• Journal of the Korean Vacuum Society
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• v.9 no.1
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• pp.7-15
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• 2000

An ECR-PECVD system with the characteristics of high ionization rat다 ability of plasma processing in a wide pressure range and deposition at low temperature was manufactured and characterized for the deposition of thin films. The system consists of a vacuum chamber, sample stage, vacuum gauge, vacuum pump, gas injection part, vacuum sealing valve, ECR source and a control part. The control of system is carried out by the microprocessor and the ROM program. We have investigated the vacuum characteristics of ECR-PECVD system, and also have diagnosed the characteristics of ECR microwave plasma by using the Langmuir probe. From the data of system and plasma characterization, we could confirmed the stability of pressure in the vacuum chamber according to the variation of gas flow rate and the effect of ion bombardment by the negative DC self bias voltage. The plasma density was increased with the increase of gas flow rate and ECR power. On the other hand, it was decreased with the increase of horizontal radius and distance between ECR source and probe. The calculated plasma densities were in the range of 49.7\times10^{11}\sim3.7\times10^{12}\textrm{cm}^{-3}$. It is also expected that we can estimate the thickness uniformity of film fabricated by the ECR-PECVD system from the distribution of the plasma density.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.72-72
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• 2015

메모리 반도체 세계 시장 점유율 1위 뿐만 아니라 국내 전체 산업 가운데 가장 중추적인 역할을 하는 반도체 산업의 지속적인 성장과 국가 경제의 발전을 위해서 소자 업체 뿐만 아니라 장비, 소재, 부품 산업의 동반 성장은 반드시 필요하다. 그 중에서 특히 소재, 부품 산업을 발전시키는 것이 국산 반도체 장비의 시장 점유율이 낮은 현 시점에서 가장 필요한 선택이다. 반도체 소재, 부품 산업의 발전을 위해서 제일 먼저 해야할 일은 영세한 국내 반도체 소재, 부품 산업을 활성화 시키는 것이며, 지속 적인 연구 개발, 성능 평가 방안 확보, 수요 업체와의 연계 방안 확보 등이 주요 현안이다. 반도체 소자 업체, 장비 업체에서 원하는 소재 및 부품의 성능을 만족하는 제품을 만들기 위해서는 우선 소재 및 부품의 기본 특성을 만족하는지에 대한 평가가 필요하고, 더 나아가서는 디바이스의 특성을 만족시켜줄 수 있는 한 단계 상향된 수요자의 요구 조건을 만족 시켜줄 수 있어야 한다. 본 연구에서는 그 중 특히 중요한 요소인 성능 평가에 대해서 논하고자 한다. 우선 반도체 공정용 소재에 대해서 살펴 보면 대표적인 반도체 소재로 증착용 Precursor, Photo Resistor, Sputter Target 등이 있다, 평가 방법으로는 ALD용 Precursor의 경우 대기 노출시 폭발, 화염 발생 등의 위험 요소를 안고 있어 특별한 주의가 요구 된다. PR이나 Sputter Target은 상대적으로 위험성은 적으며, 다양한 성능 평가 들이 가능하다. 다음으로 부품 평가에 대해서 살펴 보자. 본 원에서 가장 많이 진행된 부품 평가는 개발된 Pump의 성능 평가이다. 개발된 Pump는 1차적으로 KRISS 진공센터 에서 기본 Pumping 능력 평가를 실시하고, 다음으로 공정 평가를 실시한다. Pump마다 특성이 달라서 각 펌프의 성능 평가에 적합한 공정과 장비를 우선 선정하고 그에 합당한 공정을 진행하여 평가를 실시한다. 고 진공용인 Cryo Pump는 순수한 물질의 증착이 중요한 Metal Sputter 공정 장비에 장착하여 공정용 Gas를 흘리면서 Pump의 구동에 따른 성능 평가를 하고, 다음으로 실제로 Metal Sputter를 실시해서 Wafer에 증착된 물질의 특성을 확인한다. 다음으로 Turbo Pump의 경우 Etch 장비에 장착하여 Etch Uniformity, Etch Rate, By-product 배출 정도에 대해서 평가를 한다. Dry Pump는 비교적 공정 압력이 낮은 PECVD 공정 장비에서 평가를 진행 한다. 마지막으로 공정 진단, 챔버 상태 진단 등을 할 수 있는 별도의 부품 또는 장치로 PBMS, PCDS, OES 등의 평가에 대해서 논한다. 본 장치들은 실제 반도체 공정 장비와 환경에서 평가가 되어야지만 최종 사용자 입장에서 신뢰를 가지고 결과에 대해서 접근할 수 있다. 위에 논의된 장치들은 현재 공정 장비에 부착되어서 판매 되고 있는 것이 아니라 수요가 많지 않으나, 자체 성능 개선과 적합한 평가를 통해서 장치의 성능이 인정되면 300 mm 이상 Wafer 공정에서 반드시 필요한 실시가 공정 진단을 위해서 폭발적인 수요를 창출할 수 있으리라 본다.

