• Journal of the Korean Vacuum Society
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• v.22 no.3
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• pp.111-118
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• 2013

The influence of gas flow on the plasma generation in the atmospheric plasma jet is described with the theory of hydrodynamics. The plasma discharge is affected by the gas-flow streams with Reynolds number (Re) as well as the gas pressure with Bernoulli's theorem according to the gas flow rate inserted into the glass tube. The length of plasma column is varied with the flow types such as the laminar flow of Re<2,000 and the turbulent flow of Re>4,000 as it has been known in a general fluid experiments. In the laminar flow, the plasma column length is increased as the increase of flow rate. Since the pressure in the glass tube becomes low as the increase of flow velocity by the Bernoulli's theorem, the breakdown voltage of plasma discharge is reduced by the Paschen's law. Therefore, the plasma length is increased as the increasing flow rate with the fixed operation voltage. In the transition of laminar and turbulent flows, the plasma length is decreased. When the flow becomes turbulent as the flow rate is increasing, the plasma length becomes short and the discharge is shut down ultimately. In the discharge of laminar flow, the diameter of plasma beam exposed on the substrate surface is kept less than the glass diameter, since the gas flow is kept to the distinct distance from the nozzle of glass tube.

• Journal of the Korean Vacuum Society
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• v.17 no.5
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• pp.408-418
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• 2008

The rectangular resonant cavity was designed and characterized as a microwave plasma source for focused ion beam. The optimum cavity was calculated analytically and analyzed in detail by using HFSS(High Frequency Structure Simulator). Since the resonant cavity can be affected by the permittivity of quartz chamber and plasma, the cavity is designed to be changeable in one direction. By observing the microwave input power at which the breakdown begins, the optimum cavity length for breakdown is measured and compared with the calculated one, showing in good agreement with the optimum length reduced by 10cm according to the permittivity change in the presence of quartz chamber. The shape of breakdown power curve as a function of pressure appears to be similar to Paschen-curve. After breakdown, plasma densities increase with microwave power and the reduced effective permittivity in the cavity with plasma results in larger optimum length. However, it is not possible to optimize the cavity condition for high density plasmas with increased input power, because too high input power causes expansion of density cutoff region where microwave cannot penetrate. For more accurate microwave cavity design to generate high density plasma, plasma column inside and outside the density cutoff region needs to be treated as a conductor or dielectric.

• The Journal of the Acoustical Society of Korea
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• v.39 no.6
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• pp.524-532
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• 2020

In this study, noise radiated from a high-speed fan-motor unit for a cordless vacuum cleaner is reduced by designing splitter blades on the existing impeller. First of all, in order to investigate the flow field through a fan-motor unit, especially impeller, the unsteady incompressible Reynolds-Averaged Navier-Stokes (RANS) equations are numerically solved by using computational fluid dynamic technique. With predicted flow field results as input, the Ffowcs Williams-Hawkings (FW-H) integral equation is solved to predict aerodynamic noise radiated from the impeller. The validity of the numerical methods is confirmed by comparing the predicted sound pressure spectrum with the measured one. Further analysis of the predicted flow field shows that the strong vortex is formed between the impeller blades. As the vortex induces the loss of the flow field and acts as an aerodynamic noise source, supplementary splitter blades are designed to the existing impeller to suppress the identified vortex. The length and position of splitter are selected as design factors and the effect of each design factor on aerodynamic noise is numerically analyzed by using the Taguchi method. From this results, the optimum location and length of splitter for minimum radiated noise is determined. The finally selected design shows lower noise than the existing one.

• Journal of the Korean Society of Food Science and Nutrition
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• v.40 no.8
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• pp.1136-1140
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• 2011

This study was designed to evaluate the potential of using high pressure processing (HPP) for extending shelf life of seasoned squid during refrigerated storage. The vacuum-packed seasoned squid samples were subjected to 400 MPa for 20 min using a custom-made high pressure processor. Microbial counts, dimethylamine (DMA), trimethylamine (TMA), total biogenic amine, autolytic activity were determined on days 0, 7, 14, and 21 of refrigerated storage. The numbers of indigenous bacteria were effectively reduced by 2.77 log CFU/g after HPP treatment. The amounts of DMA and TMA produced in the control samples increased up to 15.99 and 42.82 mg/g after 7 days of refrigerated storage when compared to 5.27 and 10.21 mg/g the HPP-treated samples, respectively. The autolytic activity of the HPP-treated sample (4.32 nkat/g) significantly lower than that of the control (7.13 nkat/g) after 7 days of refrigerated storage. Therefore, HPP can be applied as a potential squid processing method microbiological safety and shelf life.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.10b
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• pp.389-396
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• 2002

