• 제목/요약/키워드: Vacuum measurement

검색결과 785건 처리시간 0.025초

진공환경에서 다공성 소재의 열확산도 측정 시스템 (Measurement System of the Thermal Diffusivities for Porous Materials under Vacuum Conditions)

  • 공철원;남기원;이영무
    • 항공우주기술
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    • 제10권1호
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    • pp.39-44
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    • 2011
  • 다공성 소재의 열 확산도 측정 시스템을 개발하였다. 열확산도를 측정하는 다양한 시스템이 있지만 다공성 소재의 열확산도를 측정하는 것은 기존의 시스템으로는 어렵다. 본 논문에서는 주기가열법을 이용한 열확산도 측정시스템 및 장비의 검증에 대하여 정리하였다. 주기가열법을 검증하기 위해서 사용한 표준시편은 세라믹 소재를 사용하였다. 그 결과 표준값과 측정값이 일치함을 보였다. 다공성 소재 적용을 위하여 검증한 시편은 폴리스티렌 폼이었다. 진공에서 열확산도 값도 측정하였는데, 진공에서 열확산도는 대기조건과 비교하여 63% 감소함을 보였다. 두 결과 모두 측정값과 표준값은 10% 오차 범위 이내에 있었다.

Measurement of Porosity by EPMA-EDS Image Processing

  • Hung, Minhui;Li, Xiangting;Xia, Jiyu;Ding, Chuanxian
    • 한국진공학회지
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    • 제6권S1호
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    • pp.66-69
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    • 1997
  • Porosity is one important characteristic feature and structural index of sprayed coatings. A method of measurement of porosity, EPMA-EDS image processing is developed in the paper. The characteristics of pores can be determined by processing of the image obtained from an electron microscope via VISTA, Not only the porosity can be presented but also the statistical result of pore size distribution. Finally it can be drawn from this paper that EPMA-EDS is a quite effective method to completely characterize the pores in plasma sprayed coatings.

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첨단 나노소자 공정제어용 측정기술 연구 (Studies of process measurement technology for manufacturing advanced nano devices)

  • 조용재
    • 진공이야기
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    • 제2권3호
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    • pp.4-10
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    • 2015
  • We developed a real-time three-polarizer spectroscopic ellipsometer based on a new data acquisition algorithm and a general data reduction (the process of extracting the ellipsometric sample parameters from the Fourier coefficients). The data acquisition algorithm measures Fourier coefficients of radiant flux waveform accurately and precisely. The general data reduction is introduced to represent the analytic functions of the standard uncertainties of the ellipsometric sample parameters, and the extracted theoretical values closely agree with the corresponding experimental data. Our approach can be used for optimization of measurement conditions, instrumentation, simulation, standardization, laboratory accreditation, and metrology.

$1~10^5$ Pa 영역의 저진공 표준 확립 (Establishment of Low Vacuum Standard in the 1 to $1~10^5$ Pa Range)

  • 홍승수;신용현;정광화
    • 한국진공학회지
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    • 제5권3호
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    • pp.181-187
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    • 1996
  • The Ultrasonic Interferometer Manometer(UIM) which can calibrae from1 Pa to $10^5$Pa has been developed, and its uncertainty is evaluated less than $\pm$(30ppm of pressure+12mPa). We can calibrate Capacitance Diaphragm Gauge(DCG) used as a transfer standard gauge in the low vacuum field. TheUIM enables to maintain the measurement traceability for industries. In order to improve the UIM's accracy, we will perform the international intercomparison withother national standards laboratories.

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Tip Enhanced Nano Raman Scattering in Graphene

  • Mun, Seok Jeong
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.87.2-87.2
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    • 2016
  • As an era of nano science approaches, the understanding on the shape and optical properties of various materials in a nanoscale range is getting important more seriously than ever. Accordingly the development of high spatial-temporal-spectral resolution measurement tools for characterization of nanomaterials/structures is highly required. Generally, the various properties of sample can be measured independently, e.g. to observe the structural property of sample, we use the scanning electron microscopy or atomic force microscopy, and to observe optical property, we have to use another independent measurement tool such as photoluminescence spectroscopy or Raman spectroscopy. In the case of nano-materials, however, it is very difficult to find out the same position of sample at every different measurement processes, and the condition of sample can be changed by the influence of first measurement. The tip enhanced Raman scattering(TERS), which can simultaneously measure the two or more information of sample with nanoscale spatial resolution, is one of solutions of this problem. In this talk, I will present our recent nano Raman scattering data of graphene that measured by TERS and optimized tip fabrication method for efficient experiment.

