• Applied Science and Convergence Technology
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• 제25권6호
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• pp.108-115
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• 2016

Even if ion pumps are widely and mostly used in ultra-high vacuum (UHV) conditions, virtually every existing ion pump has its maximum pumping speed around 1E-6 mbar (1E-4 Pa). Discharge intensity in the ion pump Penning cell is defined as the current divided by pressure (I/P). This quantity reflects the rate of cathode bombardment by ions, which underlies all of the various pumping mechanisms that occur in ion pumps (chemisorption on sputtered material, ion burial, etc.), and therefore is an indication of pumping speed. A study has been performed to evaluate the influence of magnetic fields and cell dimensions on the ion pump discharge intensity and consequently on the pumping speed at different pressures. As a result, a combination of parameters has been developed in order to design and build an ion pump with the pumping speed peak shifted towards lower pressures. Experimental results with several different test set-ups are presented and a prototype of a new 200 l/s ion pump with the maximum pumping speed in the 1E-8 mbar (1E-6 Pa) is described. A model of the system has also been developed to provide a framework for understanding the experimental observations.

• 한국진공학회지
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• 제15권1호
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• pp.14-23
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• 2006

스크롤 펌프는 초청정 진공 시스템에서 많이 사용되고 있지만 막상 수소 배기 특성에 대해서 잘 알려져 있지 않다 이런 정보부족은 수소를 다량 사용하는 핵융합 실험장치에서 스크롤 점프가 사용 가능한지 판단하기 어렵게 만든다 이 논문에서는 특히 수소에 대한 스크롤펌프의 배기속도, 압측비 및 역류특성을 측정하기 위해 구성한 실험장치, 측정절차와 실험결과에 대해 기술하고 논의했다.

• 한국진공학회지
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• 제16권6호
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• pp.405-413
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• 2007

진공시스템 최적화 설계를 위한 시스템 성능에 대한 설계인자 영향이 전산모사로 연구되었다. 본 연구로 상업화 전산모사기인 $VacSim^{Multi}$에 의한 진공시스템 모델링기구가 제시되었으며 진공시스템의 진공생성기구인 펌핑계 설계인자의 영향을 평가하여 향후 여러 설계인자들의 전산모사 연구 가능성이 확인되었다. $VacSim^{Multi}$의 저진공펌프 모델 전산모사 결과와 펌프사양에 의한 배기거동이 오차범위로 일치하였으며 부스터펌프의 사용이 중진공영역 응용에 효과적인 것으로 확인되었다. 또한 자체 배기능력이 없는 유확산펌프와 터보분자펌프 배기계의 최적화보조펌프 조합이 제시되었으며, 유확산 및 터보분자펌프 배기계의 시스템 공정응용특성도 확인되었다.

• 반도체디스플레이기술학회지
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• 제1권1호
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• pp.41-45
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• 2002

In modem manufacturing, new applations and technologies demand smaller, and functional devices to replace large systems. As miniaturization becomes a necessity, many companies are interested in small pumps for use in creating ultra-high vacuum, but past efforts to develop such systems have failed due to problems with vibration, stress, heat and power consumption. This paper shows analysis-based design techniques for high vacuum turbomolecular pump by finite element analysis.

• 한국유체기계학회 논문집
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• 제17권4호
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• pp.53-58
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• 2014

Vacuum pump transfers waste that is pulverized by integrated macerator. For this reason, unlike ordinary pump systems, there is a rotating macerator ahead of impeller for pulverizing. It is hard to predict numerical solution because area of Inlet flow path changes according to the rotation angle of the integrated macerator. So, in this study, the verification of performance evaluation method of Marine vacuum pump were numerically studied by commercial ANSYS CFX 13.0 software. We select a model of performance evaluation for study, and we analyze change of inlet flow path of integrated macerator according to rotation angle. We generate 5 model sets according to rotation angle of the integrated macerator. And we evaluate their performance by numerical analysis. Then, we analyze internal flow field and performance according to rotation angle of the integrated macerator based on numerical analysis result. In addition, we compared with experimental data for validity of numerical result by using steady state analysis.

• International journal of advanced smart convergence
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• 제11권4호
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• pp.88-95
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• 2022

Vacuum simulation is associated with the prediction and calculation of how materials, pumps and systems will perform using mathematical equations. In this investigation, three different high vacuum systems were simulated and estimated with each vacuum characteristics by VacTran simulator. In each of modelled vacuum systems, selection of gas loads into vessel, combination of rough and high vacuum pumps and dimension of conductance elements were proposed as system variables. In pump station model, the pumping speed to pressures by the combination of root pump was analyzed under the variations of vessel volume. In this study, the effects of outgassing dependent on vessel materials was also simulated and aluminum vessel was estimated to optimum materials. It was obtained from the modelling with diffusion pump that the diameter, length of 50×250[mm]roughing line was characterized as optimum variables to reach the ultimate pressure of 10E-7[torr]. Optimum design factors for vacuum characteristics of modelled vacuum system were achieved by VacTran simulator. Feasibility of VacTran as vacuum simulator was verified and applications of VacTran in high tech process expected to be increased.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 춘계학술대회논문집B
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• pp.813-818
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• 2000

The objective of this study is to elucidate the characteristic performance of Roots-type vacuum pump with Cassini oval lobe shape. The modelled lobe shape of Roots-type vacuum pump is two-lobe spur gear. The numerical analyses are performed fer leak flows, using 4th-order Runge-Kutta method and are compared with experimental results. Results show that for the case of involute lobe shape the total amount of the leak flow conductance is greater than that of cycloid and Cassini oval lobe shapes.

• 대한기계학회논문집B
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• 제28권11호
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• pp.1359-1367
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• 2004

The demand of vacuum pump has been increased in the process of semi-conduct manufacturing, as a core component. The response of the system for vacuum pump performance test can be utilized to assess the system and to obtain the reliability of the apparatus for the test. The system consists of gas supply tank, pressure chamber, measurement chamber and transmission line. Transient analysis for compressible fluid has been conducted to evaluate the dynamic characteristic of the volume terminated transmission line. Numerical approach based on the method of characteristics is used for the analysis. The response is evaluated with the important parameters for the system: i.e., length and diameter of the line, volume of the terminal tank. Using the numerical results, pumping speeds are calculated and then compared to the experimental results.

• 로봇학회논문지
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• 제18권4호
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• pp.456-462
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• 2023

In recent years, the use of robot arms has increased rapidly in both industrial and service applications. Unlike production sites, where only one type of gripper is used for productivity, service sites often use a tool changer to replace fingered grippers or vacuum grippers to cover various objects to be grasped. To this end, a tool changer-based pneumatic grasping system was developed in this study. In order to simultaneously use a positive pressure-based pneumatic gripper and a negative pressure-based vacuum gripper, a small vane pump capable of generating positive and negative pressures depending on the direction of rotation was developed. Experiments with actual prototypes have shown that the pneumatic system based on the developed vane pump can effectively realize both pneumatic grippers and vacuum grippers.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2008년도 제35회 하계학술대회 초록집
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• pp.356-356
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• 2008