Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
권호 표지

Effects of Carbon Nitride Surface Layers and Thermal Treatment on Field-Emission and Long-Term Stability of Carbon Nanotube Micro-Tips

질화탄소 표면층 및 열처리가 탄소 나노튜브 미세팁의 전계방출 및 장시간 안정성에 미치는 영향

  • Noh, Young-Rok (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
  • Kim, Jong-Pil (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
  • Park, Jin-Seok (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University)
  • 노영록 (한양대학교 전자전기제어계측공학과) ;
  • 김종필 (한양대학교 전자전기제어계측공학과) ;
  • 박진석 (한양대학교 전자전기제어계측공학과)
  • Published : 2010.03.31
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Abstract

The effects of thermal treatment on CNTs, which were coated with a-$CN_x$ thin film, were investigated and related to variations of chemical bonding and morphologies of CNTs and also properties of field emission induced by thermal treatment. CNTs were directly grown on nano-sized conical-type tungsten tips via the inductively coupled plasma-chemical vapor deposition (ICP-CVD) system, and a-$CN_x$ films were coated on the CNTs using an RF magnetron sputtering system. Thermal treatment on a-$CN_x$ coated CNT-emitters was performed using a rapid thermal annealing (RTA) system by varying temperature ($300-700^{\circ}C$). Morphologies and microstructures of a-$CN_x$/CNTs hetero-structured emitters were analyzed by FESEM and HRTEM. Chemical composition and atomic bonding structures were analyzed by EDX, Raman spectroscopy, and XPS. The field emission properties of the a-$CN_x$/CNTs hetero-structured emitters were measured using a high vacuum (below $10^{-7}$ Torr) field-emission measurement system. For characterization of emission stability, the fluctuation and degradation of the emission current were monitored in terms of operation time. The results were compared with a-$CN_x$ coated CNT-emitters that were not thermally heated as well as with the conventional non-coated CNT-emitters.

Keywords

References

  1. H. Y. Jung, S. M. Jung, and J. S. Suh, "Horizontallyaligned single-walled carbon nanotube field emitters fabricated on vertically aligned multi-walled carbon nanotube electrode arrays," Carbon, Vol. 46, pp.1345-1349, 2008. https://doi.org/10.1016/j.carbon.2008.05.020
  2. J. P. Kim, Y. K. Kim, C. K. Park, H. Y. Choi, C. H. Shon, J. U. Kim, and J. S. Park, "Long-term stability of various carbon-nanotube-based micro-tip emitters", Diamond Relat. Mater., Vol. 18, pp.486-489, 2009. https://doi.org/10.1016/j.diamond.2008.10.019
  3. F. Jin, Y. Liu, C. M. Day, S. A. Little, "Enhanced electron emission from functionalized carbon nanotubes with a barium strontium oxide coating produced by magnetron sputtering," Carbon, Vol. 45, pp.587-593, 2007. https://doi.org/10.1016/j.carbon.2006.10.014
  4. C. J. Yang, J. I. Park, and Y. R. Cho, "Enhanced fieldemission obtained from NiO coated carbon nanotubes," Adv. Eng. Mater., Vol. 9, pp.88-91, 2007. https://doi.org/10.1002/adem.200600003
  5. Y. Morihisa, C. Kimura, M. Yukawa, H. Aoki, T. Kobayashi, S. Hayashi, S. Akita, Y. Nakayama, and T. Sugino, "Improved field emission characteristics of individual carbon nanotube coated with boron nitride nanofilm," J. Vac. Sci. Technol. B, Vol. 26(2), pp. 872-875, 2008. https://doi.org/10.1116/1.2822990
  6. Y. Cho, C. Kim, H. Moon, Y. Choi, S. Park, C. K. Lee, and S. Han, "Electronic structure tailoring and selective adsorption mechanism of metal-coated nanotubes," Nano Lett., Vol. 8(1), pp.81-86, 2008. https://doi.org/10.1021/nl0720051
  7. C. Liu, K. S. Kim, J. Baek, Y. Cho, S. Han, S. W. Kim, N. K. Min, Y. Choi, J. U. Kim, and C. J. Lee, "Improved field emission properties of double-walled carbon nanotubes decorated with Ru nanoparticles," Carbon. Vol. 47, pp.1158-1164, 2009. https://doi.org/10.1016/j.carbon.2008.12.054
  8. Y. Liu, L. Liu, P. Liu, L. Sheng, and S. Fan, "Plasma etching carbon nanotube arrays and the field emission properties," Diamond Relat. Mater., Vol. 13, pp.1609-1613, 2004. https://doi.org/10.1016/j.diamond.2004.01.014
  9. Y. K. Kim, J. P. Kim, C. K. Park, S. J. Yun, W. Kim, S. Heu, and J. S. Park, "Electron-emission properties of titanium carbide-coated carbon nanotubes grown on a nano-sized tungsten tip," Thin Solid Films, Vol. 517, pp.1156-1160, 2008. https://doi.org/10.1016/j.tsf.2008.08.168
  10. S. Shrestha, W. C. Choi, W. Song, Y. T. Kwon, S. P. Shrestha, and C. Y. Park, "Preparation and field emission properties of Er-decorated multiwalled carbon nanotubes," Carbon, Vol, 48, pp.54-59, 2010. https://doi.org/10.1016/j.carbon.2009.08.029
  11. W. T. Zheng, J. J. Li, X. Wang, X. T. Li, Z. S. Jin, B. K. Tay, and C. Q. Sun, "Electron emission of carbon nitride films and mechanism for the nitrogen-lowered threshold in cold cathode," J. Appl. Phys., Vol. 94, pp.2741-2745, 2003. https://doi.org/10.1063/1.1594822
  12. L. Liao, J. C. Li, D. F. Wang, C. Liu, C. S. Liu, Q. Fu, and L. X. Fan, "Field emission property improvement of ZnO nanowires coated with amorphous carbon and carbon nitride films," Nanotechnology, Vol. 16, pp.985-989, 2005. https://doi.org/10.1088/0957-4484/16/6/061
  13. Y. R. Noh, J. P. Kim, and J. S. Park, "Coating of carbon nanotubes with amorphous carbon nitride thin films and characterization of long-term emission stability," 37th ICMCTF(International Conference on Metallurgical Coatings and Thin Films), 2010.