• Title/Summary/Keyword: Vapor phase growth

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Synthesis of Single-Crystalline InSb Nanowires Using CVD Method and Study of Growth Mechanism in Open and Close System (CVD 방법을 이용한 단결정 InSb 나노와이어의 성장과 Open/Close 시스템에서의 반응 메커니즘 연구)

  • Kang, Eun Ji;Park, Yi-Seul;Lee, Jin Seok
    • Journal of the Korean Vacuum Society
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    • v.22 no.6
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    • pp.306-312
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    • 2013
  • Single-crystalline InSb nanowire was synthesized on $SiO_2$ wafer via vapor-liquid-solid (VLS) mechanism using chemical vapor deposition method. According to the source container system (open or close) which contain InSb powder and $SiO_2$ wafer, the single-crystalline InSb nanowires have different growth mechanisms. Structural characterization of the InSb nanowires was examined by scanning electron microscope (SEM). Composition of the nanowires was investigated using x-ray diffraction (XRD) and energy dispersive x-ray spectroscopy (EDS). This study demonstrates that length and diameter of the InSb nanowires are long and thick using open-boat system by VLS and additional vapor-solid (VS) mechanisms, because open-boat system can carry a large amount of vapor-phase InSb precursor than close-boat system.

Numerical Study of Bubble Growth in a Microchannel (미세관에서의 기포성장에 대한 수치적 연구)

  • Seo, Ki-Chel;Son, Gi-Hun
    • Proceedings of the KSME Conference
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    • 2003.04a
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    • pp.1891-1896
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    • 2003
  • The bubble motion during nucleate boiling in a microchannel is investigated numerically. The liquid-vapor interface is tracked by a level set method which is modified to include the effects of phase change at the interface and contact angle at the wall. The computations are made for various channel sizes, liquid flow rates, and contact angles. Based on the numerical results, the bubble growth pattern and its effect on the flow and heat transfer are discussed.

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Investigation of thermodynamic analysis in GaN thick films gtowth (GaN 후막 증착의 열역학적 해석에 관한 연구)

  • Park, Beom Jin;Park, Jin Ho;Sin, Mu Hwan
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.8 no.3
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    • pp.387-387
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    • 1998
  • This paper reports on a thermodynamic analysis for the GaN thick film growth by vapor phaseepitaxy method. The thermodynamic calculation was performed using a chemical stoichiometric algorism. Thesimulation variables include the growth temperature in a range 400~1500 K, the gas ratios $(GaCl_3)/(GaCl_3+NH_3)$and $(N_2)/(GaCl_3+NH_3)$. The theoretical calculation predicts that the growth temperature of GaN be in thelower range of 450~750 K than the experimental results. The difference in the growth temperature betweenthe simulation and the experiments indicates that the vapor phase epitaxy of GaN is kinetically limited,presumably, due to the high activation energy of thin film growth.

Characteristics of Free-Standing GaN Substrates grown by Hydride Vapor Phase Epitaxy (Hydride Vapor Phase Epitaxy 법으로 성장된 Free-Standing GaN 기판의 특성에 관한 연구)

  • Kim, Hwa-Mok;Choe, Jun-Seong;O, Jae-Eung;Yu, Tae-Gyeong
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.3
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    • pp.14-19
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    • 2000
  • Free-standing GaN single crystal substrates have been obtained by growing thick GaN epitaxial layers on (0001) sapphire substrates using hydride vapor phase epitaxy (HVPE) method. After growing the GaN thick film of 200 ${\mu}{\textrm}{m}$, a free-standing GaN with a size of 10 mm $\times$10 mm were obtained by mechanical polishing process to remove sapphire substrate. Crack-free GaN substrates have been obtained by GaCl pre-treatment prior to the growth of GaN epitaxial layers. Properties of free-standing GaN substrates have been compared with those of lateral epitaxial overgrowth (LEO) GaN films by double-crystal x-ray diffraction (DC-XRD), cathodoluminescence (CL) and photoluminescence (PL) measurements.

