• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2000.11a
• /
• pp.471-475
• /
• 2000

P-type (100) Si wafer patterned with 1000$\AA$ SiO$_2$island was used as substrate and the Si films were deposited under low pressure using Si$_2$H$_{6}$-H$_2$gas mixture where the total gas flow rate and deposition pressure were 16.6sccm and 3.5mtorr, respectively. In this condition, we selectively obtained high-quality epitaxial Si layer of the 350~1050$\AA$ thickness. In order to extend the incubation period, we kept high pressure H$_2$ environment without Si$_2$H$_{6}$ gas for few minutes after first incubation period and then we conformed the existence of second incubation period.iod.

• Journal of Surface Science and Engineering
• /
• v.29 no.5
• /
• pp.350-356
• /
• 1996

This paper presents VHF-Plasma Enhanced Chemical Vapor Deposition (VHF-PECVD) of Ti/TiN with silne reduction process, using $TiCl_4$ source. VHF plasma, which is denser than a conventional RF plasma, produces a large number of radicals. Silane reduction process, which supplies silane radicals, more promotes dissociation of Ti-Cl bond than a conventional hydrogen reduction process. therefore, the VHF-PECVD with silane reduction process forms high quality Ti/TiN films, which have low level of Cl content(<0.2 at.%). In result, the resistivity for Ti or TiN is less than 200$\mu$$\Omega$cm. The surface morphology of Ti film is very smooth. The structure of TiN film is amorphous. Furthermore, excellent step coverage for the films is obtained.

• Proceedings of the KIEE Conference
• /
• 2006.07c
• /
• pp.1378-1379
• /
• 2006

Carbon nanotubes (CNTs) with few defects and very small amount of amorphous carbon coating have been synthesized by catalytic decomposition of acetylene in $H_2$ over well-dispersed metal particles supported on MgO. The yield, quality and diameters of CNTs were obtained by control of catalyst metal compositions to be used. The optimization condition of carbon nanotubes with high yield is when Co and Mo are in a 1:1 ratio and Fe metal contents to Co is increased on magnesium oxide support. It is also found that the diameter of the as-prepared CNTs can be controlled mainly by adjusting the molar ratio of Fe-Mo, Co-Fe, and Co-Mo versus the MgO support. Our results indicated that desired diameter distribution of CNTs is obtained by choosing or combining the catalyst to be employed.

• Journal of information and communication convergence engineering
• /
• v.4 no.3
• /
• pp.105-107
• /
• 2006

Amorphous silicon is a kind of optical to electric conversion material with current or voltage type after generating a numerous free electron and hole when it is injected by light. It is very effective technology to make schottky diode by bonding thin film to use optical diode. In this paper, we have fabricated optical diode device by forming chrome silicide film through thermal processing with thin film($100{\AA}$) having optimal amorphous silicon. The optimal condition is that we make a thin film by using PECVD(Plasma Enhanced Chemical Vapor Deposition) to improve reliability and characteristics of optical diode. We have obtained high quality diode by using chrome silicide optical diode from dark current and optical current measurement compared to previous method. It makes a simple process and improves a good reliability.

• Journal of Korean Vacuum Science & Technology
• /
• v.2 no.2
• /
• pp.118-121
• /
• 1998

Diisopropylselenide (DIPSe) is employed for the metalorganic vapor phase epitaxy (MOVPE) of ZnSe in order to eliminate premature gas phase reaction while maintaining negligible carbon incorporation and preserving relatively low growth temperature. In combination with dimethylzinc, single crystalline ZnSe layers were grown on GaAs at temperature around 450$^{\circ}C$. Secondary ion mass spectrometry showed a negligible carbon incorporation in ZnSe films grown from DIPSe even at high [Ⅵ]/[II] ratios, in contrast of a carbon concentration of 1021 cm-3 in ZnSe films grown from diallyselenide (DASe). Crystalline and interface quality are demonstrated by secondary electron microscopy, secondary ion mass spectroscopy and double crystal X-ray diffraction.

