• Title/Summary/Keyword: Vanadium nitride

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Properties of VN Coatings Deposited by ICP Assisted Sputtering: Effect of ICP Power

  • Chun, Sung-Yong
    • Journal of the Korean Ceramic Society
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    • v.54 no.1
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    • pp.38-42
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    • 2017
  • Vanadium nitride (VN) coatings were deposited using inductively coupled plasma (ICP) assisted sputtering at different ICP powers. Microstructural, crystallographic and mechanical characterizations were performed by FE-SEM, AFM, XRD and nanoindentation. The results show that ICP has significant effects on coating's microstructure, structural and mechanical properties of VN coatings. With an increase in ICP power, coating microstructure evolved from a porous columnar structure to a highly dense one. Single- phase cubic (FCC) VN coatings with different preferential orientations and residual stresses were obtained as a function of ICP power. Average crystal grain sizes of single phase cubic (FCC) VN coatings were decreased from 10.1 nm to 4.0 nm with an increase in ICP power. The maximum hardness of 28.2 GPa was obtained for the coatings deposited at ICP power of 200 W. The smoothest surface morphology with Ra roughness of 1.7 nm was obtained in the VN coating sputtered at ICP power of 200 W.

A temperature sensor using single phase-vanadium dioxide thin films (single phase-vanadium dioxide 박막을 이용한 온도센서에 관한 연구)

  • Kim, Ji-Hong;Hong, Sung-Min;Kwak, Yeon-Hwa;Park, Soon-Seob;Hwang, Hak-In;Moon, Byung-Moo
    • Proceedings of the KIEE Conference
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    • 2006.10a
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    • pp.109-110
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    • 2006
  • In bio applications, high temperature coefficient of resistance (TCR) at $30^{\circ}C{\sim}40^{\circ}C$ is especially important for a temperature sensor. In this work, single phase-vanadium dioxide ($VO_2$) thin films for temperature sensor were fabricated by reactive DC magnetron sputtering and post-annealing method. VOx thin films deposited by reactive sputtering in a controlled $Ar/O_2$ atmosphere can be transformed into single phase-$VO_2$ films by post-annealing in $N_2$ atmosphere. The grown $VO_2$ thin films have a moderate resistance at room temperature and very high TCR at room temperature and transition temperature, respectively 2.88%/K and 15.8%/K. A detailed structural characterization is performed by SEM, XRD and RBS. SEM morphology image indicates that grains of fabricated $VO_2$films are homogeneous and ball-like in shape. A fact that the films contain only single phase-$VO_2$ is obtained by XRD and RBS analysis. After deposition, the sensors were fabricated by micromachining technology. Silicon nitride membrane and black nickel were used for a thermal isolation structure and absorption layer. In the vicinity of room temperature, the TCR of sensors was enough high to apply for bio sensors.

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Microstructure, Crystal Structure and Mechanical Properties of VN Coatings Using Asymmetric Bipolar Pulsed dc Sputtering (비대칭 바이폴라 펄스 스퍼터법으로 증착된 VN 코팅막의 미세구조, 결정구조 및 기계적 특성에 관한 연구)

  • Chun, Sung-Yong;Jeong, Pyeong-Geun
    • Journal of the Korean institute of surface engineering
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    • v.49 no.5
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    • pp.461-466
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    • 2016
  • Nanocrystalline vanadium nitride (VN) coatings were deposited using asymmetric bipolar pulsed dc sputtering to further understand the influence of the pulsed plasmas on the crystal structure, microstructure and mechanical properties. Properties of VN coatings were investigated with FE-SEM, XRD and nanoindentation. The results show that, with the increasing pulse frequency and decreasing duty cycle, the coating morphology changed from a porous columnar to a dense structure, with finer grains. Asymmetric bipolar pulsed dc sputtered VN coatings showed higher hardness, elastic modulus and residual compressive stress than dc sputtered VN coatings. The results suggest that asymmetric bipolar pulsed dc sputtering technique is very beneficial for the reactive sputtering deposition of VN coatings.

MICROSTRUCTURAL EVOLUTION OF A HIGH CR FE-BASED ODS ALLOY BY DIFFERENT COOLING RATES

  • Shen, Yin-Zhong;Cho, Hae-Dong;Jang, Jin-Sung
    • Nuclear Engineering and Technology
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    • v.40 no.2
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    • pp.99-106
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    • 2008
  • Through mechanical alloying, hot isostatic pressing and hot rolling, a 9%Cr Fe-based oxide dispersion-strengthened alloy sample was fabricated. The tensile strength of the alloy is significantly improved when the microstructure is modified during the post-consolidation process. The alloy samples were strengthened as the cooling rates increased, though the elongation was somewhat reduced. With a cooling rate of $800^{\circ}C/s$ after normalization at $1150^{\circ}C$, the alloy sample showed a tensile strength of 1450 MPa, which is about twice that of the hot rolled sample; however, at $600^{\circ}C$ the tensile strength dramatically decreased to 620 MPa. Optical microscope and transmission electron microscope were used to investigate the microstructural changes of the specimens. The resultant strengthening of the alloy sample could be mainly attributed to the interstitially dissolved nitrogen, the fraction of the tempered martensite, the fine grain and the presence of a smaller precipitate. The decrease in the tensile strength was mainly caused by the precipitation of vanadium-rich nitride.

Joint Interface Observation of V and 17-4PH Stainless Steel Dissimilar Materials Manufactured by Direct Energy Deposition (직접 에너지 적층방식으로 제조된 V과 17-4PH 스테인리스강 이종재료의 접합계면 분석)

  • Lee, Se-Hwan;Kim, Hobeom;Kim, Jeoung Han
    • Journal of Powder Materials
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    • v.29 no.1
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    • pp.8-13
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    • 2022
  • In this study, we have prepared a Ti-6Al-4V/V/17-4 PH composite structure via a direct energy deposition process, and analyzed the interfaces using scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The joint interfaces comprise two zones, one being a mixed zone in which V and 17-4PH are partially mixed and another being a fusion zone in the 17-4PH region which consists of Fe+FeV. It is observed that the power of the laser used in the deposition process affects the thickness of the mixed zone. When a 210 W laser is used, the thickness of the mixed zone is wider than that obtained using a 150 W laser, and the interface resembles a serrated shape. Moreover, irrespective of the laser power used, the expected σ phase is found to be absent in the V/17-4 PH stainless steel joint; however, many VN precipitates are observed.