• 한국결정성장학회지
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• 제34권2호
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• pp.61-65
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• 2024

HVPE(Hydride vapor phase epitaxy) 공법은 기체상의 원료를 사용하여 박막 또는 단결정을 제조하는 공법이다. 화학적 기상증착법의 원리를 적용하여 난용융성 또는 고융점의 물질의 단결정을 성장할 수 있는 공법으로서, 질화갈륨(GaN) 단결정을 얻을 수 있는 공법 중 하나이다. 최근 동 공법을 이용하여 질화알루미늄(AlN) 단결정을 성장하고자 하는 연구가 많이 수행되어져 왔으나, 아직은 좋은 결과를 얻지 못하고 있다. 본 연구에서는 AlN 단결정을 HVPE 공법으로 성장하고자 하였다. 성장 공정에서 질소를 운송가스(Carrior gas)로 사용하였으며, 질소(N2)의 양의 변화에 따른 성장 결과를 고찰하여 보았다. 질소의 양이 증가함에 따른 성장 결정의 변화 양상을 확인할 수 있었다. 성장된 AlN 단결정의 형상을 광학 현미경을 사용하여 관찰하였고, 이중결정 X선 회절 분석(DCXRD, Double crystal X-ray diffractometry)을 이용하여, AlN 결정의 생성을 확인함과 동시에 성장된 단결정의 결정성도 알아보았다.

• 수산해양교육연구
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• 제25권3호
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• pp.625-631
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• 2013

Two-phase pressure drop experiments were performed during flow boiling to deionized water in a microchannel having a hydraulic diameter of $500{\mu}m$. Tests were made in the ranges of heat fluxes from 100 to $400kW/m^2$, vapor qualities from 0 to 0.2 and mass fluxes of 200, 400 and $600kg/m^2s$. The frictional pressure drop during flow boiling is predicted by using two models; the homogeneous model that assumes equal phase velocity and the separate flow model that allows a slip velocity between two phases. From the experimental results, it is found that the two phase multiplier decreases with an increase in mass flux. Measured data of pressure drop are compared to a few available correlations proposed for macroscale and mini/microscale. Among the separated flow models, the correlation model suggested by Lee and Garimella predicted the frictional pressure drop within MAE of 47.2%, which is better than other correlations.

• 대한기계학회논문집B
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• 제31권5호
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• pp.467-472
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• 2007

In this study the penetration distance of liquid phase fuel(i.e. liquid phsae length) was investigated in evaporative field. An exciplex fluorescence method was applied to the evaporative fuel spray to measure and investigate both the liquid and the vapor phase of the injected spray. For accurate investigation, images of the liquid and vapor phase regions were recorded using a 35mm still camera and CCD camera, respectively. Liquid fuel was injected from a single-hole nozzle (l/d=1.0mm/0.2mm) into a constant-volume chamber under high pressure and temperature in order to visualize the spray phenomena. Experimental results indicate that the liquid phase length decreased down to a certain constant value in accordance with increase in the ambient gas density and temperature. The constant value, about 40mm in this study the, is reached when the ambient density and temperature of the used fuel exceed critical condition.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.480.1-480.1
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• 2014

In this study, we suggest the new emitter formation applied solid phase epitaxy (SPE) growth process using rapid thermal process (RTP). Preferentially, we describe the SPE growth of intrinsic a-Si thin film through RTP heat treatment by radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD). Phase transition of intrinsic a-Si thin films were taken place under $600^{\circ}C$ for 5 min annealing condition measured by spectroscopic ellipsometer (SE) applied to effective medium approximation (EMA). We confirmed the SPE growth using high resolution transmission electron microscope (HR-TEM) analysis. Similarly, phase transition of P doped a-Si thin films were arisen $700^{\circ}C$ for 1 min, however, crystallinity is lower than intrinsic a-Si thin films. It is referable to the interference of the dopant. Based on this, we fabricated 16.7% solar cell to apply emitter layer formed SPE growth of P doped a-Si thin films using RTP. We considered that is a relative short process time compare to make the phosphorus emitter such as diffusion using furnace. Also, it is causing process simplification that can be omitted phosphorus silicate glass (PSG) removal and edge isolation process.

• Environmental Engineering Research
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• 제25권3호
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• pp.281-289
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• 2020

Environmental fate of ionizable organic pollutants such as perfluoroalkyl acids (PFAAs) are of increasing interest but has not been well understood because of uncertain values for parameters related with atmospheric interphase partitioning behavior. In the present study, not only the values for air-water partition coefficient (K_AW) and dissociation constant (pKa) of PFAAs were induced by adjusting to in situ measurements of air-water distribution coefficient between vapor phase and rainwater but also gas-particle partition coefficients were also estimated using three-phase partitioning model of ionizable organic pollutants, in situ measurements of PFAAs in aerosol and air vapor phase, and obtained parameter values. The pKa values of PFAAs we obtained were close to the minimum values suggested in literature except for perfluorooctane sulfonic acids, and COSMOtherm-modeled K_AW values were assessed to more appropriate among suggested values. When applying parameter values we obtained, it was predicted that air particle-associated fate and transport of PFAAs could be negligible and PFAAs could distribute ubiquitously along the transection from urban to rural region by pH-dependent phase transfer in air. Our study is expected to have some implications in prediction of the environmental redistribution of other ionizable organic compounds.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2005년도 제28회 학술발표회 초록집
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• pp.145-145
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• 2005

• 한국진공학회:학술대회논문집
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• 한국진공학회 1996년도 제11회 학술발표회 논문개요집
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• pp.28-28
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• 1996

• 한국연초학회:학술대회논문집
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• 한국연초학회 1998년도 40회 학술발표회
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• pp.19-19
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• 1998

• 한국재료학회:학술대회논문집
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• 한국재료학회 1995년도 추계 학술발표 강연 및 논문개요집
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• pp.14-14
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• 1995

• 한국세라믹학회:학술대회논문집
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• 한국세라믹학회 1986년도 Priceedings Of The Third Korea-Japan Seminar On New Ceramics
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• pp.87-113
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• 1986