• Proceedings of the Acoustical Society of Korea Conference
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• autumn
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• pp.313-316
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• 2004

진공펌프의 상태를 미리 알고 대처하는 것은 수많은 진공펌프를 사용하는 반도체 회사에게는 경제적인 이익을 준다. 진공펌프의 상태를 파악하기 위해서는 실제 공정에서 많은 실험을 해야만 한다. 하지만 실제 공정에서 실험을 하기에는 많은 제약과 문제점들이 따른다. 이를 해결하기 위해 본 연구는 MFC(Mass Flow Controller)를 이용하여 실제 공정과 유사한 압력조건을 생성할 수 있는 시뮬레이션 시스템을 구축하였다.

• Journal of Korea Multimedia Society
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• v.18 no.11
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• pp.1400-1407
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• 2015

In the paper, we suggest bettered EHMECS(Enhanced Hybrid Multi Electrical Cupping System) to regulate automatically vacuum pressure using many cupping cup at once. We controlled accurately the pressure using S-PI control technique in pump motor to input the air inside cupping cup. S-PI control compared constant velocity, load and velocity variance between existing PI and FLC(Fuzzy Logic Control). The stabilization time of suggested S-PI control improve 20% of existing PI and 8% of FLC. The error constant of normal condition improved 71% of existing PI and 62% of FLC in steady speed and 80% of existing PI and 67% of FLC in load change. Also the error constant about velocity variance improve 45% of PI control. It is prove the suggested S-PI control technique. When use long time vacuum pressure of cupping cup regulated the suggested S-PI control technique, can loosen knotted muscles.

• Proceedings of the Korean Geotechical Society Conference
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• 2001.03a
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• pp.551-558
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• 2001

The horizontal drain method is one of methods improving reclamation ground. This method reduces consolidation time by using drained installed horizontally, and negative pressure is applied on end of these drains by vacuum pump. But, effective negative pressure still wasn't evaluated in applying this method to reclamation ground. To estimate optimum negative pressure, soil box test that make a model the in-situ by installing horizontal drains in the center is performed pressing different vacuum pressure In the laboratory, and the variations in settlement and volume of drained water through the drains during consolidation process were measured. Also, water content with distance from drain and with depth is measured after the test.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.154.1-154.1
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• 2014

Indium gallium zinc oxide (IGZO)는 차세대 디스플레이 평판 패널에 사용되는 반도체 화합물의 일종으로 최근 주목받고 있는 물질의 하나이다. 기존의 IGZO를 사용하여 박막을 증착한 뒤 표면 처리를 통해 박막의 특성 변화에 대한 연구들이 진행되어 왔으며, 기존의 연구들은 plasma 환경에 노출을 시켜 간접적인 plasma treatment를 통해 박막의 특성을 향상시켜 왔다. 본 연구에서는 기존의 plasma treatment에서 발견된 방식인 ion beam treatment를 통해 플라즈마를 직접적으로 표면에 조사하여 박막의 특성 변화를 알아보았다. 한국표준과학연구원에서 자체 제작한 chamber를 이용하여 RF sputter로 Si wafer 위에 IGZO 박막을 증착하고 수소 ion beam treatment를 한 뒤, SEM과 XPS를 사용하여 박막 표면의 물성 변화를 분석하였다. 실험에 사용된 chamber에는 sputter gun과 ion beam이 함께 장착되어 있으며, scroll pump와 TMP를 사용하여 pressure를 유지하였다. 실험 시 base pressure는 $1.4{\times}10^{-6}Torr$였다. RF power 150 W. ion beam power 2,000 V에서 실험을 진행하였다.

