• Title/Summary/Keyword: Vacuum pump

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Effect of The Impeller Discharge Angle on the Performance of a Spurt Vacuum Pump

  • Lee, Ji-Gu;Kim, Youn-Jea
    • Applied Science and Convergence Technology
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    • v.26 no.1
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    • pp.1-5
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    • 2017
  • The spurt vacuum pump is widely used to transfer sludge and slurry, and to control flow rate in a variety of processing fields, such as the oil, chemical, and fiber industries. The efficiency of the pump depends on the design parameters of the impeller, such as the number of blades, and the blade angle. In this study, the effect of the configuration of the impeller discharge angle of a spurt vacuum pump, which influences total head, shaft power, and efficiency, was numerically investigated using the commercial code, ANSYS CFX ver. 16.1. In addition, the performance of the pump was evaluated on the basis of the correlations between the total head, pump efficiency, and pressure distribution.

The Design and Analysis of vacuum Pump Driven by Linear Motor (리니어 모터구동 진공펌프 설계 및 해석)

  • 김동수;안영희;이원희;김광영
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.680-683
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    • 2002
  • In this paper, it has been investigated that the design and simulation of vacuum pump driven by linear motor. Vacuum pump consists of unified plunger and piston part, coils, inlet valve and outlet valve. Operating principal of vacuum pump show that air is to flow to go inside through the inlet valve when the magnetic force (16N) is exerted, whereas, air is to flow to go outside through outlet valve when spring farce (14.8N) is exerted. The results of simulation. it was turned out that reached vacuum pressure was about -0.55 bar at 150 seconds, magnetic force was loaded with 16 Newton, displacement of actuator was about 8mm.

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Operating Characteristics of Low Vacuum Pumps (저진공 펌프의 운전 특성)

  • 임종연;심우건;정광화
    • Journal of the Korean Vacuum Society
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    • v.12 no.2
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    • pp.93-104
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    • 2003
  • For evaluation of durability of low vacuum pumps, it is required to examine the performance and degradation of low vacuum pumps. Pump degradation may result from abnormalities associated with the performance in many areas of pump operation. The diagnostics method can be used to monitor the pump performance in the semi-conductor process line. Based on the mechanical defect of the pump, the dynamic response and reliability of the system for performance test, and the dynamic characteristics of the pump were experimentally assessed. The theoretical work rate for the compression process in the pump was calculated, and then the efficiency of the pump associated with the power consumption was evaluated. This analysis will be useful in detecting pump degradation with increasing the power consumption. To determine the predominant factors of pump degradation, it is important to evaluate the entire pumping system. We studied vibration, dynamic pressure, pumping speed, and power consumption of low vacuum pumps. Our results can be utilized for the future research on the evaluating technology of durability of low vacuum pumps.

Evaluation of Rotor Dynamic Characteristic of Roots Type Vacuum Pump (루츠타입 진공펌프의 동특성 평가)

  • Lee, Jong-Myeong;Kim, Yong-Hwi;Ha, Jeong-Min;Gu, Dong-Sik;Hwang, Ho-Jun;Choi, Byeong-Keun
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2011.10a
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    • pp.264-270
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    • 2011
  • The goal of this study is a stability evaluation through eigenvalue and rotor dynamics analysis of the vacuum pump. The vacuum pump used is a roots type pump, one of the dry middle vacuum pumps, is necessary at the procedure to produce semiconductor and display. The eigenvalue evaluation is solved by numerical analysis through using Modal test and 2D 3D models. Both the experiment and the analysis result are similar, the analysis result using 2D is more oculate the 3D model comparing with test result. So rotor dynamic evaluation is performed through using 2D model. Rotor dynamic evaluation used the campbell diagram and root locus map which were acquired by complex eigenvalue analysis. And we checked minimum clearance of vacuum pump composition between two rotors through unbalance response analysis. Thus, vacuum pump, the target object of this study, was evaluated to be operated stably.