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농축산물의 저장 및 유통을 위한 감압증발 급냉각 시스템에 관한 연구 (A Study on the Rapid Cooling Vacuum System for the Storage and Transportation of the Cold Agriculture and Livestock Products)

  • 김성규;김원녕;김경석;최순열;전현필
    • Journal of Advanced Marine Engineering and Technology
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    • 제21권1호
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    • pp.26-36
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    • 1997
  • Recently, the new refrigerating system, using non - fluorinated hydrocarbon refrigerants has to be developed for the agricultural fields. One of that kinds of systems is the cooling system using the water vapor and vacuum, in which the water evaporate at the low temperature under vacuum and absorb the large amount of the latent heat. If vapor with large amount of latent heat is removed from the system, the system is cooled accordingly. The characteristics of cooling under the vacuum was observed and measured using experimental apparatus, which is consisted of vacuum chamber, the ejectors, the pumps and the measurement apparatus. As the results of experiments, we know that the evaporation in the vacuum occurs vigorously when the materials to be cooled has more amounts of heat before cooling, and by which effects the materials can be cooled. The cooling vacuum system is more efficient than other methods when the agricultural products is chilled or dried.

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Experimental Approach to Equalizing the Orifice Method with the Throughput One for the Measurement of TMP Pumping Speed

  • Lim, J.Y.;Kang, S.B.;Shin, J.H.;Koh, D.Y.;Cheung, W.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.18-18
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    • 2010
  • Methods of the characteristics evaluation of turbo-molecular pumps (TMP) are well-defined in the international measurement standards such as ISO, PNEUROP, DIN, JIS, and AVS. The Vacuum Center in the Korea Research Institute of Standards and Science has recently designed, constructed, and established the integrated characteristics evaluation system of TMPs based on the international documents by continuously pursuing and acquiring the reliable international credibility through measurement perfection. The measurement of TMP pumping speed is normally performed with the throughput and orifice methods dependent on the mass flow regions. However, in the UHV range of the molecular flow region, the high uncertainties of the gauges, mass flow rates, and conductance are too critical to precisely accumulate reliable data. With UHV gauges of uncertainties less than 15% and a calculated conductance of the orifice, about 35% of pumping speed uncertainties are experimentally derived in the pressure range of less than $10^{-6}$ mbar. In order to solve the uncertainty problems of pumping speeds in the UHV range, we introduced an SRG with 1% accuracy and a constant volume flow meter (CVFM) to measure the finite mass flow rates down to $10^{-3}$ mbar-L/s with 3% uncertainty for the throughput method. In this way we have performed the measurement of pumping speed down to less than $10^{-6}$ mbar with an uncertainty of 6% for a 1000 L/s TMP. In this article we suggest that the CVFM has an ability to measure the conductance of the orifice experimentally with flowing the known mass through the orifice chambers, so that we may overcome the discontinuity problem encountering during introducing two measurement methods in one pumping speed evaluation sequence.

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벌집형 셀 구조를 가지는 스퍼터 이온펌프의 성능 분석 (Pumping speed of a sputter ion pump with a honeycomb anode cell structure)

  • 하태균;안병남;이득진;김진곤;정석민
    • 한국진공학회지
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    • 제15권5호
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    • pp.451-457
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    • 2006
  • 벌집형 양극 셀 구조를 가지는 스퍼터 이온펌프를 제작하여 그 성능을 측정하고 기존의 원통형 구조와 비교하였다. 원통형 구조는 원통과 원통 사이에 기체의 이온화에 크게 기여하지 못하는 공간(dead space)이 전체의 10 % 정도 존재하는데, 벌집형 구조에서는 이러한 공간이 없으므로 이론적으로는 배기성능 또한 최대 10 % 정도 향상될 것으로 예측된다. 이러한 점에 착안하여 본 연구에서는 원통형 및 벌집형 셀 구조의 스퍼터 이온펌프를 제작하여 배기성능을 측정하여 서로 비교하였다. 그 결과 벌집형 구조가 원통형 구조에 비해 압력 구간에 따라서 $5%{\sim}11%$ 정도 배기속도가 높은 것으로 나타났다.