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Characterization of Multiphase in $Fe_2O_3$ Thin Film by PECVD

  • Kim, Bum-Jin;Lee, Eun-Tae;Jang, Gun-Eik;Chung, Yong-Sun
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1997.06a
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    • pp.79-85
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    • 1997
  • Fe$_2$O$_3$ thin films were prepared on $Al_2$O$_3$ substrate by PECVD(Plasma-Enhanced Chemical Vapor Deposition) process. The phase transformation of iron oxide film was determined as the substrate temperature and reduction-oxidation process. $\alpha$-Fe$_2$O$_3$ was stable in deposition temperature ranges of 80~15$0^{\circ}C$. Fe$_3$O$_4$ phase was obtained by the reduction process of $\alpha$-Fe$_2$O$_3$ phase in H$_2$ ambient. Fe$_3$O$_4$ phase was transformed into a ${\gamma}$-Fe$_2$O$_3$ thin film under controlled oxidation conditions at 280~30$0^{\circ}C$.

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Growth and characterization of bulk GaN single crystals by basic ammonothermal method (Basic 암모노써멀 방법에 의한 벌크 GaN 단결정의 성장 및 특성)

  • Shim, Jang Bo;Lee, Young Kuk
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.26 no.2
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    • pp.58-61
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    • 2016
  • Bulk GaN crystals were grown by the basic ammonothermal method. The c-plane GaN templates grown by hydride vapor phase epitaxy were used as seed crystals and sodium metal, amide, and azide were added as a mineralizer. The growth conditions are at temperatures from $500{\sim}600^{\circ}C$ and pressures from 2~3 kbar. The growth rate for the c-axis was increased with increasing the operating pressure. Average dislocation density was measured $1{\times}10^5/cm^2$ by the cathodoluminescence measurement. The full-width at half-maximum of the X-ray diffraction rocking curve for (002) reflection was approximately 270 arcsec for Ga face and 80 arcsec for N face.

Vapor Phase Epitaxial Growth and Properties of GaN (GaN의 기상성장과 특성)

  • 김선태;문동찬
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1996.05a
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    • pp.72-75
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    • 1996
  • A hydride vapor phase epitaxy (HVPE) method is performed to prepare the GaN thin films on c-plane sapphire substrate. The full-width at half maximum of double crystal X-ray rocking curves from 20$\mu\textrm{m}$-thick GaN was 576 arcsecond. The photoluminescence spectrum measured 10 K shows the hallow bound exciton (I$_2$) line and weak donor-acceptor peak, however, there was not observed deep donor-acceptor pair recombination indicate the GaN crystals prepared in this study are of high purity and high crystalline quality. The GaN layer is n-type conducting with electron mobility of 72 $\textrm{cm}^2$/V$.$sec and with carrier concentration of 6 x 10$\^$18/cm/sup-3/.

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A Study on Formation Process of $TiO_2$ Nanopowder by Numerical Analysis in Chemical Vapor Condensation Reactor (화학기상응축 반응기 내부의 유동해석을 통한 $TiO_2$ 나노분말의 형성과정에 관한 연구)

  • Yu, Ji-Hun;Choe, Cheol-Jin;Kim, Yong-Jin;Kim, Byeong-Gi
    • 연구논문집
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    • s.33
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    • pp.123-135
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    • 2003
  • Using the residence time calculated by computer simulation for temperature and gas velocity distribution in CVC reactor, the kinetics on the formation of $TiO_2$ nano powder was analyzed for coagulation process, After abrupt increase of particle size at initial growth stage (< 0.2 $\mus$ ), the particle grew in proportion of cubic root to time. The numerically calculated particle sizes well agreed with the experimental results. However, the coarse rutile $TiO_2$ powders having the particle size of over 40 nm were formed on the surface of quratz rod in the reactor. it is thought that the fine anatase particles condensed on quratz rod were sintered in a heated CVC reactor to grow and transform to coarse rutile phase, and the critical size for phase transformation anstase-to-rutile was around 25 nm tn this study.

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