• 제목/요약/키워드: Vacuum measurement

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Characteristics of Silicon Nitride Deposited Thin Films on IT Glass by RF Magnetron Sputtering Process (RF Magnetron Sputtering공정에 의해 IT유리에 적층시킨 Silicon Nitride 박막의 특성)

  • Son, Jeongil;Kim, Gwangsoo
    • Korean Journal of Materials Research
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    • 제30권4호
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    • pp.169-175
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    • 2020
  • Silicon nitride thin films are deposited by RF (13.57 MHz) magnetron sputtering process using a Si (99.999 %) target and with different ratios of Ar/N2 sputtering gas mixture. Corning G type glass is used as substrate. The vacuum atmosphere, RF source power, deposit time and temperature of substrate of the sputtering process are maintained consistently at 2 ~ 3 × 10-3 torr, 30 sccm, 100 watt, 20 min. and room temperature, respectively. Cross sectional views and surface morphology of the deposited thin films are observed by field emission scanning electron microscope, atomic force microscope and X-ray photoelectron spectroscopy. The hardness values are determined by nano-indentation measurement. The thickness of the deposited films is approximately within the range of 88 nm ~ 200 nm. As the amount of N2 gas in the Ar:N2 gas mixture increases, the thickness of the films decreases. AFM observation reveals that film deposited at high Ar:N2 gas ratio and large amount of N2 gas has a very irregular surface morphology, even though it has a low RMS value. The hardness value of the deposited films made with ratio of Ar:N2=9:1 display the highest value. The XPS spectrum indicates that the deposited film is assigned to non-stoichiometric silicon nitride and the transmittance of the glass with deposited SiO2-SixNy thin film is satisfactory at 97 %.

Hall effect of K-doped $BaFe_2As_2$ superconducting thin films

  • Son, Eunseon;Lee, Nam Hoon;Hwang, Tae-Jong;Kim, Dong Ho;Kang, Won Nam
    • Progress in Superconductivity and Cryogenics
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    • 제15권3호
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    • pp.5-8
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    • 2013
  • We have studied Hall effect for potassium (K)-doped $BaFe_2As_2$ superconducting thin films by analyzing the relation between the longitudinal resistivity (${\rho}_{xx}$) and the Hall resistivity (${\rho}_{xy}$). The thin films used in this study were fabricated on $Al_2O_3$ (000l) substrates by using an ex-situ pulsed laser deposition (PLD) technique under a high-vacuum condition of ~$10^{-6}$ Torr. The samples showed the high superconducting transition temperatures ($T_c$) of ~ 40 K. The ${\rho}_{xx}$ and the ${\rho}_{xy}$ for K-doped $BaFe_2As_2$ thin films were measured by using a physical property measurement system (PPMS) with a temperature sweep (T-sweep) mode at an applied current density of $100A/cm^2$ and at magnetic fields from 0 up to 9 T. We report the T-sweep results of the ${\rho}_{xx}$and the ${\rho}_{xy}$ to investigate Hall scaling behavior on the basis of the relation of ${\rho}_{xy}={A{\rho}_{xx}}^{\beta}$. The ${\beta}$ values are $3.0{\pm}0.2$ in the c-axis-oriented K-doped $BaFe_2As_2$ thin films, whereas the thin films with various oriented-directions like a polycrystal showed slightly lower ${\beta}$ than that of c-axis-oriented thin films. Interestingly, the ${\beta}$ value is decreased with increasing magnetic fields.

Reuse of Eluent by Controlling its Specific Gravity during the Chromatographic Purification of Paclitaxel (크로마토그래피를 이용한 Paclitaxel 정제에서 비중 조절에 의한 Eluent 재사용)

  • Kim, Jin-Hyun
    • KSBB Journal
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    • 제22권5호
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    • pp.366-369
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    • 2007
  • In this study, the feasibility of reusing the eluent was confirmed by monitoring its specific gravity during the chromatographic purification of paclitaxel from plant cell cultures. The specific gravity of the eluent (methanol/water = 70/30, v/v) was measured prior to its elution through the hydrophobic resin column. The measurement showed a specific gravity of 0.853. The discharged eluent from the column outlet was first evaporated under vacuum pressure. The evaporated eluent was collected and condensed into a liquid eluent again, followed by the HPLC analysis in order to check the presence of any trace of impurity. Even if the specific gravity of the liquid eluent is varied from 0.853 as a result of the evaporation and condensation, the eluent can still be reused after it specific gravity is adjusted by the addition of methanol or water. The reuse of the eluent resulted in the paclitaxel yield of 86% with a purity of 95% which were closely similar to those of before the eluent reuse. These results indicate that the strategy of reusing the eluent on the basis of the specific gravity analysis was successfully implemented in this study.

