Crystalline Properties of GaN Layers Grown on PSS and AlN Buffered PSS by HVPE Method (HVPE법을 이용하여 PSS와 AlN Buffered PSS 위에 성장시킨 GaN 박막의 결정 특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.31 no.6
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- pp.386-391
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- 2018