• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.II
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• pp.1320-1322
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• 2005

Microcrystalline silicon films were deposited on glass substrate by using plasma-enhanced chemical vapor deposition (PECVD) method. The crystalline volume fraction was estimated by means of Raman spectrometer with argon laser as light source. The high hydrogen dilution of silane gas was used for increase in content of crystal silicon phase.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2007년도 춘계 학술대회논문집
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• pp.95-98
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• 2007

A general purpose program NUFLEX has been extended for two-phase flows with topologically complex interface and cavitation flows with liquid-vapor phase change caused by large pressure drop. In analysis of two-phase flow, the phase interfaces are tracked by employing a LS(Level Set) method. Compared with the VOF(Volume-of-Fluid} method based on a non-smooth volume-fraction function, the LS method can calculate an interfacial curvature more accurately by using a smooth distance function. Also, it is quite straightforward to implement for 3-D irregular meshes compared with the VOF method requiring much more complicated geometric calculations. Also, the cavitation process is computed by including the effects of evaporation and condensation for bubble formation and collapse as well as turbulence in flows. The volume-faction and continuity equations are adapted for cavitation models with phase change. The LS and cavitation formulation are implemented into a general purpose program for 3-D flows and verified through several test problems.

• 한국세라믹학회지
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• 제26권4호
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• pp.550-558
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• 1989

Polycrystalline diamond films have been deposited on Si wafer Ly hot W filament CVD method using CH4H2 mixtures. The effects of surface pretreatment, W filament temperature, CH4 volume fraction, and addition of water vapor on the growth rate and morphology of the films were investigated. Surface pretretment was essential for depositing a continuous diamond film. Raising the filament temperature resulted in an increased growth rate and a better crystal quality of the film. As the methane content is varied from 0.5% to 5%, well-faceted crystals gradually transformed into spherical particles of non-diamond phase with a simultaneous increase in the growth rate. Addition of water vapor markedly improved the crystallinity to produce crystalline particles even with 5% methane mixture.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2008년도 하계학술발표대회 논문집
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• pp.1201-1206
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• 2008

Psychrometric chart displays graphically the thermophysical properties of moist air, so it is very conveniently used in air-conditioning and refrigeration. On general psychrometric chart, there are dry bulb temperature, web bulb temperature, absolute humidity ratio, relative humidity, specific enthalpy, specific volume, sensible heat factor, and enthalpy-humidity difference ratio. However, various state and process values besides aboves can be plotted on psychrometric chart. In this study, we developed the software drawing twenty kinds of lines, that is vapor pressure, mole fraction ratio of vapor, dew point temperature, degree of saturation, density, specific entropy, specific exergy, contact or bypass factor, uncomfort index, discomposition index, predicted mean vote index, predicted percent dissatisfied, and so on. We wish to this software is a help to design, analysis and education.

• 한국유체기계학회 논문집
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• 제18권6호
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• pp.76-80
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• 2015

The purpose of this study is to understand the cavitation phenomena in centrifugal pumps through computational fluid dynamics method. NPSH characteristic curve is measured from different flow operating conditions. Steady state, liquid-vapor homogeneous method with two equations transport turbulence model is employed to estimate the NPSH curve in centrifugal pumps. The Rayleigh-Plesset cavitation model is adapted as source term for inter-phase mass transfer in order to understand cavitation phenomena in centrifugal pumps. The cavitation incipient curve is clearly estimated at different flows operating conditions. A relationship is made between cavitation incipient and NPSH curve. Also the effects on water vapor volume fraction and pressure load distributions on the impeller blade are also described.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.632-635
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• 2001

Microcrystalline Si films have been deposited by using five W-wire filaments of 0.5 mm diameter for hot-wire chemical vapor deposition (HWCVD). We compared the HWCVD grown films with the film exposed to transformer couple plasma system for the modification of seed layer. W-wire filament temperature was maintained below 1600$^{\circ}C$ to avoid metal contamination by thermal evaporation at the filament. Deposition conditions were varied with H$_2$dilution ratio, with and without plasma treatment. From the Raman spectra analysis, we observed that the film crystallization was strongly influenced by the H$_2$dilution ratio and weakly depended on the distance between the wire and a substrate. We were able to achieve the crystalline volume fraction of about 70% with an SiH$_4$/H$_2$ratio of 1.3%, a wire temperature of 1514$^{\circ}C$, a substrate separation distance of 4cm, and a chamber pressure of 38 mTorr. We investigated the influence of ${\mu}$c-Si film properties by using a plasma treatment. This article also deals with the influence of the H$_2$dilution ratio in crystallization modification.