Activation Energies of Hydrogen Absorption and Desorption in Pd Thin Films for the α phase (팔라디움박막의 α 상영역 수소 활성화에너지)

  • Cho, Youngsin
    • Journal of Hydrogen and New Energy
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    • 제10권4호
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    • pp.191-196
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    • 1999
  • 4-probe resistivity measurement technique was used to study hydrogen A-D(Absorption-Desorption)kinetics on Pd films(18 to 67nm thick) from 25 to $50^{\circ}C$, from 0 to 5 torr hydrogen pressure. Pd films were made on sapphire substrate by thermal evaporation technique under high vacuum at room temperature. Upto about 100 hydrogen A-D cyclings, no pulverization was observed, but film was detached partially from substrate. Forward reaction and backward reaction rate were analyzed separately. The activation energies of hydrogen A-D processes were obtained from the Arrhenius plot of the reaction rates. The activation energies of Pd films are not strongly dependent on the thickness of the film. But the activation energy of very thin film( l8nm thick) was smaller than the others.

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Effects of Different Levels of Concentrate in the Diet on Physicochemical Traits of Korean Native Black Goat Meats

  • Kim, Sang Woo;Park, Seong Bok;Kim, Myeong Jik;Kim, Dong Hun;Yim, Dong-Gyun
    • Food Science of Animal Resources
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    • 제34권4호
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    • pp.457-463
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    • 2014
  • The effects of feeding of diets based on roughage supplemented with concentrate on the carcass and meat quality attributes of Korean black goats were investigated. The 40 male goats at 5 mon age were divided into four treatment groups; T1 (1.5%), T2 (2.0%), T3 (2.5%) and T4 (ad libitum) feeding of concentrate with ad libitum rice straw. Forty bucks at the end of the feeding were fasted for 12 h before slaughter and were then slaughtered. For carcass measurement, cold buck carcasses were examined after 24 h of chilling at $5^{\circ}C$. The carcasses were chilled in refrigerator at $2{\pm}2^{\circ}C$ for 24 h, then the longissimus dorsi muscle was removed from the carcasses. The samples were separately vacuum packaged, frozen and stored at $-20^{\circ}C$ for up to 1 mon, prior to physicochemical evaluations. Carcass yields were greatly affected by rate of concentrate feeding. T4 showed the heaviest live and carcass weights and the highest dressing and fat percentages (p<0.05). The moisture contents were lower in T4 compared with other treatments, while the crude protein and fat contents were higher (p<0.05). mono-unsaturated fatty acid in T4 was significantly higher than others, which showed the highest percentages of oleic acid (C18:1). For the sensory test, T4 was tenderer and produced better flavor scores than others. Increasing the level of concentrate in the diet resulted in an improvement in growth performance, and carcass and physicochemical characteristics of goat meats.

Effects of Carbon Nitride Surface Layers and Thermal Treatment on Field-Emission and Long-Term Stability of Carbon Nanotube Micro-Tips (질화탄소 표면층 및 열처리가 탄소 나노튜브 미세팁의 전계방출 및 장시간 안정성에 미치는 영향)

  • Noh, Young-Rok;Kim, Jong-Pil;Park, Jin-Seok
    • Journal of the Semiconductor & Display Technology
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    • 제9권1호
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    • pp.41-47
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    • 2010
  • The effects of thermal treatment on CNTs, which were coated with a-$CN_x$ thin film, were investigated and related to variations of chemical bonding and morphologies of CNTs and also properties of field emission induced by thermal treatment. CNTs were directly grown on nano-sized conical-type tungsten tips via the inductively coupled plasma-chemical vapor deposition (ICP-CVD) system, and a-$CN_x$ films were coated on the CNTs using an RF magnetron sputtering system. Thermal treatment on a-$CN_x$ coated CNT-emitters was performed using a rapid thermal annealing (RTA) system by varying temperature ($300-700^{\circ}C$). Morphologies and microstructures of a-$CN_x$/CNTs hetero-structured emitters were analyzed by FESEM and HRTEM. Chemical composition and atomic bonding structures were analyzed by EDX, Raman spectroscopy, and XPS. The field emission properties of the a-$CN_x$/CNTs hetero-structured emitters were measured using a high vacuum (below $10^{-7}$ Torr) field-emission measurement system. For characterization of emission stability, the fluctuation and degradation of the emission current were monitored in terms of operation time. The results were compared with a-$CN_x$ coated CNT-emitters that were not thermally heated as well as with the conventional non-coated CNT-emitters.

Property Variation of Diamond-like Carbon Thin Film According to the Annealing Temperature (열처리에 따른 Diamond-like Carbon (DLC) 박막의 특성변화)

  • Park, Ch.S.;Koo, K.H.;Park, H.H.
    • Journal of the Microelectronics and Packaging Society
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    • 제18권1호
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    • pp.49-53
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    • 2011
  • Diamond-like carbon (DLC) films is a metastable form of amorphous carbon containing a significant fraction of Sp3 bond. DLC films have been characterized by a range of attractive mechanical, chemical, tribological, as well as optical and electrical properties. In this study DLC films were prepared by the RF magnetron sputter system on $SiO_2$ substrates using graphite target. The effects of the post annealing temperature on the Property variation of the DLC films were examined. The DLC films were annealed at temperatures ranging from 300 to $500^{\circ}C$ using rapid thermal process equipment in vacuum. The variation of electrical property and surface morphology as a function of annealing treatment was investigated by using a Hall Effect measurement and atomic force microscopy. Raman and X-ray photoelectron spectroscopy analyses revealed a structural change in the DLC films.

