• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.912-915
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• 2004

A vacuum environment is very important for NGL(Next Generation Lithography) apparatuses such as EUVL(Extreme Ultra Violet Lithography) or EPL(Electron Projection Lithography) and so on. The performance of these systems is dominated by vacuum level of processing and positioning accuracy of a stage. So, ultra-precision stage usable in a high vacuum level is needed for the improved performance of these devices. In contrast to atmospheric condition, a special attention must be paid to guide bearing, actuator and other elements. In this paper, air bearing is adopted because of its very high motional accuracy. So, air bearing is designed to be vacuum compatible using differential exhaust method, which prevents air from entering into vacuum chamber. For this, leakage analysis is performed theoretically and verified from experiment.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2011.11a
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• pp.827-829
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• 2011

Vacuum facility is required for high altitude space environment test to develop satellites or space launch vehicles. We, at Chungnam, National University, developed turbo molecular pump vacuum test facility up to $1.0{\times}10-6$ torr to simulate 200 km altitude environment. In this paper, we present some preliminary vacuum performance test results.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2007.04a
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• pp.49-52
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• 2007

Vacuum facility is required for high altitude space environment test to develop small thruster. We, at Chungnam National University, developed vacuum test facility up to $10^{-5}$ torr to simulate $100{\sim}120km$ altitude environment. Prior to operation, we predict vacuum pump performances and present preliminary calculation and experiments.

• International Journal of Aeronautical and Space Sciences
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• v.11 no.1
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• pp.26-30
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• 2010

The present paper studies the thermally-induced vibration phenomenon of the flexible space boom structure. In order to simulate the thermally-induced vibration phenomenon of the flexible thin boom structure of the spacecraft with the attached tip mass in space, the thermally-induced vibration including thermal flutter is experimentally investigated at various thermal environments using a heating lamp in vacuum chamber. In this experimental study, fluctuating characteristics, natural frequency and thermal strains of the thermally-induced vibration are parametrically investigated at various thermal environment conditions. Finally the thermally-induced vibration of the flexible boom structure of the orbiting earth satellite in solar radiation environment from the earth eclipse region including umbra and penumbra is simulated using the power control of the heating lamp in the vacuum chamber.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2007.11a
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• pp.45-48
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• 2007

Vacuum facility is required for high altitude space environment test to develop small thruster. We, at Chungnam National University, developed vacuum test facility up to $10^{-5}$ torr to simulate 100${\sim}$120 km altitude environment. In this paper, we present some preliminary performance test results.

• Journal of Powder Materials
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• v.22 no.1
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• pp.32-38
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• 2015

The effect of heat treatment environment on the microstructure and properties of tantalum coating layer manufactured by kinetic spraying was examined. Heat treatments are conducted for one hour at $800^{\circ}C$, $900^{\circ}C$, and $1000^{\circ}C$ in two different environments of vacuum and Ar gas. Evaluation of microstructure and physical properties are conducted. High density ${\alpha}$-tantalum single phase coating layer with a porosity of 0.04% and hardness of 550 Hv can be obtained. As heat treatment temperature increases, porosity identically decreases regardless of heat treatment environment (vacuum and Ar gas). Hardness of heat treated coating layer especially in Ar gas environment deceases from 550 Hv to 490 Hv with increasing heat treatment temperature. That in vacuum environment deceases from 550 Hv to 530 Hv. The boundary between particles became vague as heat treatment temperature increases. Oxygen distribution of tantalum coating layer is minute after heat treatment in vacuum environment than Ar gas environment.

• Proceedings of the Korean Vacuum Society Conference
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• 2005.02a
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• pp.76-76
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• 2005

• Journal of the Korean Society of Industry Convergence
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• v.25 no.5
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• pp.835-842
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• 2022

In this study, the membrane degassing process of the sweep gas - vacuum combination type was proposed for ammonia wastewater treatment. The effect of pH, initial ammonia concentration and scale-up on ammonia degassing performance was investigated. As a result, as the pH and the initial ammonia concentration increased, the degassing permeate flux was improved. On the other hand, the ammonia mass transfer coefficient increased as the initial ammonia reduced, which seems to be due to the driving force of the sweep gas-vacuum combination type membrane degassing system proposed in this study. In addition, 80 mg NH₃/min of the ammonia degassing rate was achieved using a 6×28 inch size module. Better degassing performance is expected if consideration for maintaining vacuum pressure is involved in the scale-up design.

• Vacuum Magazine
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• v.4 no.1
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• pp.16-23
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• 2017

Recently, KSTAR, Korea's superconducting fusion energy research and development device, has succeeded in driving the high performance plasma for 70 seconds for the first time in the world. Continuous plasma operation technology is an essential factor for commercialization of fusion energy power generation. Therefore, this achievement is expected to play a major role in the research of fusion technology required for future fusion power plants. In order to operate the KSTAR, the discharge process in which the neutral gas is turned into the plasma should be preceded in the start-up (breakdown) phase of tokamak operation. This process essentially involves the vacuum environment in the tokamak device. KSTAR has successfully operated a vacuum pumping system to achieve the target level of the vacuum environment through a high temperature baking operation, a discharge cleaning process and boronization.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.40 no.1
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• pp.51-58
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• 2020

As interest in lunar exploration increases, studies on lunar surface environment simulation including a lunar soil simulant are being conducted. One of the problems when creating a vacuum environment with lunar soil is that it takes long time to reach high vacuum due to outgas from the soil. Most of the outgas is water, and the time to reach high vacuum can be significantly reduced by a pretreatment process that removes moisture adhering to the surface of the lunar soil before putting soil into a vacuum chamber. The existing soil drying methods were examined to determine how these methods were effective to remove moisture from the lunar simulant soil. Drying experiments of lunar soil samples were carried out using a dry oven, a microwave oven, direct heating method and a vacuum oven, and the results of the drying experiment were presented. Drying soil at 110℃ using a dry oven and drying soil by a microwave oven were not enough to remove moisture, and vacuum oven drying method and direct heating drying method at more than 200℃ were effective in water removal.