• 한국정보디스플레이학회:학술대회논문집
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• 2002.08a
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• pp.1051-1052
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• 2002

Vacuum surroundings in Cathode Ray Tubes (CRT) are very important factor for CRT lifetime, especially cathode & getter's. A getter is a very good vacuum pump; unfortunately, it cannot absorb an inert gas and hydrocarbons. There are only argon and helium in CRT after $1^{st}$ emission test because other active gases are absorbed by getter and methane is decomposed during CRT working. It is also very important to know exactly where and when methane is decomposed during the CRT manufacturing process, because methane is known to be harmful to cathode when its amount is high, and getter can't absorb the methane.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.48-48
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• 2000

진공부품에 사용되고 있는 재료는 여러 가지 있으나 회주철품은 진동 감쇄 및 흡진성이 우수하여 소음 발생이 적고, 조직 중에 흑연이 존재하므로 주강에 비하여 자기윤활작용이 있으며, 말차계수가 적어 마찰면의 면입이 높은 경우에도 소손 등의 이상 마멸현상이 적어 진공펌프, 내연기관, 공작 기계등과 같이 강인성과 내마멸성을 요구하는 부품에 많이 이용되어 왔다, 이 회주철도 대별하면 여러 종류가 있고, 진공 펌프용 재질은 주로 회주철 중에 ASTM A형으로 도면에 명기되어 있다. 따라서 본 제품을 개발하는 과정중에 연속 주조법으로 제조된 ASTM형이 기존의 재료에 비하여 내기밀성, 내마면성, 내피로성 및 기계적 성질등이 우수함을 확인하여본 재질로 개발하였고, 시험한 연구 결과를 발표하고자 한다. 실험은 ASTM A형으로 주조하기 위하여 용해된 용탕을 사형 주형에서 GC200으로 주조하고, ASTM D형은 D사의 연속 주조기에서 직경 30mm로 주조하였다. 이와 같이 주조된 사료를 일정한 크기로 시험편을 만들어 인장 강도, 경도, 피로한도, 피로성, 절삭성, 내유압성, 소입성과 내마멸성을 시험하였다.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09b
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• pp.1018-1021
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• 2006

Powdered metal parts and components may be carburized successfully in a vacuum furnace by combining carburizing technology $VacCarb^{TM}$ with a hi-tech control system. This approach is different from traditional carburizing methods, because vacuum carburizing is a non-equilibrium process. It is not possible to set the carbon potential as in a traditional carburizing atmosphere and control its composition in order to obtain a desired carburized case. This paper presents test results that demonstrate that vacuum carburizing system $VacCarb^{TM}$ carburized P.M. materials faster than traditional steel with acceptable results. In the experiments conducted, PM samples with the lowest density and open porosity showed a dramatic increase in the surface carbon content up to 2.5%C and a 3 times deeper case. Currently the boost-diffusion technique is applied to control the surface carbon content and distribution in the case. In the first boost step, the flow of the carburizing gas has to be sufficient to saturate the austenite, while avoiding soot deposition and formation of massive carbides. To accomplish this goal, the proper gas flow rate has to be calculated. In the case of P.M. parts, more carbon can be absorbed by the part's surface because of the additional internal surface area created by pores present in the carburized case. This amount will depend on the density of the part, the densification grade of the surface layer and the stage of the surface. "as machined" or "as sintered". It is believed that enhanced gas diffusion after initial evacuation of the P.M. parts leads to faster carburization from within the pores, especially when pores are open . surface "as sintered" and interconnected . low density. A serious problem with vacuum carburizing is delivery of the carbon in a uniform manner to the work pieces. This led to the development of the different methods of carburizing gas circulation such as the pulse/pump method or the pulse/pause technique applied in SECO/WARWICK's $VacCarb^{TM}$ Technology. In both cases, each pressure change may deliver fresh carburizing atmosphere into the pores and leads to faster carburization from within the pores. Since today's control of vacuum carburizing is based largely on empirical results, presented experiments may lead to better understanding and improved control of the process.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.1531-1532
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• 2013

• Proceedings of the Korea Technology Innovation Society Conference
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• 2004.11a
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• pp.617-624
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• 2004

• Proceedings of the KIPE Conference
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• 2001.07a
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• pp.316-318
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• 2001

In this paper, the basic characteristics of flat fluorescent lamp using ultraviolet generated from gas discharge and powder type electrolyminescent display(P-ELD) using a phenomenon of the light emission eaused by the electrical field applied to phosphor are studied. The lamp is a simple structure with insulator layer, phosphor layer, and gas gap. Current(displacement current + discharge current) in flat fluorescent lamp using.