Al Doping Effect of Pd/TiO2 for Improved Hydrogen Detection (수소 감지 성능 향상을 위한 Pd/TiO2 분말에서의 Al 도핑 효과)

  • Lee, Yeongan;Seo, Hyungtak
    • Journal of Sensor Science and Technology
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    • 제23권3호
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    • pp.207-210
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    • 2014
  • $TiO_2$ oxide semiconductor is being widely studied in various applications such as photocatalyst and photosensor. Pd/$TiO_2$ gas sensor is mainly used to detect $H_2$, CO and ethanol. This study focus on increasing hydrogen detection ability of Pd/$TiO_2$ in room temperature through Al-doping. Pd/$TiO_2$ was fabricated by the hydrothermal method. Contacting to Aluminum (Al) foil led to Al doping effect in Pd/$TiO_2$ by thermal diffusion and enhanced hydrogen sensing response. $TiO_2$ nanoparticles were sized at ~30 nm of diameter from scanning electron microscope (SEM) and maintained anatase crystal structure after Al doping from X-ray diffraction analysis. Presence of Al in $TiO_2$ was confirmed by X-ray photoelectron spectroscopy at 73 eV. SEM-energy dispersive spectroscopy measurement also confirmed 2 wt% Al in Pd/$TiO_2$ bulk. The gas sensing test was performed with $O_2$, $N_2$ and $H_2$ gas ambient. Pd/Al-doped $TiO_2$ did not response $O_2$ and $N_2$ gas in vacuum except $H_2$. Finally, the normalized resistance ratio ($R_{H2on}/R_{H2off}$) of Pd/Al-doped $TiO_2$ increases about 80% compared to Pd/$TiO_2$.

Process Modeling and Optimization Studies in Drying of Current Transformers

  • Bhattacharya, Subhendu;D'Melo, Dawid;Chaudhari, Lokesh;Sharma, Ram Avatar;Swain, Sarojini
    • Transactions on Electrical and Electronic Materials
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    • 제13권6호
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    • pp.273-277
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    • 2012
  • The vacuum drying process for drying of paper in current transformers was modeled with an aim to develop an understanding of the drying mechanism involved and also to predict the water collection rates. A molecular as well as macroscopic approach was adopted for the prediction of drying rate. Ficks law of diffusion was adopted for the prediction of drying rates at macroscopic levels. A steady state and dynamic mass transfer simulation was performed. The bulk diffusion coefficient was calculated using weight loss experiments. The accuracy of the solution was a strong function of the relation developed to determine the equilibrium moisture content. The actually observed diffusion constant was also important to predict the plant water removal rate. Thermo gravimetric studies helped in calculating the diffusion constant. In addition, simulation studies revealed the formation of perpetual moisture traps (loops) inside the CT. These loops can only be broken by changing the temperature or pressure of the system. The change in temperature or pressure changes the kinetic or potential energy of the effusing vapor resulting in breaking of the loop. The cycle was developed based on this mechanism. Additionally, simulation studies also revealed that the actual mechanism of moisture diffusion in CT's is by surface jumps initiated by surface diffusion balanced against the surrounding pressure. Every subsequent step in the cycle was to break such loops. The effect of change in drying time on the electrical properties of the insulation was also assessed. The measurement of capacitance at the rated voltage and one third of the rated voltage demonstrated that the capacitance change is within the acceptance limit. Hence, the new cycle does not affect the electrical performance of the CT.

Hydrophilicity Improvement of Polyamide66/Polyphenylene Blends by Plasma Surface Treatment (Polyamide66/Polyphenylene 블렌드의 플라스마 표면처리를 통한 친수성 향상)

  • Ji Young-Yeon;Kim Sang-Sik
    • Polymer(Korea)
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    • 제30권5호
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    • pp.391-396
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    • 2006
  • It has been reported that plasma treatments are used to modify surface properties of polymers such as adhesivity hydrophobicity and hydrophilicity. Using plasma treatment, interfacial pro-perty can be introduced to a polymer surface without affecting the desired bulk properties of a material. In this study, commercial polyamide66 (PA66) /polyphenylene (PPE) polymer was modified by plasma treatment under a various gas specious for elimination of organic compound and polymer surface property with hvdrophilicity. PA66/PPE polymer with hydrophilicity was treated by RF plasma vacuum system under a various parameter such as gas specious, processing time and partial pressure. Hydrophilicity of PA66/PPE was confirmed by calculation of the surface free energy from contact angle measurement. The highest surface free energy of $50.03 mJ/m^2$ with the lowest contact angle of $14^{\circ}$ was obtained at plasma process power of 100 W, treatment time of 2 min and $Ar/O_2$ gases of 100 and 200 sccm. Moreover the change of organic compounds on the polymer surface was analyzed by fourier transforms infrared spectrometry (FTIR).