• Journal of Mechanical Science and Technology
• /
• v.19 no.12
• /
• pp.2289-2295
• /
• 2005

Two-Phase flow pattern and pressure drop data were obtained for pure refrigerants R134a and R123 and their mixtures as test fluids in a horizontal tube. The flow pattern is observed through tubular sight glasses located at inlet and outlet of the test section. The flow map of Baker developed for air-water two-phase flow at atmospheric pressure failed to predict the observed flow patterns at the higher value of the mass velocity used in the present study. The map of Kattan et al. predicted the data well over the entire region of mass velocity selected in the present study. The measured pressure drop increased with an increase in vapor quality and mass velocity. A new two-phase multiplier was developed from a dimensional analysis of the frictional pressure drop data measured in the present experiment. This new multiplier was found successfully to correlate the frictional pressure drop.

• Food Science and Biotechnology
• /
• v.17 no.6
• /
• pp.1203-1206
• /
• 2008

Silk fibroin (SF) film containing catechin was prepared and the antimicrobial activity as well as physical property of the film was examined. Tensile strength of the SF film decreased with increasing concentration of catechin, and water vapor permeability of the film decreased. The film's antimicrobial activity against Escherichia coli O157:H7 increased with increasing catechin concentration. Sausage samples were inoculated with E. coli 0157:H7 and Listeria monocytogenes, and the sausage packaged with the SF film containing catechin had a decrease in the populations of E. coli O157:H7 and L. monocytogenes by 0.83 and 0.85 log CFU/g after 12 days of storage, respectively, compared to the control. In addition, the sausage had a better quality than the control regarding lipid oxidation. Our results indicate that sausages can be packed with the SF film containing catechin to extend shelf life.

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2009.10a
• /
• pp.185-185
• /
• 2009

Polypropylene beads (PP) coated with $TiO_2$ thin films were prepared by a rotating cylindrical plasma chemical vapor deposition (PCVD) reactor and were used to remove phenol in aqueous solution. The $TiO_2$ thin films of 416 nm thickness were coated on the PP particles uniformly. As the number of $TiO_2$-coated PP beads increases, the phenol is degraded faster, because of larger total surface area of photocatalysts for photodegradation. This study shows that a rotating cylindrical PCVD reactor can be a good method to prepare the particles coated with high-quality $TiO_2$ thin films, which can be applied to the pollutant removal by a photodegradation reaction of $TiO_2$ with high efficiency.

• International Journal of Air-Conditioning and Refrigeration
• /
• v.15 no.4
• /
• pp.169-174
• /
• 2007

The characteristics of nine existing condensation frictional pressure drop correlations for microfin tubes were evaluated with geometries, vapor quality, mass flux, and refrigerants. The $M\ddot{u}ller-Steinhagen$ and Heck [17] smooth tube frictional pressure drop correlation was utilized to evaluate the pressure drop penalty factor (PF). Except the Nozu et al. [2], the Kedzierski and Goncalves [3], the Choi et al. [10], and the Cavallini et al. [7], other pressure drop correlations did not consider the effect of tube geometry. The prediction values for R407C by pressure drop correlations show discrepancy with previous researcher's experimental trend. Additional efforts on the development of reliable condensation pressure drop correlation for microfin tubes are still required with the systematic investigation of various effects like geometries and working conditions.

• International Journal of Air-Conditioning and Refrigeration
• /
• v.15 no.4
• /
• pp.163-168
• /
• 2007

The feature of six existing condensation heat transfer correlations for microfin tubes were evaluated with the consideration of vapor quality, mass flux, geometries, and various refrigerants. The Kosky and Staub [15] and the Jaster and Kosky [16] correlations for smooth tube were used for the evaluation of the heat transfer enhancement factor (EF). For the prediction of zeotropic mixtures, most correlations show discrepancy with previous measurements. The Yu and Koyama [4] and the Shikazono et al. [8] correlations do not consider spiral angle effect. The Han and Lee [10] correlation shows fin height growth deteriorates heat transfer. Experimental verification to develop reliable condensation heat transfer correlation for microfin tubes is still needed with the consideration of geometrical effects and working conditions.