In XXI century it is necessary to expect the recommencement and development of activities on mastering the Moon. In the long term it is construction of manned lunar bases with industrial, astrophysical, procuring, repair equipment and services. Interplanetary flights from the Moon demand smaller power expenditures, than from the Earth, therefore it is favourable to use its surface for the construction of space-vehicle launching sites. Flights of devices in libration points in the system 'Earth - Moon' are considered. Experience of engineering system creation for the Moon displays the great complexity in provision of serviceability and reliability of friction units. Open friction units should operate under following conditions on the Moon: pressure of environment (vacuum) $p\;>10\;^{-10}$ Pa; wide range of temperature change $+150^{\circ}C\;...170^{\circ}C$; high evaporability of lubricants; influence of temperature gradients and warping of constructions; sublimation of elements of constructional materials; irradiation of different physical nature; effect of micrometeorites; reduced gravitation; influence of abrasive particles of lunar ground; requirements on minimization of size and weight characteristics of a construction (high tension); undesirability (impossibility) of application of liquid and plastic lubricants; vibration, shock, acoustic loadings during start and landings to the Earth; difficulties in repair-regenerative operations in conditions of the Moon etc. Adhesive interaction of conjugated surfaces is the principal reason of possible failures of rubbed units on the Moon. In the research of the Moon automatic interplanetary stations of 'Luna' (USSR), 'Surveyer', 'Apollo' (USA) series were used. Stations executed functions of flying, landing, artificial satellites of the Moon, moon-rovers and manned spacecrafts such as 'Apollo'. The experimental- theoretical researches carried out in the sixtieth years on tribology for conditions of the Moon appeared to be rather useful to engineering of an outer space exploration and the decision of complex problems for the friction units operating in extreme conditions on the Earth. For the creation of highly loaded friction units for the long service life on the Moon it is required not only to use accumulated experience and designed technologies, but also to carry out wide scientific research.

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.55 no.12
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• pp.511-517
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• 2006

The key issues in high power, high energy applications such as electromagnetic launchers include safety, reliability, flexibility, efficiency, compactness, and cost. To explore some of the issues, a control scheme for a large current wave-forming was designed, built and experimentally verified using a 2.4MJ pulse power system (PPS). The PPS was made up of eight capacitors bank unit, each containing six capacitors connected in parallel. Therefore there were 48 capacitors in total, with ratings of 22kV and 50kJ each. Each unit is charged through a charging switch that is operated by air pressure. For discharging each unit has a triggered vacuum switch (TVS) with ratings of 200kA and 250kV. Hence, flexibility of a large current wave-forming can be obtained by controlling the charging voltage and the discharging times. The whole control system includes a personal computer(PC), RS232 and RS485 pseudo converter, electric/optical signal converters and eight 80C196KC micro-controller based capacitor-bank module(CBM) controllers. Hence, the PC based controller can set the capacitor charging voltages and the TVS trigger timings of each CBM controller for the current wave-forming. It also monitors and records the system status data. We illustrated that our control scheme was able to generate the large current pulse flexibly and safely by experiments. The our control scheme minimize the use of optical cables without reducing EMI noise immunity and reliability, this is resulting in cost reduction. Also, the reliability was increased by isolating ground doubly, it reduced drastically the interference of the large voltage pulse induced by the large current pulse. This paper contains the complete control scheme and details of each subsystem unit.

• Composites Research
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• v.33 no.6
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• pp.390-394
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• 2020

The carbon fiber has been damaged via tow spreading process for carbon fiber spread tow. The fiber damage is caused by friction between equipment and fibers or between fibers and fibers in the process of spreading. As a result, mechanical properties are decreased due to differences in process via material and equipment condition. Therefore, minimizing fiber damage have to be considered in the process. In this study, the change in carbon fiber pneumatic spreading process was observed by according to the filament count, sizing content of carbon fiber and process variables in spreading equipment (fiber tension at the beginning, air temperature in spreading zone, vacuum pressure in spreading zone). Tensile strength was evaluated using samples prepared under optimal conditions for each of the carbon fiber varieties, and mechanical properties were reduced due to damage on the carbon fiber.