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Development of Localized Roots Type Medium-Vacuum Pump (루츠형 중진공펌프 국산화 개발)

  • Tak, Bong-Yeol;Kim, Byung-Duk;Yang, Hea-Gyeong;Han, Gi-Young;Lee, So-A
    • The KSFM Journal of Fluid Machinery
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    • v.14 no.3
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    • pp.23-27
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    • 2011
  • Due to a roots type medium vacuum pump is operated in condition of $1{\sim}10^{-3}$ torr vacuum, it could be applied for production and process of industrial parts, such as precise processing, vaporization, enrichment, separation, casting, metaling, welding, transportation. Therefore, the demand of this pump is increasing nowadays in our industrial markets of semiconductor, electric, electronic, automobile, material, environmental and transporting industries. However, the pumps are almost imported, because the domestic pumps are inferior in fields of vacuum range as under $10^{-1}$torr, relevant techniques(design, fabrication, casting, test, etc.) to the imported ones. In this study, essential parts of the development pump are designed with using of CFD and 3D decodes, FEM for analysing strength and deformation, generated heat, vibration and noise control, and are casted with using of mechanochemistry techniques for decreasing of weights, increasing of heat resistances and abrasion durability of materials for pump caing and impellers especially. Besides, in order to achieve ultimate vacuum around $10^{-3}$torr, this pump is composed of 6 stages, among which 1st stage is operated separately from remained stages. Additionally, a test rig for prototype pumps(300$m^3/h$ and 2,500$m^3/h$) is designed and procured as to apply for multi-staged rootz type vacuum pump, with modification of the test method recommended by KS B 6314 "Positive-displacement oil-sealed rotary vacuum pumps".

Fabrication and Vacuum Performance Test of the NEG Pump for $10^{-9}$ Pa Chamber ($10^{-9}$ Pa대 용기를 위한 NEG 펌프 제작 및 진공성능 조사)

  • 박미영;인상렬
    • Journal of the Korean Vacuum Society
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    • v.10 no.3
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    • pp.312-320
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    • 2001
  • A Non-Evaporable Getter(NEG) pump was fabricated using Zr-V-Fe alloy modules to obtain $10^{-9}$ Pa range pressures. Pumping performances and activation characteristics were investigated and the pumping speeds for hydrogen, deuterium and carbon monoxide gases of the NEG pump were measured. And hydrogen desorption characteristics were examined during activation at $450^{\circ}C$. Futhermore the vacuum performance was compared with those of other high vacuum pumps as turbo-molecular pump, sputter-ion pump, and cryo pump by analyzing the residual gases of the system.

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Optimization and dynamic characteristics of the hybrid type vacuum pump (하이브리드 타입 진공펌프의 동특성 및 최적화)

  • Kim, Yong-Hwi;Lee, Jong-Myeong;Ahn, Byeong-Hyun;Ha, Jeong-Min;Choi, Byeong-Keun
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2014.10a
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    • pp.306-310
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    • 2014
  • The purpose of this study is the stability evaluation of a vacuum pump through modal test and rotor dynamics. Eigenvalue was solved by the finite-element method(FEM) using 2D and 3D models, then the modal test result was compared with the FEM result. According to the comparison, the analysis result using the 2D was more accurate than the 3D model. Therefore, rotor dynamics was performed by the 2D model. Campbell diagram and root-locus maps, which were calculated by complex-eigenvalue analysis, were used to evaluate the stability of the rotors of the vacuum pump. And displacement solved by unbalance response analysis was compared with the minimum clearance between two rotors of the vacuum pump. Thus, the vacuum pump is assumed operated under steady state through the evaluation of the rotor dynamics.

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A study on the Noise Reduction of Vane-type Vacuum pump Mounted on Alternator using Design of Experiments (실험계획법을 이용한 교류발전기 부착형 진공펌프의 소음저감에 관한 연구)

  • Park, Soon-Sik;Kim, Yong-Chan;Kim, Byoung-Duk
    • Tribology and Lubricants
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    • v.23 no.5
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    • pp.234-239
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    • 2007
  • Recently one of the automobile customer's greatest concerns is quietness in a vehicle along with various functional requirements such as comfort, stability, mobility etc. Therefore car makers place more weight on vehicle noise. Especially, in the case of diesel engine, as the noise level of engine becomes more silent by the development of engineering technology. The noise of alternator with vacuum pump has been able to be noticed enough becoming an issue on vehicles. In this study vacuum pump noise on alternator was identified andclassified into five types. DOE was applied to induce the statistical analysis result to reduce the vacuum pump noise. It was done by subjective listening. Design and statistical analysis are done with Minitab software. This work provides dominant elements of vacuum pump noise on alternator and can be the basis of furture studies.