• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.49-49
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• 2000

당사는 1991년 6월에 설립된 후 반도체 장비의 국산화 개발에 주력하고 있다. Thermoelectric module typer Chiller 및 Dry gas scrubber를 국산화 하였으며 THC(Temperature & Humidity Controller)를 개발하여 국내 및 미국에 특허를 출원중에 있으며 기업 부설연구소를 통해 계속하여 각종 제품을 연구 개발하고 있다. 이외 다수의 제품을 보유하고 있으며 기업 부설연구소를 통해 계속하여 각종 제품을 연구 개발하고 있다. 이외 다수의 제품을 보유하고 있으며 진공관련 제품으로는 미국 MDC사 Vacuum components, e-beam vaporation system. ISI사 electrical and optical components, US Inc. 사 Sputter system, SBC사 Bellows. 일본 IKC사 Bellows, Vacuum components, Vacuum system을 취급하고 있다. 1998년에 경기도 및 중소기업청으로부터 유망중소기업 및 벤처기업 인증을 획득하였으며 1999년 12월에 경기도 및 중소기업청으로부터 유망중소기업 및 벤쳐기업 인증을 획득하였으며 1999년 12월 KOSDAQ에 등록하였다. 중소기업 수출기업화 사업 대상기업으로 선정되었으며 1999년 12월 KOSDAQ에 등록하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.134-134
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• 2012

최근 반도체 및 디스플레이 산업에서 진공, 특히 플라즈마 공정은 중요한 기술로 알려져 있다. 반도체 제조공정은 플라즈마를 이용하여 증착(deposition)공정 및 패터닝을 위한 식각(Dry Etch)공정으로 크게 나뉘고, 디스플레이 공정에서는 Glass위에 형성된 금속오염입자 및 polymer와 같은 불순물을 제거하는 공정으로 식각(Dry Etch)공정을 주로 사용하고 있다. 진공공정장비인 CVD, Etcher는 플라즈마와 활성기체, 고온의 공정온도에 노출 되면서 진공공정장비 부품에 부식이 진행되기 때문에 내플라즈마성이 강한 재료를 코팅하여 사용하고 있다. 하지만 장시간 부식환경에 노출이 되면, 코팅부품에서도 부식이 진행되면서 다량의 오염입자가 발생하여 생산수율 저하에 원인이 되기도 하고, 부품 교체비용이 많이 들기 때문에 산업체에서 많은 어려움을 겪고 있다. 본 연구에서는 산업체에서 코팅부품으로 많이 사용되고 있는 다양한(Al2O3, Y2O3 등) 산화막 및 세라믹코팅 부품의 내플라즈마 특성을 비교 연구하였다.

• Journal of the Korean Vacuum Society
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• v.8 no.4A
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• pp.476-481
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• 1999

Characteristics of platinum dry etching were investigated in a cryogenic magnetized inductively coupled plasma (MICP). The problem with platinum etching is the redeposition of sputtered platinum on the sidewall. Because of the redeposits on the sidewall, the etching of patterned platinum structure produces feature sizes that exceed the original dimension of the PR size and the etch profile has needle-like shape [1]. The main object of this study was to investigate a new process technology for fence-free Pt etching As bias voltage increased, the height of fence was reduced. In cryogenic etching, the height of fence was reduced to 20% at-$190^{\circ}C$ compared with that of room temperature, however the etch profile was not still fence-free. In Ar/$SF_6$ Plasma, fence-free Pt etching was possible. As the ratio of $SF_6$ gas flow is more than 14% of total gas flow, the etch profile had no fence. Chemical reaction seemed to take place in the etch process.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1999.11a
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• pp.42-48
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• 1999

An experimental study was performed to discover the effect of environment on the tribological behavior of Si-incorporated diamond-like carbon(Si-DLC) film slid on a steel ball. The films were deposited on Si(100) wafers from radio-frequency glow discharge of mixtures of benzene and dilute silane gases. Experiments using a ball-on-disk test-rig was performed under vacuum, dry air and ambient air conditions. It was observed that coefficient of friction was decreased as the environmental condition changes from vacuum, to dry air. It was also observed that the coefficient of friction decreased with increasing silicon concentration in the film. Chemical analyses of debris suggested that the low and stable friction coefficient is closely related to the silicon rich oxide debris and the rolling action.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.102-102
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• 2011

인공위성이 임무를 수행하는 우주환경은 지상 환경과 달리 고진공 및 극저온의 극한환경으로 지상에서는 제대로 작동하는 것으로 관찰되더라도 우주환경에서는 예상하지 못한 기능장애를 일으켜 위성의 성능에 치명적인 영향을 미치기도 한다. 이에 10-5 torr 이하의 고진공과 -180$^{\circ}C$ 이하의 극저온 환경을지상에서 모사하여 위성체의 안정성 및 신뢰성을 시험한다. 시험에는 열진공챔버라고 불리는 우주환경모사기가 사용이 되며, 기본적으로 챔버 내부 진공형성이 중요하다. 우주환경의 모사를 위해 먼저 저진공펌프로 10-2 Torr 의 저진공을 형성한 후 Turbo-molecular pump 및 Cryopump를 이용하여 10-5 Torr 이하의 고진공을 형성하게 된다. 본 논문에서는 기존 우주환경모사기에 부착된 oil type rotary pump 및 구형 turbo-molecular pump의 교체 과정을 기술한다. 특히, 저진공펌프의 경우는 챔버 내부로의 oil 역류로 인한 오염 문제를 방지하기 위하여 dry type의 펌프가 설치되었다.

