• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.249-249
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• 2010

The effect of forming a passivation layer was investigated in superconformal Cu gap-filling of the nano-scale trench with atomic-layer deposited (ALD)-Ru glue layer. It was discovered that the nucleation and growth of Cu during metal-organic chemical vapor deposition (MOCVD) were affected by hydrogen plasma treatments. Specifically, as the plasma pretreatment time increased, Cu nucleation was suppressed proportionally. XPS and Thermal Desorption Spectroscopy indicated that hydrogen atoms passivate the Ru surface, which leads to suppression of Cu nucleation owing to prevention of adsorption of Cu precursor molecules. For gap-fill property, sub 60-nm ALD Ru trenches without the plasma pretreatment was blocked by overgrown Cu after the Cu deposition. With the plasma pretreatment, superconformal gap filling of the nano-scale trenches was achieved due to the suppression of Cu nucleation near the entrances of the trenches. Even the plasma pretreatment with bottom bias leads to the superconformal gap-filling.

• 한국정밀공학회지
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• 제16권11호
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• pp.74-80
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• 1999

In this study, a stereolithography apparatus (SLA) prototype is used as a master model to be transformed into the silicone pattern by vacuum tool forming. The tool for the first prototype is fabricated by using this silicone pattern. Following this procedure, a temporary tool with metal powder and epoxy for wax injection is prepared for the die set of quick change type which consists of upper and lower base die나 and an insert die. The die set of quick change type appears to be very effective in casting operation by changing tools rapidly. The original wax pattern is formed through the die set, and is made of lost-was. Finally the lost-wax pattern is applied to investment casting. The final casting product is checked regarding its dimensional accuracy.

• Elastomers and Composites
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• 제57권3호
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• pp.114-120
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• 2022

The tensile properties of the extruded PC film were measured in the extrusion direction and perpendicular to the extrusion direction. The measured properties were the elastic modulus and Poisson's ratio at the glass transition temperature of PC. The measured orthotropic properties of the film were used for the computer simulation of vacuum forming. In this simulation, three mold shapes were tested: dome, trapezoid, and cubic, and the vacuum was applied between the mold surface and the heated film. The stress, strain, thickness, and stretch ratio distributions of the film in different mold shapes were observed and compared. The thermoforming simulation method used in this study and the obtained results, considering the determined orthotropic properties, can be applied to the thermoforming of various three-dimensional shapes.

• 한국진공학회지
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• 제6권4호
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• pp.293-297
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• 1997

점성진공계(spinning rotor gauge, SRG)는 고진공영역인 1${\times}$10-5∼100Pa에서 전달표 준기(transfer standard gauge)로 사용되고 있는 진공게이지이다. 제조회사가 각각 Leybold-Heraeus와 MKS회사인 두 개의 SRG에 대해서 질소가스를 사용하여 장기안정성과 적응계수(accommodation coefficient, $sigma$)결정에 영향을 미치는 변수들인 측정압력, 온도, 최 대도달압력(base pressure), 신호분산(signal scattering), 영점(offset)변화에 대한 특성을 10 개월에 걸쳐 조사하였다. 이 결과 장기안정특성 및 입력변수들에 의한 영향이 SRG 고유오 차인 $pm$1.0% 이내에 있음을 확인하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.597-597
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• 2013

The resistive switching behaviors of Pt nanodisk on Nb-doped SrTiO3 single-crystal have been studied with conductive atomic force microscopy in ultra-high vacuum. The nanometer sizes of Pt disks were formed by using self-assembled patterns of silica nanospheres on Nb-doped SrTiO3 single-crystal semiconductor film using the Langmuir-Blodgett, followed by the metal deposition with e-beam evaporation. The conductance images shows the spatial mapping of the current flowing from the TiN coated AFM probe to Pt nanodisk surface on Nb：STO single-crystal substrate, that was simultaneously obtained with topography. The bipolar resistive switching behaviors of Pt nanodisk on Nb：STO single-crystal junctions was observed. By measuring the current-voltage spectroscopy after the forming process, we found that switching behavior depends on the charging and discharging of interface trap state that exhibit the high resistive state (HRS) and low resistive state (LRS), respectively. The results suggest that the bipolar resistive switching of Pt/Nb:STO single-crystal junctions can be performed without the electrochemical redox reaction between tip and sample with the potential application of nanometer scale resistive switching devices.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제51권12호
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• pp.584-590
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• 2002