• Archives of Plastic Surgery
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• v.37 no.3
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• pp.227-232
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• 2010

Purpose: Continuous irrigation method is an important step in managing wound infection. V.A.C. devices have been used in intractable wounds for reducing discharge, improving local blood flow, and promoting healthy granulation tissue. We expect synergistic effects of reduced infection and more satisfactory, accelerated wound healing when using both methods simultaneously. This study evaluated continuous irrigation combined with V.A.C. appliance for treatment of infected chronic wounds. Methods: We reviewed data from 17 patients with infected intractable chronic wounds. V.A.C. device (Group A) was used in 9 patients, and V.A.C. with antibiotics irrigation (Group B) was used in 8 patients. We placed Mepitel$^{(R)}$ on the surface of wound and placed an irrigation and aspiration tube on each side. A sponge was placed on the Mepitel$^{(R)}$ and covered with film dressing. The wound was irrigated continuously with mixed antibiotics solution at the speed of 200 cc/hr and aspirated through the wall suction at the pressure of -125 mmHg. V.A.C. applied time, wound culture and wound size were compared between the two groups. Results: No complication were seen in two groups. Compared with Group A, in the Group B, V.A.C. applied time was shortened from 32.7 days to 25.6 days and showed efficacy in the reduction rate of wound size. No statistical differences were shown in bacterial reversion. Conclusion: V.A.C. appliance with continuous irrigation is an effective new method of managing infected chronic wounds and useful to reduce treatment duration and decrease wound size. Moreover it could be applied more widely to infected wound.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.239-240
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• 2012

With advancements in semiconductor device technologies, manufacturing processes are getting more complex and it became more difficult to maintain tighter process control. As the number of processing step increased for fabricating complex chip structure, potential fault inducing factors are prevail and their allowable margins are continuously reduced. Therefore, one of the key to success in semiconductor manufacturing is highly accurate and fast fault detection and classification at each stage to reduce any undesired variation and identify the cause of the fault. Sensors in the equipment are used to monitor the state of the process. The idea is that whenever there is a fault in the process, it appears as some variation in the output from any of the sensors monitoring the process. These sensors may refer to information about pressure, RF power or gas flow and etc. in the equipment. By relating the data from these sensors to the process condition, any abnormality in the process can be identified, but it still holds some degree of certainty. Our hypothesis in this research is to capture the features of equipment condition data from healthy process library. We can use the health data as a reference for upcoming processes and this is made possible by mathematically modeling of the acquired data. In this work we demonstrate the use of recurrent neural network (RNN) has been used. RNN is a dynamic neural network that makes the output as a function of previous inputs. In our case we have etch equipment tool set data, consisting of 22 parameters and 9 runs. This data was first synchronized using the Dynamic Time Warping (DTW) algorithm. The synchronized data from the sensors in the form of time series is then provided to RNN which trains and restructures itself according to the input and then predicts a value, one step ahead in time, which depends on the past values of data. Eight runs of process data were used to train the network, while in order to check the performance of the network, one run was used as a test input. Next, a mean squared error based probability generating function was used to assign probability of fault in each parameter by comparing the predicted and actual values of the data. In the future we will make use of the Bayesian Networks to classify the detected faults. Bayesian Networks use directed acyclic graphs that relate different parameters through their conditional dependencies in order to find inference among them. The relationships between parameters from the data will be used to generate the structure of Bayesian Network and then posterior probability of different faults will be calculated using inference algorithms.

• Journal of the Korean Vacuum Society
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• v.5 no.4
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• pp.371-376
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• 1996

Au films with a thickness around 1600 $\AA$ were deposited onto glass at room temperature by ion beam sputtering with a 5 cm cold-hollow ion gun at pressure $1\times 10^{-6}-1\times 10^{-5}$ Torr. Irradiation of the Au deposited samples was carried out at pressure of $7\times 10^{-6}$ Torr. For the sputter depositions, $Ar^+$ ion energy was 1 keV, and the current density at the substrate surface was 15 $\mu$A/$\textrm{cm}^2$. Effects of 1 keV $Ar^+$ ion dose($I_d$) between $1\times 10^{16}\; and\;2\times 10^{17}\;Ar^+\textrm{cm}^{-2}$on properties such as crystallinity, surface roughness and adhesion, etc. of the films have been investigated. The Au films sputtered by $Ar^+$ ion beam had only (111) plane and the X-ray intensity of the films decreased with increase of $I_d$. The thickness of Au films reduced with Id. $R_{ms}$ surface roughness of the films increased from 16 $\AA$ at as-deposited to 1118 $\AA$ at ion dose= $2\times 10^{17}\;Ar^+\textrm{cm}^{-2}$. Adhesion of Au film on sputtered at $I_d$= $2\times 10^{17}\;Ar^+\textrm{cm}^{-2}$ was 9 times greater than that of Au film with untreated, as determined by a scratch test.