• Tribology and Lubricants
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• v.16 no.3
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• pp.188-193
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• 2000

An experimental study was performed to discover the effect of environment on the tribological behavior of Si-incorporated diamond-like carbon(Si-DLC) film slid on a steel ball. The films were deposited on Si(100) wafers by a radio-frequency glow discharge of mixtures of benzene and dilute silane gases. Experiments using a ball-on-disk test-rig was performed in vacuum, dry air and ambient air conditions. It was observed that coefficient of friction decreased as the environment changed from vacuum, to dry air. Chemical analyses of debris suggested that low and stable friction is closely related to the formation of silicon-rich oxide debris and the rolling action.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.429-429
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• 2012

To investigate the gettering effect of B-doped n-type monocrystalline silicon wafer, we made the p-n junction by diffusing boron into n-type monocrystalline Si substrate and then oxidized the boron doped n-type monocrystalline silicon wafer by in-situ wet and dry oxidation. After oxidation, the minority carrier lifetime was measured by using microwave photoconductance and the sheet resistance by 4-point probe, respectively. The junction depth was analyzed by Secondary Ion Mass Spectrometry (SIMS). Boron diffusion reduced the metal impurities in the bulk of silicon wafer and increased the minority carrier lifetime. In the case of wet oxidation, the sheet resistance value of ${\sim}46{\Omega}/{\Box}$ was obtained at $900^{\circ}C$, depostion time 50 min, and drive-in time 10 min. Uniformity was ~7% at $925^{\circ}C$, deposition time 30 min, and drive-in time 10 min. Finally, the minority carrier lifetime was shown to be increased from $3.3{\mu}s$ for bare wafer to $21.6{\mu}s$ for $900^{\circ}C$, deposition 40 min, and drive-in 10 min condition. In the case of dry oxidation, for the condition of 50 min deposition, 10 min drive-in, and O2 flow of 2000 SCCM, the minority carrier lifetime of 16.3us, the sheet resistance of ${\sim}48{\Omega}/{\Box}$, and uniformity of 2% were measured.

• Korean Journal of Medicinal Crop Science
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• v.22 no.4
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• pp.255-261
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• 2014

Cosmetic activities of the leaves of Curcuma longa L. were compared according to different drying methods, to expand the use of the by-products of Curcuma longa L. The highest extraction yield of 29.4% was obtained from vacuum drying process (VD), whose value was very close to 29.2% from freeze drying process (FD). Relatively lower extraction yield were observed as 24.5% and 25.3% from the raw leaf (RL) as control and hot air drying process (HD). The cytotoxicity was observed lower FD and VD than RL and HD. It shows that cytotoxicity was closely related to cosmetic activities such as tyrosinase and melanin inhibition activities by showing much better cosmetic activities of the extracts from both FD and VD than those from the RL and HD. It was interesting that was differences of the cosmetic activities and cytotoxicity between FD and VD, which implies that VD method should be a more efficient process than FD method in terms of drying time and operation costs: 6 hours vs 24 hours and 3-5 times higher extraction costs in drying. It was observed that VD is more excellent dry method than others. This result could be utilized to effectively dry other soft plant biomass.

• Asian-Australasian Journal of Animal Sciences
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• v.27 no.11
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• pp.1623-1629
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• 2014

Dry-cured pork neck samples were stored at $10^{\circ}C$ for 90 days under vacuum packaging (VP) or modified atmosphere packaging (MAP; 25% $CO_2$+75% $N_2$) conditions. The pH, moisture, water activity, total aerobic bacteria, and Enterobacteriaceae counts of dry-cured pork neck products with MAP were significantly lower than those with VP (p<0.05) after 90 days of storage. However, CIE $b^*$ and 2-thiobarbituric acid reacted substance (TBARS) values of the pork product with MAP were significantly higher (p<0.05) than those with VP. Total aerobic bacterial counts and Enterobacteriaceae counts of samples with MAP were lower than those with VP after 30 days of storage. Sensory results indicated that aroma, flavor and tenderness scores of the samples with both VP and MAP decreased during storage and the scores after >60 days of storage were lower than those at Day 1. In conclusion, despite presenting higher lipid oxidation, the samples stored in packages containing 25% $CO_2$ for 90 days at $10^{\circ}C$ have lower bacterial counts than vacuum-packed samples. Therefore, further studies should be performed on the packaging of dry-cured meat at adjusted concentrations of $CO_2$.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.449-449
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• 2011

We reported the direct effect of intrinsic surface energy of dry adhesive material to the Van der Waals and capillary forces contributions of the total adhesion force in an artificial gecko-inspired adhesion system. To mimic the gecko foot we fabricated tilted nanohairy structures using both lithography and ion beam treatment. The nanohairy structures were replicated from Si wafer mold using UV curable polymeric materials. The control of nanohairs slanting angles was based on the uniform linear argon ion irradiation to the nanohairy polymeric surface. The surface energy was studied utilizing subsequent conventional oxygen ion treatment on the nanohairy structures which resulted in gradient surface energy. Our shear adhesion test results were found in good agreement with the accepted Van der Waals and capillary forces theory in the gecko adhesion system. Surface energy would give a direct impact to the effective Hamaker constant in Van der Waals force and the filling angle (${\varphi}$) of water meniscus in capillary force contributions of gecko inspired adhesion system. With the increasing surface energy, the effective Hamaker constant also increased but the filling angle decreased, resulting in a competition between the two forces. Using a simple mathematical model, we compared our experimental results to show the quantitative contributions of Van der Waals and capillary forces in a single adhesion system on both hydrophobic and hydrophilic surfaces. We found that the Van der Waals force contributes about 82.75% and 89.97% to the total adhesion force on hydrophilic and hydrophobic test surfaces, respectively, while the remaining contribution was occupied by capillary force. We also showed that it is possible to design ultrahigh dry adhesive with adhesion strength of more than 10 times higher than apparent gecko adhesion force by controlling the surface energy and the slanting angle induced-contact line of dry adhesive the materials.