Crowbar system is usually applied to a pulsed power system in which a capacitor bank is discharged into a load. This provides a free wheeling path for the load current and prevents the capacitor from recharging due to a reverse voltage. Usually diodes have been used as a crowbar switch, but it is not a practical system because the cost of the diodes goes up enormously with increasing the system voltage and current. This paper presents a novel protection scheme of a charging and discharging system of a 300 kJ capacitor bank using a low-cost crowbar system which consists of a crowbar switch and resistors. Triggered vacuum switch(TVS) was used for a crowbar switch, and Rogowski coil was used to determine a trigger time of TVS. When this crowbar system is applied to our pulsed power system which consists of capacitor bank($123muF$), inductor() for forming a pulse, load resistor$(100 m\Omega)$, and a closing switch, instantaneous reversal voltage of capacitor bank could be limited less than 1.8 ㎸ until capacitor bank was charred to 17 ㎸.

• 반도체디스플레이기술학회지
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• 제11권1호
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• pp.73-78
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• 2012

In this study, the optimal process condition was induced about the pillar arrangement process of applying the screen printing method in the manufacture process of vacuum glazing panel. The high precision screen printing is technology which pushes out the paste and spreads it by using the squeegee on the stainless steel plate in which the pattern is formed. The screen printing method is much used in the flat panel display field including the LCD, PDP, FED, organic EL, and etc for forming the high precision micro-pattern. Also a number of studies of screen printing method have been conducted as the method for the cost down through the improvement of productivity. The screen printing method has many parameters. So we used Taguchi method in order to decrease test frequencies and optimize this parameters efficiently. In this study, experiments of pillar arrangement were performed by using Taguchi experimental design. We analyzed experimental results and obtained optimal conditions which are 4 m/s of squeegee speed, $40^{\circ}$ of squeegee angle and distance between metal mask and glass.

• 반도체디스플레이기술학회지
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• 제11권4호
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• pp.43-48
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• 2012

The screen printing method is much used in the flat panel display field including the LCD, PDP, FED, organic EL, and etc. for forming the high precision micro-pattern. Also A number of studies of screen printing method has been conducted as the method for the cost down through the improvement of productivity. Because of being the dot printing method of the cylindrical shape not being the line printing method like the existing PDP barrier rib and phosphor, the pillar arrays using the screen printing method is deposited in the hemispherical type not being cylindrical shape in the existing printing process conditions. In this paper, the parameters were set on the screen printing device in order to deposit the cross-sectional shape with the cone or trapezoid shape of the pillar in depositing the pillars used the screen printing device for vacuum glazing. The cross-sectional shape slope of the pillar according to the parameters was measured. And analysis the effect of the screen printing process conditions on the cross-sectional shape slope of pillars based upon the result of being measured. The processing conditions were drawn to minimize the cross-sectional shape slope of pillar.

• 한국전기전자재료학회논문지
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• 제34권2호
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• pp.105-109
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• 2021

CNT fiber has been in the spotlight as a conductor, but the conductivity of CNT fibers do not match that of CNT. This study reveals that the conductivity of CNT fiber can be improved by depositing Al/Cu through vacuum evaporation. Cu is commonly used for deposition on CNT fibers. But low bonding strength of the interface between CNT and Cu could be a disadvantage. To overcome this, Al was deposited on the CNT fiber for forming aluminum carbide islands to increase the interfacial bonding strength. The conductivity characteristics were improved as the deposition time increased. The resistance was measured as a function of temperature, demonstrating that the temperature coefficient of resistance (TCR) is improved to be 241 ppm/℃ in comparison with that of as-received CNT fibers at -1,251 ppm/℃, when the CNT fibers are deposited with Al and Cu, respectively, for 90s and for 540s.

• 한국세라믹학회지
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• 제29권6호
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• pp.489-495
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• 1992

The continuous compaction response of zirconia powders prepared by different processing treatments was investigated. Though the yield point could be or not below 1 MPa, the change of slope was always observed at high pressure range around 60 MPa. Powder compaction was mainly governed by second compaction stage and compaction rate was decreased with increasing forming pressure. Rotary vacuum dried powder favored a high compaction density, whereas freeze dried and calcined powders favored an increase in the pressing efficiency. In order to extract more reliable information about powder compaction, it was necessary to use not only compaction response diagram but also compaction rate diagram.