• 한국전산유체공학회:학술대회논문집
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• 2009.04a
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• pp.227-231
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• 2009

Traditional vacuum cleaner adoptsa highly rotating centrifugal impeller for generating suction region at lower pressure. The rotational speed is very high at 35,000 to 40,000 rpm and accessory structure such as a circular brush at the base plate of the cleaning devices is equipped for gathering dusts. Highly rotating impeller is effective for low pressure generation but causes noise problems. Recently, the unwanted noise is removed by installation of air-pump, instead of a centrifugal impeller, and the internal flows of the modified system are estimated in numerical and experimental approach, respectively.

• Proceedings of the Optical Society of Korea Conference
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• 1990.02a
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• pp.162-166
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• 1990

Photoinduced anisotropy (PIA) in amorphous As2S3 (a-As2S3 ) thin film, deposited by vacuum evaporation, is investigated. PIA is induced by linearly polarized Ar+ laser beam (λ=514.5nm) and probed by weak Ar+ laser (λ=514.5nm) and He-Ne laser (λ=632.8nm) beam through the crossed analyzer. Keeping pump beam intensity constantly, rotation of pump beam polarization direction induces reorientation phenomina of anisotropic axis. Introducing directional factor into simplified 3-level system, which is used to analyze photodarkening phenomina, an analytical expression of PIA is derived. Temporal behavior of PIAand its reorientation phenomina are investigated andcompared with theory. In the experiment pump beam intensity is 100mW/$\textrm{cm}^2$ and thickness of a-As2S3 thin film is 3${\mu}{\textrm}{m}$. In those condition, time constant of photoinduced anisotropy obtained by method of least square curve fitting is 4.0$\times$10-2sec-1. The time constant of PIA we obtained is larger than that of photodarkening, 2.8$\times$10-2sec-1.

• Applied Science and Convergence Technology
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• v.24 no.4
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• pp.84-89
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• 2015

The base pressure and outgassing rate of a mild steel chamber were measured and compared to those of a stainless steel chamber. A combined sputter-ion and non-evaporable getter pump with a nominal pumping speed of 490 l/s generated the base pressure of $2.7{\times}10^{-11}$ mbar in the mild steel chamber and $1.2{\times}10^{-10}$ mbar in the stainless steel chamber. The rate-of-rise measurements show that the mild steel has an extremely low outgassing rate of $2.6{\times}10^{-13}$ mbar $ls^{-1}cm^{-2}$, which is about one-order of magnitude smaller than the outgassing rate of the stainless steels. Vacuum annealing of the mild steel at $850^{\circ}C$ reduced the outgassing rate further to $8.8{\times}10^{-14}$ mbar $ls^{-1}cm^{-2}$, which was comparable to the outgassing rate of a heat treated stainless steel for extreme-high vacuum use.

• Journal of the Korean Society of Tobacco Science
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• v.19 no.2
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• pp.159-161
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• 1997

A study on the optimal drying condition by a vacuum drying oven was done using shredded tobacco lamina and commercial cigarettes ('This'). Changes in the mass of the experimental material were monitored for about 50 hrs at 6 different temperatures (5$0^{\circ}C$~10$0^{\circ}C$, 1$0^{\circ}C$ stepwise) while continuously operating a vacuum pump. After 30 hrs, small amount of samples from each material were taken sequentially to monitor changes in moisture content using a Karl-Fischer method (Metrohm KF 701 Titrino). Absolute moisture contents calculated from the measurements indicated an ideal data distribution could be obtained by drying at temperatures between 7$0^{\circ}C$~8$0^{\circ}C$. Results from cigarette products which contains humectant and tobacco lamina without it were compared.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.1313-1316
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• 2006

Demands of high volume dry vacuum pumps on the domestic semiconductor and LCD industries are rapidly increasing as the size of wafers and LCD is increasing. This study introduces a new experimental setup for testing the reliability of vacuum pumps. The test system was designed to measure the acoustic pressure and mechanical vibration levels simultaneously. It is shown that the test system enables the analysis and evaluation of the performance of dry pumps under the different gas-load conditions. Detailed experimental result are shown to enable us to examine the characteristics and performance of dry pumps.

• Fire Science and Engineering
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• v.30 no.1
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• pp.104-110
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• 2016

Positive displacement pumps with high pressure and water capacity are used large fires in various high-rise buildings. This study provides information for a performance approval standard of fire pumps for fire trucks based on centrifugal pump standards enacted in 2012. An experiment was conducted with a positive displacement pump for three levels of performance from the approval standard (V-1, 2, and 3). The efficiency of the pump was included in the reference, which requires the approval of 65% performance, the same as a centrifugal pump. The water pressure is between 1.5 and 2.5 MPa, and the required flow rate was established as at least $0.31m^3/min$ and up to $3.0m^3/min$. A relief valve was added to adjust the shut-off pressure due to the structural characteristics of the positive displacement pump. A strainer was also installed to prevent damage to the inside of the pump due to foreign matter. However, the strainer includes a difference from the positive displacement pump to operate without a vacuum pump and the centrifugal pump. This is due to the additional approval standard portion of the positive displacement pump, which is expected to be selected for more variety of fire-fighting equipment and proactive responses to fire suppression in a high-rise buildings and large fires. In conclusion, this approval standard was enacted in January 2016.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2014.04a
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• pp.229-230
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• 2014

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2013.10a
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• pp.170-171
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• 2013