• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 추계학술대회 논문집
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• pp.137-138
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• 2006

• 한국진공학회:학술대회논문집
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• 한국진공학회 2008년도 제35회 하계학술대회 초록집
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• pp.279-279
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• 2008

• 한국정밀공학회지
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• 제25권12호
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• pp.132-138
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• 2008

Recently, mastering processes for high density optical disc such as Blu-ray disc rely on electron beams, which are operable in only vacuum. In the mastering process, one of the most important tasks is to design precision stages for providing precise positioning of the works with respect to the source in a high vacuum environment. In this paper, we have developed a precision rotation table usable in the electron beam mastering. The rotation table adopted air bearings for a high positioning repeatability and velocity stability. The air leakage from the air bearings has been minimized by employing the differential exhaust scheme using three steps of air drain. The design parameters such as diameters of exhaust lines, seal lengths, and pumping speeds were decided according to the optimization method using genetic algorithm. The performance on the vacuum level of the rotation table was evaluated experimentally and theoretically. The results indicate that a vacuum level of $10^{-4}$ Pa is achieved with operation of air bearings in a vacuum chamber, which is sufficient for the electron beam mastering.

• 동력기계공학회지
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• 제17권3호
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• pp.17-22
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• 2013

Diesel particulate filter has been adopted in new vehicle with diesel engine. Since the flow of exhaust gas was clogged as particulate matters were deposited in the filter, it have bad effects on a fuel consumption and power. It was investigated that a particulate filtering system with vacuum pump in the exhaust gas line could be free from clogging in previous research. In this study, the effects of water injection and position of inlet port in filtering system on reducing in particulate matter were investigated. It was noticed that particulate matter were decreased remarkable by water injection and moving the position of inlet port.

• 한국추진공학회지
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• 제12권4호
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• pp.16-23
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• 2008

고고도에서 작동하는 로켓의 작동 환경을 지상에서 모사하기 위한 초음속 디퓨져의 연구를 위하여 이론적 접근과 수치적 접근을 수행하였다. 물리적 모델은 축대칭 형상을 갖는 디퓨져, 진공챔버, 로켓모터로 구성하였으며, 유동 발달 측면에서 초음속 디퓨져 작동특성에 관한 연구를 수행하였다. 본 논문은 디퓨져의 시동압력 예측모델, 진공챔버 크기의 효과, 디퓨져 시동을 위한 로켓모터의 최소 시동압력에 대한 연구내용을 수록하였다

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 추계학술대회 논문집
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• pp.431-432
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• 2007

• 한국입자에어로졸학회지
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• 제11권4호
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• pp.93-98
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• 2015

Particles which generated from plasma enhanced chemical vapor deposition (PECVD) during thin film deposition process can affect to the process yield. By using light extinction method, ISPM can measure particles in the large-diameter pipe (${\leq}300mm$). In our research, in-situ particle monitor (ISPM) sensor was installed at the 300 mm diameter exhaust-line to count the particles in each size. In-house flange for mounting the transmitting and receiving parts of ISPM was carefully designed and installed at a certain point of exhaust line where no plasma light affect to the light extinction measurement. Measurement results of trend changes on particle count in each size can confirm that ISPM is suitable for real-time monitoring of vacuum process.

• 진공이야기
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• 제2권1호
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• pp.31-34
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• 2015

This article introduces fundamentals of self-diagnosis and predictive (or preventive) maintenance technologies for dry vacuum pumps. The state variables of dry pumps are addressed, such as the pump and motor body temperatures, consumption currents of main and booster pumps, mechanical vibration, and exhaust pressure, etc. The adaptive parametric models of the state variables of the dry pump are exploited to provide dramatic reduction of data size and computation time for self-diagnosis. Two indicators, the Hotelling's $T^2$ and the sum of squares residuals (Q), are illustrated to be quite effective and successful in diagnosing dry pumps used in the semiconductor processes.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2012년도 제38회 춘계학술대회논문집
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• pp.475-478
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• 2012

케로신과 액체산소를 추진제로 하는 로켓엔진의 고공환경모사를 위한 실험 장치의 예비 설계를 수행하였다. 고공환경모사를 위한 장치는 진공챔버, 초음속디퓨저, 열교환기, 이젝터, 증기 발생기로 구성된다. 로켓엔진을 장착한 진공챔버는 이차목 초음속 디퓨저에 의해 고공환경의 압력이 모사되고 이를 유지한다. 로켓엔진의 메인 연소가스는 열교환기에서 물로 냉각되며 이로 인한 혼합물은 이젝터로 인해 대기 중으로 배출된다. 이젝터는 75% 에탄올과 액체산소, 물로 작동하는 증기 발생기에 의해 작동되며 초기 진공도를 유지하는 역할을 한다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제37회 하계학술대회 초록집
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• pp.275-275
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• 2009