• 한국결정학회지
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• 제14권2호
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• pp.56-61
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• 2003

Nanocrystalline hydrogenated silicon (nc-Si : H) thin films were deposited at room temperature by plasma enhanced chemical vapor deposition (PECVD): a mixture of SiH₄ and H₂ gas was introduced into the evacuated reaction chamber. When the H₂ gas flow rate was low, the density of Si-H₃ bonds was high in the films. On the other hand, when the H₂ gas flow rate was high, e.g., 100 sccm, a large number of Si-H bonds contributed to the passivation of the surface of the large volume of Si nanocrystallites. The relative fraction of the Si-H₃ and Si-H₂ bonds in the amorphous matrix varied sensitively with the H₂ gas flow rate. The variation was associated with the change in the intensity as well as the wavelength of the main PL peaks, indicating the change in the total volume as well as the size of the Si nanocrystallites in the films.

• 한국자동차공학회논문집
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• 제14권5호
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• pp.172-180
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• 2006

This study was to analyze the effect of mixed fuel composition and mass fraction on the characteristics of evaporating diesel spray and combustion under the various ambient conditions. The characteristics of vaporization distribution and combustion were visualized by laser induced fluorescent method and direct photography. The experiments were conducted in the constant volume vessel and rapid compression expansion machine with optical access. Multi-component fuels mixed i-octane, n-dodecane and n-hexadecane were injected the vessel and rapid compression expansion machine with electronically controlled common rail injector. Experimental results show that fuel vapor formed stratified distribution. And vaporization and diffusion are become actively increasing in mass fraction of low boiling point component. Consequently multi-component fuels were expected to control the evaporating behavior according to their suitable mass fraction.

• 한국전산유체공학회지
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• 제12권2호
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• pp.21-25
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• 2007

A general purpose program NUFLEX has been extended for two-phase flows with topologically complex interface and cavitation flows with liquid-vapor phase change caused by large pressure drop. In analysis of two-phase flow, the phase interfaces are tracked by employing a LS(Level Set) method. Compared with the VOF(Volume-of-Fluid) method based on a non-smooth volume-fraction function, the LS method can calculate an interfacial curvature more accurately by using a smooth distance function. Also, it is quite straightforward to implement for 3-D irregular meshes compared with the VOF method requiring much more complicated geometric calculations. Also, the cavitation process is computed by including the effects of evaporation and condensation for bubble formation and collapse as well as turbulence in flows. The volume-faction and continuity equations are adapted for cavitation models with phase change. The LS and cavitation formulation are implemented into a general purpose program for 3-D flows and verified through several test problems.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 춘계학술발표대회
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• pp.6.1-6.1
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• 2011

Nanoscale block copolymer (BCP) patterns have been pursued for applications in sub-30 nm nanolithography. BCP self-assembly processing is scalable and low cost, and is well-suited for integration with existing semiconductor fabrication techniques. However, one of the major technical challenges for BCP self-assembly is limited tunability in pattern geometry, dimension, and functionality. We suggest methods for extending the degree of tunability by choosing highly incompatible polymer blocks and utilizing solvent vapor treatment techniques. Siloxane BCPs have been developed as self-assembling resists due to many advantages such as high etch-selectivity, good etch-resistance, long-range ordering, and reduced line-edge roughness. The large incompatibility leads to extensive degree of pattern tunability since the effective volume fraction can be easily manipulated by solvent-based treatment techniques. Thus, control of the microdomain size, periodicity, and morphology is possible by changing the vapor pressure and the mixing ratio of selective solvents. This allows a range of different pattern geometry such as dots, lines and holes and critical dimension simply by changing the processing conditions of a given block copolymer without changing a polymer chain length. We demonstrate highly extensive tunability (critical dimension ~6~30 nm) of self-assembled patterns prepared by a siloxane BCP with extreme incompatibility.