94/2.99{\pm}.37$ in order of precedence. The average grade in job commitment is $32.47{\pm}5.77/3.30{\pm}.60$ and that in job satisfaction is $63.39{\pm}10.16/3.17{\pm}.51$, respectively. We find the positive relationship between professionalism and organizational commitment (r=.522, P<.05), between professionalism and job commitment (r=.444, P<.05), and between professionalism and job satisfaction (r=.507, P<.05). And we also get the positive relationship between organizational commitment and job commitment (r=.549, P<.05), between organizational commitment and job satisfaction (r=.433, P<.05), and between job commitment and job satisfaction (r=.462, P<.05). To catch the factors influencing the professionalism of radiotherapists, we used multiple regression analysis. According to the final model, it appears affective commitment (B=.755, P<.05), normative commitment (B=.305, P<.05), job satisfaction (B=.092, P<.05), an opportunity for developing (B=-1.505, P<.05), and the position (B=-1.155, P<.05) in order of precedence. It seems that explaining influece on $R^2$ is 0.504. Conclusion: The results of the factors that influence professionalism working as radiotherapists in the department of radiation oncology have it that the more affective commitment, normative commitment, and job satisfaction we feel, the more professionalism we recognize. We think that the focus of professionalism is increased if getting the chances for radiotherapists to have little to do with developing opportunities given.